Semiconductor memory device including pillars

This U.S. non-provisional patent application claims priority under 35 U.S.C. §119(a) to Korean patent application number 10-2016-0106289 filed on Aug. 22, 2016 in the Korean Intellectual Property Office (KIPO), the disclosure of which is herein incorporated by reference in its entirety.

1. Field

Various embodiments of the present disclosure relate generally to a semiconductor memory device and, more particularly, to a semiconductor memory device including pillars passing through a stack.

2. Description of Related Art

Three-dimensional (3D) semiconductor memory devices including memory cells that are arranged in a three dimensional structure are well known in the art. A 3D semiconductor memory device may include a stack including alternating layers of insulating layers and conductive patterns, and vertical channel layers passing through the stack. As the disposition density of the channel layers is increased to improve the degree of integration, various defects may be caused during a manufacturing process of a 3D semiconductor memory device. Hence, improved 3D semiconductor memory devices and methods for making them are desirable.

In an exemplary embodiment of the present disclosure, a semiconductor memory device may include: a first group of pillars having diameters which are gradually increased toward a first side; and interlayer insulating layers and conductive patterns surrounding the pillars of the first group, the interlayer insulating layers and conductive patterns being alternately stacked.

In an exemplary embodiment of the present disclosure, a semiconductor memory device may include: a stack including a first sidewall and a second sidewall that face each other in a first direction; an upper separation pattern disposed between the first sidewall and the second sidewall, and passing through at least portion of the stack from an upper surface of the stack; a first row of pillars passing through the stack and disposed adjacent to the first sidewall or the second sidewall; and an n th row of pillars (n is a natural number of 2 or more) passing through the stack and disposed adjacent to the upper separation pattern, each of the pillars of the n th row having a diameter greater than a diameter of each of the pillars of the first row.

In an exemplary embodiment of the present disclosure, a semiconductor memory device may include: a stack having a first sidewall and a second sidewall facing each other; and a plurality of pillars passing through the stack, wherein distances between the plurality of pillars are gradually reduced toward a center between the first sidewall and the second sidewall.

The above and other features and advantages of the present invention will become more apparent to those skilled in the art to which the present invention belongs by describing in detail various embodiments thereof with reference to the attached drawings in which:

FIG. 1 is a perspective view illustrating a semiconductor memory device according to an exemplary embodiment of the present disclosure;

FIGS. 2A and 2B are plan views illustrating semiconductor memory devices according to exemplary embodiments of the present disclosure;

FIG. 3 is a plan view comparing diameters of pillars of a semiconductor memory device according to an exemplary embodiment of the present disclosure;

FIG. 4 is an enlarged sectional view of region X shown in FIG. 1 ;

FIGS. 5A to 5D are sectional views illustrating a method of manufacturing a semiconductor memory device according to an exemplary embodiment of the present disclosure;

FIG. 6 is a view illustrating variation in gas velocity.

FIG. 7 is a plan view illustrating the distances between the pillars of the semiconductor memory device according to an exemplary embodiment of the disclosure.

FIGS. 8A and 8B are graphs illustrating distances between pillars of a semiconductor memory device and the velocity of gas flowing between the pillars according to an exemplary embodiment of the present disclosure;

FIG. 9 is a block diagram illustrating a memory system according to an exemplary embodiment of the present disclosure; and

FIG. 10 is a block diagram showing a computing system including the memory system illustrated with reference to FIG. 9 .

Hereinafter, embodiments will be described in greater detail with reference to the accompanying drawings. However, it is noted that the present invention may be embodied in different other forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the present invention to those skilled in the art to which the present invention pertains.

In the drawing figures, dimensions may be exaggerated for clarity of illustration. It will be understood that when an element is referred to as being “between” two elements, it can be the only element between the two elements, or one or more intervening elements may also be present. Like reference numerals refer to like elements throughout.

Embodiments are described herein with reference to simplified schematic illustrations of embodiments (and intermediate structures). As such, variations from the shapes of the illustrations as a result, for example, of manufacturing techniques and/or tolerances, are to be expected. Thus, embodiments should not be construed as limited to the particular shapes of regions illustrated herein but may include deviations in shapes that result, for example, from manufacturing. In the drawings, lengths and sizes of layers and regions may be exaggerated for clarity. Like reference numerals in the drawings denote like elements.

Terms such as ‘first’ and ‘second’ may be used to describe various components, but they should not limit the various components. Those terms are only used for the purpose of differentiating a component from other components. For example, a first component may be referred to as a second component, and a second component may be referred to as a first component and so forth without departing from the spirit and scope of the present disclosure. Furthermore, ‘and/or’ may include any one of or a combination of the components mentioned.

The phrase “at least one of . . . and . . . ,” when used herein with a list of items, means a single item from the list or any combination of items in the list. For example, “at least one of A, B, and C” means, only A, or only B, or only C, or any combination of A, b, and C.

Spatially relative terms, such as “under,” “below,” “lower,” “above,” “upper” and the like, may be used herein for ease of description to describe one element or feature's relationship to another element(s) or feature(s) as illustrated in the figures. It will be understood that the spatially relative terms are intended to encompass different orientations of the device in manufacturing, use or operation in addition to the orientation depicted in the figures. For example, if the device in the figures is turned over, elements described as “below” or “under” other elements or features would then be “above” the other elements or features. The device may be otherwise oriented (rotated 90 degrees or at other orientations) and the spatially relative descriptors used herein interpreted accordingly.

The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the present invention. As used herein, singular forms are intended to include the plural forms as well, unless the context clearly indicates otherwise.

