Semiconductor device and process for fabricating the same

Referring to FIGS. 1(A) to 1(D), an example according to an embodiment of the present invention is described below. A silicon oxide film 102 from 1,000 to 5,000 Å in thickness was deposited as a base film on a Corning 7059 substrate 101 (100×1,000 mm 2 in area); more specifically, for instance, at a thickness of 2,000 Å. The oxide film can be deposited, for example, by sputtering or by decomposing TEOS using plasma CVD. The oxide film in this case was deposited by sputtering under an oxygen atmosphere. The silicon oxide film thus formed may be annealed in the temperature range of from 400 to 650° C.

An amorphous silicon film was deposited thereafter by plasma CVD or by LPCVD to a thickness of from 300 to 5,000 Å, preferably in a range of from 400 to 1,000 Å, for instance, to a thickness of 500 Å. The amorphous silicon film thus obtained was crystallized thereafter by annealing it in a temperature range of from 550 to 600° C. under a reducing atmosphere for a duration of from 8 to 24 hours. Nickel may be added in a trace amount to accelerate the crystallization. Otherwise, the crystallization step may be effected by irradiating a laser radiation. The crystallized silicon film thus obtained was etched to form an island-like region 103. A gate insulating film was formed thereon by depositing a 700 to 1,500 Å thick, more specifically, a 1,200 Å thick silicon oxide film 104 using plasma CVD.

An aluminum film containing 1% by weight of silicon, or from 0.1 to 0.3% by weight of scandium (Sc) was deposited by sputtering to a thickness of from 1,000 Å to 3 μm, for instance, to a thickness of 5,000 Å. The resulting film was etched to obtain a gate electrode 105. The gate electrode 105 was then anodically oxidized in an electrolytic solution by applying current. Thus was formed an anodic oxide from 500 to 2,500 Å in thickness, for instance, a 2,000 Å thick anodic oxide was obtained. The electrolytic solution used herein was an L-tartaric acid diluted to a concentration of 5% by using ethylene glycol and pH-controlled to a value of 7.0±0.2. The substrate was then immersed in the solution, and the positive side of a constant current supply was connected to the gate electrode on the substrate while connecting the negative side to a platinum electrode. By applying a voltage at a constant current of 20 mA, the oxidation was continued until a voltage of 150 V was attained. The oxidation was further continued at a constant voltage of 150 V until the current decreased to 0.1 mA or lower. Thus was obtained a 2,000 Å thick aluminum oxide film (FIG. 1(A)).

An N-type impurity region 106 was formed by implanting impurity ions (phosphorus ions in this case) by means of ion doping into the island-like silicon film 103 in a self-aligned manner using the gate electrode portion 105 (i.e., the gate electrode and the surrounding anodic oxide film) as a mask. Thus, phosphorus was implanted at a dose of in a range of from 1×10 15 to 8×10 15 cm -2 under an accelerating voltage of from 60 to 90 kV. More specifically in this case, phosphorus was implanted at a dose of 5×10 15 cm -2 under an accelerating voltage of 80 kV.

Then, laser radiation was irradiated to the resulting structure using a KrF excimer laser operated at a wavelength of 248 nm and at a pulse width of 20 nsec, to activate the doped impurity. The laser was operated at an energy density of from 200 to 400 mJ/cm 2 , more preferably, at an energy density of from 250 to 300 mJ/cm 2 . Alternatively, thermal annealing can be used in the place of laser annealing, although not applicable in this case because aluminum, which is inferior in heat resistance, is used in the present example as the electrode (FIG. 1(B)).

A 5,000 Å thick silicon oxide film 107 was deposited thereafter by means of CVD as an interlayer dielectric over the entire surface of the resulting structure. The interlayer dielectric 107 and the gate insulating film 104 were etched to form contact holes in the source/drain of the TFT.

