Servo valve

This application is based upon and claims the benefit of priority from Japanese Patent Application No. 2019-163580 filed on Sep. 9, 2019, the contents all of which are incorporated herein by reference.

The present invention relates to a servo valve that controls the flow rate of a fluid supplied to or discharged from two pressure chambers of a fluid pressure cylinder.

For example, a servo valve that controls an operational position of a spool using a moving-magnet-type electromagnetic actuator as a driving source so as to control the flow rate of air supplied to an air cylinder has conventionally been known (for example, Japanese Laid-Open Patent Publication No. 2003-206908).

On the other hand, there has been known a technique in which meter-out control or meter-in control is performed with a speed controller (variable throttle valve) being provided to the air cylinder or a pipe (or tube) connected to the air cylinder. The meter-out control is control in which the flow rate of the air discharged from a pressure chamber of the air cylinder is reduced. The meter-in control is control in which the flow rate of the air supplied to the pressure chamber of the air cylinder is reduced. The meter-out control is performed in a case that operation needs to be stabilized against external disturbance or in a case that thrust force needs to rise quickly after a stroke end has been reached. The meter-in control is performed in a case that “jumping-out phenomenon” in which the cylinder starts to move swiftly needs to be suppressed or in a case that thrust force needs to rise gradually after the stroke end has been reached.

In the air cylinder controlled by the servo valve, if the meter-out control or the meter-in control is performed, it is necessary to provide the speed controller to the air cylinder or the pipe (or tube) additionally.

The present invention has been made in view of the above circumstances, and an object thereof is to provide a servo valve including a unique structure that achieves meter-out control or meter-in control.

According to an aspect of the present invention, there is provided a servo valve configured to control a flow rate of a fluid supplied to and discharged from one pressure chamber and the other pressure chamber of a fluid pressure cylinder, and the servo valve includes a sleeve including a plurality of openings and a spool that is provided inside the sleeve, wherein the spool includes a plurality of lands and a plurality of grooves. In addition, a first flow path area at a position where one opening of the openings and one groove of the grooves overlap with each other is different in size from a second flow path area at a position where another opening of the openings and another groove of the grooves overlap with each other. The one opening and the one groove form a flow path for connecting one of the one pressure chamber and the other pressure chamber to a fluid supply source, due to displacement of the spool. The other opening and the other groove form a flow path for connecting another one of the other pressure chamber and the one pressure chamber to a fluid discharge port, due to the displacement of the spool.

According to the servo valve described above, meter-out control or meter-in control can be achieved by the structure of the servo valve itself without a speed controller attached to the fluid pressure cylinder.

In the servo valve according to the present invention, when the spool is displaced, the first flow path area at the place where a predetermined opening of the sleeve and a predetermined groove of the spool overlap with each other is different in size from the second flow path area at the place where another predetermined opening of the sleeve and another predetermined groove of the spool overlap with each other. Thus, the meter-out control or the meter-in control can be achieved by the structure of the servo valve itself.

The above and other objects, features, and advantages of the present invention will become more apparent from the following description when taken in conjunction with the accompanying drawings, in which preferred embodiments of the present invention are shown by way of illustrative example.

FIG. 1 is an overall view of a system including a servo valve according to the present invention;

FIG. 2 is a cross-sectional view of a servo valve according to a first embodiment of the present invention;

FIG. 3 is a schematic diagram illustrating a relation between a sleeve and a spool of the servo valve in FIG. 2 when the spool is at a neutral position;

FIG. 4 is a diagram corresponding to FIG. 3 when the spool in FIG. 2 has been displaced in an X 1 direction by a predetermined amount;

FIG. 5 is a diagram corresponding to FIG. 3 when the spool in FIG. 2 has been further displaced in the X 1 direction by the predetermined amount than in the case of FIG. 4 ;

FIG. 6 is a diagram corresponding to FIG. 3 when the spool in FIG. 2 has been displaced in an X 2 direction by the predetermined amount;

FIG. 7 is a diagram corresponding to FIG. 3 when the spool in FIG. 2 has been further displaced in the X 2 direction by the predetermined amount than in the case of FIG. 6 ;

FIG. 8 is a diagram showing a relation between a position of the spool of the servo valve in FIG. 2 and the effective area of a flow path in a case where meter-out control is performed;

FIG. 9 is a diagram showing the relation between the position of the spool of the servo valve in FIG. 2 and the effective area of the flow path in a case where meter-in control is performed;

FIG. 10 is a schematic diagram illustrating a relation between a sleeve and a spool of a servo valve according to a second embodiment of the present invention when the spool is at the neutral position;

FIG. 11 is a schematic diagram illustrating a relation between a sleeve and a spool of a servo valve according to a third embodiment of the present invention when the spool is at the neutral position;

FIG. 12 is a diagram illustrating a state of openings formed in the sleeve when the spool in FIG. 11 has been displaced in the X 1 direction;

FIG. 13 is a diagram illustrating the state of the openings formed in the sleeve when the spool in FIG. 11 has been displaced in the X 2 direction;

FIG. 14 is a schematic diagram illustrating a relation between a sleeve and a spool of a servo valve according to a fourth embodiment of the present invention when the spool is at the neutral position;

FIG. 15 is a diagram illustrating a state of openings formed in the sleeve when the spool in FIG. 14 has been displaced in the X 1 direction;

FIG. 16 is a diagram illustrating the state of the openings formed in the sleeve when the spool in FIG. 14 has been displaced in the X 2 direction;

FIG. 17 is a schematic diagram illustrating a relation between a sleeve and a spool of a servo valve according to a fifth embodiment of the present invention when the spool is at the neutral position;

FIG. 18 is a diagram illustrating a state of openings formed in the sleeve when the spool in FIG. 17 has been displaced in the X 1 direction; and

FIG. 19 is a diagram illustrating the state of the openings formed in the sleeve when the spool in FIG. 17 has been displaced in the X 2 direction.

Preferred embodiments of a servo valve according to the present invention are hereinafter described with reference to the attached drawings.

First Embodiment

A servo valve 10 according to a first embodiment of the present invention is described with reference to FIG. 1 to FIG. 9 .

FIG. 1 is a schematic diagram illustrating an entire system that controls a fluid pressure cylinder 36 by the servo valve 10 . The servo valve 10 is a valve that controls the flow rate of a fluid supplied to or discharged from one pressure chamber 36 a and the other pressure chamber 36 b of the fluid pressure cylinder 36 . The operation of the servo valve 10 is controlled by a valve controller 68 . Here, the term “fluid” means a compressible fluid including air. For the convenience of description, in FIG. 1 , the servo valve 10 is expressed using general circuit symbols.

