USPatent applicationPatented

Target profile for a physical vapor deposition chamber target

Granted 22 Mar 2022 · 1 office action

Current assignee: Applied Materials Israel · originally Applied Materials, Inc.

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Inventors: Fuhong Zhang, Zheng Wang, Martin Lee Riker · Examiner: Sheryl Lane · AU 2915 · TC 2900

Application· this page
29/714,564
filed 25 Nov 2019
Publication
Not published
not published
Patent
US D946638
granted 22 Mar 2022

Life of the application

5 dated events
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Description

1 parts
›FIG. 1 is a top perspective view of…

FIG. 1 is a top perspective view of a target profile for a physical vapor deposition chamber target, according to the novel design.

FIG. 2 is a top plan view thereof.

FIG. 3 is a bottom plan view thereof.

FIG. 4 is a right side plan view thereof.

FIG. 5 is a left side plan view thereof.

FIG. 6 is a front view thereof.

FIG. 7 is a back view thereof; and,

FIG. 8 is an enlarged cross sectional view taken along line 8 - 8 in FIG. 2 .

The dashed lines in the drawings represent unclaimed environment and form no part of the claimed design.

the grant prints no section headings; every part label below is ours, taken from that part's own first words

Claims as granted

1 claim

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Classifications

2 codes
USPC · US Patent Classification
D15/138D13/182

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File wrapper

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Pendency
2.3 y
848 days filing → grant
Office actions
0
after a restriction
Examiner
Sheryl Lane
art unit 2915 · TC 2900
Citations: 134 back · 0 forward

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Chain of title

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