Then, an aluminum film 108 was deposited to a thickness of from 3,000 Å to 2 μm, preferably from 4,000 to 8,000 Å, for instance, to a thickness of 5,000 Å by means of sputtering. Then, an anodic oxide 109 was formed to a thickness of from 40 to 500 Å, for instance, at a thickness of 100 Å by effecting anodic oxidation in an electrolytic solution in the same manner as described above. In this case again, the electrolytic solution was an L-tartaric acid diluted to a concentration of 5% by using ethylene glycol and pH-controlled to a value of 7.0±0.2. The substrate was immersed in the solution, and the positive side of a constant current supply was connected to the aluminum film 108 on the substrate while connecting the negative side to a platinum electrode. By applying a voltage at a constant current of 20 mA, the oxidation was continued until a voltage in a range of from 5 to 30 V, specifically in this case, 10 V, was attained. The oxidation was further continued at a constant voltage of 10 V until the current decreased to 0.1 mA or lower. Thus was obtained an aluminum oxide film about 2,000 Å in thickness (FIG. 1(C)).

The aluminum film 108 and the aluminum oxide film 109 thus obtained were etched to obtain a second layer aluminum interconnection 110. A passivation film 111 was formed thereafter to protect the element from the ambient. The passivation film 111 was a silicon nitride film deposited to a thickness of from 2,000 to 8,000 Å, for instance, 4,000 Å, by means of plasma CVD using a mixed gas of NH 3 , SiH 4 , and H 2 . The substrate was maintained at a temperature in a range of from 250 to 350° C. during the film deposition (FIG. 1(D)).

In general, hillocks generate on the surface of aluminum due to temperature rise in case a silicon nitride film is formed directly on the surface of aluminum film. In the present example, however, the anodic oxide film prevented hillocks from generating.

Referring to FIGS. 2(A) to 2(E), an example according to an embodiment of the present invention related to a CMOS TFT is described below. A silicon oxide film 202 from 1,000 to 5,000 Å in thickness, more specifically, for instance, at a thickness of 2,000 Å, was deposited as a base film on a substrate 201 by means of plasma CVD. The silicon oxide film thus formed may be annealed in the temperature range of from 400 to 650° C.

An amorphous silicon film was deposited thereafter by plasma CVD to a thickness of from 300 to 5,000 Å, preferably in a range of from 400 to 1,000 Å, for instance, to a thickness of 500 Å. The amorphous silicon film thus obtained was crystallized thereafter by annealing it in a temperature range of from 550 to 600° C. under a reducing atmosphere for a duration of from 8 to 24 hours. Nickel may be added in a trace amount to accelerate the crystallization. Otherwise, the crystallization step may be effected by irradiating a laser radiation. The crystallized silicon film thus obtained was etched to form island-like regions 203 and 204. A gate insulating film was formed thereon by depositing a 700 to 1,500 Å thick, more specifically, a 1,200 Å thick silicon oxide film 205 using plasma CVD.

An aluminum film was deposited by sputtering to a thickness of from 1,000 Å to 3 μm, for instance, to a thickness of 5,000 Å. The resulting film was etched to obtain gate electrodes 206 and 207. The gate electrodes were then anodically oxidized in an electrolytic solution by applying current. Thus was formed an anodic oxide from 500 to 2,500 Å in thickness, for instance, a 2,000 Å thick anodic oxide was obtained (FIG. 2(A)).

Impurities were implanted by means of ion doping in a self-aligned manner into the island-like films 203 and 204 by using the gate electrode portions 206 and 207 as masks. N-type impurity regions 208 and 209 were formed by implanting impurity ions (phosphorus ions in this case) over the entire surface. Thus, phosphorus was implanted at a dose of in a range of from 1×10 15 to 8×10 15 cm -2 under an accelerating voltage of from 60 to 90 kV. More specifically in this case, phosphorus was implanted at a dose of 2×10 15 cm -2 under an accelerating voltage of 80 kV (FIG. 2(B)).

After masking the region of N-channel TFT using a photoresist 210, boron was implanted to reverse the conductive type of the N-type impurity region 209. Thus was obtained a P-type impurity region 211. Boron was implanted at a dose of in a range of from 1×10 15 to 8×10 15 cm -2 under an accelerating voltage of from 40 to 80 kV. More specifically in this case, boron was implanted at a dose higher than that of the previously implanted phosphorus; thus, boron was implanted at a dose of 5×10 15 cm -2 under an accelerating voltage of 65 kV (FIG. 2(C)).

