Semiconductor device manufacturing apparatus having plurality of gas exhausting pipes and gas sensors

This application claims priority under 35 U.S.C. § 119 to Korean Patent Application No. 10-2016-0010753, filed on Jan. 28, 2016, the disclosure of which is hereby incorporated by reference in its entirety.

Embodiments of the inventive concept relate to a semiconductor device manufacturing apparatus having a plurality of gas exhausting pipes and gas sensors.

In order to improve the productivity of semiconductor devices, a semiconductor device manufacturing apparatus using a space division method capable of performing a plurality of processes in one chamber has been proposed. The apparatus requires spatially clear division so that gases are not mixed with each other in the chamber. Embodiments of the inventive concept provide an apparatus capable of quickly monitoring whether gases are mixed with each other in a chamber thereof.

Embodiments of the inventive concept provide a semiconductor device manufacturing apparatus capable of determining whether space division is clear.

Other embodiments of the inventive concept provide a semiconductor device manufacturing apparatus having a gas sensor capable of sensing and analyzing components of an exhaust gas.

The technical objectives of the inventive concept are not limited to that described above; other objectives may become apparent to those of ordinary skill in the art based on the following descriptions.

In accordance with an aspect of the inventive concept, a semiconductor device manufacturing apparatus includes a shower head disposed at a top of a chamber, a gas supplying part disposed on the shower head, a susceptor disposed in the chamber, and a gas exhausting part disposed under the chamber. The chamber has a first reaction space and a second reaction space that are virtually separated from each other. The gas supplying part includes a first gas supply pipe that supplies a first gas into the first reaction space and a second gas supply pipe that supplies a second gas into the second reaction space. The gas exhausting part includes a first gas exhausting pipe disposed adjacent the first reaction space and a second gas exhausting pipe disposed adjacent the second reaction space, which are disposed at opposite sides of the susceptor, a first gas sensor connected to the first gas exhausting pipe and that senses the second gas, and a second gas sensor connected to the second gas exhausting pipe and that senses the first gas.

In accordance with an aspect of the inventive concept, a semiconductor device manufacturing apparatus includes a chamber having a first reaction space and a second reaction space that are virtually separated from each other, a shower head disposed at a top of the chamber, wherein the shower head includes a first inner room disposed over the first reaction space and a second inner room disposed over the second reaction space, a gas supplying part disposed on the shower head, wherein the gas supplying part includes a first gas supply pipe disposed over the first inner room and a second gas supply pipe disposed over the second inner room, a susceptor disposed in the chamber and on which a plurality of wafers are mounted, a first gas exhausting pipe and a second gas exhausting pipe, which are disposed under the chamber, and a first gas sensor and a second gas sensor connected to the first gas exhausting pipe and the second gas exhausting pipe, respectively. The first gas supply pipe, the first inner room, the first reaction space, and an opening of the first gas exhausting pipe are spatially and vertically aligned with each other. The second gas supply pipe, the second inner room, the second reaction space, and an opening of the second gas exhausting pipe are spatially and vertically aligned with each other.

In accordance with an aspect of the inventive concept, a semiconductor device manufacturing apparatus includes a chamber having first to fourth reaction spaces, a shower head disposed at a top of the chamber, wherein the shower head includes an upper plate having first to fourth gas inlets and a lower plate having partitions to define first to fourth inner rooms spatially connected to the first to fourth gas inlets, respectively, a susceptor disposed in the chamber and on which a plurality of wafers are mounted, a first gas exhausting pipe and a second gas exhausting pipe, which are disposed at both sides of the susceptor, a first gas sensor spatially connected to the first gas exhausting pipe, and a second gas sensor spatially connected to the second gas exhausting pipe. The first gas inlet, the first inner room, the first reaction space, and an opening of the first gas exhausting pipe are spatially aligned with each other; the second gas inlet, the second inner room, the second reaction space, and an opening of the second gas exhausting pipe are spatially and vertically aligned with each other; the third gas inlet, the third inner room, the third reaction space, and an opening of the third gas exhausting pipe are spatially aligned with each other; the fourth gas inlet, the fourth inner room, the fourth reaction space, and an opening of the fourth gas exhausting pipe are spatially and vertically aligned with each other. The second gas sensor senses a first gas passing through the first gas inlet, the first inner room, the first reaction space, and the second gas exhausting pipe, and the first gas sensor senses a second gas passing through the second gas inlet, the second inner room, the second reaction space, and the first gas exhausting pipe. The first gas sensor is insensitive to the first gas and a third gas, and the second gas sensor is insensitive to the second gas and the third gas. The third gas passes through the third gas inlet, the third inner room, the third reaction space, and the first and second gas exhausting pipes.

