Method for producing glass film

The present invention relates to a method of manufacturing for example, a band-like glass film.

As is well known, thinning of glass sheets to be used in flat panel displays (FPD), such as a liquid crystal display and an OLED display, glass sheets to be used in OLED illumination, glass sheets to be used for manufacturing a tempered glass that is a component of a touch panel, and the like, and glass sheets to be used in panels of solar cells, and the like has been promoted in the current circumstances.

For example, in Patent Literature 1, there is disclosed a glass film (thin sheet glass) having a thickness of several hundred micrometers or less. As described also in this literature, this kind of glass film is generally obtained through continuous forming with a forming device employing a so-called overflow down-draw method.

In the method of manufacturing a glass film disclosed in Patent Literature 1, an elongated glass film obtained by the continuous forming by the overflow down-draw method is changed in its conveying direction from a vertical direction to a horizontal direction, and is then continuously conveyed to a downstream side with a lateral conveying unit (horizontal conveying unit) of a conveying device. In the process of the conveyance, both end portions (selvage portions) of the glass film in a width direction are cut and removed. After that, the glass film is taken up into a roll shape with a take-up roller. Thus, a glass roll is formed.

In Patent Literature 1, as a method of cutting both the end portions of the glass film in the width direction, laser cleaving is disclosed. This laser cleaving method involves, while conveying the glass film, forming initial cracks on the glass film by crack forming means, such as a diamond cutter, and then irradiating the portion with a laser beam to heat the portion, followed by cooling the heated portion by cooling means. With this, a thermal stress is generated in the glass film, and the initial cracks are developed through the thermal stress, to thereby cleave the end portions of the glass film in the width direction.

Patent Literature 1: JP 2012-240883 A

Technical Problem

When an ultra-thin glass film having a thickness of 200 μm or less is cut by the above-mentioned laser cleaving method while conveyed, innumerable wrinkles may occur on the glass film during its conveyance. In the related-art laser cleaving method, when the glass film is cleaved under the state in which the wrinkles overlap with its irradiation position with a laser beam, there is a problem in that a defect remains on an end surface (cross section) of the glass film after the cleavage owing to the wrinkles.

The present invention has been made in view of the above-mentioned circumstances, and a technical object of the present invention is to prevent the occurrence of an end surface defect when a glass film is cut by laser cleaving.

Solution to Problem

In order to solve the above-mentioned problem, according to one embodiment of the present invention, there is provided a method of manufacturing a glass film, comprising a cleaving step of cleaving a band-like glass film conveyed in a predetermined conveying direction through irradiation of the glass film with a laser beam, wherein the cleaving step comprises: a step of, while supporting a lower surface of the glass film by a surface plate comprising an opening, suctioning the glass film through the opening; and a step of irradiating the glass film suctioned through the opening with the laser beam.

With such configuration, part of the band-like glass film conveyed along the conveying direction is suctioned through the opening of the surface plate in the cleaving step, and hence the occurrence of wrinkles on the suctioned part of the glass film can be prevented, or wrinkles having occurred on the glass film can be eliminated. When the suctioned part of the glass film is irradiated with the laser beam, to thereby cleave the glass film, the occurrence of a defect on a cleaved surface (end surface) can be reliably prevented.

In addition, it is desired that the cleaving step comprise a step of conveying the glass film by a conveying device having a predetermined pass line, the surface plate comprise a support portion configured to support the glass film, and an upper surface of the support portion be located above the pass line. When the upper surface of the support portion of the surface plate is located above the pass line as described above, the glass film conveyed by the conveying device is pushed upward by the support portion when passing through the surface plate. With this, the occurrence of wrinkles on the glass film during its passage through the surface plate can be effectively prevented.

In the above-mentioned method, it is desired that the support portion be configured to support the glass film on a downstream side of the opening in the conveying direction, and the cleaving step comprise a cooling step of releasing a cooling medium toward the glass film supported by the support portion on the downstream side of the opening.

