Acoustic-wave device with active calibration mechanism

This application claims the benefits of Taiwan application Serial No. 105107942, filed Mar. 15, 2016 and Taiwan application Serial No. 105107944, filed Mar. 15, 2016, the subject matters of which are incorporated herein by reference.

The invention relates in general to an acoustic-wave device, and more particularly to an acoustic-wave device with active calibration mechanism.

Referring to FIG. 1 , a schematic diagram of an acoustic-wave device 900 is shown. The acoustic-wave device 900 includes a piezoelectric substrate 910 , a piezo film layer 920 and an interdigitated capacitor structure 930 . Surface acoustic waves are spread on the interdigitated capacitor structure 930 . An electric signal is converted into an acoustic signal by the piezo film layer 920 , and then the acoustic signal is further converted into an electric signal.

Along with the development of the technique of surface acoustic wave, the acoustic-wave device 900 has been used in many fields. For example, the acoustic-wave device 900 can be used as a filter, an oscillator, a transformer and a sensor of a mobile phone. The acoustic-wave device 900 can also be used in the fields of radio and TV, such that the frequency range of radio reception can be very narrow and accurate. Or, the acoustic-wave device 900 can monitor and forecast earthquakes because the surface acoustic wave can be spread on the surface of the earth.

Since the interdigitated capacitor structure 930 and the piezo film layer 920 have different coefficients of thermal expansion, the acoustic-wave device 900 may generate warpage. Referring to FIG. 2A , a schematic diagram of the acoustic-wave device 900 at a low temperature state is shown. When the acoustic-wave device 900 at the low temperature state, the contraction of the interdigitated capacitor structure 930 is greater than that of the piezo film layer 920 , so the two edges of the acoustic-wave device 900 will be warped upward. At the low temperature state, the pitch of the interdigitated capacitor structure 930 is reduced, the signals are shifted towards high frequencies.

Referring to FIG. 2B , a schematic diagram of the acoustic-wave device 900 at a high temperature state is shown. When the acoustic-wave device 900 at the high temperature state, the expansion of the interdigitated capacitor structure 930 is greater than that of the piezo film layer 920 , so the two edges of the acoustic-wave device 900 will be warped downward. At the high temperature state, the pitch of the interdigitated capacitor structure 930 is enlarged, the signals are shifted towards low frequencies.

Referring to FIG. 3A , an insertion loss curve diagram of the acoustic-wave device 900 under different temperatures is shown. The frequency response curve L 11 is an insertion loss curve measured at 20° C. the frequency response curve L 12 is an insertion loss curve measured at 50° C., and the frequency response curve L 13 is an insertion loss curve measured at 85° C. The three frequency response curves L 11 , L 12 and L 13 show that as the temperature increases, the insertion loss gradually drifts towards low frequencies.

Referring to FIG. 3B , a return loss curve diagram of the acoustic-wave device 900 under different temperatures. The frequency response curve L 21 is a return loss curve measured at 20° C., the frequency response curve L 22 is a return loss curve measured at 50° C., and the frequency response curve L 23 is a return loss curve measured at 85° C. The three frequency response curves L 21 , L 22 and L 23 show that as the temperature increases, the return loss gradually drifts towards low frequencies.

Apart from the temperature which may cause signal variation to the acoustic-wave device 900 , errors in the manufacturing process also cause signal variation to the acoustic-wave device 900 . For example, when the pitch of the interdigitated capacitor structure 930 is too small, signals will shift towards high frequencies. On the other hand, when the pitch of the interdigitated capacitor structure 930 is too large, signals will shift towards low frequencies.

As disclosed above, signal variation caused by temperature factor or manufacturing process factor has always been a bottleneck that is hard to overcome. The research personnel in the industries have been dedicated to resolve the bottleneck.

The invention is directed to an acoustic-wave device with active calibration mechanism. A calibration resonator is used to understand a signal variation caused from temperature factor or manufacturing process factor, such that the acoustic-wave device can be actively calibrated.