It will be further understood that the terms “comprises,” “comprising,” “includes,” and “including” when used in this specification, specify the presence of the stated elements and do not preclude the presence or addition of one or more other elements. As used herein, the term “and/or” includes any and all combinations of one or more of the associated listed items.

Unless otherwise defined, all terms including technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which the present invention belongs in view of the present disclosure. It will be further understood that terms, such as those defined in commonly used dictionaries, should be interpreted as having a meaning that is consistent with their meaning in the context of the present disclosure and the relevant art and will not be interpreted in an idealized or overly formal sense unless expressly so defined herein.

In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present invention. The present invention may be practiced without some or all of these specific details. In other instances, well-known process structures and/or processes have not been described in detail in order not to unnecessarily obscure the present invention.

It is also noted, that in some instances, as would be apparent to those skilled in the relevant art, an element (also referred to as a feature) described in connection with one embodiment may be used singly or in combination with other elements of another embodiment, unless specifically indicated otherwise.

Furthermore, unless defined otherwise, all the terms used in this specification including technical and scientific terms have the same meanings as would be generally understood by those skilled in the related art. The terms defined in generally used dictionaries should be construed as having the same meanings as would be construed in the context of the related art, and unless clearly defined otherwise in this specification, should not be construed as having idealistic or overly formal meanings.

It is also noted that in this specification, “connected/coupled” refers to one component not only directly coupling another component but also indirectly coupling another component through an intermediate component. On the other hand, “directly connected/directly coupled” refers to one component directly coupling another component without an intermediate component.

Various embodiments of the present disclosure are directed to a 3D semiconductor memory device having an improved configuration so that defects during a manufacturing process may be reduced.

FIG. 1 is a perspective view illustrating a 3D semiconductor memory device according to an exemplary embodiment of the present disclosure. The semiconductor memory device may include a 3D nonvolatile memory cell array. In an embodiment, the 3D nonvolatile memory cell array may be a vertical NAND flash memory cell array.

Referring to FIG. 1 , the semiconductor memory device may include stacks ST_A, ST_B and ST_C that are separated from each other by slit insulating layers SSI, pillars 1 P 1 to 1 Pn and 2 P 1 to 2 Pn that pass through each of the stacks ST_A, ST_B and ST_C, multilayer memory patterns ML 1 and ML 2 that surround each of the pillars 1 P 1 to 1 Pn and 2 P 1 to 2 Pn, and a source layer SL that encloses the bottoms of the pillars 1 P 1 to 1 Pn and 2 P 1 to 2 Pn.

The stacks ST_A, ST_B and ST_C may have the same structure. FIG. 1 illustrates only a portion of the semiconductor memory device. In particular, FIG. 1 is focused on the A-stack ST_A for the sake of explanation. Hereinafter, the structure of each of the stacks ST_A, ST_B and ST_C will be described centering on the A-stack ST_A. The A-stack ST_A may have a first sidewall SW 1 and a second sidewall SW 2 that are formed along sidewalls of the slit insulating layers SSI. The first and second sidewalls SW 1 and SW 2 extend vertically in a third direction III above the source layer SL and face each other in a first direction I. The A-stack ST_A may include a plurality of conductive patterns CP 1 to CPk and interlayer insulating layers ILD that are alternately stacked.

The conductive patterns CP 1 to CPk may be used as source select lines SSL, word lines WL and drain select lines DSL, in the recited order starting from the lowermost conductive pattern. In the embodiment of FIG. 1 , there are two source select lines and two drain select lines DSL, however, their number may vary on design. Hence, the two lowermost conductive patterns CP 1 and CP 2 are employed as source select lines and the two uppermost conductive patterns CPk and CPk−1 are employed as drain select lines. The source select lines SSL are coupled to gates of source select transistors. The word lines WL are coupled to gates of memory cells and the drain select lines DSL are coupled to gate of a drain select transistors. The memory cells, the source select transistors and the drain select transistors are formed at the intersections of the corresponding conductive patterns and the pillars.

The conductive pattern CP 1 disposed at a lowermost layer may be used as one of the source select lines SSL. Not only the conductive pattern CP 1 disposed at the lowermost layer but also the conductive pattern CP 2 disposed at a second layer over the lowermost layer may be used as the source select lines SSL. Although not shown, depending on design, some of the conductive patterns disposed over the conductive pattern CP 2 disposed at the second layer may be used as the source select lines SSL.

The conductive pattern CPk disposed at an uppermost layer may be used as one of the drain select lines DSL. Not only the conductive pattern CPk disposed at the uppermost layer but also the conductive pattern CPk−1 disposed at a k−1 th layer under the uppermost layer may be used as the drain select lines DSL. Although not shown, depending on design, some of the conductive patterns disposed under the conductive pattern CPk−1 disposed at the k−1 th layer may be used as the drain select lines DSL. The conductive patterns (for example, CP 3 to CPk−2) disposed between the drain select lines DSL and the source select lines SSL may be used as the word lines WL.

At least a portion of the A-stack ST_A may be penetrated by an upper separation pattern USI. For example, the upper separation pattern USI may thus separate each of the two uppermost conductive patterns (CPk−1 and CPk) into a first drain select line SEL 1 and a second drain select line SEL 2 . The upper separation pattern USI may extend in the second direction II intersecting with the first direction I. Although, in the embodiment of FIG. 1 , the upper separation pattern USI extends in the third direction III to a depth at an equal level with the bottom surface of the second from the top conductive pattern CPk−1, the invention is not limited in this way. For example, generally, the upper separation pattern USI may extend in the third direction III starting from the top surface of the A stack ST_A to the bottom surface of the lowermost conductive pattern that is used as a drain select line DSL. In another embodiment, (not shown), the upper separation pattern USI may extend in the third direction III to pass through the word lines WL and the source select line SSL that are disposed below the first drain select line SEL 1 and the second drain select line SEL 2 . The third direction III refers to a direction which is perpendicular to a horizontal plane defined by the first and second directions I and II.

