Substrate processing method and substrate processing apparatus

A substrate processing method comprising: supplying a first cleaning liquid containing water to a first surface of a substrate while the substrate is being rotated, thereby cleaning the first surface of the substrate; supplying a second cleaning liquid containing water to a second surface of the substrate that is opposite to the first surface of the substrate while the substrate is being rotated and the first cleaning liquid is being supplied to the first surface of the substrate, thereby cleaning the second surface of the substrate; supplying a rinsing liquid to the first surface of the substrate and the second surface of the substrate while the substrate is being rotated, thereby rinsing the first cleaning liquid and rinsing the second cleaning liquid; stopping the supplying of the rinsing liquid to the second surface of the substrate at a predetermined time, continuing the rinsing of the first surface of the substrate after stopping the rinsing of the second surface of the substrate and thereafter supplying an organic solvent to the first surface of the substrate to substitute the rinsing liquid on the first surface such that the first surface of the substrate is not exposed to outside air while the substrate is continuously rotated, thereby removing the rinsing liquid remaining on the first surface of the substrate by the organic solvent and removing the rinsing liquid remaining on the second surface of the substrate by a centrifugal force; supplying a water-repellent agent to the first surface of the substrate while the substrate is being rotated; and after the supplying the water-repellent agent to the first surface of the substrate, increasing a rotation speed of the substrate thereby drying the substrate.

A substrate processing method comprising: supplying a first cleaning liquid containing water to a first surface of a substrate while the substrate is being rotated, thereby cleaning the first surface of the substrate; supplying a second cleaning liquid containing water to a second surface of the substrate that is opposite to the first surface of the substrate while the substrate is being rotated and the first cleaning liquid is being supplied to the first surface of the substrate, thereby cleaning the second surface of the substrate; supplying a rinsing liquid to the first surface of the substrate and the second surface of the substrate while the substrate is being rotated, thereby rinsing the first cleaning liquid and the second cleaning liquid, after the supplying of the rinsing liquid to the first surface of the substrate and the second surface of the substrate is stopped, supplying an organic solvent to the first surface of the substrate such that the first surface of the substrate is not exposed to outside air while the substrate is continuously rotated, thereby removing the rinsing liquid remaining on the first surface of the substrate by the organic solvent and supplying a gas to only the second surface of the substrate while the organic solvent is supplied to the first surface of the substrate thereby removing the rinsing liquid remaining on the second surface of the substrate; supplying a water-repellent agent to the first surface of the substrate while the substrate is being rotated; and after the supplying the water-repellent agent to the first surface of the substrate, increasing a rotation speed of the substrate thereby drying the substrate.

A substrate processing method comprising: supplying a cleaning liquid containing water to a first surface of a substrate while the substrate is being rotated thereby cleaning the substrate; supplying a second cleaning liquid containing water to a second surface of the substrate that is opposite to the first surface of the substrate while the substrate is being rotated and the first cleaning liquid is being supplied to the first surface of the substrate, thereby cleaning the second surface of the substrate; supplying a rinsing liquid to the first surface of the substrate and the second surface of the substrate while the substrate is being rotated, thereby rinsing the first cleaning liquid and the second cleaning liquid, after the supplying of the rinsing liquid to the substrate is completed, supplying a water-repellent agent to the first surface of the substrate in a state where the rinsing liquid remains present on a second surface of the substrate that is opposite to the first surface of the substrate while the substrate is being rotated, such that a stain is generated on the second surface of the substrate by the water-repellent agent and the rinsing liquid, wherein the rinsing liquid is deionized water; supplying an organic solvent to the first surface of the substrate while rotating the substrate at a first rotation speed for a predetermined period of time; and changing a rotation speed of the substrate to a second rotation speed lower than the first rotation speed, so that the organic solvent supplied to the first surface of the substrate flows around to the second surface thereby removing the generated stain.