Composite edge ring
Granted 19 Sep 2017 · no office action yet
Current assignee: Applied Materials Israel · originally Applied Materials, Inc.
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Inventors: Vedapuram S. Achutharaman, James Rogers, Jason A. Kenney, Olivier Joubert +3 · Examiner: Elizabeth J Oswecki · AU 2912 · TC 2900
Life of the application
5 dated eventsDescription
1 parts›FIG. 1 is a top perspective view of…
FIG. 1 is a top perspective view of a composite edge ring showing our new design;
FIG. 2 is bottom perspective view thereof;
FIG. 3 is a top plan view thereof;
FIG. 4 is a bottom plan view thereof;
FIG. 5 is a side elevational view thereof, the opposite side elevation view, the front elevation view, and the rear elevation view being a mirror-image thereof;
FIG. 6 is a cross-sectional view thereof taken along section 6 - 6 of FIG. 3 ;
FIG. 7 is an enlarged view of a portion labeled FIG. 7 in FIG. 6 ; and,
FIG. 8 is an enlarged view of a portion labeled FIG. 8 in FIG. 6 shown in a used condition with a surrounding environment shown in broken lines.
The broken lines in the Figures form no part of the claimed design.
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