As illustrated in FIG. 2 , the servo valve 10 includes a flow path switching mechanism unit 12 and an actuator unit 14 . The flow path switching mechanism unit 12 includes a tubular-shaped valve body 16 and a spool 28 that is disposed in the valve body 16 . The actuator unit 14 includes a stator part 38 that is disposed on an end of the valve body 16 , and a magnet part 52 that is connected to an end of the spool 28 through a connection shaft 54 . In the description below, a direction that is parallel to an axis direction of the spool 28 , that is, a direction in which the spool 28 moves is referred to as an X direction. Moreover, a direction in which the spool 28 is separated from the actuator unit 14 along the X direction is referred to as an X 1 direction, and a direction in which the spool 28 comes close to the actuator unit 14 along the X direction is referred to as an X 2 direction.

The valve body 16 includes a hole that penetrates the valve body 16 in a longitudinal direction thereof. This hole is made up of a first large-diameter hole 18 a that is formed at an end of the valve body 16 in the X 1 direction, a second large-diameter hole 18 b that is formed at an end of the valve body 16 in the X 2 direction, and a small-diameter hole 18 c that is formed between the first large-diameter hole 18 a and the second large-diameter hole 18 b.

The valve body 16 is provided with a first port 20 a to a fifth port 20 e that communicate with the small-diameter hole 18 c and are open at an outer peripheral surface of the valve body 16 . The first to fifth ports 20 a to 20 e are arranged in the X direction. The first port 20 a and the fifth port 20 e are connected to a fluid supply source (not shown), and the third port 20 c is connected to a fluid discharge port (not shown). In addition, the second port 20 b and the fourth port 20 d are connected to the one pressure chamber 36 a and the other pressure chamber 36 b of the fluid pressure cylinder 36 , respectively (see FIG. 1 ).

A sleeve 22 with a cylindrical shape is inserted into the small-diameter hole 18 c of the valve body 16 . The sleeve 22 is positioned and fixed in the valve body 16 in the axis direction using a tubular-shaped sleeve stopper 25 that is fixed to the first large-diameter hole 18 a of the valve body 16 and a snap ring 26 that is fixed to an end of the second large-diameter hole 18 b of the valve body 16 in the X 1 direction.

As illustrated in FIG. 3 , the sleeve 22 includes a first opening 24 a , a second opening 24 b , a third opening 24 c , a fourth opening 24 d , and a fifth opening 24 e . Each of the first opening 24 a to the fifth opening 24 e includes a pair of openings that penetrates a wall surface of the sleeve 22 on both sides in a diameter direction. The first opening 24 a to the fifth opening 24 e communicate with the first port 20 a to the fifth port 20 e of the valve body 16 , respectively. The shape of the first opening 24 a to the fifth opening 24 e when viewed in a radial direction is the same rectangular shape, and the width thereof (length that is orthogonal to the X direction) is constant in the X direction. In the present embodiment, the shape of the first opening 24 a to the fifth opening 24 e is the rectangular shape; however, the shape thereof may be a circular shape including an oval or elliptical shape.

The cylindrical spool 28 is inserted into the sleeve 22 so as to be movable in the X direction. The spool 28 is provided with a first land 30 a , a second land 30 b , a third land 30 c , and a fourth land 30 d that are in close contact with an inner peripheral surface of the sleeve 22 . The first land 30 a to the fourth land 30 d are arranged in the X direction. A first groove 32 a is formed between the first land 30 a and the second land 30 b so as to surround an outer peripheral surface of the spool. Similarly, between the second land 30 b and the third land 30 c , a second groove 32 b is formed so as to surround the outer peripheral surface, and between the third land 30 c and the fourth land 30 d , a third groove 32 c is formed so as to surround the outer peripheral surface.

As illustrated in FIG. 3 , when the actuator unit 14 is not energized and the spool 28 is at a neutral position, the second opening 24 b of the sleeve 22 is closed by the second land 30 b of the spool 28 , and the fourth opening 24 d of the sleeve 22 is closed by the third land 30 c of the spool 28 . Thus, the second opening 24 b connected to the one pressure chamber 36 a of the fluid pressure cylinder 36 is blocked from the first opening 24 a connected to the fluid supply source and is also blocked from the third opening 24 c connected to the fluid discharge port. In addition, the fourth opening 24 d connected to the other pressure chamber 36 b of the fluid pressure cylinder 36 is blocked from the fifth opening 24 e connected to the fluid supply source and is also blocked from the third opening 24 c connected to the fluid discharge port.

When the spool 28 is at the neutral position, an X-direction length (lap length) a 1 is less than an X-direction length (lap length) b 1 . The X-direction length a 1 is a length, in the X direction, of a portion where the second land 30 b is in contact with an inner wall surface of the sleeve 22 between the first opening 24 a and the second opening 24 b . The X-direction length b 1 is a length, in the X direction, of a portion where the third land 30 c is in contact with an inner wall surface of the sleeve 22 between the third opening 24 c and the fourth opening 24 d . In addition, when the spool 28 is at the neutral position, an X-direction length (lap length) a 2 is less than an X-direction length (lap length) b 2 . The X-direction length a 2 is a length, in the X direction, of a portion where the third land 30 c is in contact with an inner wall surface of the sleeve 22 between the fourth opening 24 d and the fifth opening 24 e . The X-direction length b 2 is a length, in the X direction, of a portion where the second land 30 b is in contact with an inner wall surface of the sleeve 22 between the second opening 24 b and the third opening 24 c . In the present embodiment, the length a 2 is equal to the length a 1 , and the length b 2 is equal to the length b 1 .

The stator part 38 is housed in a stator housing 40 that is fixed to the end of the valve body 16 in the X 2 direction. The stator part 38 includes a fixed yoke 42 that is made from a ferromagnetic body and an exciting coil 50 that is disposed inside the fixed yoke 42 . The fixed yoke 42 includes a thick-walled-tubular-shaped first end yoke 44 that is disposed on the side of the X 1 direction, a thick-walled-tubular-shaped second end yoke 46 that is disposed on the side of the X 2 direction, and a thin-walled-tubular-shaped outer yoke 48 that is disposed between the first end yoke 44 and the second end yoke 46 so as to be flush with outer peripheral surfaces of the first end yoke 44 and the second end yoke 46 .

The first end yoke 44 has, on an inner peripheral side thereof, a first pole tooth 44 a that is formed protruding so as to extend toward the second end yoke 46 . The second end yoke 46 has, on an inner peripheral side thereof, a second pole tooth 46 a that is formed protruding so as to extend toward the first end yoke 44 . When electric current is applied to the exciting coil 50 in a predetermined direction, the first pole tooth 44 a becomes the north pole (N-pole) and the second pole tooth 46 a becomes the south pole (S-pole). When electric current is applied to the exciting coil 50 in the opposite direction, the first pole tooth 44 a becomes S-pole and the second pole tooth 46 a becomes N-pole.

