Heat assisted magnetic recording write apparatus having a dielectric gap

A conventional heat assisted magnetic recording (HAMR) transducer typically includes at least a waveguide, a near-field transducer (NFT), a main pole and a coil for energizing the main pole. The conventional HAMR transducer uses light, or energy, received from a conventional laser in order to write to a magnetic recording media. Light from the laser is incident on and coupled into the waveguide. Light is guided by the conventional waveguide to the NFT near the ABS. The NFT focuses the light to magnetic recording media (not shown), such as a disk. This region is thus heated. The main pole is energized and field from the pole tip is used to write to the heated portion of the recording media.

Although the conventional HAMR transducer functions, improvements in performance are still desired. For example, the location of the hot spot on the media, temperature gradient and distance between the media hot spot and the write pole are desired to be controlled.

FIG. 1 is a diagram depicting a side view of an exemplary embodiment of a HAMR disk drive.

FIGS. 2A, 2B and 2C are diagrams depicting plan, apex and ABS views of an exemplary embodiment of a portion of a HAMR disk drive.

FIGS. 3A and 3B are diagrams depicting apex and ABS views of another exemplary embodiment of a portion of a HAMR disk drive.

FIGS. 4A and 4B are diagrams depicting apex and ABS views of another exemplary embodiment of a portion of a HAMR disk drive.

FIG. 5 is a diagram depicting an apex view of another exemplary embodiment of a HAMR disk drive.

FIG. 6 is a diagram depicting an apex view of another exemplary embodiment of a HAMR disk drive.

FIG. 7 is a diagram depicting an apex view of another exemplary embodiment of a HAMR disk drive.

FIG. 8 is a diagram depicting an apex view of another exemplary embodiment of a HAMR disk drive.

FIG. 9 is a flow chart depicting an exemplary embodiment of a method for fabricating a HAMR write apparatus.

FIG. 10 is a flow chart depicting an exemplary embodiment of a method for fabricating an NFT for a HAMR write apparatus.

FIG. 1 depicts a side view of an exemplary embodiment of a portion of a heat-assisted magnetic recording (HAMR) write apparatus, or disk drive 100 . FIGS. 2A, 2B AND 2C depict plan, apex and ABS views of a portion of the HAMR disk drive 100 . For clarity, FIGS. 1, 2A, 2B and 2C are not to scale. For simplicity not all portions of the HAMR disk drive 100 are shown. In addition, although the HAMR disk drive 100 is depicted in the context of particular components other and/or different components may be used. For example, circuitry used to drive and control various portions of the HAMR disk drive 100 is not shown. For simplicity, only single components are shown. However, multiples of each component and their sub-components, might be used.

The HAMR disk drive 100 includes media 102 , a slider 110 , a laser subassembly 120 and a HAMR transducer 130 . Additional and/or different components may be included in the HAMR disk drive 100 . Although not shown, the slider 110 , and thus the laser assembly 120 and HAMR transducer 130 are generally attached to a suspension. The laser assembly 120 includes a laser 122 and a submount 124 . The submount 124 is a substrate to which the laser 122 may be affixed for improved mechanical stability, heat sinking, ease of manufacturing and better robustness. The laser 122 may be a chip such as a laser diode or other laser. Although not shown, the laser subassembly 120 may include a photodetector which sample light tapped from the waveguide of the HAMR transducer 130 .

The HAMR transducer 130 is fabricated on the slider 110 and includes an air-bearing surface (ABS) proximate to the media 102 during use. In general, the HAMR write transducer 130 and a read transducer are present in the HAMR write apparatus 100 . However, for clarity, only the HAMR write transducer 130 is shown. The HAMR transducer 130 includes coil(s) 132 , a waveguide 140 , write pole 150 , dielectric gap 160 and near-field transducer (NFT) 170 . The waveguide 140 is optically coupled with the laser 122 . The waveguides 140 carry light energy from the laser 122 toward the ABS. The NFT 170 couples a portion of this energy from the waveguides 140 to the media 102 . The write pole 150 is energized by the coils 132 and writes to the heated portion of the media 102 . The coil(s) 132 may be solenoidal or spiral (pancake) coils. Other components including but not limited to other poles and/or shields may also be present.

