Semiconductor package device and method of manufacturing the same

1. Technical Field

The present disclosure relates generally to a semiconductor package device and a method of manufacturing the same. More particularly, the present disclosure relates to a semiconductor package device including a stacking structure and a method of manufacturing the same.

2. Description of the Related Art

In comparable three-dimensional semiconductor packages, there is a bridge in an interposer (e.g., a through silicon via (TSV) interposer) to provide electrical interconnection (e.g., via a redistribution layer (RDL)) between two dies (such as an application-specific integrated circuit (ASIC) and a high bandwidth memory (HBM)). However, fine pitch (e.g., smaller than 1 micrometer (μm)) interconnection exists in a small portion of the interposer (e.g., the area between the two dies). Most of the regions of the interposer are designed for interconnection with relatively great pitch (e.g., greater than 1 μm). However, it may take great cost to use the TSV interposer to provide electrical interconnection between the two dies.

In one or more embodiments, a semiconductor package device includes a first interconnection structure, a non-silicon interposer and a first die. The first interconnection structure has a first pitch. The non-silicon interposer surrounds the first interconnection structure. The non-silicon interposer includes a second interconnection structure having a second pitch. The second pitch is larger than the first pitch. The first die is above the first interconnection structure and is electrically connected to the first interconnection structure.

In one or more embodiments, a semiconductor system includes a fan-out semiconductor package device. The fan-out semiconductor package device includes a first interconnection structure having a first pitch, a non-silicon interposer surrounding the first interconnection structure and having a second interconnection structure with a second pitch, a first die electrically connected to the fan-out semiconductor package, and a second die electrically connected to the first die through the fan-out semiconductor package.

In one or more embodiments, a method of manufacturing a semiconductor package device includes providing a carrier and a release film, disposing a first interconnection structure and a silicon base on the carrier, disposing a non-silicon interposer over the first interconnection structure, disposing a second interconnection structure over the first interconnection structure and the non-silicon interposer, connecting a first die to the second interconnection structure, and connecting a second die to the second interconnection structure.

FIG. 1 illustrates a cross-sectional view of a semiconductor package device in accordance with some embodiments of the present disclosure;

FIG. 2A illustrates a cross-sectional view of a semiconductor package device in accordance with some embodiments of the present disclosure;

FIG. 2B illustrates a cross-sectional view of a semiconductor package device in accordance with some embodiments of the present disclosure;

FIG. 3A , FIG. 3B , FIG. 3C , FIG. 3D , FIG. 3E , FIG. 3F , FIG. 3G and FIG. 3H illustrate a method of manufacturing a semiconductor package device in accordance with some embodiments of the present disclosure; and

FIG. 4A , FIG. 4B , FIG. 4C , FIG. 4D , FIG. 4E and FIG. 4F illustrate a method of manufacturing a semiconductor package device in accordance with some embodiments of the present disclosure.

Common reference numerals are used throughout the drawings and the detailed description to indicate the same or similar elements. The present disclosure will be more apparent from the following detailed description taken in conjunction with the accompanying drawings.

FIG. 1 illustrates a cross-sectional view of a semiconductor package device 1 in accordance with some embodiments of the present disclosure. The semiconductor package device 1 includes a substrate 10 , electronic components 11 a , 11 b and an interconnection component 12 .

The substrate 10 may be a flexible substrate or a rigid substrate, depending upon the specific application. In some embodiments, the substrate 10 includes a plurality of electrical traces disposed therein. In some embodiments, an external contact layer is also formed or disposed on the substrate 10 . In some embodiments, the external contact layer includes a ball grid array (BGA). In other embodiments, the external contact layer includes an array such as, but not limited to, a land grid array (LGA) or an array of pins (PGA). In some embodiments, the external contact layer includes solder balls 10 b , which are used and are composed of lead or are lead free (e.g., including such materials as alloys of gold and tin solder or silver and tin solder).

Electronic components 11 a , 11 b are disposed over the substrate 10 . Each of the electronic components 11 a , 11 b includes a plurality of semiconductor devices, such as, but not limited to, transistors, capacitors and resistors interconnected together by a die interconnection structure into functional circuits to thereby form an integrated circuit. As will be understood to those skilled in the art, the device side of the semiconductor die includes an active portion including integrated circuitry and interconnections. The electronic components 11 a , 11 b may be any suitable integrated circuit device including, but not limited to, a microprocessor (e.g., single or multi-core), a memory device, a chipset, a graphics device, or an application-specific integrated circuit (ASIC) according to several different embodiments. In some embodiments, the electronic component 11 a is a high bandwidth memory (HBM) and the electronic component 11 b is an ASIC.

