In a charged-particle beam apparatus having a high-accuracy and high-resolution focusing optical system for charged-particle beam, a group of coils are arranged along a beam emission axis to extend through the contour of radial planes each radiating from the beam emission axis representing a rotary axis and each having a circular arc which subtends a divisional angle resulting from division of a circumferential plane by a natural number larger than 2 so that a superposed magnetic field may be generated on the incident axis of the charged-particle beam and the trajectory of the charged-particle beam may be controlled by the superposed magnetic field.

Claims

11 · 2 independent · depth 2

11 granted claims

›1.independentA charged-particle beam aberration corrector for correcting the aberration of a charged particle beam emitted from a charged-particle beam source, com…+8

›2.↳ 1A charged-particle beam aberration corrector according to claim 1, wherein a plurality of stages of coils each subject to the same divisional angle or…d2

›3.↳ 1A charged-particle beam aberration corrector according to claim 1, wherein the coils are connected in series to generate a resultant superposed magnet…d2

›4.↳ 1A charged-particle beam aberration corrector according to claim 1, wherein currents to the coils are controlled independently and the trajectory of th…d2

›5.↳ 1A charged-particle beam aberration corrector according to claim 1, wherein current lines inside the coils are controlled independently and the traject…d2

›6.↳ 1A charged-particle beam aberration corrector according to claim 1, wherein a current line, an exciting current amplifier, a voltage source for setting…d2

›7.↳ 1A charged-particle beam aberration corrector according to claim 1, wherein a magnetic shield is arranged peripherally of the coils.d2

›8.↳ 1A charged-particle beam aberration corrector according to claim 1, wherein a non-magnetic vacuum pipe is arranged internally of said coils.d2

›9.↳ 1A charged-particle beam aberration corrector according to claim 1, wherein electrically conductive films are formed on insulating layer surfaces of wi…d2

›10.independentA charged-particle beam apparatus having a focusing optical system for focusing a charged-particle beam emitted from a charged-particle beam source on…+1

Classifications

9 codes

IPC · International Patent Classification

Section G — Physics

G21K1/08

Section H — Electricity

H01J3/26
H01J49/42
H01J3/14

USPC · US Patent Classification

250/396.R250/306250/307250/305250/396.ML

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Pendency

1.9 y

684 days filing → grant

Office actions

none on record

Responses

1 RCE

Examiner

Jack I Berman

art unit 2881 · TC 2800

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1 priority documents

›Priority documents — 1

Type	Document	Date
related publication	US 20090032722 A1	5 Feb 2009

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