Heat assisted magnetic recording writer having an integrated polarization rotation plate

A conventional heat assisted magnetic recording (HAMR) transducer typically includes at least a waveguide, a near-field transducer (NFT), a main pole and a coil for energizing the main pole. The conventional HAMR transducer uses light, or energy, received from a conventional laser in order to write to a magnetic recording media. Light from the laser is incident on and coupled into the waveguide. Light is guided by the conventional waveguide to the NFT near the ABS. The NFT focuses the light to magnetic recording media (not shown), such as a disk. This region is thus heated. The main pole is energized and field from the pole tip is used to write to the heated portion of the recording media.

Although the conventional HAMR transducer functions, improvements in performance are still desired.

FIG. 1 is a diagram depicting a side view of an exemplary embodiment of a HAMR disk drive.

FIG. 2 is a diagram depicting an exploded perspective view of an exemplary embodiment of a portion of a HAMR writer.

FIG. 3 is a diagram depicting an exploded perspective view of another exemplary embodiment of a portion of a HAMR writer.

FIG. 4 is a diagram depicting a side view of another exemplary embodiment of a HAMR writer.

FIG. 5 is a diagram depicting a side view of another exemplary embodiment of a HAMR writer.

FIG. 6 is a flow chart depicting an exemplary embodiment of a method for fabricating a HAMR disk drive.

FIG. 7 is a flow chart depicting an exemplary embodiment of a method for fabricating rotation plate for a HAMR writer.

FIGS. 8A and 8B depict perspective and side views of an exemplary embodiment of a wafer during fabrication of the HAMR disk drive.

FIGS. 9-13 depict side views of an exemplary embodiment of a HAMR transducer during fabrication.

FIG. 1 depicts a side view of an exemplary embodiment of a portion of a heat-assisted magnetic recording (HAMR) write apparatus, or disk drive 100 . For clarity, FIG. 1 is not to scale. For simplicity not all portions of the HAMR disk drive 100 are shown. In addition, although the HAMR disk drive 100 is depicted in the context of particular components other and/or different components may be used. For example, circuitry used to drive and control various portions of the HAMR disk drive 100 is not shown. For simplicity, only single components are shown. However, multiples of each component and their sub-components, might be used.

The HAMR disk drive 100 includes media 102 , a slider 110 , a HAMR transducer 120 , a polarization rotation plate 160 and a laser subassembly 170 . Additional and/or different components may be included in the HAMR disk drive 100 . Although not shown, the slider 110 , and thus the laser assembly 170 and HAMR transducer 120 are generally attached to a suspension (not shown). The laser assembly 170 includes a laser 172 and a submount 174 . The submount 174 is a substrate to which the laser 172 may be affixed for improved mechanical stability, ease of manufacturing and better robustness. The laser 172 may be a chip such as a laser diode or other laser. The laser 172 outputs energy having a particular polarization state, indicated as Polarization State 1 (first polarization state) in FIG. 1 . In some embodiments, this first polarization state may be for light linearly polarized in the cross-track direction. The laser 172 outputs this light energy through the surface closest to the HAMR transducer 120 .

The HAMR transducer 120 is fabricated on the slider 110 and includes an air-bearing surface (ABS) proximate to the media 102 during use. In general, the HAMR write transducer 120 and a read transducer are present in the HAMR write apparatus 100 . However, for clarity, only the HAMR write transducer 120 is shown. As can be seen in FIG. 1 , HAMR transducer 120 includes a near-field transducer (NFT) 130 , a waveguide 140 , a main pole 150 and coil(s) 155 . The waveguide 140 is optically coupled with the laser 172 through the polarization rotation plate 160 , discussed below. The waveguide 140 carries light energy from the laser 172 to the ABS. The NFT 130 couples a portion of this energy from the waveguide 140 to the media 102 . In some embodiments, the NFT 130 occupies a portion of the ABS. The NFT 130 transfers energy to the media 102 . The write pole 150 is energized by the coils 155 and writes to the media 102 . The coil(s) 155 may be solenoidal or spiral (pancake) coils. Other components including but not limited to other poles and/or shields may also be present.