Each of the electronic components 11 a , 11 b includes a plurality of electrical contacts 11 p 1 , 11 p 2 to provide electrical connections between the electronic components 11 a , 11 b and other electronic components. In some embodiments, the electrical contacts 11 p 1 , 11 p 2 and the active sides of the electronic components 11 a , 11 b are covered or encapsulated by an underfill 11 f . In some embodiments, the underfill 11 f includes an epoxy resin, a molding compound (e.g., an epoxy molding compound or other molding compound), a polyimide, a phenolic compound or material, a material including a silicone dispersed therein, or a combination thereof.

The interconnection component 12 is disposed between the electronic components 11 a , 11 b and the substrate 10 to provide electrical connections therebetween. In some embodiments, the interconnection component 12 is a fan-out structure. The interconnection component 12 includes a first interconnection layer 14 , a second interconnection layer 13 , a passivation layer 15 and electrical contacts 16 .

The first interconnection layer 14 includes electrical contacts (such as micro-pads) to which the electronic components 11 a , 11 b are electrically connected. In some embodiments, the first interconnection layer 14 is a dielectric layer or a non-silicon interposer (e.g., an organic interposer) and includes a plurality of conductive connections 14 m 1 , 14 m 2 embedded therein. In some embodiments, the conductive connection 14 m 2 is referred to as a second interconnection structure, and the conductive connection 14 m 1 is referred to as a second interconnection structure or a third interconnection structure. The first interconnection layer 14 covers or encapsulates the second interconnection layer 13 . For example, the first interconnection layer 14 is disposed on and adjacent to the second interconnection layer 13 .

The second interconnection layer 13 (e.g., also referred to as a first interconnection structure) includes a plurality of conductive connections (or a redistribution layer (RDL)) 13 m therein. A portion of the conductive connections 14 m 1 of the first interconnection layer 14 is electrically connected to the conductive connections 13 m of the second interconnection layer 13 . For example, the conductive connections 14 m 1 that are electrically connected to the electronic components 11 a , 11 b are electrically connected to the conductive connections 13 m of the second interconnection layer 13 . The second interconnection layer 13 provides interconnections between the electronic components 11 a and 11 b . For example, the second interconnection layer 13 can serve as a bridge between the electronic components 11 a and 11 b.

In some embodiments, the pitch (e.g., the line width and line space (L/S)) of the conductive connection 13 m of the second interconnection layer 13 is less than that of the conductive connections 14 m 1 , 14 m 2 of the first interconnection layer 14 . For example, the conductive connection 13 m of the second interconnection layer 13 is a fine-pitch interconnection or fine line (e.g., less than about 1 micrometer (μm)), and the conductive connections 14 m 1 , 14 m 2 of the first interconnection layer 14 are coarse-pitch interconnections or coarse lines (e.g., greater than about 1 μm). In some embodiments, a thickness D 1 of the second interconnection layer 13 is in a range from about 10 μm to about 20 μm. In some embodiments, a density of the second interconnection layer 13 is larger than a density of the conductive connections 14 m 1 , 14 m 2 . In some embodiments, a top surface of the conductive connection 14 m 1 is substantially coplanar with a top surface of the conductive connection 14 m 2 . In some embodiments, a diameter of the conductive connection 14 m 1 is less than a diameter of the conductive connection 14 m 2 .

In comparable semiconductor package devices, an interposer (e.g., a through silicon via (TSV) interposer) is used to provide electrical interconnections between two dies. However, fine-pitch interconnection may be used in a small portion of the interposer (e.g., the area between two dies). Most of the regions of the interposer are designed for interconnection with relatively great pitch. Therefore, it may take great cost to use the TSV interposer to provide electrical interconnections. In accordance with some embodiments, the fine-pitch interconnection (e.g., the conductive connection 13 m of the second interconnection layer 13 ) is provided at a predetermined area (e.g., the area between the electronic components 11 a and 11 b ), and the remaining area is provided with coarse-pitch interconnections (e.g., the conductive connections 14 m 1 , 14 m 2 ). For example, the fine-pitch interconnection structure is embedded within the coarse-pitch interconnection structure. Therefore, it is unnecessary to use a TSV interposer to provide interconnections between two dies, which would reduce the thickness of the semiconductor package device and the manufacturing cost.

