Resist composition for immersion exposure, method of forming resist pattern using the same, and fluorine-containing compound
Granted 6 Aug 2013 · 2 office actions
Assignee: Tokyo Ohka Kogyo Co., Ltd.
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Inventors: Takayoshi Mori, Daiju Shiono, Sanae Furuya, Tomoyuki Hirano +1 · Examiner: Anca Eoff · AU 1722 · TC 1700
Life of the patent
3 dated eventsAbstract
A resist composition for immersion exposure, including a base component that exhibits changed solubility in an alkali developing solution under action of acid, an acid generator component that generates acid upon exposure, and a fluorine-containing compound represented by a general formula (c-1) that is decomposable in an alkali developing solution: [structure] wherein R 1 represents an organic group which may contain a polymerizable group, with the proviso that said polymerizable group has a carbon-carbon multiple bond, and the carbon atoms forming the multiple bond are not directly bonded to the carbon atom within the —C(╠O)— group in general formula (c-1); and R 2 represents an organic group having a fluorine atom.
Claims
7 · 1 independent · depth 4Classifications
7 codes- G03F7/039
- G03F7/004
- G03F7/033
- G03F7/26
- G03F7/028
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1 priority documents›Priority documents — 1
| Type | Document | Date |
|---|---|---|
| related publication | US 20120077125 A1 | 29 Mar 2012 |
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