In some embodiments, the NFT 130 may be configured to propagate a surface plasmon polariton. In such embodiments, the NFT 130 may be desired to utilize a transverse magnetic (TM) mode oriented in the down track direction. In other embodiments, the NFT 130 may be configured to receive energy polarized in a particular manner for other reason(s). The desired polarization of light received by the NFT 130 is depicted as Polarization State 3 (third polarization) in FIG. 1 . In some embodiments, the waveguide 140 may also be desired to be excited with linearly polarized light having the TM mode in the down track direction. In other embodiments, the waveguide 140 may have improved efficiency for light polarized in another manner. However, the first polarization state of the light output by the laser 172 may be different than that which is desired. The light energy received by the waveguide 140 is polarized in a second polarization state (Polarization State 2 in FIG. 1 ).

Thus, the energy output by the laser 172 in the first polarization state may not match the energy desired to be input to the NFT 130 in the third polarization state or to the waveguide 140 in the second polarization state. As a result, the polarization rotation plate 160 is integrated into the HAMR disk drive 100 . The polarization rotation plate 160 is between the laser 172 and the HAMR transducer 120 . In some embodiments, the polarization rotation plate 160 is integrated onto the back side (opposite the ABS) of the slider 110 . In such embodiments, the polarization plate 160 may be fabricated onto the slider back side. In other embodiments, the polarization rotation plate 160 is integrated onto/fabricated onto the surface of the laser 172 . For example, the polarization rotation plate 160 may be fabricated on the surface of the laser 172 through which light is emitted.

The polarization rotation plate 170 is optically coupled with the laser 172 and changes the polarization of the energy passing through the polarization rotation plate 170 from the first polarization state to the second polarization state. In some embodiments, the polarization rotation plate 160 rotates the polarization to a state that is desired for the NFT 130 . In such an embodiment, the second polarization state is the same as the third polarization state. In other embodiments, the polarization of the energy exiting the polarization rotation plate 160 may be further altered. For example, the waveguide 140 may be configured to rotate the polarization from the second state to the third state. In other embodiments, an additional component might be used between the polarization rotation plate 160 and the laser 172 , between the polarization rotation plate 160 and the waveguide 140 , between the laser 172 and the polarization rotation plate 160 , or in another location between the polarization rotation plate 160 and the NFT 130 .

For example, the NFT 130 may be configured for light that is linearly polarized in the down track direction, while the laser 172 outputs light polarized in the cross-track direction. In some embodiments, the polarization rotation plate 160 may be a half-wave plate. Thus, the polarization of light entering the polarization rotation plate 160 form the laser 172 is rotated by ninety degrees. The light exiting the polarization rotation plate may have its TM mode in the down track direction as desired. In such an embodiment, the second and third polarization states are the same. Thus, the waveguide 140 or other optical component between the polarization rotation plate 160 and the NFT 130 does not change the polarization of the energy. In other embodiments, the polarization rotation plate 160 may be a quarter-wave plate or may change the polarization in another manner. In the case of a quarter-wave plate, the polarization of light entering the polarization rotation plate 160 form the laser 172 is rotated to be circularly polarized. In other cases, the polarization of the light may be changed in another manner. In such an embodiment, the second and third polarization states are different. In order for the light entering the NFT to have its TM mode in the down track direction, the waveguide 140 or other optical component between the laser 172 and the NFT 130 changes the polarization of the energy to match the desired polarization state.

In order to be integrated into the HAMR disk drive 100 , the polarization rotation plate 160 may be desired to be thin. Such a thin film polarization rotation plate might be fabricated using photolithography and analogous techniques. For example, the thickness, D, of the polarization rotation plate 160 may be desired to be not more than 10 micrometers. In some embodiments, thinner plates may be possible. For example, the polarization rotation plate 160 may be at least one micrometer and not more than six micrometers thick. In some embodiments, the polarization rotation plate may be not more than four microns thick. Other thicknesses may be possible.

The polarization rotation plate 160 may perform its functions through the use of birefringent material(s). In a birefringent materials, light propagating across different optical axes accrues a differential phase delay. Because light travels at different speeds along different axes, the index of refraction for the axes differ. A measure of the birefringence of the material is the difference in the indices of refraction along the ordinary and extraordinary optical axes. Thus, the birefringence is given by Δn, where Δn=n ordinary −n extraordinary . The thickness of the polarization rotation plate is given by D=jλ/(Δn), where j=0.5 for a half-wave plate (ninety degree rotation) and 0.25 for a quarter-wave plate (circular polarization). Other values of j are possible. The birefringence, Δn, of the material(s) used for the polarization rotation plate 160 is desired to be sufficiently high that the thicknesses described above may be achieved. For example, in some embodiments, the birefringence of the birefringent material(s) used in the polarization rotation plate may have a birefringence (Δn) of at least 0.1. As used herein, a high birefringence is one which is at least 0.1. Thus, the polarization rotation plate 160 may have a reduced thickness in the desired range.