One configuration of the dielectric gap 160 , NFT 170 , and portion of the waveguide 140 near the ABS may be better seen in FIGS. 2A-2C . Note that the structure labeled as the waveguide 140 may be considered to be the waveguide core. The surrounding cladding, though functionally part of the waveguide is not separately labeled in the drawings. The NFT 170 includes an optional plasmonic ridge 172 , cap 174 and nose 176 , each of which are typically formed of a metal such as Au. The plasmonic ridge 172 generally runs along the direction of transmission of the waveguide 140 . In the embodiment shown, this direction is at an acute angle from the ABS. However, other angles are possible in other embodiments. The NFT cap 174 extends over a relatively large area, greater than the pole at the ABS. For example, the NFT cap 174 may be semicircular with a radius of approximately seven hundred through nine hundred nanometers. Other shapes and sizes are, however, possible. The NFT cap 174 aids in heat dissipation and provides a boundary for the optical field of the NFT. Part of the NFT cap 174 adjoins the pole 150 near the ABS. The NFT nose 176 is smaller than the NFT cap. In some embodiments, the NFT nose 176 is not more than fifty nanometers wide in the cross-track direction. In some such embodiments, the NFT nose 176 is nominally forty nanometers wide in the cross-track direction. In some embodiments the thickness of the nose 176 in the down track direction is on the order of fifteen through twenty-five nanometers. Other sizes are, however, possible.

The dielectric gap 160 resides between a portion of the NFT 170 and the main pole 150 at and near the ABS. The NFT cap 174 does cover the sides and the back (distal from the ABS) of the dielectric gap 160 . Similarly, the NFT nose 176 adjoins the bottom of the dielectric gap 160 . In the embodiment shown in FIGS. 2A-2C , therefore, the dielectric gap 160 is surrounded by the NFT 170 except for the surface that occupies the ABS. In some embodiments, the dielectric gap 150 is an oxide, such as silicon oxide. Thus, the dielectric gap 160 may be formed of the same material as the cladding of the waveguide 140 . However, other dielectrics/oxides, including those not used in the waveguide 140 , may be used. In general, the dielectric gap 160 may be desired to have a relatively low index of refraction. Consequently, the materials used in the core of the waveguide 140 might not be used for the dielectric gap 160 in some embodiments. For reliability, the dielectric gap 160 materials are also desired to be able to sustain high temperatures developed in the region of the NFT 160 without breaking down. In addition, the dielectric gap 160 may be unlikely to allow for diffusion of surrounding materials, such as Fe in the pole 150 and/or Au in the NFT 170 . In the embodiment shown, the width of the dielectric gap 160 is slightly less than that of the NFT nose 176 . In some embodiments, the width of the oxide gap 160 is substantially the same as the width of the NFT nose 176 . However, other widths are possible. The dielectric gap 160 also has a thickness in the down track direction and a length in the yoke direction. In general, the thickness, width and length of the dielectric gap 160 may be similar to those of the NFT nose 176 . However, in other embodiments, these features differ. In some embodiments, the dielectric gap 160 may be desired to be the same size as or larger than the NFT nose 176 . In general, if the dielectric gap 160 extends further in the yoke direction, the thickness in the down track direction and/or the width in the cross-track direction may be reduced.

As discussed above, the NFT 170 couples the optical energy carried by the waveguide 140 into the media 102 . The optical spot formed on the media 102 has a characteristic spot size, peak intensity location, and power gradient. The thermal spot on the media 102 has a corresponding size, peak temperature location and thermal gradient. The presence of the dielectric gap 160 between the NFT nose 176 and the main pole 150 may shift a peak in the energy delivered to the media 102 by the NFT 170 in the down track direction. Thus, the peak may be closer to the main pole 150 . In addition, the gradient in the energy may be higher on the side of the peak that is closer to the main pole 150 . Because the shape and location of the energy peak delivered to the media 102 have been changed, the heating of the media is also affected. In particular, the peak in temperature of the thermal spot for the media 102 is shifted in the down track direction to be closer to the main pole 150 . Further, the temperature gradient for the thermal spot his higher closer to the main pole 150 . Both the closer proximity to the main pole 150 and the higher thermal gradient are desirable.