The first interconnection layer 14 and the second interconnection layer 13 are disposed on the passivation layer 15 . The passivation layer 15 encapsulates or covers a portion of the first interconnection layer 14 and the second interconnection layer 13 and exposes conductive contacts of the first interconnection layer 14 and the second interconnection layer 13 . In some embodiments, the passivation layer 15 includes silicon oxide, silicon nitride, gallium oxide, aluminum oxide, scandium oxide, zirconium oxide, lanthanum oxide or hafnium oxide.

A conductive layer 16 u (e.g., under bump metallurgy (UBM)) contacts the exposed portions of the conductive contacts of the first interconnection layer 14 and the second interconnection layer 13 . The electrical contacts 16 electrically contact the conductive layer 16 u . The first interconnection layer 14 and the second interconnection layer 13 are electrically connected to the substrate 10 through electrical contacts 16 (such as Controlled Collapse Chip Connection (C4) pads). In some embodiments, the electrical contacts 16 can be covered or encapsulated by an underfill 16 f.

FIG. 2A illustrates a cross-sectional view of a semiconductor package device 2 A in accordance with some embodiments of the present disclosure. The semiconductor package device 2 A includes a substrate 20 , electronic components 21 a , 21 b and an interconnection component 22 .

The substrate 20 may be a flexible substrate or a rigid substrate, depending upon the specific application. In some embodiments, the substrate 20 includes a plurality of electrical traces disposed therein. In some embodiments, an external contact layer is also formed or disposed on the substrate 20 . In some embodiments, the external contact layer includes a BGA. In other embodiments, the external contact layer includes an array, such as, but not limited to, an LGA or a PGA. In some embodiments, the external contact layer includes solder balls 20 b , which are used and are composed of lead or are lead free (e.g., including such materials as alloys of gold and tin solder or silver and tin solder).

Electronic components 21 a , 21 b are disposed over the substrate 20 . Each of the electronic components 21 a , 21 b includes a plurality of semiconductor devices, such as, but not limited to, transistors, capacitors and resistors interconnected together by a die interconnection structure into functional circuits to thereby form an integrated circuit. As will be understood to those skilled in the art, the device side of the semiconductor die includes an active portion including integrated circuitry and interconnections. The electronic components 21 a , 21 b may be any suitable integrated circuit device including, but not limited to, a microprocessor (e.g., single or multi-core), a memory device, a chipset, a graphics device, or an ASIC according to several different embodiments. In some embodiments, the electronic component 21 a is an HBM and the electronic component 21 b is an ASIC.

Each of the electronic components 21 a , 21 b includes a plurality of electrical contacts 21 p 1 , 21 p 2 to provide electrical connections between the electronic components 21 a , 21 b and other electronic components. In some embodiments, the electronic components 21 a , 21 b are covered or encapsulated by a package body 24 b . In some embodiments, the package body 24 b includes an epoxy resin including filler therein, a molding compound (e.g., an epoxy molding compound or other molding compound), a polyimide, a phenolic compound or material, a material including a silicone dispersed therein, or a combination thereof.

The interconnection component 22 is disposed between the electronic components 21 a , 21 b and the substrate 20 to provide electrical connections therebetween. In some embodiments, the interconnection component 22 is a fan-out structure. The interconnection component 22 includes an interconnection layer 23 , a package body 24 a , a passivation layer 25 , a dielectric layer 27 and electrical contacts 26 .

The package body 24 a includes a plurality of conductive connections 24 m 1 , 24 m 2 embedded therein. In some embodiments, the conductive connection 24 m 2 is referred to as a second interconnection structure, and the conductive connection 24 m 1 is referred to as a third interconnection structure. The package body 24 a covers or encapsulates the interconnection layer 23 . For example, the package body 24 a is disposed on and adjacent to the interconnection layer 23 . The dielectric layer 27 is disposed on the package body 24 a and includes electrical contacts (such as micro-pads) to which the electronic components 21 a , 21 b are electrically connected.