Although not shown in FIG. 1 , antireflective coatings may be used in connection with the polarization rotation plate 160 . For example, the surface of the polarization rotation plate 160 adjacent to the laser 172 and/or the surface of the polarization rotation plate 160 adjacent to the waveguide 140 may be covered by antireflective coatings. The use of such antireflective may improve the coupling efficiency of light into and out of the polarization rotation plate 160 .

In operation, the laser 172 emits light having the first polarization state. The light then traverses the polarization rotation plate 160 . Upon exiting the polarization rotation plate 160 , the polarization of the light has been rotated to the second polarization state. The light then enters the waveguide 140 . The waveguide 140 directs the light to the NFT 130 . The waveguide 140 or other component may optionally change the polarization of the light. Thus, light entering the NFT 130 has a third polarization state. The NFT 128 focuses the light to a region of magnetic recording media 102 . High density bits can be written on a high coercivity medium with the pole 150 energized by the coils 155 to a modest magnetic field.

The HAMR disk drive 100 may exhibit enhanced performance. Using the polarization rotation plate 160 , the polarization of the light energy from the laser 172 can be rotated to be in the desired direction. Thus, energy having the desired polarization can be provided to the NFT 130 . For example, an NFT 130 that propagates surface plasmon polariton can be used in the HAMR transducer 100 . In addition, a lower cost laser 172 that produces light linearly polarized in the cross-track direction may be used in the HAMR disk drive 100 . Thus, performance of the HAMR disk drive may be improved.

FIG. 2 depicts an exploded perspective view of another exemplary embodiment of a portion of the HAMR disk drive 100 ′. For clarity, FIG. 2 is not to scale. For simplicity not all portions of the HAMR disk drive 100 ′ are shown. In addition, although the HAMR disk drive 100 ′ is depicted in the context of particular components other and/or different components may be used. Further, the arrangement of components may vary in different embodiments. The HAMR disk drive 100 ′ is analogous to the HAMR disk drive 100 . Consequently, similar components have analogous labels. The HAMR disk drive 100 ′ thus includes a laser 172 , a polarization rotation plate 160 ′ and a HAMR transducer 120 that includes a waveguide 140 , NFT 130 that are analogous to the laser 172 , polarization rotation plate 160 and HAMR transducer 120 including waveguide 140 and NFT 130 , respectively. For clarity, components such as the pole and coils have been omitted.

As can be seen in FIG. 2 , the polarization rotation plate 160 ′ is a half-wave plate 160 ′. The half-wave plate 160 ′ has a thickness D′ in the transmission direction of the light that is 0.5λ/Δn, where λ, is the wavelength of the light emitted by the laser 172 and Δn is the birefringence of the material used for the half-wave plate 160 ′. As discussed above, Δn is desired to be large—on the order of 0.1 or more. Thus, high birefringent material(s), such as TiO 2 , may be used for the half-wave plate 160 ′. In other embodiments, other material(s) having different birefringence(s) may be used. The thickness D′ of the half-wave plate 160 ′ may be less than ten micrometers. In some embodiments, the thickness of the half-wave plate 160 ′ is at least one micrometer and not more than six micrometers.

The laser 172 outputs light having a first polarization state, with the transverse electric (TE) mode in the cross track direction. After passing through the half-wave plate 160 ′, the light energy has its polarization rotated by ninety degrees. Thus, the second polarization state of the light exiting the half-wave plate 160 ′ is with TM mode polarized in the down track direction. The light is carried from the half-wave plate 160 ′ to the waveguide 140 and the NFT 130 . Because the polarization of the light is not further changed, the light energy coupled into the NFT 130 has a third polarization state that is the same as the second polarization state. Stated differently, this light provided to the NFT 130 is polarized in the down track direction. The NFT may then couple the energy from this light to the media (not shown in FIG. 2 ) and the write pole (not shown in FIG. 2 ) used to magnetically write to the heated portion of the media.

The HAMR disk drive 100 ′ shares the benefits of the HAMR transducer 100 . Using the half-wave plate 160 ′, the polarization of the light energy from the laser 172 can be rotated to be in the desired direction. Thus, energy having the desired polarization can be provided to the NFT 130 . Efficiency and reliability of the NFT 130 may thus be improved. In addition, a lower cost laser 172 that produces light linearly polarized in the cross-track direction may be used in the HAMR disk drive 100 ′. Thus, performance of the HAMR disk drive 100 ′ may be improved.

