USPatent applicationPatented

Pressing member for substrate polishing apparatus

Granted 11 Jun 2019 · no office action yet

Assignee: Ebara Corporation

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Inventors: Yasuyuki Miyasawa, Satoru Yamamoto, Kenji Kamimura, Kenji Kodera +1 · Examiner: Patricia A Palasik · AU 2918 · TC 2900

Application· this page
29/659,981
filed 14 Aug 2018
Publication
Not published
not published
Patent
US D851142
granted 11 Jun 2019

Life of the application

4 dated events
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Description

1 parts
›FIG. 1 is a first perspective view, observed…

FIG. 1 is a first perspective view, observed from a front of a pressing member for a substrate polishing apparatus showing our new design;

FIG. 2 is a second perspective view, observed from a rear thereof;

FIG. 3 is a front view thereof;

FIG. 4 is a rear view thereof;

FIG. 5 is a top view thereof;

FIG. 6 is a bottom view thereof; and,

FIG. 7 is a right-side view thereof, a left-side view being a mirror image thereof.

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Claims as granted

1 claim

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Classifications

1 codes
USPC · US Patent Classification
D15/126

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File wrapper

⤢ drag to zoomJul 2018Oct 2018Jan 2019Apr 2019Jul 2019USPTOApplicantNotice of allowance
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Pendency
0.8 y
301 days filing → grant
Office actions
0
none on record
Examiner
Patricia A Palasik
art unit 2918 · TC 2900
Citations: 32 back · 0 forward

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Chain of title

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