Then, laser radiation was irradiated to the resulting structure using a KrF excimer laser operated at a wavelength of 248 nm and at a pulse width of 20 nsec, to activate the doped impurity. The laser was operated at an energy density of from 200 to 400 mJ/cm 2 , more preferably, at an energy density of from 250 to 300 mJ/cm 2 .

A 5,000 Å thick silicon oxide film 212 was deposited thereafter by means of CVD as an interlayer dielectric over the entire surface of the resulting structure. The interlayer dielectric 212 and the gate insulating film 205 were etched to form contact holes in the source/drain of the TFT.

Then, an aluminum film 213 was deposited to a thickness of from 3,000 Å to 2 μm, preferably from 4,000 to 8,000 Å, for instance, to a thickness of 5,000 Å by means of sputtering. Then, an anodic oxide was formed to a thickness of from 50 to 300 Å, for instance, at a thickness of 150 Å by effecting anodic oxidation in an electrolytic solution in the same manner as described above. The substrate was immersed in the solution, and the positive side of a constant current supply was connected to the aluminum film on the substrate while connecting the negative side to a platinum electrode. By applying a voltage at a constant current of 20 mA, the oxidation was continued until a voltage in a range of from 5 to 30 V, specifically in this case, 10 V, was attained. The oxidation was further continued at a constant voltage of 10 V until the current decreased to 0.1 mA or lower. Thus was obtained an aluminum oxide film 150 Å in thickness (FIG. 2(D)).

The aluminum film 213 and the aluminum oxide film 214 thus obtained were etched to obtain second layer aluminum interconnections 215, 216, and 217. A passivation film 218 was formed thereafter. The passivation film was a silicon oxynitride (SiO x N y ) film deposited to a thickness of from 2,000 to 8,000 Å, for instance, 4,000 Å, by means of plasma CVD using a mixed gas of NH 3 , SiH 4 , N 2 O and H 2 . The substrate was maintained at a temperature in a range of from 250 to 350° C. during the film deposition (FIG. 2(E)).

In the present example again, the anodic oxide film 214 prevented hillocks from generating on the aluminum film.

Referring to FIGS. 3(A) to 3(E), an example according to an embodiment of the present invention is described below. The present example is related to TFTs placed in the pixel portions of a liquid crystal display device of an active matrix type.

A 2,000 Å thick silicon oxide film 302 was deposited as a base film on a substrate 301 by means of plasma CVD. After depositing an amorphous silicon film to a thickness of 500 Å by plasma CVD, the resulting structure was allowed to stand in a reducing atmosphere maintained in a temperature range of from 550 to 600° C. for a duration of from 8 to 24 hours. Nickel may be added in a trace amount to accelerate the crystallization. Otherwise, the crystallization step may be effected by irradiating a laser radiation. The crystallized silicon film thus obtained was etched to form an island-like region 303. A gate insulating film was formed thereon by depositing a 1,200 Å thick silicon oxide film 304 using plasma CVD.

An aluminum film was deposited by sputtering to a thickness of from 1,000 Å to 3 μm, for instance, to a thickness of 6,000 Å. A thin anodic oxide film from 100 to 400 Å in thickness was formed on the surface of the aluminum film in the next step of anodic oxidation to maintain the photoresist tightly adhered to the surface of the aluminum film. A photoresist was formed by means of spin-coating to a thickness of about 1 μm on the thus treated aluminum film. The resulting film was subjected to a known photolithography to obtain a gate electrode 305. The gate electrode had a photoresist mask 306 thereon (FIG. 3(A)).

The substrate was then immersed in an aqueous 10% oxalic acid solution, and was subjected to anodic oxidation under a voltage in a range of from 5 to 50 V, for instance, 8 V, for a duration of form 10 to 500 minutes, for instance, for 200 minutes. Thus was formed a porous anodic oxide 307 about 5,000 Å in thickness on the side plane of the gate electrode. The photoresist mask 306 on the upper surface of the gate electrode prevented anodic oxidation from proceeding on the upper side of the gate electrode (FIG. 3(B)).