FIG. 3 depicts an exploded perspective view of another exemplary embodiment of a portion of the HAMR disk drive 100 ″. For clarity, FIG. 3 is not to scale. For simplicity not all portions of the HAMR disk drive 100 ″ are shown. In addition, although the HAMR disk drive 100 ″ is depicted in the context of particular components other and/or different components may be used. Further, the arrangement of components may vary in different embodiments. The HAMR disk drive 100 ″ is analogous to the HAMR disk drives 100 and 100 ′. Consequently, similar components have analogous labels. The HAMR disk drive 100 ″ thus includes a laser 172 , a polarization rotation plate 160 ″ and a HAMR transducer 120 ′ that includes a waveguide 140 ′, NFT 130 that are analogous to the laser 172 , polarization rotation plate 160 / 160 ′ and HAMR transducer 120 including waveguide 140 and NFT 130 , respectively. For clarity, components such as the pole and coils have been omitted.

As can be seen in FIG. 3 , the polarization rotation plate 160 ″ is a quarter-wave plate 160 ″. The quarter-wave plate 160 ″ has a thickness D″ in the transmission direction of the light that is 0.25λ/Δn, where λ is the wavelength of the light emitted by the laser 172 and Δn is the birefringence of the material used for the quarter-wave plate 160 ″. As discussed above, Δn is desired to be large—on the order of 0.1 or more. Thus, high birefringent material(s), such as TiO 2 , may be used for the quarter-wave plate 160 ′. In other embodiments, other material(s) that may have other birefringence(s) may be used. Thus, the thickness D″ of the half-wave plate 160 ′ may be less than ten micrometers. In some embodiments, the thickness of the quarter-wave plate 160 ′ is at least one micrometer and not more than six micrometers. After traversing the quarter-wave plate 160 ″, the light has a second polarization state that is circularly polarized.

In addition, the HAMR transducer 120 ′ is depicted as including rotation component 142 . The rotation component 142 may be part of the waveguide 140 ′ or a separate component between the quarter-wave plate 140 ′ and the NFT 130 . The rotation component 142 may be used to filter the undesired rotation state(s) or otherwise change the polarization of the light to be the desired polarization. If the rotation component 142 is considered to be part of the waveguide 140 ′, then the waveguide 140 ′ is configured to provide this polarization change. Thus, the third polarization state of the light entering the NFT 130 is in the down track direction as shown in FIG. 3 .

In operation, the laser 172 provides light having a first polarization state, with the TE mode in the cross track direction. After passing through the quarter-wave plate 160 ″, the light energy is circularly polarized. The light is carried from the quarter-wave plate 160 ″ to the waveguide 140 ′/rotation component 142 and the NFT 130 . The polarization of the light is changed by some combination of the waveguide 140 ′ and/or component 142 such that the light energy coupled into the NFT 130 has a third polarization state, with the TM mode in the down track direction. Thus, this light provided to the NFT 130 is polarized in the down track direction. The NFT may then couple the energy from this light to the media (not shown in FIG. 3 ) and the write pole (not shown in FIG. 3 ) used to write to the heated portion of the media.

The HAMR disk drive 100 ″ shares the benefits of the HAMR transducer(s) 100 and/or 100 ′. Using a combination of the quarter-wave plate 160 ″ and rotation component 142 /waveguide 140 ′, the polarization of the light energy from the laser 172 can be rotated to be in the desired direction. Thus, energy having the desired polarization can be provided to the NFT 130 . Efficiency and reliability of the NFT 130 may thus be improved. In addition, a lower cost laser 172 that produces light linearly polarized in the cross-track direction may be used in the HAMR disk drive 100 ″. Further, use of the combination of the polarization rotation plate 160 ″ and the rotation component 142 /waveguide 140 ′ may be easier to manufacture. The efficiency of coupling light from the laser 172 into the transducer 120 ′ may also be improved by splitting the polarization rotation change between multiple components 160 ″ and 142 / 140 ′. Thus, performance of the HAMR disk drive 100 ″ may be improved.

Although not shown in FIGS. 1-3 , antireflective coatings may be used in conjunction with the polarization rotation plates 160 , 160 ′ and/or 160 ″. In addition, the polarization rotation plates 160 , 160 ′ and/or 160 ″ may be fabricated on the laser 172 or the transducer 120 / 120 ′. FIGS. 4 and 5 depict side views of HAMR disk drives 100 ′″ and 100 ″″, respectively, that illustrate two such embodiments.