According to an embodiment of the present invention, an acoustic-wave device with active calibration mechanism is provided. The acoustic-wave device with active calibration mechanism includes at least one acoustic-wave duplexer, a voltage-controlled oscillator (VCO), a frequency discriminator and a control circuit. The acoustic-wave duplexer includes a TX filter and an RX filter. The voltage-controlled oscillator includes a calibration resonator and a tunable negative impedance circuit. The TX filter, the RX filter and the calibration resonator are disposed on the same piezoelectric substrate. The frequency discriminator generates a calibration signal according to a frequency deviation of the calibration resonator. The control circuit is connected to the acoustic-wave duplexer and the frequency discriminator. The control circuit adjusts an operating frequency of the TX filter or an operating frequency of the RX filter according to the calibration signal.

According to another embodiment of the present invention, an acoustic-wave device with active calibration mechanism is provided. The acoustic-wave device with active calibration mechanism includes at least one acoustic-wave duplexer, a phase-locked loop (PLL) and a control circuit. The acoustic-wave duplexer includes a TX filter and an RX filter. The phase-locked loop at least includes a voltage-controlled oscillator (VCO). The voltage-controlled oscillator includes a calibration resonator and a tunable negative impedance circuit. The TX filter, the RX filter and the calibration resonator are disposed on the same piezoelectric substrate. The phase-locked loop generates a calibration signal according to a frequency deviation of the calibration resonator. The control circuit is connected to the acoustic-wave duplexer and the phase-locked loop. The control circuit adjusts an operating frequency of the TX filter or an operating frequency of the RX filter according to the calibration signal.

The above and other aspects of the invention will become better understood with regard to the following detailed description of the preferred but non-limiting embodiment(s). The following description is made with reference to the accompanying drawings.

FIG. 1 (prior art) shows a schematic diagram of an acoustic-wave device.

FIG. 2A (prior art) shows a schematic diagram of the acoustic-wave device at a low temperature state.

FIG. 2B (prior art) shows a schematic diagram of the acoustic-wave device at a high temperature state.

FIG. 3A (prior art) shows an insertion loss curve diagram of the acoustic-wave device under different temperatures.

FIG. 3B (prior art) shows a return loss curve diagram of the acoustic-wave device under different temperatures.

FIG. 4 (prior art) shows a schematic diagram of an acoustic-wave device with active calibration mechanism according to an embodiment of the invention.

FIG. 5 shows a schematic diagram of an acoustic-wave duplexer.

FIG. 6A shows an insertion loss curve diagram of a variable capacitor set at different capacitances.

FIG. 6B shows an insertion loss curve diagram of a variable inductor set at different inductances.

FIGS. 7A to 7C show schematic diagrams of different designs of variable inductors.

FIG. 8 shows a schematic diagram of the digitally adjusted voltage-controlled oscillator of FIG. 4 .

FIG. 9 shows a schematic diagram of an acoustic-wave device with active calibration mechanism according to another embodiment of the invention.

FIG. 10 shows a schematic diagram of the analogically adjusted voltage-controlled oscillator of FIG. 9 .

Referring to FIG. 4 , a schematic diagram of an acoustic-wave device 100 with active calibration mechanism according to an embodiment of the invention is shown. The acoustic-wave device 100 includes at least one acoustic-wave duplexer 110 , a voltage-controlled oscillator (VCO) 120 , a frequency discriminator 130 and a control circuit 140 . The acoustic-wave duplexer 110 includes a TX filter 111 and an RX filter 112 . The TX filter 111 is used for transmitting signals. The RX filter 112 is used for receiving signals. In one embodiment, the acoustic-wave device 100 may include multiple acoustic-wave duplexers 110 for processing the signals of different frequency bands. The multiple acoustic-wave duplexers 110 can be switched using a switch 180 .

Referring to FIG. 5 , a schematic diagram of the acoustic-wave duplexer 110 is shown. The RX filter 112 is connected to a phase shifter 115 . The TX filter 111 includes a plurality of transmitting resonators U 1 , two variable capacitors C 1 and a variable inductor I 1 . The RX filter 112 includes a plurality of receiving resonators U 2 , two variable capacitors C 2 and a variable inductor I 2 . Each of the transmitting resonator U 1 and the receiving resonator U 2 is an interdigitated structure whose pitch may be easily changed due to temperature factor or manufacturing process factor.