The interconnection layer 23 (e.g., also referred to as a first interconnection structure) is disposed on a silicon layer 23 s . The interconnection layer 23 includes a plurality of conductive connections 23 m therein. A portion of the conductive connections 24 m 1 is electrically connected to the conductive connection 23 m of the interconnection layer 23 . For example, the conductive connections 24 m 1 that are electrically connected to the electronic components 21 a , 21 b are electrically connected to the conductive connection 23 m of the interconnection layer 23 . The interconnection layer 23 provides interconnections between the electronic components 21 a and 21 b . For example, the interconnection layer 23 can serve as a bridge between the electronic components 21 a and 21 b.

In some embodiments, the pitch (e.g., the L/S) of the conductive connection 23 m of the interconnection layer 23 is less than that of the conductive connections 24 m 1 , 24 m 2 embedded within the package body 24 a . For example, the conductive connection 23 m of the interconnection layer 23 is a fine-pitch interconnection or fine line (e.g., less than about 1 μm), and the conductive connections 24 m 1 , 24 m 2 within the package body 24 a are coarse-pitch interconnections or coarse lines (e.g., greater than about 1 μm).

In comparable semiconductor package devices, an interposer (e.g., a TSV interposer) is used to provide electrical interconnections between two dies. However, fine-pitch interconnection is used in a small portion of the interposer (e.g., the area between the two dies). Most of the regions of the interposer are designed for interconnection with relatively great pitch. Therefore, it may take great cost to use the TSV interposer to provide electrical interconnections. In accordance with some embodiments, the fine-pitch interconnection (e.g., the conductive connection 23 m of the interconnection layer 23 ) is provided at a predetermined area (e.g., the area between the electronic components 21 a and 21 b ), and the remaining area is provided with coarse-pitch interconnection (e.g., the conductive connections 24 m 1 , 24 m 2 ). For example, the fine-pitch interconnection structure is embedded within the coarse-pitch interconnection structure. Therefore, it is unnecessary to use a TSV interposer to provide interconnections between the two dies, which would reduce the thickness of the semiconductor package device and the manufacturing cost.

The package body 24 a and the silicon layer 23 s are disposed on the passivation layer 25 . The passivation layer 25 encapsulates or covers a portion of the package body 24 a and the silicon layer 23 s and exposes the conductive connections 24 m 2 and the silicon layer 23 s . In some embodiments, the passivation layer 25 includes silicon oxide, silicon nitride, gallium oxide, aluminum oxide, scandium oxide, zirconium oxide, lanthanum oxide or hafnium oxide.

A conductive layer 26 u (e.g., UBM) contacts the exposed portions of the conductive connections 24 m 2 and the silicon layer 23 s . The electrical contacts 26 electrically contact the conductive layer 26 u . The conductive connections 24 m 2 and the silicon layer 23 s are electrically connected to the substrate 20 through electrical contacts 26 (such as C4 pads). In some embodiments, the electrical contacts 26 can be covered or encapsulated by an underfill 26 f.

FIG. 2B illustrates a cross-sectional view of a semiconductor package device 2 B in accordance with some embodiments of the present disclosure. The semiconductor package device 2 B is similar to the semiconductor package device 2 A except that in FIG. 2B , the interconnection layer 23 is replaced by a plurality of metal pillars 29 .

The metal pillars 29 are electrically connected to the electronic components 21 a , 21 b through conductive contacts within the dielectric layer 27 . The metal pillars 29 provide interconnections between the electronic components 21 a and 21 b . For example, the conductive pillars 29 can serve as a bridge between the electronic components 21 a and 21 b . In some embodiments, the pitch (e.g., the L/S) of the metal pillar 29 is less than the conductive connection 24 m 2 embedded within the package body 24 a . In some embodiments, the metal pillars 29 include copper studs.

FIGS. 3A, 3B, 3C, 3D, 3E, 3F, 3G and 3H illustrate cross-sectional views of a semiconductor structure fabricated at various stages, in accordance with some embodiments of the present disclosure. Various figures have been simplified for a better understanding of the aspects of the present disclosure.

Referring to FIG. 3A , a carrier 30 ′ is provided. In some embodiments, the carrier 30 ′ may be a glass carrier or any other type of suitable carrier. An interconnection layer 33 is disposed over the carrier 30 ′. In some embodiments, the interconnection layer 33 is attached to the carrier 30 ′ through an adhesive layer (or a release film) 30 a on the carrier 30 ′. In some embodiments, the interconnection layer 33 does not completely cover the carrier 30 ′. For example, the interconnection layer 33 covers a portion of the carrier 30 ′ and exposes another portion of the carrier 30 ′.