A magnet part 52 includes a first magnet 52 a , a second magnet 52 b , and a tubular inner yoke 52 c made of a ferromagnetic body. The first magnet 52 a and the second magnet 52 b are permanent magnets with a tubular shape. The inner yoke 52 c is disposed between the first magnet 52 a and the second magnet 52 b . An outer peripheral surface of the first magnet 52 a faces an inner peripheral surface of the first pole tooth 44 a of the first end yoke 44 , and an outer peripheral surface of the second magnet 52 b faces an inner peripheral surface of the second pole tooth 46 a of the second end yoke 46 . The first magnet 52 a is magnetized so that the X 1 direction side thereof becomes N-pole and the X 2 direction side becomes S-pole. The second magnet 52 b is magnetized so that the X 1 direction side becomes S-pole and the X 2 direction side becomes N-pole.

One end of the connection shaft 54 is fixed to the spool 28 , and the magnet part 52 is fixed to the other end of the connection shaft 54 . Specifically, a small-diameter shaft portion 54 a is formed at the other end of the connection shaft 54 through a step portion. This small-diameter shaft portion 54 a is inserted into the magnet part 52 and is further inserted into a magnet stopper 55 , and then an end of the small-diameter shaft portion 54 a is screw-engaged with a nut 56 , whereby the magnet part is fixed. Thus, the spool 28 can be displaced in the X direction together with the magnet part 52 .

In the second large-diameter hole 18 b of the valve body 16 on the outer peripheral side of the connection shaft 54 , a first coil spring 58 and a second coil spring 60 are disposed. The first coil spring 58 is placed between a common spring receiver 62 and a first spring receiver 64 . The common spring receiver 62 is in contact with the end of the spool 28 in the X 2 direction and can move with the spool 28 . The first spring receiver 64 is in contact with an end of the first end yoke 44 in the X 1 direction. The second coil spring 60 is disposed inside the first coil spring 58 and placed between the common spring receiver 62 and a second spring receiver 66 . The second spring receiver 66 is fixed on the outer periphery of the connection shaft 54 .

When the spool 28 is displaced in the X 2 direction from the neutral position, the first coil spring 58 is compressed in the X direction and applies biasing force in the X 1 direction to the spool 28 . When the spool 28 is displaced in the X 1 direction from the neutral position, the second coil spring 60 is compressed in the X direction and applies biasing force in the X 2 direction to the spool 28 . That is to say, when energization to the exciting coil 50 is stopped, the first coil spring 58 and the second coil spring 60 return the spool 28 to the neutral position, and when the exciting coil 50 is not energized, the first coil spring 58 and the second coil spring 60 keep the spool 28 at the neutral position stably.

The stator housing 40 is provided with a magnetic sensor 53 capable of detecting magnetic flux that changes in accordance with the displacement of the magnet part 52 in the X direction. This magnetic sensor 53 can detect the position of the spool 28 that is displaced together with the magnet part 52 .

The servo valve 10 according to the present embodiment is basically structured as described above, and the operation thereof is hereinafter described. Note that in an initial state, the spool 28 is at a neutral position as illustrated in FIG. 3 .

In the initial state, the second opening 24 b of the sleeve 22 is closed by the second land 30 b of the spool 28 , and the fourth opening 24 d of the sleeve 22 is closed by the third land 30 c of the spool 28 . Thus, the fluid is not supplied to or discharged from the one pressure chamber 36 a and the other pressure chamber 36 b of the fluid pressure cylinder 36 .

In the initial state, when the exciting coil 50 is energized so that the current flows into the exciting coil 50 in the predetermined direction, the first pole tooth 44 a of the first end yoke 44 becomes N-pole and the second pole tooth 46 a of the second end yoke 46 becomes S-pole. Then, the spool 28 that is integral with the magnet part 52 is displaced in the X 1 direction due to an interaction between the magnetic flux that occurs in the first end yoke 44 and the magnetic flux of the first magnet 52 a and an interaction between the magnetic flux that occurs in the second end yoke 46 and the magnetic flux of the second magnet 52 b.

As the spool 28 is displaced in the X 1 direction, the following occurs. First, when the displaced amount of the spool 28 reaches a 2 , the closed state of the fourth opening 24 d of the sleeve 22 by the third land 30 c of the spool 28 is canceled and the fourth opening 24 d of the sleeve 22 starts to overlap with the third groove 32 c of the spool 28 . Next, when the displaced amount of the spool 28 reaches b 2 , the closed state of the second opening 24 b of the sleeve 22 by the second land 30 b of the spool 28 is canceled and the second opening 24 b of the sleeve 22 starts to overlap with the second groove 32 b of the spool 28 .

When the fourth opening 24 d of the sleeve 22 overlaps with the third groove 32 c of the spool 28 , the fourth port 20 d connected to the other pressure chamber 36 b of the fluid pressure cylinder 36 communicates with the fifth port 20 e connected to the fluid supply source. In addition, when the second opening 24 b of the sleeve 22 overlaps with the second groove 32 b of the spool 28 , the second port 20 b connected to the one pressure chamber 36 a of the fluid pressure cylinder 36 communicates with the third port 20 c connected to the fluid discharge port.

As illustrated in FIG. 4 , when the spool 28 has been displaced in the X 1 direction by a predetermined amount, the fourth opening 24 d overlaps with the third groove 32 c by a length L 1 in the X direction, and the second opening 24 b overlaps with the second groove 32 b by a length L 2 in the X direction.

At the neutral position, the lap length a 2 is less than the lap length b 2 , wherein the lap length a 2 is a length, in the X direction, of a portion where the third land 30 c is in contact with an inner wall surface of the sleeve 22 between the fourth opening 24 d and the fifth opening 24 e , and the lap length b 2 is a length, in the X direction, of a portion where the second land 30 b is in contact with an inner wall surface of the sleeve 22 between the second opening 24 b and the third opening 24 c . Thus, the length L 2 is less than the length L 1 by (b 2 −a 2 ). Therefore, the effective area of a flow path from the one pressure chamber 36 a to the fluid discharge port is smaller than the effective area of a flow path from the fluid supply source to the other pressure chamber 36 b . As a result, when the fluid is supplied to the other pressure chamber 36 b and the fluid is discharged from the one pressure chamber 36 a , meter-out control that reduces the flow rate of the discharged fluid is performed. Note that the term “effective area of flow path” is a cross-section area at the smallest portion in the flow path.

As illustrated in FIG. 5 , when the spool 28 has been further displaced in the X 1 direction by the predetermined amount, the fourth opening 24 d overlaps with the third groove 32 c in the X direction by a length L 3 that is greater than the length L 1 , and the second opening 24 b overlaps with the second groove 32 b in the X direction by a length L 4 that is greater than the length L 2 . Since the length L 4 is less than the length L 3 , the meter-out control is performed.

Since the length L 3 is greater than the length L 1 , the flow rate of the fluid supplied to the other pressure chamber 36 b is large compared with the case in FIG. 4 . Moreover, since the length L 4 is greater than the length L 2 , the flow rate of the fluid discharged from the one pressure chamber 36 a is also large compared with the case in FIG. 4 . Thus, the operation speed of the fluid pressure cylinder 36 is high.