Referring to FIG. 6A , an insertion loss curve diagram of the variable capacitor C 1 set at different capacitances is shown. Let the TX filter 111 be taken for example. Given that the variable inductor I 1 is fixed at 1.5 nH, the frequency response curve L 31 is an insertion loss curve obtained when the variable capacitor C 1 is set as 0.25 pF; the frequency response curve L 32 is an insertion loss curve obtained when the variable capacitor C 1 is set as 0.40 pF; the frequency response curve L 33 is an insertion loss curve obtained when the variable capacitor C 1 is set as 0.55 pF. The three frequency response curves L 31 , L 32 and L 33 show that the operating frequency of the TX filter 111 can be changed through the control of the variable capacitor C 1 . Similarly, the operating frequency of the RX filter 112 can also be changed through the control of the variable capacitor C 2 . Thus, as indicated in FIG. 4 , the control circuit 140 can control the variable capacitor C 1 or the variable capacitor C 2 to adjust the operating frequency of the TX filter 111 or the operating frequency of the RX filter 112 .

Referring to FIG. 6B , an insertion loss curve diagram of the variable inductor I 1 set at different inductances is shown. Let the TX filter 111 be taken for example. Given that the variable capacitor C 1 is fixed at 0.25 pF, the frequency response curve L 41 is an insertion loss curve obtained when the variable inductor I 1 is set as 0.5 nH; the frequency response curve L 42 is an insertion loss curve obtained when the variable inductor I 1 is set as 1.5 nH; the frequency response curve L 43 is an insertion loss curve obtained when the variable inductor I 1 is set as 2.5 nH. The three frequency response curves L 41 , L 42 , and L 43 show that the operating frequency of the TX filter 111 can be changed through the control of the variable inductor I 1 . Similarly, the operating frequency of the RX filter 112 can also be changed through the control of the variable inductor I 2 . Thus, as indicated in FIG. 4 , the control circuit 140 can control the variable inductor I 1 or the variable inductor I 2 to adjust the operating frequency of the TX filter 111 or the operating frequency of the RX filter 112 .

Referring to FIGS. 7A to 7C , schematic diagrams of different designs of the variable inductors I 1 and I 2 are shown. In various embodiments, the variable inductors I 1 and I 2 can adopt different designs. As indicated in FIG. 7A , the variable inductors I 1 and I 2 can respectively be realized by a switch-type inductor Ia. As indicated in FIG. 7B , the variable inductors I 1 and I 2 can respectively be realized by an MENS-type inductor Ib. As indicated in FIG. 70 , the variable inductors I 1 and I 2 can respectively be realized by a transformer-type inductor Ic.

Refer to FIG. 4 . The voltage-controlled oscillator 120 includes a calibration resonator U 3 and a tunable negative impedance circuit 121 . The transmitting resonator U 1 (illustrated in FIG. 5 ) of the TX filter 111 , the receiving resonator U 2 (illustrated in FIG. 5 ) of the RX filter 112 and the calibration resonator U 3 are disposed on the same piezoelectric substrate 190 . Since the transmitting resonator U 1 , the receiving resonator U 2 and the calibration resonator U 3 have substantially the same size, the shape and the thickness, and are formed in the same manufacturing process, signal variation. The signal variation occurs to the transmitting resonator U 1 and the receiving resonator U 2 due to temperature factor or manufacturing process factor, may also occur to the calibration resonator U 3 . Thus, how to perform active calibration on the acoustic-wave duplexer 110 can be obtained through the analysis of the calibration resonator U 3 .

Referring to FIG. 8 , a schematic diagram of the digitally adjusted voltage-controlled oscillator 120 of FIG. 4 is shown. The voltage-controlled oscillator 120 includes the calibration resonator U 3 and the tunable negative impedance circuit 121 . The tunable negative impedance circuit 121 includes a plurality of binary capacitors C 3 respectively connected to a transistor T 0 , such that the binary capacitors C 3 can be digitally turned on or off.

Referring to FIG. 4 , the frequency discriminator 130 digitally inputs an adjustment signal S 11 to the tunable negative impedance circuit 121 to control the binary capacitors C 3 to obtain a feedback signal S 12 . By continually adjusting the adjustment signal S 11 and receiving the feedback signal S 12 , the frequency discriminator 130 can obtain a frequency deviation of the calibration resonator U 3 .