The upper separation pattern USI is disposed between the first sidewall SW 1 and the second sidewall SW 2 . More particularly, the upper separation pattern USI is disposed between the first and second sidewalls SW 1 and SW 2 at substantially equal distances from each. The first drain select line SEL 1 extends from the first sidewall SW 1 toward the upper separation pattern USI, and the second drain select line SEL 2 extends from the second sidewall SW 2 toward the upper separation pattern USI. The first drain select line SEL 1 and the second drain select line SEL 2 that are disposed at the same level are spaced apart from each other by the upper separation pattern USI.

The word lines WL and the source select lines SSL are stacked below the first and second drain select lines SEL 1 and SEL 2 . The word lines WL and the source select lines SSL may extend in the first direction I from the first sidewall SW 1 to the second sidewall SW 2 .

The A-stack ST_A may further include liner layers LL that are formed along surfaces of the conductive patterns CP 1 to CPk. More specifically, liner layers LL are formed along top and bottom surfaces of each of the conductive patterns CP 1 to CPk. There are no liner layers LL formed on sidewalls of the conductive patterns CP 1 to CPk toward the first sidewall SW 1 and second sidewall SW 2 . Thus, the line layers LL are open toward the first sidewall SW 1 and the second sidewall SW 2 . The liner layers LL extend between each of the sidewalls of the upper separation pattern USI and the conductive patterns CPk and CPk−1 The liner layers LL also extend on sidewalls of the pillars 1 P 1 to 1 Pn and 2 P 1 to 2 Pn, i.e., between the sidewalls of the pillars 1 P 1 to 1 Pn and 2 P 1 to 2 Pn and the conductive patterns CP 1 to CPk.

The pillars 1 P 1 to 1 Pn and 2 P 1 to 2 Pn may be surrounded by the interlayer insulating layers ILD and the conductive patterns CP 1 to CPk. The pillars 1 P 1 to 1 Pn and 2 P 1 to 2 Pn may be classified into a first and a second group of pillars GR 1 and GR 2 .

The first group of pillars GR 1 may be disposed between the first sidewall SW 1 and the upper separation pattern USI. The first group of pillars GR 1 may include a first row of pillars 1 P 1 to an n th row of pillars ( 1 Pn; n is a natural number of 2 or more). The pillars of the first group GR 1 may be surrounded by the first drain select line SEL 1 . Multiple rows of pillars 1 P 2 to 1 Pn−1 may be disposed in a zigzag manner between the first row of pillars 1 P 1 and the n th row of pillars 1 Pn.

The pillars of the second group GR 2 may be disposed between the second sidewall SW 2 and the upper separation pattern USI. The pillars of the second group GR 2 may include a first row of pillars 2 P 1 to an n th row of pillars 2 Pn. The pillars of the second group GR 2 may be surrounded by the second drain select line SEL 2 . Multiple rows of pillars 2 P 2 to 2 Pn−1 may be disposed in a zigzag manner between the first row of pillars 2 P 1 and the n th row of pillars 2 Pn.

The pillars of the first group GR 1 may be arranged to be symmetrical with the pillars of the second group GR 2 based on the upper separation pattern USI. Each of the word lines WL may extend to surround the pillars of the first group GR 1 and the pillars of the second group GR 2 .

Each of the pillars 1 Pn or 2 Pn arranged in the no row which is adjacent to the upper separation pattern USI may have a diameter that is larger than that of each of the pillars 1 P 1 arranged in the first row adjacent to the first sidewall SW 1 or each of the pillars 2 P 1 arranged in the first row adjacent to the second sidewall SW 2 . Moreover, the pillars of the first group GR 1 and the pillars of the second group GR 2 may gradually increase in diameter as they are close to the upper separation pattern USI. In other words, the pillars of the first group GR 1 may have diameters which are gradually increased toward a first side and the pillars of the second group GR 2 may have diameters which are gradually increased toward a second side. The first side and the second sides are opposite.

The multilayer source layer SL may include a first source layer SL 1 and a second source layer SL 2 . The second source layer SL 2 may be stacked on the first source layer SL 1 . The multilayer source layer SL may be disposed under the stacks ST_A, ST_B and ST_C. The slit insulating layers SSI may extend onto an upper surface of the second source layer SL 2 . The first source layer SL 1 and the second source layer SL 2 may be formed of various conductive materials. For example, the first source layer SL 1 may include at least one of a low-resistance metal layer and a silicon layer, and the second source layer SL 2 may include a silicon layer.

Each of the multilayer memory patterns ML 1 and ML 2 may include a tunnel insulating layer, a data storage layer and a first blocking insulating layer. The multilayer memory patterns ML 1 and ML 2 may be divided into a first multilayer memory pattern ML 1 and a second multilayer memory pattern ML 2 . The first multilayer memory pattern ML 1 may extend along an interface between each of the pillars 1 P 1 to 1 Pn and 2 P 1 to 2 Pn and the A-stack ST_A. The pillars 1 P 1 to 1 Pn and 2 P 1 to 2 Pn may extend into the first source layer SL 1 . The second multilayer memory pattern ML 2 may extend along an interface between the first source layer SL 1 and each of the pillars 1 P 1 to 1 Pn and 2 P 1 to 2 Pn. The second source layer SL 2 extends between the first multilayer memory pattern ML 1 and the second multilayer memory pattern ML 2 , and comes into contact with sidewalls of respective channel layers CH of the pillars 1 P 1 to 1 Pn and 2 P 1 to 2 Pn.

