Apparatus for evaluating semiconductor substrate
Granted 13 Jun 2023 · no office action yet
Current assignee: Hitachi High-Tech Instruments Co., Ltd · originally Hitachi, Ltd.
Law firm: Law firm · Log in to unlock
Attorney: Attorney · Log in to unlock
Inventors: Takaaki Kikuchi, Akira Kojima, Junpei Hokari, Masayuki Arakawa +2 · Examiner: Patricia A Palasik · AU 2918 · TC 2900
Life of the application
5 dated eventsDescription
1 parts›FIG. 1 is a front, top, and right…
FIG. 1 is a front, top, and right side perspective view of an apparatus for evaluating semiconductor substrate according to the design;
FIG. 2 is a front elevational view thereof;
FIG. 3 is a rear elevational view thereof;
FIG. 4 is a left side elevational view thereof;
FIG. 5 is a right side elevational view thereof;
FIG. 6 is a top plan view thereof;
FIG. 7 is a bottom plan view thereof;
FIG. 8 is a cross-sectional view taken along line 8 - 8 of FIG. 2 ; and,
FIG. 9 is a cross-sectional view taken along line 9 - 9 of FIG. 2 .
The broken lines illustrate portions of the apparatus for evaluating semiconductor substrate that form no part of the claimed design. The hatching shown in FIG. 8 and FIG. 9 represents unclaimed subject matter and forms no part of the claimed design.
Claims as granted
1 claimLog in to read the claims of this application.
Log in to unlockClassifications
1 codesClaim changes
SoonSee which claims were amended, added or cancelled during examination, with every added and removed word marked.
The published claims of this application are not paired with the granted ones in what we hold.
File wrapper
See the full prosecution history — every USPTO and applicant action on this file, in order.
Log in to unlockDocuments
Log in to open the documents of this file: the application as filed, every office action and response, the notice of allowance.
Log in to unlockChain of title
See the full assignment history — every owner this patent has passed through, with recordation dates and reel/frame numbers.
Log in to unlock