Dicing tape-integrated film for semiconductor back surface, and process for producing semiconductor device
Granted 11 Feb 2014 · 4 office actions
Assignee: Nitto Denko
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Attorney: Attorney · Log in to unlock
Inventors: Naohide Takamoto, Fumiteru Asai, Goji Shiga · Examiner: Fernando L Toledo · AU 2897 · TC 2800
Life of the patent
3 dated eventsAbstract
The present invention relates to a dicing tape-integrated film for semiconductor back surface, which includes: a dicing tape including a base material layer, a first pressure-sensitive adhesive layer and a second pressure-sensitive adhesive layer stacked in this order, and a film for semiconductor back surface stacked on the second pressure-sensitive adhesive layer of the dicing tape, in which a peel strength Y between the first pressure-sensitive adhesive layer and the second pressure-sensitive adhesive layer is larger than a peel strength X between the second pressure-sensitive adhesive layer and the film for semiconductor back surface, and in which the peel strength X is from 0.01 to 0.2 N/20 mm, and the peel strength Y is from 0.2 to 10 N/20 mm.
Claims
8 · 1 independent · depth 4Classifications
5 codes- H01L21/331
- H01L21/00
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1 priority documents›Priority documents — 1
| Type | Document | Date |
|---|---|---|
| related publication | US 20120028418 A1 | 2 Feb 2012 |
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