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USPatent applicationPending

METHOD AND MECHANISM FOR CONTACT-FREE PROCESS CHAMBER CHARACTERIZATION

Pending · filed 5 Jul 2022 · 1 office action

Assignee: none recorded yet

Application· this page
17/857,630
filed 5 Jul 2022
Publication
US 20230008072 A1
published 12 Jan 2023
Patent
Not granted yet
still under examination
Pending
Status
22
Claims as published
5 independent
none
Litigation
checked

File wrapper

Examiner
Christopher W. Carter
art unit 2117 · TC 2100

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