Although not illustrated in detail, the structure of the A-stack ST_A may be the same as that of the other stacks ST_B and ST_C.

Although not shown, an upper surface of the channel layer CH of each of the pillars 1 P 1 to 1 Pn and 2 P 1 to 2 Pn may be coupled to a bit line. A memory string may be formed along the channel layer CH disposed between the bit line and the multilayer source layer SL. The memory string may include drain select transistors coupled to the drain select lines DSL, source select transistors coupled to the source select lines SSL and the memory cells coupled to the word lines WL.

FIGS. 2A and 2B are plan views illustrating semiconductor memory devices according to exemplary embodiments of the present disclosure. For the sake of explanation, FIGS. 2A and 2B are focused on the A-stack ST_A.

Referring to FIGS. 2A and 2B , the A-stack ST_A is penetrated by the pillars of the first group GR 1 and the pillars of the second group GR 2 , as illustrated in FIG. 1 . At least a portion of the A-stack ST_A is penetrated by the upper separation pattern USI, as illustrated in FIG. 1 . As illustrated in FIG. 1 , the A-stack ST_A may have the first sidewall SW 1 and the second sidewall SW 2 that are formed along sidewalls of the slit insulating layers SSI.

The arrangement and diameters of the pillars in the first to n th rows 1 P 1 to 1 Pn that form the first group of pillars GR 1 , and the arrangement and diameters of the pillars in the first to n th rows 2 P 1 to 2 Pn that form the second group of pillars GR 2 are the same as those described with reference of FIG. 1 .

A trench T and dummy holes DH 1 or DH 2 may be filled with the upper separation pattern USI. The trench T extends in the second direction II. The dummy holes DH 1 or DH 2 are arranged to be spaced apart from each other in the second direction II, and are overlapped with the trench T. The depth of the trench T is the same as that of the upper separation pattern USI illustrated in FIG. 1 . The dummy holes DH 1 or DH 2 may include an upper portion that is filled with the upper separation pattern USI, and a lower portion that is filled with dummy patterns (not shown). Although not shown, the lower portion of each of the dummy holes DH 1 or DH 2 and each of the dummy patterns may extend to pass through the A-stack ST_A from a lower surface of the upper separation pattern USI. That is, the dummy holes DH 1 or DH 2 may be formed to a depth greater than that of the upper separation pattern USI and the trench T. The dummy holes DH 1 or DH 2 may have various planar structures.

For example, as shown in FIG. 2A , each of the dummy holes DH 1 may be formed in a circular shape in which an a-axis and a b-axis crossing each other have the same length. Alternatively, as shown in FIG. 28 , each of the dummy holes DH 2 may be formed in an elliptical shape in which an a-axis and a b′-axis crossing each other have different lengths. Each of the dummy holes DH 2 has an elliptical shape formed such that the length of the b′-axis extending in a second direction (II; a direction in which the trench T extends) is longer than that of the a-axis extending in a first direction I intersecting with the second direction II. In the case where each of the dummy holes DH 2 is formed in an elliptical shape, an operation of forming the dummy holes DH 2 such that the distance between the dummy holes DH 2 is less than the distance between the pillars of the n th row 1 Pn or 2 Pn adjacent thereto can be facilitated.

The dummy holes DH 1 , DH 2 may be spaced apart from the pillars of the first group GR 1 and the pillars of the second group GR 2 by distances less than the distances between the pillars of the first group GR 1 and the distances between the pillars of the second group GR 2 .

In an exemplary embodiment of the present inventive concept, a plurality of pillars 1 P 1 , 1 P 2 , 1 Pn−1, and 1 Pn may include a plurality of first pillars 1 P 1 arranged in a first row adjacent to the first sidewall SW 1 and arranged at a first pitch P 1 P, a plurality of second pillars 1 P 2 arranged in a second row and arranged at a second pitch P 2 P, a plurality of n−1 th pillars 1 Pn−1 arranged in a n−1 th row and arranged at a n−1 th pitch Pn−1P, and a plurality of n th pillars 1 Pn arranged in a n th row adjacent to the center between the first sidewall and the second sidewall and arranged at a nm pitch PnP. The second row may be disposed between the first row and the n th row. The n−1 th row may be disposed between the second row and the n th row. The first pitch P 1 P, the second pitch P 2 P, the n−1 th pitch Pn−1P, and the n th pitch may be substantially the same.

FIG. 3 is a plan view comparing the diameters of pillars of a semiconductor memory device according to an exemplary embodiment of the present disclosure.

The first row of pillars 1 P 1 or 2 P 1 shown in FIGS. 1, 2A and 2B includes a plurality of first pillars P 1 arranged in a row along the second direction II. The second row of pillars 1 P 2 or 2 P 2 shown in FIGS. 1, 2A and 28 includes a plurality of second pillars P 2 arranged in a row along the second direction II. The n−1 th row of pillars 1 Pn−1 or 2 Pn−1 shown in FIGS. 1, 2A and 2B includes a plurality of n−1 th pillars Pn−1 arranged in a row along the second direction II. The n th row of pillars 1 Pn or 2 Pn includes a plurality of n th pillars Pn arranged in a row along the second direction II.