After removing the mask to expose the upper surface of the gate electrode, the substrate was immersed into an ethylene glycol solution containing 3% tartaric acid (whose pH was controlled to a neutral range by using ammonia), and current was applied at a constant value of 20 mA to raise the voltage up to 100 V. Anodic oxidation was performed in this manner. In this case, not only the upper surface but also the sides of the gate electrode were anodically oxidized to form a 1,000 Å thick dense pore-free anodic oxide.

Impurities were implanted by means of ion doping in a self-aligned manner into the island-like film 303 by using the gate electrode portion (i.e., the gate electrode and the surrounding anodic oxide film) as a mask. An N-type impurity region 308 was formed by implanting impurity ions (phosphorus ions in this case) over the entire surface. Thus, phosphorus was implanted at a dose of in a range of from 1×10 15 to 8×10 15 cm -2 under an accelerating voltage of from 60 to 90 kV. More specifically in this case, phosphorus was implanted at a dose of 5×10 15 cm -2 under an accelerating voltage of 80 kV (FIG. 3(C)).

The porous anodic oxide 307 was etched by using a phosphoric acid based etchant to expose the pore-free anodic oxide. Because the etching rate of the pore-free anodic oxide is extremely low in the phosphoric acid based etchant used herein, the porous anodic oxide 307 alone can be etched selectively while protecting the pore-free anodic oxide and the inner aluminum gate. Furthermore, because no impurity (phosphorus) was doped to the lower portion of the region in which the porous anodic oxide had been formed, an offset region was formed.

Then, laser radiation was irradiated to the resulting structure using a KrF excimer laser operated at a wavelength of 248 nm and at a pulse width of 20 nsec, to activate the doped impurity. The laser was operated at an energy density of from 200 to 400 mJ/cm 2 , more preferably, at an energy density of from 250 to 300 mJ/cm 2 . At the same time, the laser radiation was irradiated to the phase boundary portion between the impurity region 308 and the offset region. The laser radiation was found effective for preventing degradation from occurring at the phase boundary.

A 5,000 Å thick silicon oxide film 309 was deposited thereafter by means of CVD as an interlayer dielectric over the entire surface of the resulting structure. The interlayer dielectric 309 and the gate insulating film 304 were etched to form contact holes in the source/drain of the TFT.

Then, an aluminum film 310 was deposited to a thickness of from 3,000 Å to 2 μm, preferably from 4,000 to 8,000 Å, for instance, to a thickness of 5,000 Å by means of sputtering. An anodic oxide was formed in the same manner as in Example 1 to form an anodic oxide 311 to a thickness of 100 Å (FIG. 3(D)).

The aluminum film 310 and the aluminum oxide film 311 thus obtained were etched to obtain second layer aluminum interconnections 312. A passivation film 313 was formed thereafter to protect the element from the ambient. The passivation film was a silicon nitride film deposited to a thickness of 3,000 Å. In this step again, the anodic oxide film prevented hillocks from generating on the aluminum film.

The passivation film 313, the interlayer dielectric 309, and the gate insulating film 304 were etched to form contact holes for the pixel electrode. After depositing an ITO (indium tin oxide) film, an ITO pixel electrode 314 was formed by etching it (FIG. 3(E)).

The present Example refers to a liquid crystal display device. In a conventional liquid crystal display device, the active matrix substrate was disposed from the substrate opposed thereto at a distance of a mere 5 μm or so. The contact between the substrates due to the formation of hillocks on the interconnection was found a great problem. The product yield was improved in the present example in this manner by suppressing the formation of hillocks.

Referring to FIGS. 4(A) to 4(F), an example according to an embodiment of the present invention is described below. The present example is related to TFTs placed in the pixel portions of a liquid crystal display device of an active matrix type.

A 2,000 Å thick silicon oxide film 402 was deposited as a base film on a substrate 401 by means of plasma CVD. After depositing an amorphous silicon film to a thickness of 500 Å by plasma CVD, the resulting structure was allowed to stand in a reducing atmosphere maintained in a temperature range of from 550 to 600° C. for a duration of from 8 to 24 hours. Nickel may be added in a trace amount to accelerate the crystallization. Otherwise, the crystallization step may be effected by irradiating a laser radiation. The crystallized silicon film thus obtained was etched to form an island-like region 403. A gate insulating film was formed thereon by depositing a 1,200 Å thick silicon oxide film 404 using plasma CVD.