FIG. 4 depicts an exploded side view of another exemplary embodiment of a portion of the HAMR disk drive 100 ″′. For clarity, FIG. 4 is not to scale. For simplicity not all portions of the HAMR disk drive 100 ′″ are shown. In addition, although the HAMR disk drive 100 ′″ is depicted in the context of particular components other and/or different components may be used. Further, the arrangement of components may vary in different embodiments. The HAMR disk drive 100 ′″ is analogous to the HAMR disk drives 100 , 100 ′ and/or 100 ″. Consequently, similar components have analogous labels. The HAMR disk drive 100 ′″ thus includes a laser 172 , a polarization rotation plate 160 ′″ and a HAMR transducer 120 that includes a waveguide 140 , NFT 130 that are analogous to the laser 172 , polarization rotation plate 160 / 160 ′/ 160 ″ and HAMR transducer 120 / 120 ′ including waveguide 140 / 140 ′ and NFT 130 , respectively. For clarity, components such as the pole and coils have been omitted. In addition, any component 142 is omitted for simplicity.

As can be seen in FIG. 4 , the polarization rotation plate 160 ′″ is fabricated on the slider back side. The polarization rotation plate 160 ′″ may be a quarter-wave plate, a half-wave plate or other polarization rotator. If the laser 172 outputs energy polarized with the TE direction in the cross-track direction, then the polarization rotation plate 160 ′″ and other optical component(s) between the laser 172 and the NFT 130 may combine to rotate the polarization of light to be polarized with the TM mode in the down track direction by the time the light is coupled into the NFT 130 .

Also shown in FIG. 4 are antireflective coatings 162 and 164 . Although antireflective coatings 162 and 164 are shown on both the entrance and exit surfaces of the polarization rotation plate 160 ′″, in other embodiments, one or both of the coatings 162 and/or 164 may be omitted. In some embodiments, the antireflective coating(s) include multilayer(s). For example, the antireflective coatings 162 and 164 may be a bilayer including a layer of Si 3 N 4 having one index of refraction and another layer of SiO 2 having another index of refraction. Other multilayers are also possible. The polarization rotation plate 160 ′″ and the antireflective coatings 162 and 164 are fabricated on the back side of the slider 110 . In the embodiment shown, the polarization rotation plate 160 ′″ and the antireflective coatings 162 and 164 occupy the entire back surface of the slider 110 . In other embodiments, the components 160 ′″, 162 and/or 164 may be patterned such that only a portion of the back surface of the slider 110 is covered.

The HAMR disk drive 100 ′″ operates in an analogous manner to the HAMR disk drive 100 , 100 ′, and/or 100 ″. Consequently, the HAMR disk drive 100 ′″ shares the benefits of the HAMR transducer(s) 100 , 100 ′ and/or 100 ″. Using a combination of the polarization rotation plate 160 ′″ and, optionally, other component(s), the polarization of the light energy from the laser 172 can be rotated to be in the desired direction. Thus, energy having the desired polarization can be provided to the NFT 130 . Efficiency and reliability of the NFT 130 may thus be improved. In addition, a lower cost laser 172 that produces light linearly polarized in the cross-track direction may be used in the HAMR disk drive 100 ′″. Further, use of the antireflective coatings 162 and 164 may enhance the coupling efficiency for the polarization rotation plate 160 ″. Thus, performance of the HAMR disk drive 100 ′″ may be improved.

FIG. 5 depicts an exploded side view of another exemplary embodiment of a portion of the HAMR disk drive 100 ″″. For clarity, FIG. 5 is not to scale. For simplicity not all portions of the HAMR disk drive 100 ″″ are shown. In addition, although the HAMR disk drive 100 ″″ is depicted in the context of particular components other and/or different components may be used. Further, the arrangement of components may vary in different embodiments. The HAMR disk drive 100 ″″ is analogous to the HAMR disk drives 100 , 100 ′, 100 ″, and/or 100 ′″. Consequently, similar components have analogous labels. The HAMR disk drive 100 ″″ thus includes a laser 172 , a polarization rotation plate 160 ″″ and a HAMR transducer 120 that includes a waveguide 140 , NFT 130 that are analogous to the laser 172 , polarization rotation plate 160 / 1607160 ″/ 160 ″″ and HAMR transducer 120 / 120 ′ including waveguide 140 / 140 ′ and NFT 130 , respectively. For clarity, components such as the pole and coils have been omitted. In addition, any component 142 is omitted for simplicity.