The glass film suctioned through the opening is locally heated through irradiation with the laser beam, and is then cooled with the cooling medium at a downstream position. A thermal stress is generated in the glass film owing to expansion caused by the heating with the laser beam and contraction caused by the cooling with the cooling medium. Cracks are developed through the thermal stress, and thus the glass film is cleaved with high accuracy. In this case, the cooling medium is brought into contact with the glass film on the downstream side of the opening. At this position, the support portion is configured to support the glass film so that the glass film is not deformed by the pressure of the cooling medium. With this, the occurrence of an end surface defect owing to the deformation of the glass film can be prevented.

It is desired that the cleaving step comprise a step of adjusting suction power for the glass film through the opening. In the case where the glass film is suctioned through the opening, when the suction power is too high, there is a risk in that the conveyance of the glass film is inhibited. When the suction power through the opening is adjusted in the cleaving step, the glass film can be cleaved while suitably conveyed.

In the cleaving step, it is desired that the glass film have an amplitude of up and down movements of 50 μm or less when passing through the opening. When the amplitude of up and down movements of the glass film is reduced to the extent possible as described above, the occurrence of an end surface defect on the cleaved surface of the glass film can be prevented.

When the glass film is excessively suctioned through the opening, the deformation amount of the glass film is excessively increased, which results in an end surface defect on the cleaved surface of the glass film. In order to prevent such occurrence of the end surface defect, it is desired that the deformation amount of the glass film caused by suction through the opening be 0.3 mm or less.

In the above-mentioned manufacturing method, it is desired that the opening of the surface plate have a constant width, and the width of the opening be 3 mm or more and 30 mm or less. With this, the glass film can be suctioned through the opening with suitable power.

Advantageous Effects of Invention

According to the present invention, the occurrence of an end surface defect when a glass film is cut by laser cleaving can be prevented.

FIG. 1 is aside view for illustrating an apparatus for manufacturing a glass film.

FIG. 2 is a plan view for illustrating part of the apparatus for manufacturing a glass film.

FIG. 3 is a sectional view taken along the line III-III of FIG. 2 .

FIG. 4 is a plan view of a surface plate.

FIG. 5 is a sectional view taken along the line V-V of FIG. 2 .

FIG. 6 is a flowchart of a method of manufacturing a glass film.

FIG. 7 is a sectional view for illustrating an aspect of a glass film in a cleaving step.

FIG. 8 is a sectional view for illustrating the aspect of the glass film in the cleaving step.

FIG. 9 is a sectional view for illustrating behavior of the glass film in the cleaving step.

FIG. 10 is a plan view for illustrating another example of a suction device.

FIG. 11 is a sectional view taken along the line XI-XI of FIG. 10 .

Now, embodiments of the present invention are described with reference to the drawings. In each of FIG. 1 to FIG. 9 , a method for manufacturing a glass film and a manufacturing apparatus according to embodiments of the present invention are illustrated.

As illustrated in FIG. 1 , a manufacturing apparatus 1 comprises: a forming portion 2 configured to form a band-like base glass film G; a direction conversion portion 3 configured to convert a traveling direction of the base glass film G from a vertically downward direction to a lateral direction; a first conveying portion 4 configured to convey the base glass film G in the lateral direction after the direction conversion; a first cutting portion 5 configured to cut end portions (selvage portions) of the base glass film G in a width direction; and a first take-up portion 6 configured to take up a glass film (hereinafter referred to as “first glass film”) G 1 , which is obtained by removing the selvage portions from the base glass film G, into a roll shape to form a first glass roll GRL 1 .

The manufacturing apparatus 1 further comprises: a take-out portion 7 configured to take the first glass film G 1 out of the first glass roll GRL 1 ; a second conveying portion 8 configured to convey the first glass film G 1 , which has been taken out of the take-out portion 7 , in the lateral direction; a second cutting portion 9 configured to cut part of the first glass film G 1 ; and a second take-up portion 10 configured to take up a glass film (hereinafter referred to as “second glass film”) G 2 , which is obtained through the cutting by the second cutting portion 9 , into a roll shape to form a second glass roll GRL 2 .