Next, after the energization to the exciting coil 50 is stopped so that the spool 28 is returned to the neutral position, when the exciting coil 50 is energized again so that the current flows into the exciting coil 50 in an opposite direction of the predetermined direction, the first pole tooth 44 a of the first end yoke 44 becomes S-pole and the second pole tooth 46 a of the second end yoke 46 becomes N-pole. Then, the spool 28 that is integral with the magnet part 52 is displaced in the X 2 direction due to the interaction between the magnetic flux that occurs in the first end yoke 44 and the magnetic flux of the first magnet 52 a and the interaction between the magnetic flux that occurs in the second end yoke 46 and the magnetic flux of the second magnet 52 b.

As the spool 28 is displaced in the X 2 direction, the following occurs. First, when the displaced amount of the spool 28 reaches a 1 , the closed state of the second opening 24 b of the sleeve 22 by the second land 30 b of the spool 28 is canceled and the second opening 24 b of the sleeve 22 starts to overlap with the first groove 32 a of the spool 28 . Next, when the displaced amount of the spool 28 reaches b 1 , the closed state of the fourth opening 24 d of the sleeve 22 by the third land 30 c of the spool 28 is canceled and the fourth opening 24 d of the sleeve 22 starts to overlap with the second groove 32 b of the spool 28 .

When the second opening 24 b of the sleeve 22 overlaps with the first groove 32 a of the spool 28 , the second port 20 b connected to the one pressure chamber 36 a of the fluid pressure cylinder 36 communicates with the first port 20 a connected to the fluid supply source. In addition, when the fourth opening 24 d of the sleeve 22 overlaps with the second groove 32 b of the spool 28 , the fourth port 20 d connected to the other pressure chamber 36 b of the fluid pressure cylinder 36 communicates with the third port 20 c connected to the fluid discharge port.

As illustrated in FIG. 6 , when the spool 28 has been displaced in the X 2 direction by the predetermined amount, the second opening 24 b overlaps with the first groove 32 a by a length L 5 in the X direction and the fourth opening 24 d overlaps with the second groove 32 b by a length L 6 in the X direction.

At the neutral position, the lap length a 1 is less than the lap length b 1 . The lap length a 1 is a length, in the X direction, of a portion where the second land 30 b is in contact with an inner wall surface of the sleeve 22 between the first opening 24 a and the second opening 24 b . The lap length b 1 is a length, in the X direction, of a portion where the third land 30 c is in contact with an inner wall surface of the sleeve 22 between the third opening 24 c and the fourth opening 24 d . Thus, the length L 6 is less than the length L 5 by (b 1 −a 1 ). Therefore, the effective area of the flow path from the other pressure chamber 36 b to the fluid discharge port is smaller than the effective area of the flow path from the fluid supply source to the one pressure chamber 36 a . As a result, when the fluid is supplied to the one pressure chamber 36 a and the fluid is discharged from the other pressure chamber 36 b , the meter-out control that reduces the flow rate of the discharged fluid is performed.

As illustrated in FIG. 7 , when the spool 28 has been further displaced in the X 2 direction by the predetermined amount, the second opening 24 b overlaps with the first groove 32 a in the X direction by a length L 7 that is greater than the length L 5 and the fourth opening 24 d overlaps with the second groove 32 b in the X direction by a length L 8 that is greater than the length L 6 . Since the length L 8 is less than the length L 7 , the meter-out control is performed.

Since the length L 7 is greater than the length L 5 , the flow rate of the fluid supplied to the one pressure chamber 36 a is large compared with the case in FIG. 6 . Moreover, since the length L 8 is greater than the length L 6 , the flow rate of the fluid discharged from the other pressure chamber 36 b is also large compared with the case in FIG. 6 . Thus, the operation speed of the fluid pressure cylinder 36 is high.

FIG. 8 shows a relation between the position of the spool 28 and the effective area of the flow path including the second port 20 b and a relation between the position of the spool 28 and the effective area of the flow path including the fourth port 20 d in the case where the above meter-out control is performed. A horizontal axis represents the position of the spool 28 , and the origin is the point when the spool 28 is at the neutral position. The displaced amount of the spool 28 in the X 1 direction is expressed by a negative value, and the displaced amount of the spool 28 in the X 2 direction is expressed by a positive value. A vertical axis shows the effective area of the flow path. The effective area of the flow path when the fluid is supplied to the one pressure chamber 36 a or the other pressure chamber 36 b is expressed by a positive value, and the effective area of the flow path when the fluid is discharged from the other pressure chamber 36 b or the one pressure chamber 36 a is expressed by a negative value.

The relation between the position of the spool 28 and the effective area of the flow path including the second port 20 b is shown by a solid line, and the relation between the position of the spool 28 and the effective area of the flow path including the fourth port 20 d is shown by a dashed line. As can be understood from FIG. 8 , when the spool 28 has been displaced from the neutral position in the X 1 direction by the predetermined amount or more, the effective area of the flow path where the fluid in the other pressure chamber 36 b is discharged through the fourth port 20 d is smaller than the effective area of the flow path where the fluid is supplied to the one pressure chamber 36 a through the second port 20 b . Moreover, when the spool 28 has been displaced from the neutral position in the X 2 direction by the predetermined amount or more, the effective area of the flow path where the fluid in the one pressure chamber 36 a is discharged through the second port 20 b is smaller than the effective area of the flow path where the fluid is supplied to the other pressure chamber 36 b through the fourth port 20 d.

Here, the maximum displaced amount of the spool 28 in the X 1 direction is set within a range in which a flow path area where the fourth opening 24 d overlaps with the third groove 32 c does not exceed the flow path area where the fifth opening 24 e overlaps with the third groove 32 c , for example. Similarly, the maximum displaced amount of the spool 28 in the X 2 direction is set within a range in which the flow path area where the second opening 24 b overlaps with the first groove 32 a does not exceed the flow path area where the first opening 24 a overlaps with the first groove 32 a , for example.

In the present embodiment, when the spool 28 is at the neutral position, a magnitude relation is set so that the lap length a 1 is less than the lap length b 1 and the lap length a 2 is less than the lap length b 2 . On the other hand, when meter-in control is to be performed, it is only necessary to set this magnitude relation in reverse. That is to say, when the spool 28 is at the neutral position, if the magnitude relation is set so that the lap length a 1 is greater than the lap length b 1 and the lap length a 2 is greater than the lap length b 2 , the meter-in control can be performed.

Moreover, in the present embodiment, the fluid supply source is connected to the first port 20 a and the fifth port 20 e and the fluid discharge port is connected to the third port 20 c . However, if the fluid supply source is connected to the third port 20 c and the fluid discharge port is connected to the first port 20 a and the fifth port 20 e , the meter-in control can be performed.

FIG. 9 shows the relation between the position of the spool 28 and the effective area of the flow path including the second port 20 b and the relation between the position of the spool 28 and the effective area of the flow path including the fourth port 20 d in the case where the meter-in control is performed. The former is shown by a solid line, and the latter is shown by a dashed line.