The interconnection layer 33 includes a plurality of conductive connections therein. In some embodiments, the conductive connections of the interconnection layer 33 are fine-pitch interconnections or fine lines (e.g., less than about 1 μm). The interconnection layer 33 includes a silicon layer 33 s disposed thereon. In some embodiments, a metal layer 33 m is disposed between the interconnection layer 33 and the carrier 30 ′. The metal layer 33 m may include, for example, titanium (Ti), copper (Cu), tin-silver (SnAg) or other suitable metals or alloys.

Referring to FIG. 3B , the silicon layer 33 s is removed from the interconnection layer 33 . In some embodiments, the silicon layer 33 s can be removed by etching or by other suitable processes.

A dielectric layer 34 is formed or disposed on the interconnection layer 33 and the portion of the carrier 30 ′ exposed from the interconnection layer 33 . The dielectric layer 34 includes a plurality of openings 34 h 1 , 34 h 2 to expose a portion of the interconnection layer 33 and a portion of the carrier 30 ′ (or adhesive layer 30 a ). For example, the opening 34 h 1 exposes the conductive connections of the interconnection layer 33 . In some embodiments, the dielectric layer 34 is formed by bumping or by other suitable processes.

Referring to FIG. 3C , a seed layer 34 s is formed or disposed on the dielectric layer 34 and within the openings 34 h 1 , 34 h 2 . For example, the seed layer 34 s is formed or disposed on a top surface of the dielectric layer 34 and sidewalls of each opening 34 h 1 , 34 h 2 . In some embodiments, the seed layer 34 s is formed of Ti, Cu or other suitable metals or alloys.

Referring to FIG. 3D , conductive materials are formed or disposed within the openings 34 h 1 , 34 h 2 to form conductive connections (or conductive pillars) 34 m 1 , 34 m 2 . The conductive connection 34 m 1 electrically connects to the conductive connection of the interconnection layer 33 that is exposed from the dielectric layer 34 . In some embodiments, the conductive connections 34 m 1 , 34 m 2 are formed by electroplating or by other suitable techniques. In some embodiments, the conductive connections 34 m 1 , 34 m 2 are coarse-pitch interconnections or coarse lines (e.g., less than about 1 μm).

Referring to FIG. 3E , the seed layer 34 s is removed from the top surface of the dielectric layer 34 . In some embodiments, the seed layer 34 s is removed by etching or by other suitable processes.

Referring to FIG. 3F , electronic components 31 a , 31 b are formed or disposed on the dielectric layer 34 and electrically connected to the conductive connections 34 m 1 , 34 m 2 . Each of the electronic components 31 a , 31 b includes a plurality of electrical contacts 31 p 1 , 31 p 2 to provide electrical connections between the electronic components 31 a , 31 b and conductive connections 34 m 1 , 34 m 2 . The electronic components 31 a , 31 b may be any suitable integrated circuit device including, but not limited to, a microprocessor (e.g., single or multi-core), a memory device, a chipset, a graphics device, or an ASIC according to several different embodiments. In some embodiments, the electronic component 31 a is an HBM and the electronic component 31 b is an ASIC.

An underfill 31 f is formed or disposed to cover or encapsulate the active side of the electronic components 31 a , 31 b and electrical contacts 31 p 1 , 31 p 2 , and then a reflow process may be carried out. A package body 38 is then formed or disposed to cover or encapsulate the electronic components 31 a , 31 b . In some embodiments, the package body 38 includes an epoxy resin including fillers, a molding compound (e.g., an epoxy molding compound or other molding compound), a polyimide, a phenolic compound or material, a material including a silicone dispersed therein, or a combination thereof.

Referring to FIG. 3G , a portion of the package body 38 is removed so that a backside of each electronic component 31 a , 31 b is exposed from the package body 38 . In some embodiments, the package body 38 can be removed by grinding, etching or by other suitable processes. The carrier 30 ′ is then removed from the dielectric layer 34 and the interconnection layer 33 to expose the conductive connections 34 m 2 and the interconnection layer 33 .