In accordance with an aspect of the inventive concept, a semiconductor device manufacturing apparatus includes a chamber defining a first reaction space and a second reaction space, a shower head at a top of the chamber, a gas supply part, a susceptor in the chamber and configured to hold a plurality of wafers, a first gas exhaust pipe, a second gas exhaust pipe, a first gas sensor, and a second gas sensor. The shower head defines a first inner room above the first reaction space and a second inner room above the second reaction space. The gas supply part includes a first gas supply pipe connected to the first inner room of the shower head and a second gas supply pipe connected to the second inner room of the shower head. The first gas supply pipe is configured to supply a first gas through the first inner room and to the first reaction space. The second gas supply pipe configured to supply a second gas through the second inner room and to the second reaction space. The first gas exhaust pipe extends from inside to outside the chamber and includes at least one first exhaust opening adjacent a first side of the susceptor. The second gas exhaust pipe extends from inside to outside the chamber and includes at least one second exhaust opening adjacent a second, opposite side of the susceptor. The first gas sensor is in fluid communication with the first exhaust pipe and is configured to sense the second gas in a first exhaust gas flowing from the first reaction space and through the first exhaust pipe. The second gas sensor is in fluid communication with the second exhaust pipe and configured to sense the first gas in a second exhaust gas flowing from the second reaction space and through the second exhaust pipe.

Details of other embodiments are included in the detailed description and the drawings.

The foregoing and other features and advantages of the inventive concept will be apparent from the more particular description of preferred embodiments of the inventive concept, as illustrated in the accompanying drawings in which like reference characters refer to the same parts throughout the different views. The drawings are not necessarily to scale, emphasis instead being placed upon illustrating the principles of the inventive concept. In the drawings:

FIGS. 1A and 1B are perspective views of semiconductor device manufacturing apparatuses according to embodiments of the inventive concept;

FIGS. 2A and 2B are internal cross-sectional views of the semiconductor device manufacturing apparatuses according to the embodiments of the inventive concept;

FIGS. 3A to 3F are bottom views conceptually illustrating upper plates according to various embodiments of the inventive concept;

FIGS. 4A to 4C are top views conceptually illustrating lower plates according to various embodiments of the inventive concept;

FIGS. 5A to 5C are top views conceptually illustrating a susceptor, first and second gas exhausting pipes, and first and second gas sensors according to embodiments of the inventive concept; and

FIGS. 6A, 7A and 8A are top views conceptually illustrating a susceptor, first and second gas exhausting pipes, and first and second gas sensors according to embodiments of the inventive concept.

FIGS. 6B, 7B and 8B are perspective views conceptually illustrating the first and second gas exhausting pipes of FIGS. 6A, 7A and 7B , respectively.

As used herein, the term “spatially aligned” should be interpreted to mean that elements are not located on a straight line but are located in a space extending in one direction. For example, it should be understood that when elements are located at a left side from the center in the drawing, the elements may be spatially aligned with each other in a left space, and when the elements are located at a right side, the elements may be spatially aligned with each other in a right space.

FIGS. 1A and 1B are perspective views of semiconductor device manufacturing apparatuses 10 A and 10 B according to embodiments of the inventive concept.

Referring to FIGS. 1A and 1B , each of the semiconductor device manufacturing apparatuses 10 A and 10 B according to the embodiments of the inventive concept may include a gas supply or supplying part 200 disposed above a chamber 100 and a gas exhaust or exhausting part 300 disposed below or under the chamber 100 . A shower head 250 may be disposed at a top of the chamber 100 .

