USPatent applicationPatented

Self-centering wafer carrier for chemical vapor deposition

Granted 20 Feb 2018 · no office action yet

Current assignee: HSBC BANK USA, NATIONAL ASSOCIATION · originally Veeco Instruments

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Inventors: Earl Marcelo, Sandeep Krishnan, Alexander I. Gurary, Chenghung Paul Chang · Examiner: Jeffrey D Asch · AU 2917 · TC 2900

Application· this page
29/559,977
filed 1 Apr 2016
Publication
Not published
not published
Patent
US D810705
granted 20 Feb 2018

Life of the application

7 dated events
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Description

1 parts
›FIG. 1 is a top perspective view of…

FIG. 1 is a top perspective view of a first embodiment of an ornamental design for a self-centering wafer carrier for chemical vapor deposition;

FIG. 2 is a bottom perspective view of the first embodiment thereof;

FIG. 3 is a top view of the first embodiment thereof;

FIG. 4 is a bottom view of the first embodiment thereof;

FIG. 5 is a right view of the first embodiment thereof,

FIG. 6 is a left view of the first embodiment thereof;

FIG. 7 is a rear view of the first embodiment thereof;

FIG. 8 is a front view of the first embodiment thereof; and

FIG. 9 is a cross section view taken along 9 - 9 in FIG. 3 of the first embodiment thereof.

FIG. 10 is a top perspective view of a second embodiment of an ornamental design for a self-centering wafer carrier for chemical vapor deposition;

FIG. 11 is a bottom perspective view of the second embodiment thereof;

FIG. 12 is a top view of the second embodiment thereof;

FIG. 13 is a bottom view of the second embodiment thereof;

FIG. 14 is a right view of the second embodiment thereof;

FIG. 15 is a left view of the second embodiment thereof;

FIG. 16 is a rear view of the second embodiment thereof;

FIG. 17 is a front view of the second embodiment thereof; and

FIG. 18 is a cross section view taken along 18 - 18 in FIG. 12 of the second embodiment thereof.

FIG. 19 is a top perspective view of a third embodiment of an ornamental design for a self-centering wafer carrier for chemical vapor deposition;

FIG. 20 is a bottom perspective view of the third embodiment thereof;

FIG. 21 is a top view of the third embodiment thereof;

FIG. 22 is a bottom view of the third embodiment thereof;

FIG. 23 is a right view of the third embodiment thereof;

FIG. 24 is a left view of the third embodiment thereof;

FIG. 25 is a rear view of the third embodiment thereof; and

FIG. 26 is a front view of the third embodiment thereof.

FIG. 27 is a top perspective view of a fourth embodiment of an ornamental design for a self-centering wafer carrier for chemical vapor deposition;

FIG. 28 is a bottom perspective view of the fourth embodiment thereof;

FIG. 29 is a top view of the fourth embodiment thereof;

FIG. 30 is a bottom view of the fourth embodiment thereof;

FIG. 31 is a right view of the fourth embodiment thereof;

FIG. 32 is a left view of the fourth embodiment thereof;

FIG. 33 is a rear view of the fourth embodiment thereof;

FIG. 34 is a front view of the fourth embodiment thereof; and,

FIG. 35 is a cross section view taken along 35 - 35 in FIG. 29 of the fourth embodiment thereof.

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Claims as granted

1 claim

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Classifications

2 codes
USPC · US Patent Classification
D13/182D15/138

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File wrapper

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Pendency
1.9 y
690 days filing → grant
Office actions
0
none on record
Examiner
Jeffrey D Asch
art unit 2917 · TC 2900
Citations: 121 back · 0 forward

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Chain of title

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