The forming portion 2 comprises: a forming body 11 having a substantially wedge shape in sectional view in which an overflow groove 11 a is formed on an upper end portion thereof; edge rollers 12 arranged immediately below the forming body 11 and configured to sandwich a molten glass GM overflowing from the forming body 11 from both front and back surface sides of the molten glass GM; and an annealer 13 arranged immediately below the edge rollers 12 .

The forming portion 2 is configured to cause the molten glass GM overflowing from the overflow groove 11 a of the forming body 11 to flow down along both side surfaces of the forming body 11 to be joined at a lower end portion of the forming body 11 , to thereby form the molten glass GM into a film shape. The edge rollers 12 are configured to control shrinkage of the molten glass GM in a width direction to form the base glass film G having a predetermined width. The annealer 13 is configured to perform strain removal treatment on the base glass film G. The annealer 13 comprises annealer rollers 14 arranged in a plurality of stages in a vertical direction.

Support rollers 15 configured to sandwich the base glass film G from both the front and back surface sides are arranged below the annealer 13 . A tension for encouraging thinning of the base glass film G is applied between the support rollers 15 and the edge rollers 12 or between the support rollers 15 and the annealer rollers 14 at any one position.

The direction conversion portion 3 is arranged at a position below the support rollers 15 . In the direction conversion portion 3 , a plurality of guide rollers 16 configured to guide the base glass film G are arranged in a curved form. Those guide rollers 16 are configured to guide the base glass film G, which has been conveyed in the vertical direction, in the lateral direction.

The first conveying portion 4 is arranged in a forward traveling direction with respect to (on a downstream side of) the direction conversion portion 3 . The first conveying portion 4 is formed of a belt conveyor, but the configuration of the first conveying portion 4 is not limited thereto. A roller conveyor or any other various conveying devices may be used. The first conveying portion 4 is configured to continuously convey the base glass film G having passed through the direction conversion portion 3 to a downstream side by driving an endless band-like belt 4 a.

The first cutting portion 5 is arranged above the first conveying portion 4 . In this embodiment, the first cutting portion 5 is configured to cut the base glass film G by laser cleaving. The first cutting portion 5 comprises: a pair of laser irradiation devices 17 a ; and a pair of cooling devices 17 b arranged on a downstream side of the laser irradiation devices 17 a . The first cutting portion 5 is configured to, while the base glass film G is conveyed, heat a predetermined site of the base glass film G through irradiation with a laser beam L from the laser irradiation device 17 a , and then release a cooling medium R from the cooling device 17 b to cool the heated site.

The first take-up portion 6 is arranged on a downstream side of the first conveying portion 4 and the first cutting portion 5 . The first take-up portion 6 is configured to take up the first glass film G 1 into a roll shape by rotating a winding core 18 . The first glass roll GRL 1 formed as described above is conveyed to the position of the take-out portion 7 . The take-out portion 7 is configured to take the first glass film G 1 out of the first glass roll GRL 1 having been formed by the first take-up portion 6 , and supply the first glass film G 1 to the second cutting portion 9 .

The second conveying portion 8 is configured to convey the first glass film G 1 , which has been taken out of the first glass roll GRL 1 by the take-out portion 7 , along a lateral direction (hereinafter referred to as “conveying direction”) X. The second conveying portion 8 is formed of a belt conveyor, but the configuration of the second conveying portion 8 is not limited thereto. A roller conveyor or any other various conveying devices may be used. The second conveying portion 8 is configured to convey the first glass film G 1 to the second take-up portion 10 on a downstream side by driving a plurality of endless band-like belts 8 a.

The vertical positions of the plurality of belts 8 a are set so that the first glass film G 1 is maintained in a substantially horizontal posture. That is, the plurality of belts 8 a are arranged so that contact portions 8 b with the first glass film G 1 have the same vertical position (height). With this, a pass line PL is formed along a horizontal direction.