As can be seen in FIG. 5 , the polarization rotation plate 160 ″″ is fabricated on the surface of the laser 172 that emits light. The polarization rotation plate 160 ″″ may be a quarter-wave plate, a half-wave plate or other polarization rotator. If the laser 172 outputs energy polarized with the TE direction in the cross-track direction, then the polarization rotation plate 160 ″″ and other optical component(s) between the laser 172 and the NFT 130 may combine to rotate the polarization of light to be polarized with the TM mode in the down track direction by the time the light is coupled into the NFT 130 .

Also shown in FIG. 5 are antireflective coatings 162 ′ and 164 ′. The antireflective coatings 162 ′ and 164 ′ are analogous to the antireflective coatings 162 and 164 , respectively. Although antireflective coatings 162 ′ and 164 ′ are shown on both the entrance and exit surfaces of the polarization rotation plate 160 ′″, in other embodiments, one or both of the coatings 162 ′ and/or 164 ′ may be omitted. In some embodiments, the antireflective coating(s) include multilayer(s), as discussed above. The polarization rotation plate 160 ″″ and the antireflective coatings 162 ′ and 164 ′ are fabricated on the surface of the laser 172 . In the embodiment shown, the polarization rotation plate 160 ″″ and the antireflective coatings 162 ′ and 164 ′ occupy the entire back surface of the laser 172 . In other embodiments, the components 160 ″″, 162 ′ and/or 164 ′ may be patterned such that only a portion of the back surface of the laser 172 is covered.

The HAMR disk drive 100 ″″ operates in an analogous manner to the HAMR disk drive 100 , 100 ′, 100 ″ and/or 100 ′″. Consequently, the HAMR disk drive 100 ″″ shares the benefits of the HAMR transducer(s) 100 , 100 ′, 100 ″ and/or 100 ′″. Using a combination of the polarization rotation plate 160 ″″ and, optionally, other component(s), the polarization of the light energy from the laser 172 can be rotated to be in the desired direction. Thus, energy having the desired polarization can be provided to the NFT 130 . Efficiency and reliability of the NFT 130 may thus be improved. In addition, a lower cost laser 172 that produces light linearly polarized in the cross-track direction may be used in the HAMR disk drive 100 ″″. Use of the antireflective coatings 162 ′ and 164 ′ may also enhance the coupling efficiency for the polarization rotation plate 160 ″″. Thus, performance of the HAMR disk drive 100 ″″ may be improved.

FIG. 6 is a flow chart depicting an exemplary embodiment of a method 200 for fabricating a HAMR write disk drive. The method 200 may be used in fabricating disk drives such as the disk drives 100 , 100 ′, 100 ″, 100 ″″ and/or 100 ″″, though other transducers might be so fabricated. For clarity, the method 200 is described in the context of the disk drives depicted in FIGS. 1-3 . For simplicity, some steps may be omitted, performed in another order, interleaved and/or combined. The HAMR disk drives being fabricated may include a writer and a read transducer (not shown) and resides on a slider. For simplicity, however, the reader is not discussed. The method 200 is also described in the context of providing a single laser, transducer and polarization rotation plate. However, the method 200 may be used to fabricate multiple laser(s), transducer(s) and/or polarization rotation plates at substantially the same time. The method 200 and system are also described in the context of particular layers. However, in some embodiments, such layers may include multiple sublayers. The method 200 also may commence after formation of other portions of the disk drive.

A laser 172 that emits energy having a first polarization state is provided, via step 202 . In some embodiments, step 202 may include obtaining the desired laser and affixing the laser 172 to a submount 174 . Step 202 may also include affixing the laser subassembly 170 to the slider 110 , which is discussed below.

A polarization rotation plate 160 / 160 ′/ 160 ″ that can be optically coupled with the laser 172 is provided, via step 204 . Step 204 may include fabricating the polarization rotation plate 160 / 160 ′/ 160 ″ on the laser or on the slider 110 , as is shown in FIGS. 5 and 4 , respectively. Alternatively, a stand-alone polarization rotation plate may be used in step 202 if the plate can be integrated into the HAMR disk drive 100 / 100 ′/ 100 ″ without adversely affecting performance. The polarization rotation plate 160 / 160 ′/ 160 ″ changes the first polarization state of the light emitted by the laser 172 to a second polarization state. Step 204 may include multiple substeps including but not limited to depositing birefringent and/or other material(s) used in the polarization rotation plate 160 / 160 ′/ 160 ″ and optionally patterning these materials. For example, a birefringent material such as TiO 2 may be deposited for at an angle of at least forty-five degrees and not more than eighty degrees from a normal to a surface on which the polarization rotation plate is formed. The flux direction for deposition may also be set with respect to some landmark on the surface of the devices in step 204 to configure the birefringent material as desired.