As can be understood from FIG. 9 , when the spool 28 has been displaced from the neutral position in the X 1 direction by the predetermined amount or more, the effective area of the flow path where the fluid is supplied to the other pressure chamber 36 b through the fourth port 20 d is smaller than the effective area of the flow path where the fluid in the one pressure chamber 36 a is discharged through the second port 20 b . Moreover, when the spool 28 has been displaced from the neutral position in the X 2 direction by the predetermined amount or more, the effective area of the flow path where the fluid is supplied to the one pressure chamber 36 a through the second port 20 b is smaller than the effective area of the flow path where the fluid in the other pressure chamber 36 b is discharged through the fourth port 20 d.

The position of the spool 28 is controlled by the valve controller 68 . To the valve controller 68 , a command signal regarding a target position of the spool 28 is input from an upper-level controller (PLC or the like) that is not shown, and a detection signal regarding the current position of the spool 28 is also input from the magnetic sensor 53 . On the basis of these signals, the valve controller 68 outputs a required electric power supply signal to the exciting coil 50 so as to displace the spool 28 to the target position.

The target position of the spool 28 can be set to any position (steplessly), and can be set to a plurality of predetermined positions other than the neutral position. Examples of the predetermined positions include two predetermined positions respectively in the X 1 direction and the X 2 direction, and four positions including two predetermined positions in the X 1 direction and two predetermined positions in the X 2 direction. If the target positions include a plurality of positions in the X 1 direction and a plurality of positions in the X 2 direction, the operation speed of the fluid pressure cylinder 36 in both ways of the reciprocal motion can be adjusted step by step. These target positions can be set in the valve controller 68 in advance. If the number of settings of the target position is small, the command signal from the upper-level controller can be simplified, for example, combination of binary signals (ON/OFF signals).

In the servo valve 10 according to the present embodiment, each lap length between the land and the inner wall surface of the sleeve 22 that lies between the two adjacent openings when the spool 28 is at the neutral position is set ingeniously. Thus, the meter-out control or the meter-in control can be performed by the servo valve 10 alone.

Second Embodiment

Next, a servo valve according to a second embodiment of the present invention is described with reference to FIG. 10 . In the second embodiment, the shape of the spool is different from that in the first embodiment. Note that the constituent elements other than the sleeve and the spool are described using the constituent elements of the servo valve 10 according to the first embodiment and the reference symbols thereof as appropriate.

A cylindrical spool 74 is provided with a first land 76 a , a second land 76 b , and a third land 76 c that are in close contact with the inside of a sleeve 70 . The first to third lands 76 a to 76 c are arranged in the X direction. Between the first land 76 a and the second land 76 b , a first groove 78 a is formed so as to surround the outer peripheral surface. Similarly, between the second land 76 b and the third land 76 c , a second groove 78 b is formed so as to surround the outer peripheral surface.

A first opening 72 a , a second opening 72 b , a third opening 72 c , a fourth opening 72 d , and a fifth opening 72 e of the sleeve 70 communicate with the first port 20 a to the fifth port 20 e of the valve body 16 , respectively. The shape of the first opening 72 a to the fifth opening 72 e when viewed in the radial direction is the same rectangular shape, and the width thereof is constant in the X direction.

As illustrated in FIG. 10 , when the actuator unit 14 is not energized and the spool 74 is at the neutral position, the first opening 72 a of the sleeve 70 is closed by the first land 76 a of the spool 74 . Similarly, the third opening 72 c of the sleeve 70 is closed by the second land 76 b of the spool 74 , and the fifth opening 72 e of the sleeve 70 is closed by the third land 76 c of the spool 74 . Thus, the second opening 72 b connected to the one pressure chamber 36 a of the fluid pressure cylinder 36 is blocked from the first opening 72 a connected to the fluid supply source and is also blocked from the third opening 72 c connected to the fluid discharge port. In addition, the fourth opening 72 d connected to the other pressure chamber 36 b of the fluid pressure cylinder 36 is blocked from the fifth opening 72 e connected to the fluid supply source and is also blocked from the third opening 72 c connected to the fluid discharge port.

When the spool 74 is at the neutral position, a lap length d 1 is less than a lap length c 1 . The lap length d 1 is a length, in the X direction, of a portion where the second land 76 b is in contact with an inner wall surface of the sleeve 70 that lies between the third opening 72 c and the fourth opening 72 d . The lap length c 1 is a length, in the X direction, of a portion where the first land 76 a is in contact with an inner wall surface of the sleeve 70 that lies between the first opening 72 a and the second opening 72 b . In addition, when the spool 74 is at the neutral position, a lap length d 2 is less than a lap length c 2 . The lap length d 2 is a length, in the X direction, of a portion where the second land 76 b is in contact with an inner wall surface of the sleeve 70 that lies between the second opening 72 b and the third opening 72 c . The lap length c 2 is a length, in the X direction, of a portion where the third land 76 c is in contact with an inner wall surface of the sleeve 70 that lies between the fourth opening 72 d and the fifth opening 72 e . In the present embodiment, the lap length c 2 is equal to the lap length c 1 , and the lap length d 2 is equal to the lap length d 1 .

As the spool 74 is displaced in the X 1 direction from the neutral position, the following occurs. First, when the displaced amount of the spool 74 reaches d 1 , the closed state of the third opening 72 c of the sleeve 70 by the second land 76 b of the spool 74 is canceled, and the third opening 72 c of the sleeve 70 starts to overlap with the second groove 78 b of the spool 74 . Next, when the displaced amount of the spool 74 reaches c 1 , the closed state of the first opening 72 a of the sleeve 70 by the first land 76 a of the spool 74 is canceled, and the first opening 72 a of the sleeve 70 starts to overlap with the first groove 78 a of the spool 74 .

When the third opening 72 c of the sleeve 70 overlaps with the second groove 78 b of the spool 74 , the fourth port 20 d connected to the other pressure chamber 36 b of the fluid pressure cylinder 36 communicates with the third port 20 c connected to the fluid discharge port. In addition, when the first opening 72 a of the sleeve 70 overlaps with the first groove 78 a of the spool 74 , the second port 20 b connected to the one pressure chamber 36 a of the fluid pressure cylinder 36 communicates with the first port 20 a connected to the fluid supply source.

In this case, the length, in the X direction, of an overlapped portion where the first opening 72 a overlaps with the first groove 78 a is less than the length, in the X direction, of an overlapped portion where the third opening 72 c overlaps with the second groove 78 b (not shown). Therefore, the effective area of the flow path from the fluid supply source to the one pressure chamber 36 a is smaller than the effective area of the flow path from the other pressure chamber 36 b to the fluid discharge port. Thus, when the fluid is supplied to the one pressure chamber 36 a and the fluid is discharged from the other pressure chamber 36 b , the meter-in control that reduces the flow rate of the fluid to be supplied is performed.

