Heater for semiconductor manufacturing
Granted 17 Nov 2009 · 2 office actions
Current assignee: COORSTEK KK · originally Tokyo Electron Limited
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Inventors: Yasuhiro Inatomi, Kenichi Yamaga, Hiroyuki Honma · Examiner: Selina Sikder · AU 2912 · TC 2900
Life of the application
12 dated eventsDescription
1 parts›FIG. 1 is an enlarged front elevation view…
FIG. 1 is an enlarged front elevation view of a heater for semiconductor manufacturing showing our new design;
FIG. 2 is an enlarged left side elevation view, the right side being a mirror image thereof;
FIG. 3 is a top plan view thereof;
FIG. 4 is a bottom plan view thereof;
FIG. 5 is an enlarged top plan view of the area 5 — 5 shown in FIG. 3 ; and,
FIG. 6 is an enlarged bottom plan view of the area 6 — 6 shown in FIG. 4 .
The broken lines shown in the figures are for illustrative purposes only and form no part of the claimed design.
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