The gas supplying part 200 may supply various gases into the chamber 100 . For example, the gas supplying part 200 may supply a precursor, a reaction gas, a purge gas, and a cleaning gas. The gas supplying part 200 may include a plurality of gas supplying pipes 210 , 220 , 230 , and 240 disposed on the shower head 250 of the chamber 100 in a radial orientation or shape. For example, the gas supplying part 200 may include a first gas supplying pipe 210 for supplying a first gas GS 1 , a second gas supplying pipe 220 for supplying a second gas GS 2 , a third gas supplying pipe 230 for supplying a third gas GS 3 , and a fourth gas supplying pipe 240 for supplying a fourth gas GS 4 . The first gas supplying pipe 210 and the second gas supplying pipe 220 may be disposed to be opposite to each other. For example, when viewed in a top view, the first gas supply or supplying pipe 210 may be disposed on a left half portion of the shower head 250 , and the second gas supply or supplying pipe 220 may be disposed on a right half portion of the shower head 250 . The third gas supplying pipe 230 and the fourth gas supplying pipe 240 may be disposed to be opposite to each other. For example, when viewed in a top view, the third gas supplying pipe 230 may be disposed on an upper half portion of the shower head 250 , and the fourth gas supplying pipe 240 may be disposed on a lower half portion of the shower head 25 Q. According to some embodiments, the third gas supplying pipe 230 may be disposed on a back or rear portion of the shower head 250 and the fourth gas supplying pipe 240 may be disposed on a front portion of the shower head 250 . The left half portion, the right half portion, the upper half (or back) portion, and the lower half (or front) portion, which are relative concepts, may be compatible with each other.

In other embodiments, the first gas supplying pipe 210 and the second gas supplying pipe 22 Q may be symmetrically disposed. Further, the third gas supplying pipe 230 and the fourth gas supplying pipe 240 may also be symmetrically disposed (e.g., about a center of the chamber 100 or the shower head 250 ). In additional other embodiments, the first gas supplying pipe 210 and the second gas supplying pipe 220 may be disposed to have an angle between them in the range of 90° to 180° around the center of the chamber 100 or the shower head 250 (e.g., with the angle measured in a circumferential direction). (For example, the first gas supplying pipe 210 and the second gas supplying pipe 220 may also be disposed on the same upper half portion or lower half portion.) The third gas supplying pipe 230 and the fourth gas supplying pipe 240 may also be disposed to have an angle between them in the range of 90° to 180° around the center of the chamber 100 or the shower head 250 (e.g., with the angle measured in a circumferential direction). Referring to FIG. 1A , the first to fourth gas supplying pipes 210 , 220 , 230 , and 240 may be separated or spaced apart from each other. Referring to FIG. 1B , the third gas supplying pipe 230 and the fourth gas supplying pipe 240 may be connected to or integrated with each other. The first gas GS 1 may include a precursor containing silane (SiH 4 ) or a metal compound. The second gas GS 2 may include a reactive gas such as an oxidizing agent or a nitriding agent. The third gas GS 3 and/or the fourth gas GS 4 may include a purge gas such as helium (He) or argon (Ar). In other embodiments, each of the first to fourth gases GS 1 to GS 4 may include a cleaning gas such as NF 3 .

The gas exhausting part 300 may exhaust the gases from the inside of the chamber 100 . The gas exhausting part 300 may include at least two gas exhausting pipes 310 and 320 . For example, the gas exhausting part 300 may include a first gas exhaust or exhausting pipe 310 spatially and directionally aligned with the first gas supplying pipe 210 to be close thereto, and a second gas exhaust or exhausting pipe 320 spatially and directionally aligned with the second gas supplying pipe 220 to be close thereto. Referring to FIG. 1A , the first gas exhausting pipe 310 and the second gas exhausting pipe 320 may be separated or spaced apart from each other. Referring to FIG. 1B , the first gas exhausting pipe 310 and the second gas exhausting pipe 320 may be connected to or integrated with each other. The characteristics of the semiconductor device manufacturing apparatuses 10 A and 10 B illustrated in FIGS. 1A and 1B may be selectively compatible with each other.

FIGS. 2A and 2B are internal cross-sectional views of the semiconductor device manufacturing apparatuses 10 A and 10 B according to the embodiments of the inventive concept.