The second cutting portion 9 is located in the middle of the second conveying portion 8 . The second cutting portion 9 comprises: a suction device 19 configured to suction the first glass film G 1 ; and a pair of laser irradiation devices 20 and a pair of cooling devices 21 arranged above the second conveying portion 8 .

The suction device 19 comprises: a pair of surface plates 22 to be brought into contact with a lower surface of the first glass film G 1 ; a support member 23 for the surface plates 22 ; and a suction pump 24 to be connected to the surface plates 22 .

As illustrated in FIG. 2 and FIG. 3 , the surface plates 22 are each arranged between the plurality of belts 8 a of the second conveying portion 8 . The surface plate 22 is formed of a sheet member made of a metal. The surface plate 22 has a rectangular shape having a predetermined length LP and a predetermined width W, but the shape of the surface plate 22 is not limited thereto. The length LP of the surface plate 22 is set to 80 mm or more and 260 mm or less, but is not limited to this range. The width W of the surface plate 22 is set to 30 mm or more and 60 mm or less, but is not limited to this range.

The surface plate 22 comprises: a hole 25 penetrating therethrough in a thickness direction; and support portions 26 a to 26 c to be brought into contact with the first glass film G 1 .

As illustrated in FIG. 4 , the hole 25 is formed of a linear elongated hole along the conveying direction X of the first glass film G 1 . The surface plate 22 is configured to suction the lower surface of the first glass film G 1 through an opening 25 a formed at an upper end of the hole 25 . The opening 25 a has a predetermined length LA along the conveying direction X of the first glass film G 1 and a constant width WA in a direction perpendicular to the conveying direction X. The length LA of the opening 25 a is desirably set to 40 mm or more and 80 mm or less. The width WA of the opening 25 a is set to preferably 3 mm or more and 30 mm or less, more preferably 3 mm or more and 20 mm or less.

The support portions 26 a to 26 c are each formed of a sheet member made of a resin, but the materials of the support portions 26 a to 26 c are not limited thereto. As illustrated in FIG. 5 , upper surfaces of the support portions 26 a to 26 c are each located above the pass line PL of the second conveying portion 8 . A difference H in height between each of the upper surfaces of the support portions 26 a to 26 c and the pass line PL (top of the belt 8 a ) is set to desirably 0 mm or more and 3.0 mm or less, more desirably 0.5 mm or more and 3.0 mm or less.

The support portions 26 a to 26 c comprise: a first support portion 26 a ; a second support portion 26 b located on a downstream side of the first support portion 26 a ; and a third support portion 26 c located on a downstream side of the second support portion 26 b . The first support portion 26 a is arranged in a region of the surface plate 22 ranging from an end portion thereof on an upstream side to the opening 25 a . A length L 1 of the first support portion 26 a is desirably set to 10 mm or more and 50 mm or less. A width W 1 of the first support portion 26 a is equal to the width W of the surface plate 22 .

The second support portion 26 b is located outside (on both sides of) the hole 25 of the surface plate 22 in a width direction of the hole 25 . A length L 2 of the second support portion 26 b is equal to the length LA of the hole 25 (opening 25 a ). A width W 2 of the second support portion 26 b is set to 1 mm or more and 15 mm or less, but is not limited to this range.

The third support portion 26 c is located on a downstream side of the opening 25 a . The third support portion 26 c is configured to support part of the first glass film G 1 to be cooled with the cooling medium R released from the cooling device 21 . A length L 3 of the third support portion 26 c is set to 10 mm or more and 160 mm or less, but is not limited to this range. A width W 3 of the third support portion 26 c is equal to the width W of the surface plate 22 .

The support member 23 is configured to support a bottom portion of the surface plate 22 . The support member 23 is, for example, formed of a metal into a block shape. An opening (gap) 23 a through which the air outside the support member 23 is suctioned is arranged between the support member 23 and the surface plate 22 . The support member 23 comprises an internal space S communicating to the hole 25 of the surface plate 22 . Part of the suction device 19 is connected to a bottom portion of the support member 23 .

