USPatent applicationPending
PLASMA CHAMBER WITH GAS CROSS-FLOW, MICROWAVE RESONATORS AND A ROTATABLE PEDESTAL FOR MULTIPHASE CYCLIC DEPOSITION
Pending · filed 7 Jun 2022 · 6 office actions
Assignee: none recorded yet
Application· this page
17/834,278
filed 7 Jun 2022
Publication
US 20230395356 A1
published 7 Dec 2023
Patent
Not granted yet
still under examination
File wrapper
Examiner
Keath T. Chen
art unit 1716 · TC 1700
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