This benefit can be seen in curves 192 , 194 and 196 in FIG. 2B . Note that curves 192 , 194 and 196 are representative only and not meant to depict actual data. Curve 192 depicts the thermal profile due to individual optical peaks. Curve 194 is the superposition of the peaks and represents the thermal profile due to the laser power coupled into the media 102 via the NFT 170 . The dashed curve 196 indicates the thermal profile in the absence of the dielectric gap. As can be seen, the presence of the dielectric gap 160 shifts the peak in the thermal profile 194 toward the main pole 150 from the position it would occupy in the absence of the dielectric gap 160 (shown by dashed curve 196 ). In addition, the gradient in the thermal profile 194 is higher in the region closer to the main pole 150 . Thus, the thermal profile 194 may allow for a higher magnetic field amplitude in the higher temperature region of the media. In addition, the presence of the dielectric gap 160 may result in flattening of isothermal lines in the cross-track direction. Flatter isothermal lines may lead to less curvature in the written bits. This may lead to bits which better match the profile of the reader (not shown). This may lead to a higher read signal to noise ratio. As such performance of the HAMR transducer 100 and reader (not shown) of the HAMR disk drive 100 may be improved.

FIGS. 3A and 3B depict apex and ABS views of another exemplary embodiment of a portion of the HAMR disk drive 100 ′ and transducer 130 ′. For clarity, FIGS. 3A-3B are not to scale. For simplicity not all portions of the HAMR disk drive 100 ′ are shown. In addition, although the HAMR disk drive 100 ′ is depicted in the context of particular components other and/or different components may be used. Further, the arrangement of components may vary in different embodiments. The HAMR disk drive 100 ′ is analogous to the HAMR disk drive 100 . Consequently, similar components have analogous labels. The HAMR transducer 130 ′ thus includes waveguide 140 , main pole 150 , dielectric gap 160 ′ and NFT 170 ′ that are analogous to the waveguides 140 , main pole 150 , dielectric gap 160 and NFT 170 , respectively. For clarity, components such as the laser, media, optional plasmonic ridge and other components are not shown.

The NFT 170 ′ includes the NFT nose 176 ′ and the NFT cap 174 ′ that are analogous to the NFT nose 176 and NFT cap 174 , respectively. In the embodiment shown, a portion of the NFT cap 174 ′ resides between the NFT nose 176 ′ and the dielectric gap 160 ′.

The disk drive 100 ′ and transducer 130 ′ share the benefits of the HAMR disk drive 100 and transducer 130 . The presence of the dielectric gap 160 ′ between a portion of the NFT 170 ′ (the cap 174 ′ and nose 176 ′) and the main pole 150 at and near the ABS. Thus, the peak in the thermal profile is shifted in the down track direction toward the main pole 150 for the HAMR transducer 130 ′. In addition, the gradient in the thermal profile may be increased. The isothermal lines in the cross-track direction may also be flattened. Thus, writing and reading for the transducer 130 ′ and HAMR disk drive 100 ′ may be improved.

FIGS. 4A and 4B depict apex and ABS views of another exemplary embodiment of a portion of the HAMR disk drive 100 ″ and transducer 130 ″. For clarity, FIGS. 4A-4B are not to scale. For simplicity not all portions of the HAMR disk drive 100 ″ are shown. In addition, although the HAMR disk drive 100 ″ is depicted in the context of particular components other and/or different components may be used. Further, the arrangement of components may vary in different embodiments. The HAMR disk drive 100 ″ is analogous to the HAMR disk drive 100 and/or 100 ′. Consequently, similar components have analogous labels. The HAMR transducer 130 ″ thus includes waveguide 140 , main pole 150 , dielectric gap 160 ″ and NFT 170 ″ that are analogous to the waveguides 140 , main pole 150 , dielectric gap 160 / 160 ′ and NFT 170 / 170 ′, respectively. For clarity, components such as the laser, media, optional plasmonic ridge and other components are not shown.

The NFT 170 ″ includes the NFT nose 176 ″ and the NFT cap 174 ″ that are analogous to the NFT nose 176 / 176 ′ and NFT cap 174 / 174 ′, respectively. The NFT cap 174 ″ does cover the sides and a portion of the back of the dielectric gap 160 ″. Similarly, the NFT nose 176 ″ adjoins a portion of the bottom of the dielectric gap 160 ″. In the embodiment shown, there is a small space between the NFT cap 174 ″ and the NFT nose 176 ″ in the region opposite to the ABS. Thus, the dielectric gap 160 ″ is not surrounded by the NFT 170 ″.