Referring to FIGS. 2A and 2B , each of the semiconductor device manufacturing apparatuses 10 A and 10 B according to the embodiments of the inventive concept may include the gas supplying part 200 disposed above the chamber 100 , a susceptor 150 disposed in the chamber 100 , and the gas exhausting part 300 disposed below or under the chamber 100 . The chamber 100 may define or provide reaction spaces S 1 and S 2 in which various processes are performed, and the chamber 100 may maintain a vacuum. The reaction spaces S 1 and S 2 are one space which is not physically separated (e.g., the reaction spaces S 1 and S 2 are in communication with each other) but may be virtually separated so that different processes are respectively performed therein. For example, in a first reaction space S 1 , a material layer may be formed by performing a deposition process, and in a second reaction space S 2 , an oxidized material layer or a nitride material layer may be formed by performing an oxidizing process or a nitriding process. Referring to FIGS. 1A and 1B , it is assumed and illustrated that the first gas supplying pipe 210 and the second gas supplying pipe 220 are respectively disposed on the left half portion and the right half portion, and the third gas supplying pipe 230 and the fourth gas supplying pipe 240 are respectively disposed on the upper half or rear portion and the lower half or front portion. For example, it is assumed and illustrated that the gas supplying pipes 210 , 220 , 230 , and 240 are respectively disposed on quadrants of the shower head 250 . According to some embodiments, each of the gas supplying pipes 210 , 220 , 230 , and 240 is disposed on a different quadrant of the shower head 250 .

The shower head 250 may include an upper plate 251 and a lower plate 252 , which define or form a plurality of inner rooms R 1 and R 2 . The gas supplying pipes 210 and 220 may pass through or connect to the upper plate 251 to supply various gases GS 1 and GS 2 into the inner rooms R 1 and R 2 . The lower plate 252 may include a plurality of gas outlets H for providing the gases GS 1 and GS 2 in the inner rooms R 1 and R 2 onto the susceptor 150 in the chamber 100 . The shower head 250 may supply the gases GS 1 and GS 2 supplied from the gas supplying part 200 to be spatially separated from each other in the chamber 100 . For example, the first gas GS 1 passing through the first gas supplying pipe 210 and the first inner room R 1 of the shower head 250 may be supplied into the first reaction space S 1 in the chamber 100 and provided onto a first wafer W 1 mounted on the susceptor 150 . Further, the second gas GS 2 passing through the second gas supplying pipe 220 and the second inner room R 2 of the shower head 250 may be supplied into the second reaction space S 2 in the chamber 100 and provided onto a second wafer W 2 mounted on the susceptor 150 . Referring further to FIGS. 1A and 1B , the shower head 250 may further include a third inner room and a fourth inner room, through which the gases GS 3 and GS 4 respectively supplied through the third gas supplying pipe 230 and the fourth gas supplying pipe 240 pass. The chamber 100 may also further include a third reaction space and a fourth reaction space to which the gases GS 3 and GS 4 passing through the third inner room and the fourth inner room are respectively provided.

Referring to FIG. 2A , the inner rooms R 1 and R 2 of the shower head 250 may be virtually, spatially, and individually separated from each other, and referring to FIG. 2B , the inner rooms R 1 and R 2 may be spatially connected to and/or integrated with each other (e.g., the inner rooms R 1 and R 2 may be in communication with each other).

The plurality of wafers W 1 and W 2 may be mounted on the susceptor 150 . The susceptor 150 may rotate in a state in which the wafers W 1 and W 2 are mounted on or to the susceptor 150 . The wafers W 1 and W 2 may be disposed on the susceptor 150 to be aligned with the inner rooms R 1 and R 2 and the reaction spaces S 1 and S 2 of the shower head 250 .

As described above, the gas exhausting part 300 may include at least two gas exhausting pipes 310 and 320 . Openings O 1 and O 2 of the gas exhausting pipes 310 and 320 may be symmetrically disposed on both (e.g., opposite) sides of the susceptor 150 . For example, the opening O 1 of the first gas exhausting pipe 310 may be directionally and vertically aligned with the first gas supplying pipe 210 , and the opening O 2 of the second gas exhausting pipe 320 may be directionally and vertically aligned with the second gas supplying pipe 220 . Therefore, the first gas exhausting pipe 310 may mainly exhaust the first gas GS 1 provided from the first gas supplying pipe 210 to the first reaction space S 1 of the chamber 100 , and the second gas exhausting pipe 320 may mainly exhaust the second gas GS 2 provided from the second gas supplying pipe 220 to the second reaction space S 2 of the chamber 100 . In addition, the first gas exhausting pipe 310 may exhaust the first gas GS 1 , the third gas GS 3 , and the fourth gas GS 4 , and the second gas exhausting pipe 320 may exhaust the second gas GS 2 , the third gas GS 3 , and the fourth gas GS 4 . That is, the third gas GS 3 and the fourth gas GS 4 may be exhausted through both the first gas exhausting pipe 310 and the second gas exhausting pipe 320 .

