Silica glass member, process for producing the same, and process for bonding ceramic and silica glass
Granted 9 Feb 2021 · 3 office actions
Current assignee: COORSTEK KK · originally COORSTEK, INC.
Law firm: Law firm · Log in to unlock
Attorney: Attorney · Log in to unlock
Inventors: Ramesh Vallepu, Hirotaka Hagihara, Hiroaki Kobayashi, Yu Yokoyama · Examiner: Kiley S Stoner · AU 1735 · TC 1700
Life of the application
10 dated eventsAbstract
The present invention relates to a silica glass member including: a main body including a silica glass and having a bonding part for bonding to another member; and a bonding film which is provided on the bonding part, has a thickness of 0.2 μm to 10 μm, and includes Au and a glass formed through melting of glass frit, in which the bonding film is produced from Au powder having an average particle diameter of 3 μm or less and glass frit having a softening point of 850° C. or lower, a process for producing a silica glass member, and a process for bonding a ceramic and a silica glass.
Claims as granted
3 claimsLog in to read the claims of this application.
Log in to unlockClassifications
12 codes- B23K35/30
- B23K1/00
- B23K35/02
- C03C8/18
- C03C17/00
- C22C5/02
- C03C8/16
- C03C17/04
- C03C27/00
- C04B37/04
- H01L33/48
- H01L33/58
Claim changes
SoonSee which claims were amended, added or cancelled during examination, with every added and removed word marked.
The published claims of this application are not paired with the granted ones in what we hold.
File wrapper
See the full prosecution history — every USPTO and applicant action on this file, in order.
Log in to unlockDocuments
Log in to open the documents of this file: the application as filed, every office action and response, the notice of allowance.
Log in to unlockChain of title
No assignments have been recorded for this application yet.