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USPatent applicationPending

PLASMA MONITORING APPARATUS AND PLASMA PROCESSING APPARATUS INCLUDING THE SAME

Pending · filed 7 Jul 2022 · 2 office actions

Assignee: none recorded yet

Application· this page
17/859,623
filed 7 Jul 2022
Publication
US 20230130913 A1
published 27 Apr 2023
Patent
Not granted yet
still under examination
Pending
Status
20
Claims as published
2 independent
none
Litigation
checked

File wrapper

Examiner
Yuechuan Yu
art unit 1718 · TC 1700

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