The gas exhausting part 300 may include a first gas sensor 351 disposed at or close to the first gas exhausting pipe 310 and a second gas sensor 352 disposed at or close to the second gas exhausting pipe 320 . The first gas sensor 351 may be connected to the first gas exhausting pipe 310 , and the second gas sensor 352 may be connected to the second gas exhausting pipe 320 .

Therefore, first elements including the first gas supplying pipe 210 , the first inner room R 1 , the first reaction space S 1 , the first gas exhausting pipe 310 , and the first gas sensor 351 may be spatially and vertically aligned with each other, and second elements including the second gas supplying pipe 220 , the second inner room R 2 , the second reaction space S 2 , the second gas exhausting pipe 320 , and the second gas sensor 352 may be spatially and vertically aligned with each other. The first elements and the second elements may be disposed to be opposite to each other, to be symmetric, or to have an angle in the range of 90° to 180° between them around the center of the chamber 100 or the shower head 250 (e.g., with the angle measured in a circumferential direction).

Each of the first gas sensor 351 and the second gas sensor 352 may include a gas sensor. For example, the first gas sensor 351 may analyze components of a first exhaust gas GE 1 by collecting the first exhaust gas GE 1 exhausted through the first gas exhausting pipe 310 , and the second gas sensor 352 may analyze components of a second exhaust gas GE 2 by collecting the second exhaust gas GE 2 exhausted through the second gas exhausting pipe 320 . More specifically, the first gas sensor 351 may be insensitive to the first gas GS 1 supplied through the first gas supplying pipe 210 and sensitive to the second gas GS 2 supplied through the second gas supplying pipe 220 . The second gas sensor 352 may be sensitive to the first gas GS 1 supplied through the first gas supplying pipe 210 and insensitive to the second gas GS 2 supplied through the second gas supplying pipe 220 . In other words, the first gas sensor 351 may not sense the first gas GS 1 and may sense the second gas GS 2 . The second gas sensor 352 may sense the first gas GS 1 and may not sense the second gas GS 2 . For example, when the first gas GS 1 includes a precursor, the first gas sensor 351 may be insensitive to the precursor, and the second gas sensor 352 may be sensitive to the precursor. Further, for example, when the second gas GS 2 includes a reaction gas, the first gas sensor 351 may be sensitive to the reaction gas, and the second gas sensor 352 may be insensitive to the reaction gas.

According to embodiments of the inventive concept, when the first gas GS 1 supplied into the chamber 100 through the first gas supplying pipe 210 is mixed with the second exhaust gas GE 2 and exhausted through the second gas exhausting pipe 320 , the second gas sensor 352 may sense the first gas GS 1 mixed with the second exhaust gas GE 2 . Further, when the second gas GS 2 supplied into the chamber 100 through the second gas supplying pipe 220 is mixed with the first exhaust gas GE 1 and exhausted through the first gas exhausting pipe 310 , the first gas sensor 351 may sense the second gas GS 2 mixed with the first exhaust gas GE 1 .

According to embodiments of the inventive concept, whether the first gas GS 1 and the second gas GS 2 are maintained to be spatially separated from each other in the chamber 100 may be determined using the first gas sensor 351 and the second gas sensor 352 . Specifically, whether the first gas GS 1 and the second gas GS 2 spatially cross (e.g., mix) in the chamber 100 may be sensed in real time. When it is determined that the first gas GS 1 and the second gas GS 2 are maintained to be spatially separated from each other in the chamber 100 , the second gas GS 2 does not flow into the first gas exhausting pipe 310 , and the first gas GS 1 does not flow into the second gas exhausting pipe 320 . Therefore, semiconductor device manufacturing processes performed in the chamber 100 may be monitored in real time using the first gas sensor 351 and the second gas sensor 352 . Information on the components of the first exhaust gas GE 1 sensed and analyzed by the first gas sensor 351 and information on the components of the second exhaust gas GE 2 sensed and analyzed by the second gas sensor 352 may be provided to a computer in real time and displayed on a monitor.

