Microwave introducing antenna for a plasma processing apparatus
Granted 24 Mar 2009 · 1 office action
Assignee: Tokyo Electron Limited
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Attorney: Attorney · Log in to unlock
Inventors: Atsushi Ueda, Cai Zhong Tian · Examiner: T. Chase Nelson · AU 2914 · TC 2900
Life of the application
7 dated eventsDescription
1 parts›FIG. 1 is a front view of a…
FIG. 1 is a front view of a microwave introducing antenna for a plasma processing apparatus showing our new design:
FIG. 2 is a right side view thereof;
FIG. 3 is a top plan view thereof;
FIG. 4 is a sectional view taken along line 4 — 4 of FIG. 1 thereof; and,
FIG. 5 is a perspective view thereof.
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