As the spool 74 is displaced in the X 2 direction from the neutral position, the following occurs. First, when the displaced amount of the spool 74 reaches d 2 , the closed state of the third opening 72 c of the sleeve 70 by the second land 76 b of the spool 74 is canceled and the third opening 72 c of the sleeve 70 starts to overlap with the first groove 78 a of the spool 74 . Next, when the displaced amount of the spool 74 reaches c 2 , the closed state of the fifth opening 72 e of the sleeve 70 by the third land 76 c of the spool 74 is canceled and the fifth opening 72 e of the sleeve 70 starts to overlap with the second groove 78 b of the spool 74 .

When the third opening 72 c of the sleeve 70 overlaps with the first groove 78 a of the spool 74 , the second port 20 b connected to the one pressure chamber 36 a of the fluid pressure cylinder 36 communicates with the third port 20 c connected to the fluid discharge port. In addition, when the fifth opening 72 e of the sleeve 70 overlaps with the second groove 78 b of the spool 74 , the fourth port 20 d connected to the other pressure chamber 36 b of the fluid pressure cylinder 36 communicates with the fifth port 20 e connected to the fluid supply source.

In this case, the length, in the X direction, of an overlapped portion where the fifth opening 72 e overlaps with the second groove 78 b is less than the length, in the X direction, of an overlapped portion where the third opening 72 c overlaps with the first groove 78 a (not shown). Therefore, the effective area of the flow path from the fluid supply source to the other pressure chamber 36 b is smaller than the effective area of the flow path from the one pressure chamber 36 a to the fluid discharge port. Thus, when the fluid is supplied to the other pressure chamber 36 b and the fluid is discharged from the one pressure chamber 36 a , the meter-in control that reduces the flow rate of the fluid to be supplied is performed.

In the present embodiment, when the spool 74 is at the neutral position, the magnitude relationship is set such that the lap length d 1 is less than the lap length c 1 and the lap length d 2 is less than the lap length c 2 . On the other hand, when the meter-out control is to be performed, it is only necessary to set this magnitude relationship in reverse. Moreover, in the present embodiment, the fluid supply source is connected to the first port 20 a and the fifth port 20 e and the fluid discharge port is connected to the third port 20 c . However, if the fluid supply source is connected to the third port 20 c and the fluid discharge port is connected to the first port 20 a and the fifth port 20 e , the meter-out control can be performed.

In the servo valve according to the present embodiment, the lap length of a portion where the land is in contact with an inner wall surface of the sleeve 70 that lies between the two adjacent openings when the spool 74 is at the neutral position is set ingeniously. Thus, the meter-out control or the meter-in control can be performed by the servo valve alone.

Third Embodiment

Next, a servo valve according to a third embodiment of the present invention is described with reference to FIG. 11 to FIG. 13 . In the third embodiment, the relation of the lap lengths at the neutral position and the shapes of the openings of the sleeve are different from those in the first embodiment. Note that the constituent elements other than the sleeve and the spool are described using the constituent elements of the servo valve 10 according to the first embodiment and the reference symbols thereof as appropriate.

As illustrated in FIG. 11 , when a spool 84 is at the neutral position, a second opening 82 b of a sleeve 80 is closed by a second land 86 b of the spool 84 , and a fourth opening 82 d of the sleeve 80 is closed by a third land 86 c of the spool 84 .

When the spool 84 is at the neutral position, the lap length of a portion where the second land 86 b is in contact with an inner wall surface of the sleeve 80 that lies between a first opening 82 a and the second opening 82 b is equal to the lap length of a portion where the third land 86 c is in contact with an inner wall surface of the sleeve 80 that lies between the third opening 82 c and the fourth opening 82 d . In addition, when the spool 84 is at the neutral position, the lap length of a portion where the third land 86 c is in contact with an inner wall surface of the sleeve 80 that lies between the fourth opening 82 d and a fifth opening 82 e is equal to the lap length of a portion where the second land 86 b is in contact with an inner wall surface of the sleeve 80 that lies between the second opening 82 b and the third opening 82 c.

The shape of the second opening 82 b when viewed in the radial direction is a triangular shape having a base positioned on the side of an end in the X 1 direction and a vertex opposed to the base being positioned on the side of an end in the X 2 direction. The shape of the fourth opening 82 d when viewed in the radial direction is a triangular shape having a base positioned on the side of the end in the X 2 direction and a vertex opposed to the base being positioned on the side of the end in the X 1 direction. The shape of the fourth opening 82 d is obtained by inversing the shape of the second opening 82 b in the X direction.

On the other hand, the shape of the first opening 82 a , the third opening 82 c , and the fifth opening 82 e when viewed in the radial direction is the same rectangular shape, and the width thereof is constant in the X direction and is substantially the same as the length of the base of the above triangle corresponding to the maximum width of the second opening 82 b and the fourth opening 82 d . In the present embodiment, the second opening 82 b and the fourth opening 82 d have a triangular shape. However, it is only necessary that the shape of each of the second opening 82 b and the fourth opening 82 d is asymmetric in the X 1 direction and the X 2 direction and the shape of the second opening 82 b is obtained by inversing the shape of the fourth opening 82 d in the X direction. Moreover, it is preferable that the shape with the width gradually increasing in the X 1 direction and the shape with the width gradually increasing in the X 2 direction are paired.

The operation of the servo valve according to the third embodiment is hereinafter described on the premise that the first opening 82 a is connected to the fluid supply source, the second opening 82 b is connected to the one pressure chamber 36 a of the fluid pressure cylinder 36 , the third opening 82 c is connected to the fluid discharge port, the fourth opening 82 d is connected to the other pressure chamber 36 b of the fluid pressure cylinder 36 , and the fifth opening 82 e is connected to the fluid supply source.

As illustrated in FIG. 12 , when the spool 84 has been displaced in the X 1 direction by the predetermined amount or more, an X-direction length e 1 is equal to an X-direction length e 2 . The X-direction length e 1 is a length, in the X direction, of a portion where the second opening 82 b of the sleeve 80 overlaps with a second groove 88 b of the spool 84 . The X-direction length e 2 is a length, in the X direction, of a portion where the fourth opening 82 d of the sleeve 80 overlaps with a third groove 88 c of the spool 84 . However, an area S 1 of a portion where the second opening 82 b overlaps with the second groove 88 b on the vertex side of the triangle is smaller than an area S 2 of a portion where the fourth opening 82 d overlaps with the third groove 88 c on the base side of the triangle. Therefore, the effective area of the flow path from the one pressure chamber 36 a to the fluid discharge port is smaller than the effective area of the flow path from the fluid supply source to the other pressure chamber 36 b , so that the meter-out control is performed.