The gas exhausting part 300 may further include a first gas pump 361 disposed in or on the first gas exhausting pipe 310 and a second gas pump 362 disposed in or on the second gas exhausting pipe 320 . The first gas pump 361 may adjust an exhaust flow rate and an exhaust pressure of the first exhaust gas GE 1 exhausted through the first gas exhausting pipe 310 , and the second gas pump 362 may adjust an exhaust flow rate and an exhaust pressure of the second exhaust gas GE 2 exhausted through the second gas exhausting pipe 320 . For example, each of the first gas pump 361 and the second gas pump 362 may include a turbo pump.

For example, when the first gas sensor 351 senses that the second gas GS 2 is mixed with the first exhaust gas GE 1 exhausted through the first gas exhausting pipe 310 , process conditions may be modified or adjusted so that a flow rate and/or a pressure of the second gas GS 2 supplied into the second reaction space S 2 in the chamber 100 through the second gas supplying pipe 220 is reduced, or the process conditions may be modified or adjusted so that the exhaust flow rate and/or the exhaust pressure of the second exhaust gas GE 2 exhausted through the second gas exhausting pipe 320 is increased by the second gas pump 362 .

For example, when the second gas sensor 352 senses that the first gas GS 1 is mixed with the second exhaust gas GE 2 exhausted through the second gas exhausting pipe 320 , the process conditions may be modified or adjusted so that a flow rate and/or a pressure of the first gas GS 1 supplied into the first reaction space S 1 in the chamber 100 through the first gas supplying pipe 210 is reduced, or the process conditions may be modified or adjusted so that the exhaust flow rate and/or the exhaust pressure of the first exhaust gas GE 1 exhausted through the first gas exhausting pipe 310 is increased by the first gas pump 361 . In other embodiments, the process conditions may be modified or adjusted so that a supply flow rate of each of the third gas GS 3 and/or the fourth gas GS 4 supplied into the chamber 100 through the third gas supplying pipe 230 and/or the fourth gas supplying pipe 240 is increased and/or reduced.

Therefore, according to the inventive concept, whether the reaction spaces S 1 and S 2 , which are virtual, in the chamber 100 are virtually and spatially separated from each other may be clearly monitored in real time, and the processes may be adjusted so that the first gas GS 1 and the second gas GS 2 are not mixed with each other in the reaction spaces S 1 and S 2 . Specifically, while a first process is being stably performed in the first reaction space S 1 and a second process is being stably performed in the second reaction space S 2 , whether the first process and the second process are affected by each other may be monitored in real time, and the process conditions may be modified and adjusted in response to the monitoring.

FIGS. 3( a ) to 3( f ) are bottom views conceptually illustrating upper plates 251 a to 251 f of the shower head 250 according to various embodiments of the inventive concept. Referring to FIG. 3( a ) , an upper plate 251 a according to an embodiment of the inventive concept may include first to fourth gas inlets J 1 , J 2 , J 3 , and J 4 connected to the first to fourth gas supplying pipes 210 , 220 , 230 , and 240 , respectively. The first gas inlet J 1 and the second gas inlet J 2 may be symmetrically disposed to be opposite to each other and to be connected to the first gas supplying pipe 210 and the second gas supplying pipe 220 . The third gas inlet J 3 and the fourth gas inlet J 4 may also be symmetrically disposed to be opposite to each other and to be connected to the third gas supplying pipe 230 and the fourth gas supplying pipe 240 .

Referring to FIG. 3( b ) , an upper plate 251 b according to an embodiment of the inventive concept may include first to fourth gas inlets J 1 to J 4 , and the first gas inlet J 1 and the second gas inlet J 2 may be disposed to have an angle in the range of 90° to 180° between them around the center of the shower head 250 (e.g., with the angle measured in a circumferential direction). For example, the first gas inlet J 1 and/or the second gas inlet J 2 may be disposed closer to any one of the third gas inlet J 3 and the fourth gas inlet J 4 . As illustrated, the first gas inlet J 1 and the second gas inlet J 2 may be disposed closer to the fourth gas inlet J 4 than the third gas inlet J 3 . The third gas inlet J 3 and the fourth gas inlet J 4 may be disposed to be opposite to each other. Specifically, in a top view, the first gas inlet J 1 and the second gas inlet J 2 may be disposed on the same upper half or rear portion of the upper plate 251 b . (Alternatively, the first gas inlet J 1 and the second gas inlet J 2 may be disposed on a lower half or front portion, a left half portion, or a right half portion of the upper plate 251 b .)