The suction pump 24 is arranged at a position close to the second conveying portion 8 . The suction pump 24 is connected to the support member 23 through a connecting pipe 27 . With this, the suction pump 24 is configured to suction the air from the opening 23 a of the support member 23 and the opening 25 a of the surface plate 22 through the connecting pipe 27 and the internal space S of the support member 23 .

The laser irradiation devices 20 are each configured to radiate the laser beam L to a predetermined site of the first glass film G 1 moving along the conveying direction X, to thereby locally heat the site. As illustrated in FIG. 3 , the laser irradiation device 20 comprises a plurality of laser irradiation portions 20 a . The laser irradiation portions 20 a are arranged above the opening 25 a of the surface plate 22 . With this, the laser irradiation portions 20 a are configured to radiate the laser beams L to a plurality of sites of the first glass film G 1 passing through the opening 25 a . Irradiation positions O with the laser beams L from the laser irradiation portions 20 a are set so as to be positioned on a straight line substantially parallel to the conveying direction X of the first glass film G 1 .

The cooling devices 21 are arranged on a downstream side of the laser irradiation devices 20 in the conveying direction X of the first glass film G 1 . The cooling devices 21 are each configured to release the cooling medium R toward the locally heated site of the first glass film G 1 to cool the site.

The second take-up portion 10 is arranged on a downstream side of the second conveying portion 8 and the second cutting portion 9 . The second take-up portion 10 is configured to take up the second glass film G 2 , which is conveyed from the second conveying portion 8 , around a winding core 28 , to thereby form the second glass roll GRL 2 .

As a material of the second glass film G 2 (first glass film G 1 ) to be manufactured by the above-mentioned manufacturing apparatus 1 , silicate glass or silica glass is used. Borosilicate glass, soda-lime glass, aluminosilicate glass, or chemically tempered glass is preferably used, and alkali-free glass is most preferably used. The “alkali-free glass” as used herein refers to glass substantially free of an alkaline component (alkali metal oxide), and specifically refers to glass having a weight ratio of an alkaline component of 3,000 ppm or less. In the present invention, the weight ratio of the alkaline component is preferably 1,000 ppm or less, more preferably 500 ppm or less, most preferably 300 ppm or less.

In addition, the thickness of the second glass film G 2 (first glass film G 1 ) is set to 10 μm or more and 300 μm or less, and is preferably 30 μm or more and 200 μm or less, most preferably 30 μm or more and 100 μm or less.

Now, a method of manufacturing the second glass film G 2 (second glass roll GRL 2 ) through use of the manufacturing apparatus 1 having the above-mentioned configuration is described. As illustrated in FIG. 6 , this method comprises: a forming step S 1 ; a selvage portion removal step S 2 ; a first take-up step S 3 ; a take-out step S 4 ; a cleaving step S 5 ; and a second take-up step S 6 .

In the forming step S 1 , the molten glass GM overflowing from the overflow groove 11 a of the forming body 11 in the forming portion 2 is caused to flow down along both side surfaces of the forming body 11 to be joined at a lower end of the forming body 11 , to thereby form the molten glass GM into a film shape. At this time, the shrinkage of the molten glass GM in a width direction is controlled with the edge rollers 12 , and thus the base glass film G having a predetermined width is formed. After that, strain removal treatment is performed on the base glass film G with the annealer 13 (annealing step). The base glass film G having a predetermined thickness is formed through a tension applied by the support rollers 15 .

In the selvage portion removal step S 2 , while the base glass film G is sent to a downstream side by the direction conversion portion 3 and the first conveying portion 4 , part of the base glass film G is heated through irradiation with the laser beam L by the laser irradiation device 17 a in the first cutting portion 5 . After that, the cooling medium R is jetted to the heated site by the cooling device 17 b . With this, a thermal stress is generated in the base glass film G. Initial cracks formed in the base glass film G in advance are developed through the thermal stress. With this, selvage portions are removed from the base glass film G. Thus, the first glass film G 1 is formed.

