Patterned heater pedestal
Granted 9 Jan 2018 · 2 office actions
Current assignee: Applied Materials Israel · originally Applied Materials, Inc.
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Inventors: Mehran Behdjat, Dongming Iu · Examiner: Sheryl Lane · AU 2915 · TC 2900
Life of the application
9 dated eventsDescription
1 parts›FIG. 1 is an isometric top view of…
FIG. 1 is an isometric top view of a patterned heater pedestal showing my new design.
FIG. 2 is an isometric bottom view thereof.
FIG. 3 is a top plan view thereof.
FIG. 4 is a bottom plan view thereof.
FIG. 5 is a side elevational view thereof, the opposite side elevational view being a mirror image; and,
FIG. 6 is an enlarged view of a portion of FIG. 1 .
The dash-dot-dot-dash broken lines depict the boundary of an enlarged view of the patterned heater pedestal only and form no part of the claim.
Portions of the article shown in broken lines, such as the dash-dash circles located near the periphery of FIG. 3 , form no part of the claimed design.
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