The diameter of the first pillar P 1 is defined as ‘R 1 ’, the diameter of the second pillar P 2 is defined as ‘R 2 ’, the diameter of the n−1 th pillar Pn−1 is defined as ‘Rn−1’ and the diameter of the n th pillar Pn is defined as ‘Rn’ In this case, the size relationship between the diameters of the first to n th pillar P 1 to Pn may be defined as R 1 <R 2 <Rn−1<Rn.

As described with reference to FIGS. 1 to 3 , the diameter of the pillars passing through the stack may vary. This may be advantageous, because it allows controlling of the flow velocity of gases that are drawn to form the conductive patterns during a manufacturing of the semiconductor memory device and reduces the possibility of process failure. Detailed explanation thereof will be described later herein with reference to FIGS. 5D, 6, 7, 8A and 8B .

FIG. 4 is an enlarged sectional view of region X of FIG. 1 .

Referring to FIG. 4 , each of the pillars, for example, 1 P 2 , 1 Pn, 2 Pn and 2 P 2 , may include a channel layer CH. The channel layer CH may have a tubular cross-section surrounding a core insulating layer CO filling the space within the channel layer CH, as illustrated in the embodiment of FIG. 4 . Hence, in the illustrated embodiment, each of the pillars 1 P 2 , 1 Pn, 2 Pn and 2 P 2 includes a tubular channel layer CH forming the outer surface of each of the pillars 1 P 2 , 1 Pn, 2 Pn and 2 P 2 , and a core insulating layer CO filling the inside space of the tubular channel layer CH. States otherwise, the core insulating layer CO may fill the central region of each of the pillars 1 P 2 , 1 Pn, 2 Pn and 2 P 2 , and be surrounded by the channel layer CH. In an alternative embodiment, the channel layer CH may be a rod filling the entire space from the surface of each pillar 1 P 2 , 1 Pn, 2 Pn, 2 P 2 to the central region thereof.

A first multilayer memory pattern ML 1 may surround each of the pillars 1 P 2 , 1 Pn, 2 Pn and 2 P 2 . More specifically, the first multilayer memory pattern ML 1 may include a tunnel insulating layer TL that surrounds the channel layer CH, a data storage layer DL that surrounds the tunnel insulating layer TL, and a first blocking insulating layer BL 1 that surrounds the data storage layer DL. The tunnel insulating layer TL may be formed of a silicon oxide layer making charge tunneling possible. The data storage layer DL may be formed of a silicon nitride layer capable of trapping charges. The first blocking insulating layer BL 1 may be formed of a silicon oxide layer capable of blocking charges.

Each of the liner layers LL that surround the conductive patterns (for example, CPk−1) may include a barrier metal layer BM. The barrier metal layer BM may be or include a material layer such as a titanium nitride layer capable of preventing metal diffusion.

Each of the liner layers LL may further include a second blocking insulating layer BL 2 . The second blocking insulating layer BL 2 may not be formed in some cases. To prevent a back tunneling phenomenon, the second blocking insulating layer BL 2 may be formed of a material layer having a work function larger than that of the first blocking insulating layer BL 1 . For example, the second blocking insulating layer BL 2 may be formed of an aluminum oxide layer.

Each of the liner layers LL may have an opening pattern toward a slit insulating layer SSI. In detail, the barrier metal layer BM may have a pattern in which it is open toward the slit insulating layer SSI. The barrier metal layer BM may be formed on the surfaces of the interlayer insulating layers ILD, the sidewalls of the pillars 1 P 2 , 1 Pn, 2 Pn and 2 P 2 , and the sidewall of the upper separation pattern USI, before the slit insulating layer SSI is formed. Detailed explanation of this will be described later herein with reference to FIG. 5D .

FIGS. 5A to 5D are sectional views illustrating a method of manufacturing a semiconductor memory device, according to an exemplary embodiment of the present disclosure.

Referring to FIG. 5A , a first stack is formed by successively stacking a first source layer 101 , a protective layer 103 and a source sacrificial layer 105 . The first source layer 101 may be made of conductive material. The first source layer 101 may be made of conductive material which may be used as a growth seed layer of the second source layer during a following process. For example, the first source layer 101 may be made of silicon. The first source layer 101 may be made of a multilayer formed by stacking a metal layer and a silicon layer to reduce the resistance of a source line. The silicon layer may be formed on the metal layer. The metal layer may be or include a material having a resistance that is lower than that of the silicon layer. For example, the metal layer may be tungsten.

The protective layer 103 may be made of material different from that of the source sacrificial layer 105 such that the source sacrificial layer 105 can be selectively removed during a following process. The source sacrificial layer 105 may be made of material that may be selectively removed during a following process. For example, the protective layer 103 may comprise an oxide layer and the source sacrificial layer 105 may be made of polysilicon.

Subsequently, a second stack may be formed by alternately stacking first material layers 111 and second material layers 113 on the first stack.

The first material layers 111 and the second material layers 113 may be made of different materials. The first material layers 111 may be formed of an insulating material suitable for an interlayer insulating layer, whereas the second material layers 113 may be formed of an insulating material suitable for a sacrificial layer having an etching rate different from that of the first material layers 111 . For example, the first material layers 111 may be formed of silicon oxide layers, and the second material layers 113 may be formed of silicon nitride layers.

