USPatentGranted
B2

Dicing tape-integrated film for semiconductor back surface, and process for producing semiconductor device

Granted 11 Feb 2014 · 4 office actions

Life of the patent

3 dated events
⤢ drag to zoomJul 2011Oct 2011Jan 2012Apr 2012Jul 2012Oct 2012Jan 2013Apr 2013Jul 2013Oct 2013Jan 2014Apr 2014Prosecution
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Abstract

The present invention relates to a dicing tape-integrated film for semiconductor back surface, which includes: a dicing tape including a base material layer, a first pressure-sensitive adhesive layer and a second pressure-sensitive adhesive layer stacked in this order, and a film for semiconductor back surface stacked on the second pressure-sensitive adhesive layer of the dicing tape, in which a peel strength Y between the first pressure-sensitive adhesive layer and the second pressure-sensitive adhesive layer is larger than a peel strength X between the second pressure-sensitive adhesive layer and the film for semiconductor back surface, and in which the peel strength X is from 0.01 to 0.2 N/20 mm, and the peel strength Y is from 0.2 to 10 N/20 mm.

Claims

8 · 1 independent · depth 4
12345678
8 granted claims

Classifications

5 codes
IPC · International Patent Classification
Section H — Electricity
  • H01L21/331
  • H01L21/00
USPC · US Patent Classification
438/354438/108438/114

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File wrapper

Pendency
2.5 y
930 days filing → grant
Office actions
2
non-final + final
Responses
2
no RCE
Examiner
Fernando L Toledo
art unit 2897 · TC 2800
Citations: 15 back · 0 forward

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Priority chain

1 priority documents
›Priority documents — 1
TypeDocumentDate
related publicationUS 20120028418 A12 Feb 2012

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Citations

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