Mainframe of substrate processing system
Granted 20 Dec 2022 · no office action yet
Current assignee: Applied Materials Israel · originally Applied Materials, Inc.
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Inventors: Michael R. Rice, Ofer Amir, Adam J. Wyatt, Travis Morey +1 · Examiner: Patricia A Palasik · AU 2918 · TC 2900
Life of the application
5 dated eventsDescription
1 parts›FIG. 1 is a top perspective view of…
FIG. 1 is a top perspective view of a mainframe for a substrate processing system of the present design.
FIG. 2 is a side view thereof.
FIG. 3 is a side view thereof.
FIG. 4 is a front view thereof.
FIG. 5 is a rear view thereof.
FIG. 6 is a top view thereof.
FIG. 7 is a bottom view thereof; and,
FIG. 8 is a top perspective view thereof, showing unclaimed components attached thereto.
The broken lines shown in the figures are directed to unclaimed portions of the mainframe and/or unclaimed components attached to the mainframe that are for illustrative purposes only and form no part of the claimed design.
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