Subsequently, vertical holes 120 may be formed to pass through the first and second material layers 111 and 113 by etching the first and second material layers 111 and 113 . To form the vertical holes 120 , the source sacrificial layer 105 and the protective layer 103 may be further etched. Here, only an upper portion of the first source layer 101 may be etched. In this case, the vertical holes 120 may pass through the source sacrificial layer 105 and the protective layer 103 , and extend into the first source layer 101 . The vertical holes 120 may have diameters which are designed to correspond to the diameters of the pillars 1 P 1 to 1 Pn, 2 P 1 to 2 Pn and the thickness of the first multilayer memory pattern ML 1 that are described with reference to FIGS. 1, 2A to 2B . In addition, the vertical holes 120 have the same horizontal arrangement as that of the pillars 1 P 1 to 1 Pn, 2 P 1 to 2 Pn described with reference to FIGS. 1, 2A to 2B . While the vertical holes 120 are formed, the dummy holes DH 1 described with reference to FIG. 2A or the dummy holes DH 2 described with reference to FIG. 2B may also be formed. In this case, the stability of a photolithography process for forming the vertical holes 120 may be enhanced.

Subsequently, a channel layer CH that is surrounded by a multilayer memory layer ML may be formed in each of the vertical holes 120 . The channel layer surrounded by the multilayer memory layer ML may be formed by successively performing the following processes.

First, the multilayer memory layer ML may be formed on the surface of each of the vertical holes 120 . The multilayer memory layer ML may be formed by successively stacking the first blocking insulating layer BL 1 , the data storage layer DL and the tunnel insulating layer TL that are described above with reference to FIG. 4 and etching a portion of each of the first blocking insulating layer BL 1 , the data storage layer DL and the tunnel insulating layer TL on a top surface of the second stack.

Subsequently, a first semiconductor layer 121 may be formed on the multilayer memory layer ML. The first semiconductor layer 121 may be formed such that each vertical hole 120 is completely filled therewith, or be formed in a tubular shape in which a central region of the vertical hole 120 is open. In the case where the first semiconductor layer 121 is formed in a tubular shape, the central region of each of the vertical holes 120 may be filled with a core insulating layer CO.

An upper end of the core insulation layer CO may be etched. In this case, the core insulating layer CO may be formed such that the height thereof is less than that of the first semiconductor layer 121 . A region from which the core insulating layer CO has been removed may be filled with a second semiconductor layer 123 . The second semiconductor layer 123 may include a doped silicon layer. In this way, the channel layer CH that includes the first semiconductor layer 121 and the second semiconductor layer 123 may be formed.

The channel layer CH and the multilayer memory layer ML may be planarized until an upper surface of the second stack that includes the first material layers 111 and the second material layers 113 is exposed. In this way, the channel layer CH and the multilayer memory layer ML may remain only in each of the vertical holes 120 .

The above-described channel layer CH and multilayer memory layer ML may remain as a dummy pattern in each of the dummy holes DH 1 or DH 2 described with reference to FIG. 2A or 2B .

Subsequently, the first material layers 111 and the second material layers 113 may be etched to form a trench 130 that passes through at least a portion of the first material layers 111 and the second material layers 113 . The trench 130 has the same structure as that of the trench T described with reference to FIG. 2A or 2B . Portions of the channel layer and multilayer memory layer that remain as the dummy pattern (not shown) in each of the dummy holes (refer to DH 1 of FIG. 2A or DH 2 of FIG. 2B ) in the preceding process may be removed during the process of forming the trench 130 . Thereby, the upper end of each of the dummy holes may open.

Thereafter, the insulating layer may be formed such that the trench 130 and the dummy holes are filled therewith. Thereby, an upper separation pattern 131 may be formed. The upper separation pattern 131 may be planarized to expose the upper surface of the second stack that includes the first material layers 111 and the second material layers 113 , or extend on the upper surface of the second stack.

Referring to FIG. 5B , slits 135 may be formed to pass through the upper separation pattern 131 , the first material layers 111 and the second material layers 113 by etching portions of the upper separation pattern 131 , the first and second material layers 111 and 113 . Thereafter, a sidewall insulating layer 137 may be formed on a sidewall of each of the slits 135 . The sidewall insulating layer 137 may be made of material different from that of the source sacrificial layer 105 described with reference to FIG. 5A .

Subsequently, a first interlayer region 139 that exposes the channel layer CH is formed as follows. First, the source sacrificial layer 105 may be selectively removed. While the source sacrificial layer 105 is removed, the protective layer 103 described with reference to FIG. 5A may protect the first source layer 101 , and the sidewall insulating layer 137 may protect the first materials 111 and the second materials 113 Thereafter, a portion of the multilayer memory layer that is exposed by removing the source sacrificial layer 105 may be removed so that the multilayer memory layer may be divided into the first multilayer memory pattern ML 1 and the second multilayer memory pattern ML 2 . Thereby, the first interlayer region 139 that exposes the channel layer CH opens between the first source layer 101 and the second stack. While the multilayer memory layer is etched, the protective layer 103 may be removed. Alternatively, the protective layer 103 may be removed through a separate etching process. The sidewall insulating layer 137 may be removed while the multilayer memory layer is etched. Alternatively, the sidewall insulating layer 137 may be removed through a separate etching process.

Referring to FIG. 5C , a second source layer 141 may be formed to fill the first interlayer region 139 and come into contact with the sidewall of the channel layer CH and an upper surface of the first source layer 101 . In an embodiment, the second source layer 141 may be formed by depositing conductive material to fill the first interlayer region 139 . In another embodiment, the second source layer 141 may be formed by growing the silicon layer from the channel layer CH and the first source layer 101 .