In some embodiments, step 204 might include formation of antireflective coatings, such as the antireflective coatings 162 / 162 ′ and/or 164 / 164 ′. Alternatively, fabrication of these antireflective coating(s) may be accomplished in a separate step.

A HAMR transducer 120 / 120 ′ is provided, via step 206 . In step 206 , the main pole 150 , coil(s) 155 , NFT 130 , waveguide 140 / 140 ′ and, optionally, polarization rotation component 142 may be fabricated on a wafer. Other components of the transducer 120 / 120 ′ may also be manufactured in step 206 . The laser 172 , polarization rotation plate 160 / 160 ′/ 160 ″ and transducer 120 / 120 ′ may also be affixed together and incorporated into the disk drive 100 , 100 ′ and/or 100 ″ in step 206 . Alternatively, these integration steps may be considered to be separate.

Using the method 200 , the HAMR disk drive 100 , 100 ′, 100 ″, 100 ′″ and/or 100 ″″ may be fabricated. The benefit(s) of one or more of the HAMR disk drive(s) 100 , 100 ′, 100 ″, 100 ′″ and/or 100 ″″ may thus be achieved.

FIG. 7 is a flow chart depicting an exemplary embodiment of a method 210 for fabricating a portion of a HAMR disk drive. For example, the method 210 may primarily be used in forming a polarization rotation plate such as the polarization rotation plate(s) 160 , 160 ′, 160 ″, 160 ′″ and/or 160 ″″. FIGS. 8 A and 8 B- 13 are diagrams depicting various views of another exemplary embodiment of HAMR disk drives 300 and 300 ′ during fabrication using the method 210 . For clarity, FIGS. 8 A and 8 B- 13 are not to scale. Referring to FIGS. 7-13 , the method 210 is described in the context of the HAMR disk drives 300 and 300 ′. However, the method 210 may be used to form another device (not shown). The HAMR disk drive 300 / 300 ′ being fabricated may include other components that are not shown in FIGS. 8 A and 8 B- 13 . For example, a read head, a laser, the particular transducers and components thereof are not shown. The method 210 also may commence after formation of other portions of the HAMR disk drive 300 / 300 ′. The method 210 is also described in the context of providing single components. However, the method 210 may be used to fabricate multiple components at substantially the same time. The method 210 and device 300 are also described in the context of particular layers. However, in some embodiments, such layers may include multiple sublayers.

An antireflective coating is optionally provided, via step 212 . Step 212 may include depositing a multilayer, such as a Si 3 N 4 /SiO 2 multilayer. In other embodiments, other material(s) and/or another number of layers may be provided. The antireflective coating provided in step 212 is configured to reduce or eliminate reflections of light having the wavelength used in the HAMR disk drive.

The devices on which the polarization rotation plate is to be fabricated are mounted, via step 214 . For example, if the polarization rotation plate is to be fabricated on the back surface of the slider, then step 214 includes mounting the row bars containing the transducers/sliders on a substrate such that the vapor flux of birefringent material(s) being deposited has the desired direction (vapor flux direction). For example, if an e-beam evaporation process is used, the birefringent materials are deposited on the row bars in the vapor flux direction. Stated differently, step 214 includes mounting the devices in the deposition apparatus such that the birefringent material being deposited has its ordinary and extraordinary axes in the directions desired. In such an embodiment, the row bars having a long axis along which multiple sliders exist. The row bars may be mounted such that the vapor flux direction is forty-five degrees from the long axis of the plurality of row bars.

The birefringent material(s) for the polarization rotation plate are deposited at an angle from normal to the surface on which the polarization rotation plate is to be fabricated, via step 216 . In some embodiments, this angle is at least forty-five degrees and not more than eighty degrees. In some such embodiments, the angle is at least sixty degrees and not more than eighty degrees from normal to the surface. For example, the angle may be nominally seventy degrees. Because the birefringent material(s) deposited in step 216 may be under high stress, step 216 may include annealing the devices. For example, a rapid thermal anneal may be performed. Such a step may reduce the stress in the polarization plate being fabricated. Also in step 216 , the desired thickness of birefringent materials may be provided. For example, a thickness corresponding to a quarter-wave plate or a half-wave plate may be deposited. Steps 212 , 214 and 216 may result in material(s) having a high birefringence being fabricated. Thus, the polarization plate being fabricated may have a birefringence of at least 0.1.

