A charged-particle multi-beam exposure apparatus ( 1 ) for exposure of a target ( 41 ) uses a plurality of beams of electrically charged particles, which propagate along parallel beam paths towards the target ( 41 ). For each particle beam an illumination system ( 10 ), a pattern definition means ( 20 ) and a projection optics system ( 30 ) are provided. The illuminating system ( 10 ) and/or the projection optics system ( 30 ) comprise particle-optical lenses having lens elements (L 1 , L 2 , L 3 , L 4 , L 5 ) common to more than one particle beam. The pattern definition means ( 20 ) defines a multitude of beamlets in the respective particle beam, forming its shape into a desired pattern which is projected onto the target ( 41 ), by allowing it to pass only through a plurality of apertures defining the shape of beamlets permeating said apertures, and further comprises a blanking means to switch off the passage of selected beamlets from the respective paths of the beamlets.

Claims

23 · 1 independent · depth 4

23 granted claims

›1.independentA charged-particle multi-beam exposure apparatus (1) for exposure of a target (41) with a plurality of beams of electrically charged particles, said p…+22

›2.↳ 1The apparatus of claim 1, wherein the common lens elements are realized as individual lens elements provided for each of the particle beams and connec…d2

›3.↳ 1The apparatus of claim 1, wherein the common lens elements are realized by a common structural member surrounding each of the particle beams.d2

›4.↳ 1The apparatus of claim 1, wherein the particle-optical lenses of the illuminating system (10) and the projection optics system (30) comprise lens elem…d2

›5.↳ 1The apparatus of claim 1, wherein the particle-optical lenses of the illuminating system (10) and the projection optics system (30) comprise electrost…d2

›6.↳ 1The apparatus of claim 1, wherein the apertures in the pattern definition means (20) have identical shapes.d2

›7.↳ 1The apparatus of claim 1, wherein the apertures in the pattern definition means (20) have shapes which produce images of identical shape on the target…d2

›8.↳ 1The apparatus of claim 1, wherein the projection system comprises three or more focusing elements realizing reducing projection optics having two cons…d2

›9.↳ 1The apparatus of claim 1, comprising a projection lens system having 4 lenses realizing a 2-stage reduction system, in which parts of the beam are use…d2

›10.↳ 1The apparatus of claim 1, comprising a target stage (40) adapted to move the target (41) under the multiple beams according to a predefined scanning m…d2+3

›14.↳ 1The apparatus of claim 1, wherein for each particle beam a pattern definition means is provided, having a pattern field (pf) in which the apertures ar…d2

›15.↳ 1The apparatus of claim 1, wherein for each particle beam a pattern definition means is provided with at least 20000 apertures whose transparency to th…d2

›16.↳ 1The apparatus of claim 1, comprising an electrostatic lens (ML) having an electrode column realized as a series of at least 3 electrodes of substantia…d2+7

›17.↳ 16The apparatus of claim 16, wherein the outer radius of all electrodes of the electrostatic lens is not larger than 5 times the largest radius of said …d3

›18.↳ 16The apparatus of claim 16, wherein the electrodes (EM) of the electrode column are at least partially made from a soft-magnetic material having at env…d3+1

›20.↳ 16The apparatus of claim 16, further comprising a magnetic shielding tube (MS, 3) made from a soft-magnetic material surrounding the electrode column an…d3

›21.↳ 16The apparatus of claim 16, wherein outer portions (OR) of the electrodes (EM) of the electrode column(s) have corresponding opposing surfaces (f1, f2)…d3

›22.↳ 16The apparatus of claim 16, wherein each electrode (EM) of the electrode column comprises an outer member ring (OR) having a cylindrical shape with cor…d3+1

Classifications

5 codes

IPC · International Patent Classification

Section G — Physics

G21G5/00

Section H — Electricity

H01J37/08

USPC · US Patent Classification

250/492.23250/492.21250/492.22

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Pendency

1.5 y

566 days filing → grant

Office actions

none on record

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1 RCE

Examiner

Nikita Wells

art unit 2881 · TC 2800

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1 priority documents

›Priority documents — 1

Type	Document	Date
related publication	US 20050104013 A1	19 May 2005

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