As illustrated in FIG. 13 , when the spool 84 has been displaced in the X 2 direction by the predetermined amount or more, an X-direction length e 3 is equal to an X-direction length e 4 . The X-direction length e 3 is a length, in the X direction, of a portion where the fourth opening 82 d of the sleeve 80 overlaps with the second groove 88 b of the spool 84 . The X-direction length e 4 is a length, in the X direction, of a portion where the second opening 82 b of the sleeve 80 overlaps with a first groove 88 a of the spool 84 . However, an area S 3 of a portion where the fourth opening 82 d overlaps with the second groove 88 b on the vertex side of the triangle is smaller than an area S 4 of a portion where the second opening 82 b overlaps with the first groove 88 a on the base side of the triangle. Therefore, the effective area of the flow path from the other pressure chamber 36 b to the fluid discharge port is smaller than the effective area of the flow path from the fluid supply source to the one pressure chamber 36 a , so that the meter-out control is performed. Note that in FIG. 12 and FIG. 13 , hatched areas of the second opening 82 b and the fourth opening 82 d indicate a state where these areas are closed by the spool 84 .

Here, the maximum displaced amount of the spool 84 in the X 1 direction is set within a range in which the entire second opening 82 b overlaps with the second groove 88 b and the entire fourth opening 82 d does not overlap with the third groove 88 c . This is because the effective area of the flow path from the one pressure chamber 36 a to the fluid discharge port is equal to the effective area of the flow path from the fluid supply source to the other pressure chamber 36 b in the case that the entire fourth opening also overlaps with the third groove. Similarly, the maximum displaced amount of the spool 84 in the X 2 direction is set within a range in which the entire second opening 82 b overlaps with the first groove 88 a and the entire fourth opening 82 d does not overlap with the second groove 88 b.

In the present embodiment, the second opening 82 b has a triangular shape having the base positioned on the side of the end in the X 1 direction and the fourth opening 82 d has a triangular shape having the base positioned on the side of the end in the X 2 direction. However, if the second opening 82 b has a triangular shape having the base positioned on the side of the end in the X 2 direction and the fourth opening 82 d has a triangular shape having the base positioned on the side of the end in the X 1 direction, the meter-in control can be performed.

In addition, in the present embodiment, the fluid supply source is connected to the first port 20 a and the fifth port 20 e and the fluid discharge port is connected to the third port 20 c . However, if the fluid supply source is connected to the third port 20 c and the fluid discharge port is connected to the first port 20 a and the fifth port 20 e , the meter-in control can be performed.

In the servo valve according to the present embodiment, the shapes of the openings of the sleeve 80 are formed ingeniously. Thus, the meter-out control or the meter-in control can be performed by the servo valve alone.

Fourth Embodiment

Next, a servo valve according to a fourth embodiment of the present invention is described with reference to FIG. 14 to FIG. 16 . In the fourth embodiment, the relationship of the lap lengths at the neutral position and the shapes of the openings of the sleeve are different from those in the second embodiment. Note that the constituent elements other than the sleeve and the spool are described using the constituent elements of the servo valve 10 according to the first embodiment and the reference symbols thereof as appropriate.

As illustrated in FIG. 14 , when a spool 94 is at the neutral position, a first opening 92 a , a third opening 92 c , and a fifth opening 92 e of a sleeve 90 are closed by a first land 96 a , a second land 96 b , and a third land 96 c of the spool 94 , respectively.

When the spool 94 is at the neutral position, the lap length of a portion where the second land 96 b is in contact with an inner wall surface of the sleeve 90 that lies between the third opening 92 c and a fourth opening 92 d is equal to the lap length of a portion where the first land 96 a is in contact with an inner wall surface of the sleeve 90 that lies between the first opening 92 a and a second opening 92 b . In addition, when the spool 94 is at the neutral position, the lap length of a portion where the second land 96 b is in contact with an inner wall surface of the sleeve 90 that lies between the second opening 92 b and the third opening 92 c is equal to the lap length of a portion where the third land 96 c is in contact with an inner wall surface of the sleeve 90 that lies between the fourth opening 92 d and the fifth opening 92 e.

The shape of the first opening 92 a when viewed in the radial direction is a triangular shape having a base positioned on the side of an end in the X 1 direction and a vertex opposed to the base being positioned on the side of an end in the X 2 direction. The shape of the fifth opening 92 e when viewed in the radial direction is a triangular shape having a base positioned on the side of the end in the X 2 direction and a vertex opposed to the base being positioned on the side of the end in the X 1 direction. The shape of the fifth opening 92 e is obtained by inversing the shape of the first opening 92 a in the X direction.

On the other hand, the shape of the second opening 92 b , the third opening 92 c , and the fourth opening 92 d when viewed in the radial direction is the same rectangular shape, and the width thereof is constant in the X direction and is substantially the same as the length of the base of the above triangle corresponding to the maximum width of the first opening 92 a and the fifth opening 92 e . In the present embodiment, the first opening 92 a and the fifth opening 92 e have a triangular shape. However, it is only necessary that the shape of each of the first opening 92 a and the fifth opening 92 e is asymmetric in the X 1 direction and the X 2 direction and the shape of the first opening 92 a is obtained by inversing the shape of the fifth opening 92 e in the X direction. Alternatively, it is only necessary that the shape of each of the first opening 92 a and the fifth opening 92 e is the same shape that is symmetric in the X 1 direction and the X 2 direction. Note that it is necessary that the width of the first opening 92 a and the width of the fifth opening 92 e are within the range of the width of the third opening 92 c.

The operation of the servo valve according to the fourth embodiment is hereinafter described on the premise that the first opening 92 a is connected to the fluid discharge port, the second opening 92 b is connected to the one pressure chamber 36 a of the fluid pressure cylinder 36 , the third opening 92 c is connected to the fluid supply source, the fourth opening 92 d is connected to the other pressure chamber 36 b of the fluid pressure cylinder 36 , and the fifth opening 92 e is connected to the fluid discharge port.

As illustrated in FIG. 15 , when the spool 94 has been displaced in the X 1 direction by the predetermined amount or more, an X-direction length e 5 is equal to an X-direction length e 6 . The X-direction length e 5 is a length, in the X direction, of a portion where the first opening 92 a of the sleeve 90 overlaps with a first groove 98 a of the spool 94 . The X-direction length e 6 is a length, in the X direction, of a portion where the third opening 92 c of the sleeve 90 overlaps with a second groove 98 b of the spool 94 . However, an area S 5 of a portion where the first opening 92 a overlaps with the first groove 98 a on the vertex side of the triangle is smaller than an area S 6 of a portion where the third opening 92 c having the constant width overlaps with the second groove 98 b . Therefore, the effective area of the flow path from the one pressure chamber 36 a to the fluid discharge port is smaller than the effective area of the flow path from the fluid supply source to the other pressure chamber 36 b , so that the meter-out control is performed.