The disk drive 100 ″ and transducer 130 ″ share the benefits of the HAMR disk drive 100 / 100 ′ and transducer 130 / 130 ′. The presence of the dielectric gap 160 ″ between a portion of the NFT 170 ″ (the nose 176 ″) and the main pole 150 at and near the ABS. Thus, the peak in the thermal profile is shifted in the down track direction toward the main pole 150 for the HAMR transducer 130 ″. In addition, the gradient in the thermal profile may be increased. The isothermal lines in the cross-track direction may also be flattened. Thus, writing and reading for the transducer 130 ″ and HAMR disk drive 100 ″ may be improved.

FIG. 5 depicts an apex view of another exemplary embodiment of a portion of the HAMR disk drive 200 and transducer 230 . For clarity, FIG. 5 is not to scale. For simplicity not all portions of the HAMR disk drive 200 are shown. In addition, although the HAMR disk drive 200 is depicted in the context of particular components other and/or different components may be used. Further, the arrangement of components may vary in different embodiments. The HAMR disk drive 200 is analogous to the HAMR disk drives 100 , 100 ′ and/or 100 ″. Consequently, similar components have analogous labels. The HAMR transducer 230 thus includes waveguide 240 , main pole 250 , dielectric gap 260 and NFT 270 that are analogous to the waveguides 140 , main pole 150 , dielectric gap 160 / 160 ′/ 160 ″ and NFT 170 / 170 ′/ 170 ″, respectively. For clarity, components such as the laser, media, optional plasmonic ridge and other components are not shown.

The NFT 270 includes the NFT nose 276 and the NFT cap 274 that are analogous to the NFT nose 176 / 176 ′/ 176 ″ and NFT cap 174 / 174 ′/ 174 ″, respectively. The NFT cap 274 adjoins the sides and a portion of the back of the dielectric 260 . Similarly, the NFT nose 276 adjoins the bottom of the dielectric gap 260 . In addition, the NFT nose 276 has a media-facing surface (MFS) 273 that does not reside only at the ABS. Instead, the MFS 273 is shaped. In particular, the MFS 273 is angled from the ABS. In the embodiment shown, the MFS 273 is a smooth ramp. In other embodiments, the MFS 273 may be stepped, curved or have another geometry. However, the MFS 273 is shaped such that the portion of the NFT nose 276 closest to the main pole 250 is also closest to, or occupies, the ABS. Because the MFS 273 is angled, the MFS 273 further directs the laser power coupled into the media toward the pole 250 . Thus, subtle changes in the system may be less likely to affect performance of the HAMR transducer 230 . Note that in order to facilitate formation of the MFS, the NFT nose 272 and/or gap 264 the NFT 270 may be thicker in the down track direction. For example, in some embodiments, the NFT thickness may be on the order of at least fifty nanometers. In some embodiments, the thickness may be in excess of eighty nanometers. However, other thicknesses for the NFT cap 272 may be used.

The disk drive 200 and transducer 230 share the benefits of the HAMR disk drive 100 , 100 ′ and/or 100 ″ and transducer 130 , 130 ′ and/or 130 ″. The presence of the dielectric gap 260 between a portion of the NFT 270 and the main pole 250 at and near the ABS. Thus, the peak in the thermal profile is shifted in the down track direction toward the main pole 250 for the HAMR transducer 230 . In addition, the gradient in the thermal profile may be increased. The isothermal lines in the cross-track direction may also be flattened. Inclusion of the MFS 273 further directs the thermal profile toward the main pole 250 . Thus, writing and reading for the transducer 230 and HAMR disk drive 200 may be improved.

