Mainframe of dual-robot substrate processing system
Granted 14 Oct 2025
Current assignee: Applied Materials Israel · originally Applied Materials, Inc.
Law firm: Law firm · Log in to unlock
Attorney: Attorney · Log in to unlock
Inventors: Michael R. Rice, Ofer Amir, Michael C. Kuchar, Travis Morey +1 · Examiner: Patricia A Palasik · AU 2918 · TC 2900
Life of the application
4 dated eventsDescription
1 parts›FIG. 1 is a top perspective view of…
FIG. 1 is a top perspective view of a mainframe of dual-robot substrate processing system of the present design.
FIG. 2 is a left side elevational view thereof.
FIG. 3 is a right-side elevational view thereof.
FIG. 4 is a front elevational view thereof.
FIG. 5 is a rear elevational view thereof.
FIG. 6 is a top plan view thereof.
FIG. 7 is a bottom plan view thereof; and,
FIG. 8 is a top, perspective view thereof, showing unclaimed components attached thereto.
The broken lines shown in the figures are directed to unclaimed portions of the mainframe and/or unclaimed components attached to the mainframe that are for illustrative purposes only and form no part of the claimed design.
Claims as granted
1 claimLog in to read the claims of this application.
Log in to unlockClassifications
2 codesClaim changes
SoonSee which claims were amended, added or cancelled during examination, with every added and removed word marked.
The published claims of this application are not paired with the granted ones in what we hold.
File wrapper
Documents
Log in to open the documents of this file: the application as filed, every office action and response, the notice of allowance.
Log in to unlockChain of title
See the full assignment history — every owner this patent has passed through, with recordation dates and reel/frame numbers.
Log in to unlock