When the sidewall insulating layer 137 described with reference to FIG. 5B is removed, the second material layers 113 of the second stack shown in FIG. 5B are exposed through the slits 135 and may then be removed by a selective etching process. Thereby, as shown in FIG. 5C , second interlayer regions 145 are opened between the first material layers 111 .

Referring to FIG. 5D , a thin layer may be formed on a surface of each of the second interlayer regions ( 145 of FIG. 5C ). The thin layer extends onto the surface of the first multilayer memory pattern ML 1 and the sidewall of the upper separation pattern 131 . The thin layer includes material layers for liner layers 151 . The thin layer may be drawn onto the surface of the second interlayer regions 145 , the surface of the first multilayer memory pattern ML 1 and the sidewall of the upper separation pattern 131 , through the slits 135 . The thin layer may also be formed on the sidewall of each of the slits 135 . Subsequently, portions of the thin layer that are formed in the slits 135 may be removed so that the liner layers 151 are separated from each other in a shape shown in FIG. 5D . Each of the liner layers 151 may include the barrier metal layer BM and the second blocking insulating layer BL 2 , as described with reference to FIG. 4 . Each of the liner layers 151 has a pattern in which it opens toward the corresponding slit 135 .

Subsequently, conductive patterns 153 with which the second interlayer regions 145 may be filled are formed on the liner layers 151 . Deposition gas and purge gas may be drawn through the slits 135 to form the conductive patterns 153 . The deposition gas and the purge gas that are drawn through the slits 135 flow toward the upper separation pattern 131 and the dummy patterns with which the dummy holes (DH 1 of FIG. 2A or DH 2 of FIG. 2B ) are filled.

For example, in the case where the conductive patterns 153 are to be made of tungsten which is a low-resistance metal, tungsten hexafluoride (WF 6 ) gas and hydrogen gas may be drawn as deposition gas. Here, not only may the tungsten be deposited, but an impurity such as hydrogen fluoride gas may also be generated. The purge gas may be an inactive gas and may be drawn to remove any impurity.

In an exemplary embodiment of the present disclosure, as illustrated in FIGS. 1 to 3 , the diameters of the pillars may vary and may be adjusted by design, whereby a reduction in the velocity of the deposition gas and the purge gas may be mitigated. It has been observed, that such a structure reduces the impurity concentration that remains during the process of forming the conductive patterns 153 . Therefore, in the exemplary embodiment of the present disclosure, the possibility of process failure that may be caused by an excessive concentration of remaining impurity may be reduced. In addition, according to the exemplary embodiment of the present disclosure, the central portion of each of the second interlayer regions 145 close to the upper separation pattern 131 and the dummy holes (DH 1 of FIG. 2A or DH 2 of FIG. 2B ) may be more easily filled with the conductive patterns 153 .

FIG. 6 is a view illustrating variation in gas velocity.

In the case where a layer is deposited on the substrate using a chemical vapor deposition (CVD) method, an atomic layer deposition (ALD) method, etc., a diffusion boundary layer is formed by the viscous force of the substrate. The velocity of gas that is drawn for the deposition at a predetermined flow rate may be reduced by the viscous force of a deposition target (for example, the substrate). The diffusion boundary layer is a region in which the gas velocity is reduced. As the thickness of the diffusion boundary layer is increased, the concentration of the remaining impurity is increased. Therefore, present disclosure proposes a structure and a method by which the region in which the velocity of deposition gas and purge gas is reduced is minimized to reduce the thickness of the diffusion boundary layer.

Referring to FIG. 6 , gas flowing along a flow path which varies in a sectional area thereof may be drawn at a predetermined flow rate into an inlet hole having a first sectional area A 1 . Thereafter, gas may pass through a region having a second sectional area A 2 less than the first sectional area A 1 . According to Bernoulli's principle, when gas passes through the region having the second sectional area A 2 after passing through the region having the first sectional area A 1 , the velocity of the gas is increased and the pressure is reduced. In an exemplary embodiment of the present disclosure referring to this phenomenon, the arrangement of the pillars of the semiconductor memory device is controlled such that the region in which the velocity of deposition gas and purge gas that are drawn to deposit the conductive patterns is reduced is minimized.

FIG. 7 is a plan view illustrating the distances between the pillars of the semiconductor memory device according to an exemplary embodiment of the disclosure.

Referring to FIG. 7 , as described with reference to FIG. 3 , an exemplary embodiment of the present disclosure may include a first group of pillars or a second group of pillars that includes a first pillar P 1 to an n th pillar Pn. According to the exemplary embodiment of the present disclosure, the diameters of the pillars P 1 to Pn may be controlled such that the diameter of the n th pillar Pn adjacent to the upper separation pattern USI and the dummy hole DH is larger than that of the first pillar P 1 adjacent to the inlet hole for deposition gas and purge gas. In this case, the distance {circle around ( 7 )} between the pillars of the n th row that includes a plurality of n th pillars Pn may be controlled to be less than the distance {circle around ( 1 )} between the pillars of the first row that includes a plurality of first pillars P 1 . Thereby, the exemplary embodiment of the present disclosure may mitigate a reduction in velocity of the deposition gas and purge gas that flow from a space between the first pillars P 1 spaced apart from each other by the distance {circle around ( 1 )} and pass through a space between the n th pillars spaced apart from each other by the distance {circle around ( 7 )}.