An aluminum film was deposited by sputtering to a thickness of from 1,000 Å to 3 μm, for instance, to a thickness of 6,000 Å, and was then etched to form a gate electrode 405. The gate electrode was anodically oxidized by applying a current to the gate electrode in an electrolytic solution. Thus was obtained a 2,000 Å thick anodic oxide (FIG. 4(A)).

A silicon oxide film 406 was deposited by plasma CVD. This silicon oxide film 406 was used to form side walls. Accordingly, optimal thickness of the silicon oxide film differs depending on the height of the gate electrode. In case the height of the gate electrode portion (i.e., the gate electrode and the surrounding anodic oxide film) is about 6,000 Å, a preferred thickness is in a range of from 2,000 Å to 1.2 μm, corresponding to about 1/3 to 2 times the height of the gate electrode. Thus, a 6,000 Å thick silicon oxide film was deposited in this case (FIG. 4(B)).

The resulting silicon oxide film was etched by effecting an anisotropic dry etching using a known RIE (reactive ion etching) process. The etching was completed at the point it reached the gate insulating film. An insulator 407 (side wall) was formed approximately in a triangular shape on the side plane of the gate electrode portion in this manner (FIG. 4(C)).

Impurity ions (i.e., phosphorus ions in this case) were implanted by means of ion doping in a self-aligned manner into the island-like film 403 by using the gate electrode portion 405 and the side wall 407 as masks. An N-type impurity region 408 was formed by implanting the impurity at a dose of in a range of from 1×10 15 to 8×10 15 cm -2 under an accelerating voltage of from 60 to 90 kV. More specifically in this case, phosphorus was implanted at a dose of 5×10 15 cm -2 under an accelerating voltage of 80 kV. No impurity was implanted into the portion under the side wall portion, and this portion became an offset region.

Then, to activate the doped impurity, laser radiation was irradiated to the resulting structure using a KrF excimer laser operated at a wavelength of 248 nm and at a pulse width of 20 nsec. The laser was operated at an energy density of from 200 to 400 mJ/cm 2 , more preferably, at an energy density of from 250 to 300 mJ/cm 2 (FIG. 4(D)).

A 5,000 Å thick silicon oxide film 409 was deposited thereafter by means of CVD as an interlayer dielectric over the entire surface of the resulting structure. The interlayer dielectric 409 and the gate insulating film 404 were etched to form contact holes in the source/drain of the TFT.

Then, an aluminum film 410 was deposited to a thickness of from 3,000 Å to 2 μm, preferably from 4,000 to 8,000 Å, for instance, to a thickness of 5,000 Å by means of sputtering. An anodic oxide was formed in the same manner as above to form an anodic oxide 411 at a thickness of from 50 to 500 Å, for instance, at a thickness of 250 Å (FIG. 4(E)).

The aluminum film 410 and the aluminum oxide film 411 thus obtained were etched to obtain second layer aluminum interconnections 412. A passivation film 413 was formed thereafter to protect the element from the ambient. The passivation film was a silicon nitride film deposited to a thickness of 4,000 Å.

The passivation film 413, the interlayer dielectric 409, and the gate insulating film 404 were etched to form contact holes for the pixel electrode. After depositing an ITO (indium tin oxide) film, an ITO pixel electrode 414 was formed by etching (FIG. 3(F)).

Thus was obtained a pixel TFT having an offset region at the lower portion of the side wall.

As described in the foregoing, the present invention suppresses the generation of hillocks on the second layer aluminum interconnection. Thus, the formation of defective portions such as short circuit can be avoided. Particularly in the fabrication of an IC (integrated circuit) consisting of numerous elements and interconnections, a single defect may be fatal to the entire IC. The present invention considerably reduces such defects to enable the fabrication of ICs at an improved product yield.

Wile the invention has been described in detail and with reference to specific embodiments thereof, it will be apparent to one skilled in the art that various changes and modifications can be made therein without departing from the spirit and scope thereof.