FIG. 6 depicts an apex view of another exemplary embodiment of a portion of the HAMR disk drive 200 ′ and transducer 230 ′. For clarity, FIG. 6 is not to scale. For simplicity not all portions of the HAMR disk drive 200 ′ are shown. In addition, although the HAMR disk drive 200 ′ is depicted in the context of particular components other and/or different components may be used. Further, the arrangement of components may vary in different embodiments. The HAMR disk drive 200 ′ is analogous to the HAMR disk drives 100 , 100 ′, 100 ″ and/or 200 . Consequently, similar components have analogous labels. The HAMR transducer 230 ′ thus includes waveguide 240 , main pole 250 , dielectric gap 260 and NFT 270 ′ that are analogous to the waveguides 140 , main pole 150 , dielectric gap 160 / 160 ′/ 160 ″/ 260 and NFT 170 / 170 ′/ 170 ″/ 270 , respectively. For clarity, components such as the laser, media, optional plasmonic ridge and other components are not shown.

The NFT 270 ′ includes the NFT nose 276 ′ and the NFT cap 274 ′ that are analogous to the NFT nose 176 / 176 ′/ 176 ″/ 276 and NFT cap 174 / 174 ′/ 174 ″/ 274 , respectively. The NFT cap 274 ′ adjoins the sides and the back of the dielectric gap 260 . The NFT nose 276 ′ adjoins the bottom of the dielectric gap 260 . In addition, the NFT nose 276 ′ has a MFS 273 ′ that is analogous to the MFS 273 and, therefore, is shaped. In the embodiment shown in FIG. 6 , the MFS 273 ′ has a portion at the ABS and a portion that is angled from the ABS. The angled portion of the MFS 273 ′ is shown as smooth, but may have another geometry. The remaining portion having height, d, occupies a part of the ABS. In some embodiments, d is at least five nanometers. In addition, d may be less than forty nanometers. In some cases, d is not more than approximately twenty nanometers. In some such embodiments, d is at least ten nanometers. Because a portion of the MFS 273 ′ is angled, the MFS 273 ′ further directs the laser power coupled into the media toward the pole 250 . Because a portion of the MFS resides at the ABS, power through the MFS 273 ′ may be not overheat. Thus, subtle changes in the system may be less likely to affect performance of the HAMR transducer 230 ′ without adversely affecting the reliability of the HAMR transducer 230 ′.

The disk drive 200 ′ and transducer 230 ′ share the benefits of the HAMR disk drive 100 , 100 ′, 100 ″ and/or 200 and transducer 130 , 130 ′, 130 ″ and/or 200 . The presence of the dielectric gap 260 between a portion of the NFT 270 ′ and the main pole 250 at and near the ABS. Thus, the peak in the thermal profile is shifted in the down track direction toward the main pole 250 for the HAMR transducer 230 ′. In addition, the gradient in the thermal profile may be increased. The isothermal lines in the cross-track direction may also be flattened. In addition, the MFS 273 ′ further directs the thermal profile toward the main pole 250 but may be less likely to fail. Thus, writing and reading for the transducer 230 ′ and HAMR disk drive 200 ′ may be improved.

FIG. 7 depicts an apex view of another exemplary embodiment of a portion of the HAMR disk drive 200 ″ and transducer 230 ″. For clarity, FIG. 7 is not to scale. For simplicity not all portions of the HAMR disk drive 200 ″ are shown. In addition, although the HAMR disk drive 200 ″ is depicted in the context of particular components other and/or different components may be used. Further, the arrangement of components may vary in different embodiments. The HAMR disk drive 200 ″ is analogous to the HAMR disk drives 100 , 100 ′, 100 ″, 200 and/or 200 ′. Consequently, similar components have analogous labels. The HAMR transducer 230 ″ thus includes waveguide 240 , main pole 250 , dielectric gap 260 and NFT 270 ″ that are analogous to the waveguides 140 , main pole 150 , dielectric gap 160 / 160 ′/ 160 ″/ 260 and NFT 170 / 170 ′/ 170 ″/ 270 / 270 ′, respectively. For clarity, components such as the laser, media, optional plasmonic ridge and other components are not shown.

The NFT 270 ″ includes the NFT nose 276 ″ and the NFT cap 274 ″ that are analogous to the NFT nose 176 / 176 ′/ 176 ″/ 276 / 276 ′ and NFT cap 174 / 174 ′/ 174 ″/ 274 / 274 ′, respectively. The NFT cap 274 ″ adjoins the sides and back of the dielectric gap 260 ′. A portion of the NFT cap 274 ″ also adjoins the bottom of the dielectric gap 260 ′. The NFT nose 276 ″ adjoins part of the bottom of the NFT cap 274 ″. Thus, the HAMR transducer 230 ″ is analogous to the transducer 130 ′. In addition, the NFT nose 276 ″ has a MFS 273 ″ that is analogous to the MFS 273 / 273 ′ and, therefore, is shaped. The NFT nose 276 ″ thus has a shape analogous to the NFT nose 276 ′.