Referring to FIG. 3H , a passivation layer 35 is formed or disposed to cover a portion of the dielectric layer 34 and the interconnection layer 33 and to expose the conductive connections 34 m 2 and the conductive connections of the interconnection layer 33 .

A conductive layer 36 u (e.g., UBM) is formed or disposed to contact the exposed portion of the conductive connections 34 m 2 and the conductive connections of the interconnection layer 33 . Electrical contacts 36 (e.g., a C4 pad) are formed or disposed on the conductive layer 36 u . The electrical contact 36 is then formed or disposed on a substrate 30 to form the semiconductor package device 1 as shown in FIG. 1 .

FIGS. 4A, 4B, 4C, 4D, 4E and 4F illustrate cross-sectional views of a semiconductor structure fabricated at various stages, in accordance with some embodiments of the present disclosure. Various figures have been simplified for a better understanding of the aspects of the present disclosure.

Referring to FIG. 4A , a carrier 40 ′ is provided. In some embodiments, the carrier 40 ′ may be a glass carrier or any other suitable carrier. An interconnection layer 43 is disposed over the carrier 40 ′. In some embodiments, the interconnection layer 43 is attached to the carrier 40 ′ through an adhesive layer (or release film) 40 a on the carrier 40 ′. In some embodiments, the interconnection layer 43 does not completely cover the carrier 40 ′. For example, the interconnection layer 43 covers a portion of the carrier 40 ′ and exposes another portion of the carrier 40 ′.

The interconnection layer 43 includes a plurality of conductive connections 43 m therein. In some embodiments, the conductive connections 43 m of the interconnection layer 43 are fine-pitch interconnections or fine lines (e.g., less than about 1 μm). In some embodiments, a silicon layer 43 s is disposed between the interconnection layer 43 and the carrier 40 ′.

Conductive connections (or conductive pillars) 44 m 1 , 44 m 2 are formed or disposed on the carrier 40 ′ and the interconnection layer 43 . The conductive connection 44 m 1 electrically connects to the conductive connection 43 m of the interconnection layer 43 .

Referring to FIG. 4B , a package body 44 a is formed or disposed to cover or encapsulate the interconnection layer 43 and conductive connections 44 m 1 , 44 m 2 . In some embodiments, the package body 44 a includes an epoxy resin including fillers, a molding compound (e.g., an epoxy molding compound or other molding compound), a polyimide, a phenolic compound or material, a material including a silicone dispersed therein, or a combination thereof.

A portion of the package body 44 a is then removed to expose the conductive connections 44 m 1 , 44 m 2 . For example, after a portion of the package body 44 a is removed, the conductive connections 44 m 1 , 44 m 2 are substantially coplanar with or higher than a top surface of the package body 44 a.

Referring to FIG. 4C , a dielectric layer 47 is formed or disposed on the interconnection layer 43 and the package body 44 a . The dielectric layer includes electrical contacts (such as an RDL or micro-pads) to electrically connect the conductive connections 44 m 1 , 44 m 2 to electronic components formed during the subsequent operations.

Referring to FIG. 4D , electronic components 41 a , 41 b are formed or disposed on the dielectric layer 47 and electrically connected to the electrical contacts of the dielectric layer 47 . Each of the electronic components 41 a , 41 b includes a plurality of electrical contacts 41 p 1 , 41 p 2 to provide electrical connections between the electronic components 41 a , 41 b and the electrical contacts of the dielectric layer 47 . The electronic components 41 a , 41 b may be any suitable integrated circuit device including, but not limited to, a microprocessor (e.g., single or multi-core), a memory device, a chipset, a graphics device, or an ASIC according to several different embodiments. In some embodiments, the electronic component 41 a is an HBM and the electronic component 41 b is an ASIC.

A package body 44 b is formed or disposed on the package body 44 a to cover or encapsulate the electronic components 41 a , 41 b . In some embodiments, the package body 44 b includes an epoxy resin including fillers, a molding compound (e.g., an epoxy molding compound or other molding compound), a polyimide, a phenolic compound or material, a material including a silicone dispersed therein, or a combination thereof. Then a reflow process may be carried out.

Referring to FIG. 4E , the carrier 40 ′ is then removed from the package body 44 a and the silicon layer 43 s to expose the conductive connections 44 m 2 and the silicon layer 43 s.