In the subsequent first take-up step S 3 , the first glass film G 1 is taken up around the winding core 18 , to thereby form the first glass roll GRL 1 . After that, the first glass roll GRL 1 is transferred to the take-out portion 7 . In the take-out step S 4 , the first glass film G 1 is taken out of the first glass roll GRL 1 having been transferred to the take-out portion 7 , and is conveyed to the second cutting portion 9 by the second conveying portion 8 .

In the cleaving step S 5 , part of the first glass film G 1 is conveyed by the second conveying portion 8 to pass over the support portions 26 a to 26 c of the surface plate 22 (conveying step). The suction device 19 always activates the suction pump 24 , and the first glass film G 1 on the surface plate 22 is suctioned through the opening 25 a of the surface plate 22 (suction step). As illustrated in FIG. 7 and FIG. 8 , the first glass film G 1 is deformed into a concave shape in the region of the opening 25 a by being suctioned through the opening 25 a while being supported by the second support portion 26 b of the surface plate 22 .

In the cleaving step S 5 , while the first glass film G 1 is moved, the first glass film G 1 is suctioned through the opening 25 a to be deformed in the region of the opening 25 a . In this case, a deformation amount D of the first glass film G 1 is desirably set to 0.1 mm or more and 0.3 mm or less. The deformation amount D is an average of values continuously measured every 0.1 second when the first glass film G 1 is conveyed by 10 m. The deformation amount D is measured under the state in which the laser beam L is not radiated in order to eliminate the influence of thermal expansion caused by the laser beam L. In the cleaving step S 5 , the suction power of the suction device 19 is adjusted so that the deformation amount D of the first glass film G 1 is reduced to the extent possible. Specifically, the suction power through the opening 25 a is adjusted by adjusting an air suction amount by the suction pump 24 , and as well, by suctioning the air through the opening 23 a formed in the support member 23 (suction power adjusting step). The open area of the opening 23 a is adjusted through use of a closing member.

When the first glass film G 1 is suctioned through the opening 25 a while conveyed by the second conveying portion 8 , slight up and down movements (oscillation) may be caused therein through the adjustment of the suction power (reduction of the suction power) (see FIG. 9 ). The range (amplitude) A of up and down movements of the first glass film G 1 can be reduced to the extent possible by adjusting the suction power through the opening 25 a . Specifically, the range A of up and down movements of the first glass film G 1 can be set to 10 μm or more and 50 μm or less. That is, when the first glass film G 1 is conveyed by 10 m, out of values for the range A of up and down movements continuously measured every 0.1 second, the minimum value and the maximum value are desirably set to 10 μm or more and 50 μm or less, respectively. The range A of up and down movements is measured with a known laser displacement sensor. The range A of up and down movements is measured under the state in which the laser beam L is not radiated in order to eliminate the influence of thermal expansion caused by the laser beam L.

In the adjustment of the suction power, when a suction amount is increased, there is a tendency that the above-mentioned deformation amount D is increased, but the above-mentioned range A of up and down movements is reduced. In contrast, when the suction amount is reduced, there is a tendency that the above-mentioned deformation amount D is reduced, but the above-mentioned range A of up and down movements is increased. Therefore, it is preferred that the deformation amount D be reduced to the extent possible so that the range A of up and down movements falls within an acceptable range. With regard to the suction power, a wind speed through the opening 25 a preferably falls within the range of from 1 m/s to 6 m/s. The wind speed is measured with a known anemometer.

In the cleaving step S 5 , while the first glass film G 1 is conveyed by the second conveying portion 8 as described above, the first glass film G 1 is irradiated with a plurality of laser beams L from the laser irradiation portions 20 a of the laser irradiation device 20 (laser irradiation step). The laser beams L are radiated to part of the first glass film G 1 passing through the region of the opening 25 a of the surface plate 22 .

