Pressing member for substrate polishing apparatus
Granted 11 Jun 2019 · no office action yet
Assignee: Ebara Corporation
Law firm: Law firm · Log in to unlock
Attorney: Attorney · Log in to unlock
Inventors: Kenji Kodera, Masayuki Nakanishi, Kenji Kamimura, Satoru Yamamoto +1 · Examiner: Patricia A Palasik · AU 2918 · TC 2900
Life of the application
4 dated eventsDescription
1 parts›FIG. 1 is a first perspective view, observed…
FIG. 1 is a first perspective view, observed from a front of a pressing member for a substrate polishing apparatus showing our new design;
FIG. 2 is a second perspective view, observed from a rear thereof;
FIG. 3 is a front view thereof;
FIG. 4 is a rear view thereof;
FIG. 5 is a top view thereof;
FIG. 6 is a bottom view thereof; and,
FIG. 7 is a right-side view thereof, a left-side view being a mirror image thereof.
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