Referring to FIG. 3( c ) , an upper plate 251 c according to an embodiment of the inventive concept may include first to fourth gas inlets J 1 to J 4 , and the third gas inlet J 3 and the fourth gas inlet J 4 may be disposed to have an angle in the range of 90° to 180° between them around the center of the shower head 250 (e.g., with the angle measured in a circumferential direction). For example, the third gas inlet J 3 and/or the fourth gas inlet J 4 may be disposed closer to any one of the first gas inlet J 1 and the second gas inlet J 2 . As illustrated, the third gas inlet J 3 and the fourth gas inlet J 4 may be disposed closer to the second gas inlet J 2 than the first gas inlet J 1 .

Referring to FIGS. 3( d ) to 3( f ) , each of upper plates 251 d and 251 e according to various embodiments of the inventive concept may include a plurality of first gas inlets 31 , while referring to FIG. 3( e ) , the upper plate 251 e according to an embodiment of the inventive concept may include a plurality of second gas inlets J 2 , and referring to FIG. 3( f ) the upper plate 251 f according to an embodiment of the inventive concept may include a plurality of first and second gas inlets 31 and J 2 . Since the characteristics of the upper plates 251 a to 251 f illustrated in FIGS. 3( a ) to 3( f ) may be combined with each other, although not specifically illustrated therein, the characteristics of the upper plates 251 a to 251 f may be variously combined and applied. In another embodiment, the upper plates 251 a to 251 f may individually include a plurality of third gas inlets J 3 and/or fourth gas inlets J 4 .

Referring further to FIGS. 1A and 1B , the first to fourth gas supplying pipes 210 to 240 may be disposed to be connected to the first to fourth gas inlets J 1 to J 4 , respectively. For example, the first and second gas supplying pipes 210 and 220 may be disposed to have an angle from each other in the range of 90° to 180° around the center of the shower head 250 (e.g., with the angle measured in a circumferential direction), and each of the first and second gas supplying pipes 210 and 220 may be configured to be a plurality of first and second gas supplying pipes 210 and 220 .

Referring further to FIGS. 2A and 2B , the first to fourth gas inlets J 1 to J 4 may be respectively aligned with the inner rooms R 1 and R 2 of the shower head 250 . In the drawing, only the first inner room R 1 and the second inner room R 2 are illustrated.

FIGS. 4A to 4C are top views conceptually illustrating lower plates 252 a to 252 f according to various embodiments of the inventive concept.

Referring to FIGS. 4A to 4C , each of the lower plates 252 a to 252 f according to various embodiments of the inventive concept may include areas, sectors or quadrants A 1 to A 4 , which are virtually and spatially separated by partitions P so as to define the virtually and spatially divided inner rooms R 1 and R 2 . Referring to FIGS. 1A and 1B , the separated areas A 1 to A 4 may be spatially or directionally aligned with the first to fourth gas supplying pipes 210 , 220 , 230 , and 240 , respectively. Alternatively, referring to FIGS. 3( a ) to 3( f ) , the separated areas A 1 to A 4 may be spatially or directionally aligned with the gas inlets J 1 to J 4 of the various upper plates 251 a to 251 f . Each of the partitions P may have a protruding dam or wall shape. Therefore, the inner rooms R 1 and R 2 of the shower head 250 may not be virtually, spatially, and completely separated from each other but partially separated from and connected to each other. In other embodiments, the partitions P may virtually, spatially, and completely separate the inner rooms R 1 and R 2 of the shower head 250 . Referring to FIG. 4A (b), the lower plate 252 b may further include a baffle plate B disposed at the center thereof. The baffle plate B may physically and spatially space the separated areas A 1 to A 4 apart from each other. Referring to FIGS. 4B and 4C , the partitions P may be disposed in various orientations or shapes so that sizes of the separated areas A 1 to A 4 are variously changed. Time in which the first to fourth gases GS 1 to GS 4 react with the wafers W 1 to W 4 may be variously adjusted according to an arrangement of the partitions P.