The disk drive 200 ″ and transducer 230 ″ share the benefits of the HAMR disk drive 100 , 100 ′, 100 ″, 200 and/or 200 ′ and transducer 130 , 130 ′, 130 ″, 200 and/or 200 ′. The presence of the dielectric gap 260 between a portion of the NFT 270 ″ and the main pole 250 at and near the ABS. Thus, the peak in the thermal profile is shifted in the down track direction toward the main pole 250 for the HAMR transducer 230 ″. In addition, the gradient in the thermal profile may be increased. The isothermal lines in the cross-track direction may also be flattened. In addition, the MFS 273 ″ further directs the thermal profile toward the main pole 250 but may be less likely to fail. Thus, writing and reading for the transducer 230 ″ and HAMR disk drive 200 ″ may be improved.

FIG. 8 depicts an apex view of another exemplary embodiment of a portion of the HAMR disk drive 200 ′″ and transducer 230 ′″. For clarity, FIG. 8 is not to scale. For simplicity not all portions of the HAMR disk drive 200 ′″ are shown. In addition, although the HAMR disk drive 200 ′″ is depicted in the context of particular components other and/or different components may be used. Further, the arrangement of components may vary in different embodiments. The HAMR disk drive 200 ′″ is analogous to the HAMR disk drives 100 , 100 ′, 100 ″, 200 , 200 ′ and/or 200 ″. Consequently, similar components have analogous labels. The HAMR transducer 230 ′″ thus includes waveguide 240 , main pole 250 , dielectric gap 260 ′ and NFT 270 ′″ that are analogous to the waveguides 140 , main pole 150 , dielectric gap 160 / 160 ′/ 160 ″/ 260 / 260 ′ and NFT 170 / 170 ′/ 170 ″/ 270 / 270 ′, respectively. For clarity, components such as the laser, media, optional plasmonic ridge and other components are not shown.

The NFT 270 ″ includes the NFT nose 276 ″ and the NFT cap 274 ″ that are analogous to the NFT nose 176 / 176 ′/ 176 ″/ 276 / 276 ′ and NFT cap 174 / 174 ′/ 174 ″/ 274 / 274 ′, respectively. The NFT cap 274 ″ adjoins the sides, back and bottom of the dielectric gap 260 ″. In the embodiment shown in FIG. 8 , the dielectric gap 260 ″ extends further in the yoke direction, along the bottom of the main pole 250 . However, other configurations are possible. The NFT nose 276 ′″ adjoins part of the bottom of the NFT cap 274 ′″. In addition, the NFT nose 276 ′″ has a MFS 273 ′″ that is curved. The curved MFS 273 ′″ is shown as smooth. In other embodiments, however, the curved MFS 273 ′″ may be stepped or have another geometer. Like the MFS 273 , 273 ′ and 273 ″, the curved MFS 273 is configured such that the NFT nose 276 ′″ closest to the main pole 250 is also closest to, or occupies, the ABS. The NFT nose 276 ′″ thus tends to shift the peak in the energy delivered to the media closer to the main pole 250 .

The disk drive 200 ′″ and transducer 230 ′″ share the benefits of the HAMR disk drive 100 , 100 ′, 100 ″, 200 , 200 ′, and/or 200 ″ and transducer 130 , 130 ′, 130 ″, 200 , 200 ′ and/or 200 ″. The presence of the dielectric gap 260 between a portion of the NFT 270 ″ and the main pole 250 at and near the ABS. Thus, the peak in the thermal profile is shifted in the down track direction toward the main pole 250 for the HAMR transducer 230 ″. In addition, the gradient in the thermal profile may be increased. The isothermal lines in the cross-track direction may also be flattened. In addition, the MFS 273 ″ further directs the thermal profile toward the main pole 250 but may be less likely to fail. Thus, writing and reading for the transducer 230 ″ and HAMR disk drive 200 ″ may be improved.