Moreover, in the exemplary embodiment of the present disclosure, the diameters of the pillars P 1 to Pn may be controlled such that they are gradually increased from the inlet hole for the deposition gas and purge gas toward the upper separation pattern USI and the dummy hole DH. In this case, the distances {circle around ( 1 )} to {circle around ( 7 )} of the pillars P 1 to Pn may be controlled to be gradually reduced toward the upper separation pattern USI and the dummy hole DH. Thereby, the exemplary embodiment of the present disclosure may mitigate a reduction in velocity of the deposition gas and purge gas that flow from the inlet hole toward the upper separation pattern USI and the dummy hole DH.

In the exemplary embodiment of the present disclosure, the distance {circle around ( 8 )} between each n th pillar Pn and the dummy hole DH adjacent thereto may be controlled to be less than the distance {circle around ( 7 )} between the plurality of the n th pillars Pn.

The inlet hole for the deposition gas and the purge gas is adjacent to the slit 135 described with reference to FIG. 5D . The dummy hole DH may be formed in a circular shape, as described with reference to FIG. 2A , or in an elliptical shape, as described with reference to FIG. 2B .

FIGS. 8A and 8B are graphs illustrating the distances between the pillars of the semiconductor memory device and the velocity of gas flowing between the pillars according to an exemplary embodiment of the present disclosure.

As described with reference to FIG. 7 , the diameters of the pillars P 1 to Pn may be controlled such that, as shown in graph of FIG. 8A , the distances {circle around ( 1 )} to {circle around ( 8 )} between the pillars P 1 to Pn are gradually reduced toward the upper separation pattern USI and the dummy hole DH that are illustrated in FIG. 7 . In this case, as shown in the graph of FIG. 88 , the velocity of gas may be maintained (without being reduced) as the gas approaches the upper separation pattern USI and the dummy hole DH. Consequently, the exemplary embodiment of the present disclosure may mitigate a phenomenon in which an excessive amount of impurities remain in the conductive patterns due to a reduction in velocity of the deposition gas and purge gas during the process of forming the conductive patterns.

FIG. 9 is a block diagram illustrating a memory system 1100 , according to an exemplary embodiment of the present disclosure.

Referring FIG. 9 , the memory system 1100 includes a memory device 1120 and a memory controller 1110 .

The memory device 1120 may include a stack that is formed to surround any one structure of the pillars described with reference to FIGS. 2A, 2B and 7 .

The memory device 1120 may be a multi-chip package including a plurality of flash memory chips. According to an exemplary embodiment of the present disclosure, the resistance of conductive patterns which form a chip may be reduced without the chip being increased in size. A bridge failure that may be generated between different conductive patterns may be mitigated.

The memory controller 1110 is configured to control the memory device 1120 , and may include a Static Random Access Memory (SRAM) 1111 , a CPU 1112 , a host interface 1113 , an Error Correction Code (ECC) 1114 , and a memory interface 1115 . The SRAM 1111 is used as an operation memory of the CPU 1112 . The CPU 1112 performs general control operations for data exchange of the memory controller 1110 . The host interface 1113 is provided with a data interchange protocol of a host coupled with the memory system 1100 . Furthermore, the ECC 1114 detects and corrects an error included in the data that is read from the memory device 1120 , and the memory interface 1115 interfaces with the memory device 1120 . In addition, the memory controller 1110 may further include a Read Only Memory (ROM) or the like that stores code data for interfacing with the host.

The above-described memory system 1100 may be a memory card or a Solid State Disk (SSD) equipped with the memory device 1120 and the controller 1110 . For example, when the memory system 1100 is an SSD, the memory controller 1110 may communicate with the outside (e.g., host) via one of various interface protocols, such as an Universal Serial Bus (USB), a MultiMedia Card (MMC), a Peripheral Component Interconnection-Express (PCI-E), a Serial Advanced Technology Attachment (SATA), a Parallel Advanced Technology Attachment (PATA), a Small Computer Small Interface (SCSI), an Enhanced Small Disk Interface (ESDI), or an Integrated Drive Electronics (IDE).

FIG. 10 is a block diagram showing a computing system 1200 including the memory system illustrated with reference to FIG. 9 .

Referring to FIG. 10 , the computing system 1200 may include a CPU 1220 , a Random Access Memory (RAM) 1230 , a user interface 1240 , a modem 1250 , and a memory system 1210 that are electrically coupled to a system bus 1260 . Furthermore, if the computing system 1200 is a mobile device, it may further include a battery for supplying operating voltage to the computing system 1200 . An application chip set, a camera image processor CIS, a mobile DRAM and the like may be further included.

As described above with reference to FIG. 9 , the memory system 1210 may be configured with the memory device 1212 and the memory controller 1211 .

According to an exemplary embodiment of the present disclosure, the pillars passing through the stack are formed such that the sizes thereof differ from each other depending on the positions of the pillars, taking into account the velocity of gas during the manufacturing process. According to an exemplary embodiment of the present disclosure, a phenomenon in which impurities remain in conductive patterns during a process of forming the conductive patterns using gas may be mitigated. Therefore, the rate of defective semiconductor memory devices may be reduced.

Example embodiments have been disclosed herein, and although specific terms are employed, they are used and are to be interpreted in a generic and descriptive sense only and not for purpose of limitation. In some instances, as would be apparent to one of ordinary skill in the art as of the filing of the present application, features, characteristics, and/or elements described in connection with a particular embodiment may be used singly or in combination with features, characteristics, and/or elements described in connection with other embodiments unless otherwise specifically indicated. Accordingly, it will be understood by those of skill in the art that various changes in form and details may be made without departing from the spirit and scope of the present invention as set forth in the following claims.