Target profile for a physical vapor deposition chamber target
Granted 26 Nov 2019 · 1 office action
Current assignee: Applied Materials Israel · originally Applied Materials, Inc.
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Inventors: Fuhong Zhang, Martin Lee Riker, Zheng Wang · Examiner: Kevin K Rudzinski · AU 2923 · TC 2900
Life of the application
6 dated eventsDescription
1 parts›FIG. 1 is a top perspective view of…
FIG. 1 is a top perspective view of a target profile for a physical vapor deposition chamber target.
FIG. 2 is a top plan view thereof.
FIG. 3 is a bottom plan view thereof.
FIG. 4 is a right side plan view thereof.
FIG. 5 is a left side plan view thereof.
FIG. 6 is a front view thereof.
FIG. 7 is a back view thereof; and,
FIG. 8 is an enlarged cross sectional view taken along line 8 - 8 in FIG. 2 .
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