As illustrated in FIG. 16 , when the spool 94 has been displaced in the X 2 direction by the predetermined amount or more, an X-direction length e 7 is equal to an X-direction length e 8 . The X-direction length e 7 is a length, in the X direction, of a portion where the fifth opening 92 e of the sleeve 90 overlaps with the second groove 98 b of the spool 94 . The X-direction length e 8 is a length, in the X direction, of a portion where the third opening 92 c of the sleeve 90 overlaps with the first groove 98 a of the spool 94 . However, an area S 7 of a portion where the fifth opening 92 e overlaps with the second groove 98 b on the vertex side of the triangle is smaller than an area S 8 where the third opening 92 c having the constant width overlaps with the first groove 98 a . Therefore, the effective area of the flow path from the other pressure chamber 36 b to the fluid discharge port is smaller than the effective area of the flow path from the fluid supply source to the one pressure chamber 36 a , so that the meter-out control is performed. Note that in FIG. 15 and FIG. 16 , hatched areas of the first opening 92 a , the third opening 92 c , and the fifth opening 92 e indicate a state where these areas are closed by the spool 94 .

In the present embodiment, the first opening 92 a has a triangular shape in which the base is positioned on the side of the end in the X 1 direction, and the fifth opening 92 e has a triangular shape in which the base is positioned on the side of the end in the X 2 direction. However, if the first opening 92 a has a triangular shape in which the base is positioned on the side of the end in the X 2 direction and the fifth opening 92 e has a triangular shape in which the base is positioned on the side of the end in the X 1 direction, the meter-in control can be performed.

In addition, in the present embodiment, the fluid supply source is connected to the third port 20 c and the fluid discharge port is connected to the first port 20 a and the fifth port 20 e . However, if the fluid supply source is connected to the first port 20 a and the fifth port 20 e and the fluid discharge port is connected to the third port 20 c , the meter-in control can be performed.

In the servo valve according to the present embodiment, the shapes of the openings of the sleeve 90 are formed ingeniously. Thus, the meter-out control or the meter-in control can be performed by the servo valve alone.

Fifth Embodiment

Next, a servo valve according to a fifth embodiment of the present invention is described with reference to FIG. 17 to FIG. 19 . In the fifth embodiment, the relation of the lap lengths at the neutral position and the shapes of the openings of the sleeve are different from those in the second embodiment. Note that the constituent elements other than the sleeve and the spool are described using the constituent elements of the servo valve 10 according to the first embodiment and the reference symbols thereof as appropriate.

As illustrated in FIG. 17 , when a spool 104 is at the neutral position, a first opening 102 a , a third opening 102 c , and a fifth opening 102 e of a sleeve 100 are closed by a first land 106 a , a second land 106 b , and a third land 106 c of the spool 104 , respectively.

When the spool 104 is at the neutral position, the lap length of a portion where the second land 106 b is in contact with an inner wall surface of the sleeve 100 that lies between the third opening 102 c and a fourth opening 102 d is equal to the lap length of a portion where the first land 106 a is in contact with an inner wall surface of the sleeve 100 that lies between the first opening 102 a and a second opening 102 b . In addition, when the spool 104 is at the neutral position, the lap length of a portion where the second land 106 b is in contact with an inner wall surface of the sleeve 100 that lies between the second opening 102 b and the third opening 102 c is equal to the lap length of a portion where the third land 106 c is in contact with an inner wall surface of the sleeve 100 that lies between the fourth opening 102 d and the fifth opening 102 e.

The shape of the third opening 102 c when viewed in the radial direction is a rhombic shape that is symmetric in the X 1 direction and the X 2 direction, that is, a rhombic shape with one of the diagonal lines being oriented in the X direction. On the other hand, the shape of the first opening 102 a , the second opening 102 b , the fourth opening 102 d , and the fifth opening 102 e when viewed in the radial direction is the same rectangular shape, and the width thereof is constant in the X direction and is substantially the same as the length of the other diagonal line of the rhombic shape corresponding to the maximum width of the third opening 102 c . In the present embodiment, the third opening 102 c has a rhombic shape. However, as long as the shape thereof is symmetric in the X 1 direction and the X 2 direction and the width thereof is within the range of the width of the first opening 102 a and the fifth opening 102 e with a rectangular shape, any shape may be employed.

The operation of the servo valve according to the fifth embodiment is hereinafter described on the premise that the first opening 102 a is connected to the fluid supply source, the second opening 102 b is connected to the one pressure chamber 36 a of the fluid pressure cylinder 36 , the third opening 102 c is connected to the fluid discharge port, the fourth opening 102 d is connected to the other pressure chamber 36 b of the fluid pressure cylinder 36 , and the fifth opening 102 e is connected to the fluid supply source.

As illustrated in FIG. 18 , when the spool 104 has been displaced in the X 1 direction by the predetermined amount or more, an X-direction length e 9 is equal to an X-direction length e 10 . The X-direction length e 9 is a length, in the X direction, of a portion where the third opening 102 c of the sleeve 100 overlaps with a second groove 108 b of the spool 104 . The X-direction length e 10 is a length, in the X direction, of a portion where the first opening 102 a of the sleeve 100 overlaps with a first groove 108 a of the spool 104 . However, an area S 9 of a portion where the third opening 102 c overlaps with the second groove 108 b on a vertex side of the rhombus in the X 2 direction is smaller than an area S 10 of a portion where the first opening 102 a having the constant width overlaps with the first groove 108 a . Therefore, the effective area of the flow path from the other pressure chamber 36 b to the fluid discharge port is smaller than the effective area of the flow path from the fluid supply source to the one pressure chamber 36 a , so that the meter-out control is performed.

As illustrated in FIG. 19 , when the spool 104 has been displaced in the X 2 direction by the predetermined amount or more, an X-direction length e 11 is equal to an X-direction length e 12 . The X-direction length e 11 is a length, in the X direction, of a portion where the third opening 102 c of the sleeve 100 overlaps with the first groove 108 a of the spool 104 . The X-direction length e 12 is a length, in the X direction, of a portion where the fifth opening 102 e of the sleeve 100 overlaps with the second groove 108 b of the spool 104 . However, an area S 11 of a portion where the third opening 102 c overlaps with the first groove 108 a on the vertex side in the X 1 direction of the rhombus is smaller than an area S 12 of a portion where the fifth opening 102 e with the constant width overlaps with the second groove 108 b . Therefore, the effective area of the flow path from the one pressure chamber 36 a to the fluid discharge port is smaller than the effective area of the flow path from the fluid supply source to the other pressure chamber 36 b , so that the meter-out control is performed. Note that in FIG. 18 and FIG. 19 , hatched areas of the first opening 102 a , the third opening 102 c , and the fifth opening 102 e indicate a state where these areas are closed by the spool 104 .

In the present embodiment, the fluid supply source is connected to the first port 20 a and the fifth port 20 e and the fluid discharge port is connected to the third port 20 c . However, if the fluid supply source is connected to the third port 20 c and the fluid discharge port is connected to the first port 20 a and the fifth port 20 e , the meter-in control can be performed.

In the servo valve according to the present embodiment, the shapes of the openings of the sleeve 100 are formed ingeniously. Thus, the meter-out control or the meter-in control can be performed by the servo valve alone.

The servo valve according to the present invention is not limited to the above embodiments, and can employ various structures without departing from the gist and essence of the present invention.