FIGS. 8A , 8 B and 9 depict portions of the HAMR disk drives during steps 212 , 214 and 216 . FIG. 8A is a perspective view depicting the vapor flux direction at an angle from the substrate 310 . FIG. 8B is a plan view depicting the substrate 310 and the row bars 312 mounted on the substrate. FIG. 9 is a side view of a portion of the devices. As can be seen in FIG. 8A , the vapor flux direction (labeled Flux in FIG. 8A ) is at an angle, a, from the z-direction. The z-direction is normal to the surface of the substrate 310 and row bars 312 , which are substantially in the x-y plane. The substrate 310 may also be rotated during deposition, as shown in FIG. 8A by the curved arrow. In some embodiments, the rotation is accomplished via one hundred and eighty degree stepwise rotations. The row bars 312 are also mounted such that their long axis is substantially forty-five degrees from the vapor flux direction (labeled Flux in FIG. 8B ). The resulting ordinary and extraordinary axes for the birefringent material(s) deposited are shown as items n o and n e , respectively, in FIG. 8B . As can be seen in FIG. 9 , the antireflective coating layers (ARC layers) 314 and 315 have been deposited on underlying device 311 in step 212 . Together, the ARC layers 314 and 315 form antireflective coating 316 . The underlying device may include the HAMR transducer and slider that are part of the row bars 312 . In another embodiment, the underlying device 311 might be the laser. FIG. 9 also depicts the angle, a, at which the birefringent material(s) are deposited. Thus, if an e-beam evaporation process is used, the substrate may be tilted at an angle, a, from the vapor flux direction. Although the birefringent material(s) are shown as a continuous layer, in other embodiment, islands that do not occupy the entire surface of the row bars 312 or sliders may be provided.

The birefringent material(s) 320 are optionally patterned, via step 218 . Step 218 may be performed using photolithography. This patterning may be performed such that the polarization rotation plate being fabricated occupies only a portion of the slider back surface or only a portion of the laser surface. Another antireflective coating may also optionally be provided, via step 220 . Step 220 may include depositing a multilayer, such as a Si 3 N 4 /SiO 2 multilayer. In other embodiments, other material(s) and/or another number of layers may be provided. The antireflective coating provided in step 220 is configured to reduce or eliminate reflections of light having the wavelength used in the HAMR disk drive. In some embodiments, step 218 is performed before step 220 . In other embodiments, step 218 is performed after step 220 .

FIGS. 10 and 11 depict side views of a portion of the HAMR disk drive 300 when step 218 is performed after step 220 . Thus, the antireflective coating 319 is formed first. FIG. 10 depicts the HAMR disk drive 300 after step 320 is performed. In the embodiment shown, the antireflective coating 319 includes two ARC layers 317 and 318 . The patterning step 318 is then performed. FIG. 11 depicts a portion of the HAMR disk drive 300 after step 318 is performed. Thus, the antireflective coating 319 and birefringent material(s) 320 have been patterned. In this embodiment, the bottom antireflective coating 316 has not been patterned. However, in other embodiments, portions of the antireflective coating 316 not covered by the birefringent material(s) 320 may be removed.

FIGS. 12 and 13 depict side views of a portion of the HAMR disk drive 300 ′ when step 220 is performed after step 218 . Thus, the birefringent material(s) 320 are patterned first. FIG. 12 depicts a portion of the HAMR disk drive 300 ′ after step 318 is performed. Thus, the antireflective coating 316 ′ and birefringent material(s) 320 have been patterned. In other embodiments, portions of the antireflective coating 316 ′ not covered by the birefringent material(s) 320 may not be removed. Step 220 is then performed. Thus, the antireflective coating 319 ′ is formed. In the embodiment shown, the antireflective coating 319 ′ includes two ARC layers 317 ′ and 318 ′. In addition, the antireflective coating 319 ′ covers the sides of the patterned birefringent material(s) 320 and antireflective coating 316 ′. Using the method 210 , the HAMR disk drive(s) 300 and 300 ′ may be fabricated. Performance and/or reliability of the disk drives 300 and 300 ′ may thus be improved in a manner analogous to the HAMR disk drives 100 , 100 ′, 100 ″, 100 ′″ and/or 100 ″″.