Referring to FIG. 4F , a passivation layer 45 is formed or disposed to cover a portion of the package body 44 a and the silicon layer 43 s and to expose a portion of the conductive connections 44 m 2 and silicon layer 43 s . Conductive layer 46 u (e.g., UBM) is formed or disposed to contact the exposed portion of the conductive connections 44 m 2 and the silicon layer 43 s . Electrical contacts 46 (e.g., a C4 pad) are formed or disposed on the conductive layer 46 u . The electrical contact 46 is then formed or disposed on a substrate 40 to form the semiconductor package device 2 A as shown in FIG. 2A .

As used herein, the terms “approximately,” “substantially,” “substantial” and “about” are used to describe and account for small variations. When used in conjunction with an event or circumstance, the terms can refer to instances in which the event or circumstance occurs precisely as well as instances in which the event or circumstance occurs to a close approximation. For example, when used in conjunction with a numerical value, the terms can refer to a range of variation less than or equal to ±10% of that numerical value, such as less than or equal to ±5%, less than or equal to ±4%, less than or equal to ±3%, less than or equal to ±2%, less than or equal to ±1%, less than or equal to ±0.5%, less than or equal to ±0.1%, or less than or equal to ±0.05%. For example, two numerical values can be deemed to be “substantially” the same if a difference between the values is less than or equal to ±10% of an average of the values, such as less than or equal to ±5%, less than or equal to ±4%, less than or equal to ±3%, less than or equal to ±2%, less than or equal to ±1%, less than or equal to ±0.5%, less than or equal to ±0.1%, or less than or equal to ±0.05%. For example, “substantially” parallel can refer to a range of angular variation relative to 0° that is less than or equal to ±10°, such as less than or equal to ±5°, less than or equal to ±4°, less than or equal to ±3°, less than or equal to ±2°, less than or equal to ±1°, less than or equal to ±0.5°, less than or equal to ±0.1°, or less than or equal to ±0.05°. For example, “substantially” perpendicular can refer to a range of angular variation relative to 90° that is less than or equal to ±10°, such as less than or equal to ±5°, less than or equal to ±4°, less than or equal to ±3°, less than or equal to ±2°, less than or equal to ±1°, less than or equal to ±0.5°, less than or equal to ±0.1°, or less than or equal to ±0.05°.

Two surfaces can be deemed to be coplanar or substantially coplanar if a displacement between the two surfaces is no greater than 5 μm, no greater than 2 μm, no greater than 1 μm, or no greater than 0.5 μm.

As used herein, the terms “conductive,” “electrically conductive” and “electrical conductivity” refer to an ability to transport an electric current. Electrically conductive materials typically indicate those materials that exhibit little or no opposition to the flow of an electric current. One measure of electrical conductivity is Siemens per meter (S/m). Typically, an electrically conductive material is one having a conductivity greater than approximately 10 4 S/m, such as at least 10 5 S/m or at least 10 6 S/m. The electrical conductivity of a material can sometimes vary with temperature. Unless otherwise specified, the electrical conductivity of a material is measured at room temperature.

In the description of some embodiments, a component provided “on” or “over” another component can encompass cases where the former component is directly on (e.g., in physical contact with) the latter component, as well as cases where one or more intervening components are located between the former component and the latter component.

While the present disclosure has been described and illustrated with reference to specific embodiments thereof, these descriptions and illustrations do not limit the present disclosure. It can be clearly understood by those skilled in the art that various changes may be made, and equivalent components may be substituted within the embodiments without departing from the true spirit and scope of the present disclosure as defined by the appended claims. The illustrations may not necessarily be drawn to scale. There may be distinctions between the artistic renditions in the present disclosure and the actual apparatus, due to variables in manufacturing processes and such. There may be other embodiments of the present disclosure which are not specifically illustrated. The specification and drawings are to be regarded as illustrative rather than restrictive. Modifications may be made to adapt a particular situation, material, composition of matter, method, or process to the objective, spirit and scope of the present disclosure. All such modifications are intended to be within the scope of the claims appended hereto. While the methods disclosed herein have been described with reference to particular operations performed in a particular order, it can be understood that these operations may be combined, sub-divided, or re-ordered to form an equivalent method without departing from the teachings of the present disclosure. Therefore, unless specifically indicated herein, the order and grouping of the operations are not limitations of the present disclosure.