USPatentGranted
B2

Resist composition for immersion exposure, method of forming resist pattern using the same, and fluorine-containing compound

Granted 6 Aug 2013 · 2 office actions

Assignee: Tokyo Ohka Kogyo Co., Ltd.

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Inventors: Takayoshi Mori, Daiju Shiono, Sanae Furuya, Tomoyuki Hirano +1 · Examiner: Anca Eoff · AU 1722 · TC 1700

Life of the patent

3 dated events
⤢ drag to zoomJan 2012Apr 2012Jul 2012Oct 2012Jan 2013Apr 2013Jul 2013Oct 2013Prosecution
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Abstract

A resist composition for immersion exposure, including a base component that exhibits changed solubility in an alkali developing solution under action of acid, an acid generator component that generates acid upon exposure, and a fluorine-containing compound represented by a general formula (c-1) that is decomposable in an alkali developing solution: [structure] wherein R 1 represents an organic group which may contain a polymerizable group, with the proviso that said polymerizable group has a carbon-carbon multiple bond, and the carbon atoms forming the multiple bond are not directly bonded to the carbon atom within the —C(╠O)— group in general formula (c-1); and R 2 represents an organic group having a fluorine atom.

Claims

7 · 1 independent · depth 4
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7 granted claims

Classifications

7 codes
IPC · International Patent Classification
Section G — Physics
  • G03F7/039
  • G03F7/004
  • G03F7/033
  • G03F7/26
  • G03F7/028
USPC · US Patent Classification
430/270.1430/326

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File wrapper

Pendency
1.7 y
613 days filing → grant
Office actions
1
non-final + final
Responses
1
2 RCE
Interviews
1
examiner interview summaries
Examiner
Anca Eoff
art unit 1722 · TC 1700
Citations: 144 back · 0 forward

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Priority chain

1 priority documents
›Priority documents — 1
TypeDocumentDate
related publicationUS 20120077125 A129 Mar 2012

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