Process chamber mixer
Granted 10 Feb 2026
Assignee: Applied Materials, Inc.
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Attorney: Attorney · Log in to unlock
Inventors: Yu Lei, Dien-yeh Wu, Jallepally Ravi, Yi Xu +5 · Examiner: Eric L Goodman · AU 2939 · TC 2900
Life of the application
3 dated eventsDescription
1 parts›FIG. 1 is a top isometric view of…
FIG. 1 is a top isometric view of a process chamber mixer, showing our new design.
FIG. 2 is a bottom isometric view thereof.
FIG. 3 is a left side elevation view thereof.
FIG. 4 is a right side elevation view thereof.
FIG. 5 is a front elevation view thereof.
FIG. 6 is a rear elevation view thereof.
FIG. 7 is a top plan view thereof.
FIG. 8 is a bottom plan view thereof.
FIG. 9 is a cross-sectional view taken along line 9 - 9 in FIG. 7 .
FIG. 10 is a cross-sectional view taken along line 10 - 10 in FIG. 7 .
FIG. 11 is a cross-sectional view taken along line 11 - 11 in FIG. 3 .
FIG. 12 is a cross-sectional view taken along line 12 - 12 in FIG. 3 ; and,
FIG. 13 is a cross-sectional view taken along line 13 - 13 in FIG. 3 .
The broken lines shown in FIGS. 3 and 7 are included for the purpose of illustrating the boundary and direction of section views and forms no part of the claimed design.
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