The frequency discriminator 130 generates a calibration signal S 13 according to the frequency deviation of the calibration resonator U 3 .

The control circuit 140 is connected to the acoustic-wave duplexer 110 and the frequency discriminator 130 . The control circuit 140 digitally adjusts the operating frequency of the TX filter 111 or the operating frequency of the RX filter 112 according to the calibration signal S 13 . As disclosed above, the control circuit 140 can adjust the operating frequency of the TX filter 111 or the operating frequency of the RX filter 112 using the variable capacitors C 1 and C 2 or the variable inductors I 1 and I 2 .

As disclosed in above embodiments, the acoustic-wave device 100 with active calibration mechanism understands signal variation, which occurs to the transmitting resonator U 1 and the receiving resonator U 2 due to temperature factor or manufacturing process factor, using the calibration resonator U 3 , and accordingly performs active calibration.

Referring to FIG. 9 , a schematic diagram of an acoustic-wave device 200 with active calibration mechanism according to another embodiment of the invention is shown. In the present embodiment, the acoustic-wave device 200 includes at least one acoustic-wave duplexer 110 , a phase-locked loop (PLL) 220 and a control circuit 240 . Relevant descriptions of the acoustic-wave duplexer 110 are already disclosed in FIGS. 5 to 7C , and the similarities are not repeated here.

The phase-locked loop 220 includes a voltage-controlled oscillator 221 , a clock signal source 222 , a first divider 223 , a phase frequency detector (PFD) 224 , a charge pump 225 , a second-order RC filter 226 and a second divider 227 . The clock signal source 222 is used for providing a clock signal. The first divider 223 is connected to the clock signal source 222 . The phase frequency detector 224 is connected to the first divider 223 . The charge pump 225 is connected to the phase frequency detector 224 . The second-order RC filter 226 is connected to the charge pump 225 and the voltage-controlled oscillator 221 . The second divider 227 is connected to the voltage-controlled oscillator 221 and the phase frequency detector 224 .

The phase-locked loop 220 employs a frequency and phase synchronization technique implemented using the feedback control principles for synchronizing a circuit output clock and an external reference clock. When the frequency or phase of the reference clock changes, the phase-locked loop 220 will detect the change and the feedback system of the phase-locked loop 220 will adjust the output frequency until the circuit output clock and the external reference clock are synchronized. Such synchronization is also referred as “phase-locked” synchronization.

In the present embodiment, the voltage-controlled oscillator 221 includes the calibration resonator U 3 and a tunable negative impedance circuit 2211 . Referring to FIG. 10 , a schematic diagram of the analogically adjusted voltage-controlled oscillator 221 of FIG. 9 is shown. Relevant descriptions of the calibration resonator U 3 are already disclosed above, and the similarities are not repeated here. The tunable negative impedance circuit 2211 includes a variable capacitor C 4 . The variable capacitor C 4 can be analogically adjusted to achieve clock synchronization with the phase-locked loop 220 .

Refer to FIG. 9 . When the phase-locked loop 220 achieves clock synchronization, the phase-locked loop 220 can obtain the frequency deviation of the calibration resonator U 3 and generate a calibration signal S 23 .

The control circuit 240 is connected to the acoustic-wave duplexer 110 and the phase-locked loop 220 . The control circuit 240 analogically adjusts the operating frequency of the TX filter 111 or the operating frequency of the RX filter 112 according to the calibration signal S 23 . As disclosed above, the control circuit 240 can adjust the operating frequency of the TX filter 111 or the operating frequency of the RX filter 112 using the variable capacitors C 1 and C 2 or the variable inductors I 1 and I 2 .

According to the above embodiments, the acoustic-wave device 200 with active calibration mechanism understands signal variation, which occurs to the transmitting resonator U 1 and the receiving resonator U 2 due to temperature factor or manufacturing process factor, using the calibration resonator U 3 , and accordingly performs active calibration.

While the invention has been described by way of example and in terms of the preferred embodiment(s), it is to be understood that the invention is not limited thereto. On the contrary, it is intended to cover various modifications and similar arrangements and procedures, and the scope of the appended claims therefore should be accorded the broadest interpretation so as to encompass all such modifications and similar arrangements and procedures.