Target profile for a physical vapor deposition chamber target

FIG. 1 is a perspective view of a target profile for a physical vapor deposition chamber target, showing our new design;

FIG. 2 is a top plan view thereof;

FIG. 3 is a bottom plan view thereof;

FIG. 4 is a right side elevation view thereof;

FIG. 5 is a left side elevation view thereof;

FIG. 6 is a front elevation view thereof;

FIG. 7 is a back elevation view thereof; and,

FIG. 8 is a cross-sectional view taken along line 8 - 8 in FIG. 2 .

The broken lines in FIGS. 1-8 represent unclaimed environment and form no part of the claimed design.