Various features of the HAMR transducer, NFT, and dielectric gap are highlighted in FIGS. 2A-8 . One of ordinary skill in the art will readily recognize that one or more of these features may be combined in manners not explicitly described herein.

FIG. 9 is a flow chart depicting an exemplary embodiment of a method 300 for fabricating a HAMR write apparatus. The method 300 may be used in fabricating disk drives such as the disk drives 100 , 100 ′, 100 ″, 200 , 200 ′, 200 ″ and/or 200 ′″, though other transducers might be so fabricated. For clarity, the method 300 is described in the context of the disk drives 100 and 200 depicted in FIGS. 2A-2C and 5 . For simplicity, some steps may be omitted, performed in another order, interleaved and/or combined. The HAMR disk drives being fabricated may include a write transducer and a read transducer (not shown) and resides on a slider. For simplicity, however, the read transducer is not discussed. The method 300 is also described in the context of forming a transducer. However, the method 300 may be used to fabricate multiple transducer(s) at substantially the same time. The method 300 and system are also described in the context of particular layers. However, in some embodiments, such layers may include multiple sub-layers. The method 300 also may commence after formation of other portions of the disk drive.

The waveguide 140 / 240 may be provided, via step 302 . Step 302 may include depositing a layer of core material on a cladding layer, patterning the core material and refilling the region with an additional cladding layer. However, other method may be used.

The NFT 170 / 270 is provided, via step 304 . Step 304 includes providing the NFT nose 176 / 276 and the NFT cap 174 / 274 . Step 304 may include one or more steps of depositing metal layers and patterning the layers.

The dielectric gap 160 / 260 is fabricated, via step 306 . Because the dielectric gap 160 / 260 resides between the NFT nose 176 / 276 and the NFT cap 174 / 274 , at least part of step 306 may be interleaved with part(s) of step 302 .

A main pole 150 / 250 is formed, via step 308 . Step 308 may include multiple substeps such as forming a trench for the main pole in a layer, plating the high saturation magnetization material(s) for the main pole and planarizing these materials. At least one coil 132 for energizing the main pole is provided, via step 309 . Step 309 generally includes multiple deposition and removal steps to form the coil. The coil 132 may be a spiral coil, a toroidal coil or have another shape.

Using the method 300 , the HAMR devices 100 , 100 ′, 100 ″, 200 , 200 ′, 200 ″ and/or 200 ′″ may be fabricated. The benefit(s) of one or more of the HAMR disk drive(s) 100 , 100 ′, 100 ″, 200 , 200 ′, 200 ″ and/or 200 ′″ may thus be achieved.

FIG. 10 is a flow chart depicting an exemplary embodiment of a method 310 for fabricating a portion of a HAMR disk drive. For example, the method 310 may primarily be used in forming the NFTs 170 , 170 ′, 170 ″, 270 , 270 ′, 270 ″ and/or 270 ′″. However, other waveguides might be fabricated. For clarity, the method 310 is described in the context of the disk drives 100 and 200 depicted in FIGS. 2A-2C and 5 . For simplicity, some steps may be omitted, performed in another order, interleaved and/or combined. The HAMR disk drives being fabricated may include a write transducer and a read transducer (not shown) and resides on a slider. For simplicity, however, the reader is not discussed. The method 310 is also described in the context of forming a transducer. However, the method 310 may be used to fabricate multiple transducer(s) at substantially the same time. The method 310 and system are also described in the context of particular layers. However, in some embodiments, such layers may include multiple sub-layers. The method 310 also may commence after formation of other portions of the disk drive.

The metal nose for the NFT 170 / 270 is provided, via step 312 . Step 312 typically includes depositing and shaping the NFT 170 / 270 . Thus, step 312 may include shaping the MFS 273 to the desired configuration. The plasmonic ridge 172 may also be formed, via step 314 . The metal cap 174 / 274 may also be provided, via step 316 . Step 316 may also include performing multiple deposition and patterning steps.

Using the method 310 , the NFTs for the HAMR devices 100 , 100 ′, 100 ″, 200 , 200 ′, 200 ″ and/or 200 ′″ may be fabricated. The benefit(s) of one or more of the HAMR disk drive(s) 100 , 100 ′, 100 ″, 200 , 200 ′, 200 ″ and/or 200 ′″ may thus be achieved.