Gas diffusion plate for a plasma processing apparatus

FIG. 1 is a front, bottom and right side perspective view of a gas diffusion plate for a plasma processing apparatus according to the design;

FIG. 2 is a front elevational view thereof;

FIG. 3 is a left side elevational view thereof;

FIG. 4 is a right side elevational view thereof;

FIG. 5 is a top plan view thereof;

FIG. 6 is a bottom plan view thereof;

FIG. 7 is a rear elevational view thereof;

FIG. 8 is a cross-sectional view taken along line 8 - 8 of FIG. 2 ;

FIG. 9 is an enlarged view of the portion shown in BOX 9 in FIG. 2 ; and,

FIG. 10 is an enlarged view of the portion shown in BOX 10 in FIG. 8 .

The broken lines show the boundary of enlarged portions and form no part of the claimed design.