Through such irradiation with the laser beams L, the first glass film G 1 is heated at the irradiation positions O with the laser beams L. After that, the heated site of the first glass film G 1 passes through the opening 25 a , and is cooled by the cooling device 21 (cooling step). Specifically, the cooling medium R is jetted downward from the cooling device 21 located above the third support portion 26 c of the surface plate 22 . A thermal stress is generated in the first glass film G 1 owing to expansion caused by the local heating with the laser irradiation device 20 and contraction caused by the cooling with the cooling device 21 . Initial cracks formed in the first glass film G 1 in advance are developed through the thermal stress. With this, end portions of the first glass film G 1 in a width direction are continuously cut. Thus, the second glass film G 2 is formed. The second glass film G 2 is subsequently conveyed by the second conveying portion 8 to the second take-up portion 10 on a downstream side.

In the second take-up step S 6 , the second glass film G 2 is taken up around the winding core 28 . When the second glass film G 2 having a predetermined length is taken up, the second glass roll GRL 2 (glass product) is formed.

By the method of manufacturing a glass film (second glass film G 2 ) according to this embodiment described above, the first glass film G 1 is suctioned through the opening 25 a of the surface plate 22 of the suction device 19 , and thus the occurrence of wrinkles on the first glass film G 1 during its passage through the opening 25 a can be prevented. Besides, even when wrinkles occur on the first glass film G 1 before the first glass film G 1 passes through the surface plate 22 , the wrinkles can be eliminated by the suction through the opening 25 a . Therefore, when the first glass film G 1 passing through the opening 25 a is irradiated with the laser beam L, and on a downstream side, is brought into contact with the cooling medium R by the cooling device 21 , the first glass film G 1 can be cleaved with high accuracy without causing a defect on a cleaved surface of the second glass film G 2 .

In addition, when the air is suctioned through the opening 23 a present at a different position from the opening 25 a of the surface plate 22 , the suction power for the first glass film G 1 through the opening 25 a of the surface plate 22 can be adjusted. With this, a conveyance failure of the first glass film G 1 caused by strongly suctioning the first glass film G 1 through the opening 25 a of the surface plate 22 can be prevented.

Another example of the suction device is illustrated in FIG. 10 and FIG. 11 . As illustrated in FIG. 10 and FIG. 11 , the surface plate 22 comprises a plurality of holes 25 , and the holes 25 comprise: a first opening 25 a 1 in the region of which the laser beams L are radiated; and a pair of second openings 25 a 2 each arranged so as to be spaced apart from the first opening 25 a 1 in a width direction of the surface plate 22 .

The first opening 25 a 1 has the same function as the opening 25 a of the surface plate 22 illustrated in FIG. 3 and FIG. 4 . The first opening 25 a 1 is arranged between the pair of second openings 25 a 2 . When the second openings 25 a 2 are formed on the surface plate 22 , a length LA 1 of the first opening 25 a 1 is desirably set to 40 mm or more and 80 mm or less. In addition, a width WA 1 of the first opening 25 a 1 is desirably set to 3 mm or more and 5 mm or less.

An end portion DE of the first opening 25 a 1 on a downstream side protrudes on a downstream side with respect to the end portions DE of the second openings 25 a 2 on a downstream side. A protrusion amount P 1 of the end portion DE of the first opening 25 a 1 on a downstream side is desirably set to 5 mm or more and 20 mm or less.

The pair of second openings 25 a 2 are each formed so as to be longer and wider than the first opening 25 a 1 , but the configurations of the second openings 25 a 2 are not limited thereto. A length LA 2 of each of the second openings 25 a 2 is desirably set to 40 mm or more and 80 mm or less. In addition, a width WA 2 of each of the second openings 25 a 2 is desirably set to 8 mm or more and 10 mm or less. End portions UE of the second openings 25 a 2 on an upstream side protrude on an upstream side with respect to the end portion UE of the first opening 25 a 1 on an upstream side. A protrusion amount P 2 of each of the end portions UE of the second openings 25 a 2 on an upstream side is desirably set to 10 mm or more and 20 mm or less.