FIGS. 5A to 5C are top views conceptually illustrating susceptors 150 a to 150 c , first and second gas exhausting pipes 310 and 320 , and first and second gas sensors 351 and 352 according to various embodiments of the inventive concept.

Referring to FIGS. 5A to 5C , the susceptors 150 a to 150 c according to various embodiments of the inventive concept may receive a plurality of wafers W 1 to W 6 to be mounted thereon. The openings O 1 and O 2 of the first gas exhausting pipe 310 and the second gas exhausting pipe 320 may be spatially or directionally and vertically aligned with the first gas supplying pipe 210 and the second gas supplying pipe 220 , and the first gas inlet J 1 and the second gas inlet J 2 , respectively. Alternatively, the first gas exhausting pipe 310 and the second gas exhausting pipe 320 may be spatially or directionally aligned with a first inner area A 1 and a second inner area A 2 of lower plates 252 a to 252 f of a shower head 250 . As described above, the first gas sensor 351 may be connected to the first gas exhausting pipe 310 , and the second gas sensor 352 may be connected to the second gas exhausting pipe 320 . As the first gas sensor 351 and the second gas sensor 352 are adjacent the first gas exhausting pipe 310 and the second gas exhausting pipe 320 , respectively, the components of the first exhaust gas GE 1 and the second exhaust gas GE 2 may be analyzed in real time. Referring further to FIG. 5C , the first gas exhausting pipe 310 and the second gas exhausting pipe 320 may be disposed to have an angle from each other in the range of 90° to 180° around the center of the shower head 250 (e.g., with the angle measured in a circumferential direction). For example, referring to FIGS. 3( a ) to 3( f ) , the first gas exhausting pipe 310 and the second gas exhausting pipe 320 may be disposed to be directionally aligned with the first to fourth gas inlets J 1 to J 4 . Alternatively, referring to FIG. 5C , the first and second gas exhausting pipes 310 and 320 may not be opposite to each other but may be symmetrically disposed.

FIGS. 6A, 7A and 8A are top views conceptually illustrating a susceptor 150 , first and second gas exhausting pipes 310 and 320 , and first and second gas sensors 351 and 352 according to embodiments of the inventive concept. FIGS. 6B, 7B and 8 b are perspective views conceptually illustrating the first and second gas exhausting pipes 310 and 320 of FIGS. 6A, 7A and 8A , respectively. Referring to FIGS. 6A to 7B , the first and second gas exhausting pipes 310 and 320 according to the embodiments of the inventive concept may respectively include a plurality of branch exhausting pipes 311 a to 311 c and 321 a to 321 c , and main or primary exhausting pipes 312 and 322 . Referring to FIGS. 6A and 6B , the first and second gas exhausting pipes 310 and 320 may respectively include two branch exhausting pipes 311 a and 311 b and 321 a and 321 b , and main exhausting pipes 312 and 322 . Referring to FIGS. 7A and 7B , the first and second gas exhausting pipes 310 and 320 may respectively include three branch exhausting pipes 311 a to 311 c and 321 a to 321 c , and main exhausting pipes 312 and 322 . The plurality of branch exhausting pipes 311 a to 311 c and 321 a to 321 c may be connected to the main exhausting pipes 312 and 322 , respectively. Referring to FIGS. 8A and 8B , each of the first and second gas exhausting pipes 310 and 320 may have an arc shape along the periphery of the susceptor 150 in a top view and may have a funnel shape in a side view. The openings O 1 , O 2 ( FIGS. 2A and 2B ) may be curved and elongated and extend along a portion of the outer periphery of the susceptor 150 . Referring to FIGS. 6A to 8B , the first and second gas sensors 351 and 352 may be respectively connected to the main exhausting pipes 312 and 322 .

According to the inventive concept, as components of exhausted gases are sensed and analyzed using gas sensors, whether the gases are spatially separated from each other in a chamber can be monitored in real time.

According to the inventive concept, since a spatial division state in the chamber can be monitored, processes and apparatuses can be revised, improved, and modified.

Although a few embodiments have been described with reference to the accompanying drawings, those skilled in the art will readily appreciate that many modifications are possible in embodiments without departing from the scope of the inventive concept and without changing essential features. Therefore, the above-described embodiments should be considered in a descriptive sense only and not for purposes of limitation.