Focusing ring
Granted 22 Jul 2014 · 1 office action
Assignee: Tokyo Electron Limited
Law firm: Law firm · Log in to unlock
Attorney: Attorney · Log in to unlock
Inventors: Shunsuke Mizukami · Examiner: Patricia Palasik · AU 2918 · TC 2900
Life of the application
7 dated eventsDescription
1 parts›FIG. 1 is a front view of a…
FIG. 1 is a front view of a focusing ring of the present invention.
FIG. 2 is a right side view of the focusing ring of FIG. 1 .
FIG. 3 is a top plan view of the focusing ring of FIG. 1 .
FIG. 4 is a bottom view of the focusing ring of FIG. 1 .
FIG. 5 is an enlarged sectional view of the 1 - 3 intersection of lines 1 and 3 of the focusing ring of FIG. 3 .
FIG. 6 is an enlarged sectional view of the 2 - 3 intersection of lines 2 and 3 of the focusing ring of FIG. 3 ; and,
FIG. 7 is a perspective view of the focusing ring of FIG. 1 .
The rear view is the same as the front view.
The left side view is the same as the right side view.
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