The second support portion 26 b of the surface plate 22 separates the first opening 25 a 1 and the second opening 25 a 2 in the width direction of the surface plate 22 . A separate distance between the first opening 25 a 1 and the second opening 25 a 2 in the width direction of the surface plate 22 , that is, the width W 2 of the second support portion 26 b is desirably set to 1 mm or more and 3 mm or less.

The surface plate 22 comprises a fourth support portion 26 d in addition to the first support portion 26 a to the third support portion 26 c . The fourth support portion 26 d is located outside the second opening 25 a 2 in a width direction of the second opening 25 a 2 . A length L 4 of the fourth support portion 26 d is desirably set to 40 mm or more and 80 mm or less. A width W 4 of the fourth support portion 26 d is desirably set to 3 mm or more and 5 mm or less.

As illustrated in FIG. 11 , the first opening 25 a 1 and the second openings 25 a 2 communicate to the internal space S of the support member 23 . With this, the first opening 25 a 1 and the second openings 25 a 2 are configured to suction the lower surface of the first glass film G 1 by the same suction pump 24 . When the suction amount by the suction pump 24 is reduced, there is a tendency that a deformation amount D 1 of the first glass film G 1 through the first opening 25 a 1 is larger than a deformation amount D 2 of the first glass film G 1 through the second opening 25 a 2 under the state in which the first glass film G 1 is not irradiated with the laser beams L. In contrast, when the suction amount by the suction pump 24 is increased, as illustrated in FIG. 11 , there is a tendency that the deformation amount D 2 of the first glass film G 1 through the second opening 25 a 2 is larger than the deformation amount D 1 of the first glass film G 1 through the first opening 25 a 1 under the state in which the first glass film G 1 is not irradiated with the laser beams L. The case in which the deformation amount D 2 of the first glass film G 1 through the second opening 25 a 2 is larger than the deformation amount D 1 of the first glass film G 1 through the first opening 25 a 1 as illustrated in FIG. 11 is preferred because the stability of the cutting of the first glass film G 1 with the laser beam L is increased. When the first glass film G 1 is irradiated with the laser beam L, even in the case where the suction amount by the suction pump 24 is increased, there is a tendency that the deformation amount D 1 of the first glass film G 1 through the first opening 25 a 1 is larger than the deformation amount D 2 of the first glass film G 1 through the second opening 25 a 2 by the influence of heat caused by the laser beam L.

In this example, the first glass film G 1 is suctioned through the first opening 25 a 1 and the second openings 25 a 2 of the surface plate 22 , and thus the occurrence of wrinkles on the first glass film G 1 during its passage through the first opening 25 a 1 can be prevented. Besides, even when wrinkles occur on the first glass film G 1 before the first glass film G 1 passes through the surface plate 22 , the wrinkles can be eliminated by the suction through the first opening 25 a 1 and the second openings 25 a 2 . In addition, the open area (particularly width WA 1 ) of the first opening 25 a 1 can be reduced to the extent possible through the arrangement of the second openings 25 a 2 on the surface plate 22 . With this, the deformation amount D and the range A of up and down movements of the first glass film G 1 passing through the first opening 25 a 1 can be reduced, and thus the first glass film G 1 can be cleaved with high accuracy.

The present invention is not limited to the configurations of the above-mentioned embodiments. In addition, the action and effect of the present invention are not limited to those described above. The present invention may be modified in various forms within the range not departing from the spirit of the present invention.

While an example in which the base glass film G is formed by an overflow down-draw method is presented in the above-mentioned embodiment, the present invention is not limited thereto. The base glass film G may be formed by any other forming method.

While an example in which the first glass film G 1 is cleaved while suctioned by the suction device 19 in the second cutting portion 9 is presented in the above-mentioned embodiment, the present invention is not limited thereto. The base glass film G may be suctioned by a suction device in the first cutting portion 5 . The suction device 19 is arranged in one or both of the first cutting portion 5 and the second cutting portion 9 .

22 surface plate

23 support member

25 a opening

25 a 1 first opening

26 a first support portion

26 b second support portion

26 c third support portion

G 1 first glass film

L laser beam

X conveying direction