Gas supply plate for semiconductor manufacturing apparatus

FIG. 1 is a perspective view of a gas supply plate for semiconductor manufacturing apparatus showing our new design;

FIG. 2 is a front elevational view thereof;

FIG. 3 is a rear elevational view thereof;

FIG. 4 is a left side elevational view thereof;

FIG. 5 is a right side elevational view thereof;

FIG. 6 is a top plan view thereof;

FIG. 7 is an enlarged view of the portion labeled “ FIG. 7 ” indicated in FIG. 6 ;

FIG. 8 is a bottom plan view of the gas supply plate for semiconductor manufacturing apparatus of FIG. 1 ;

FIG. 9 is an enlarged view of the portion labeled “ FIG. 9 ” indicated in FIG. 8 ; and,

FIG. 10 is a cross-sectional view, taken along a line 10 - 10 of FIG. 9 .

The dashed-dot lines in FIGS. 6-9 represent the boundary lines of an enlarged portion of the gas supply plate for semiconductor manufacturing apparatus. The even dashed lines that define the circle in FIGS. 1,6,7,8 and 9 and the even dashed lines that define the outer edge of the cross sectional view in FIG. 10 form no part of the claimed design.