Cleaning plate for inducing turbulent flow of a processing chamber cleaning glass
Granted 24 Jul 2012 · no office action yet
Current assignee: Applied Materials Israel · originally Applied Materials, Inc.
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Inventors: Kyawwin Jason Maung, Anzhong Chang, Sumedh Acharya, Xizi Dong +8 · Examiner: Patricia Palasik · AU 2915 · TC 2900
Life of the application
5 dated eventsDescription
1 parts›This invention was made with Government support under…
This invention was made with Government support under DE-EE0003331 awarded by DOE. The Government has certain rights in this invention.
FIG. 1 is a cleaning plate for inducing turbulent flow of a processing chamber cleaning gas.
FIG. 2 is a top plan view of the cleaning plate of FIG. 1 .
FIG. 3 is a bottom isometric view of the cleaning plate of FIG. 1 .
FIG. 4 is a bottom plan view of the cleaning plate of FIG. 1 .
FIG. 5 is a side perspective view of the cleaning plate of 1 ; and,
FIG. 6 is an enlarged partial view of FIG. 3 .
The broken lines in the figures form no part of the claimed design.
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