Semiconductor device, process for production of the semiconductor device, and display device equipped with the semiconductor device

This application is the national stage under 35 USC 371 of International Application No. PCT/JP2010/066287, filed Sep. 21, 2010, which claims priority from Japanese Patent Application No. 2009-233255, filed Oct. 7, 2009, the entire contents of which are incorporated herein by reference.

The present invention relates to a semiconductor device, a production method thereof, and a display device having a semiconductor device.

In recent years, semiconductor devices having thin film transistors (TFTs) and thin film diodes (TFDs) formed on the same substrate, as well as electronic equipment having such a semiconductor device, are being developed (e.g., Patent Documents 1 and 2). Such a semiconductor device can be produced through forming semiconductor layers of the TFTs and TFDs by using the same crystalline semiconductor film that is formed on a substrate. The device characteristics of TFTs and TFDs that are formed on the same substrate are greatly affected by the structure of the semiconductor layers serving as their active regions.

Patent Document 1 discloses an image sensor having a photosensor portion utilizing a TFD and a driving circuit portion utilizing a TFT on the same substrate. Patent Document 1 discloses a display device which, by allowing a low concentration region (e.g., an n− or p− region) composing a photodiode in the photosensor to be larger than a high concentration region (e.g., an n+ or p+ region), provides an increased photocurrent, an improved efficiency of photoelectric conversion, and an improved S/N ratio (a current ratio of bright and dark). In the present specification, the p+ region and the n+ region may collectively be referred to as “high concentration regions”. Moreover, the p− region (or n− region) may be referred to as a low concentration region (or an intrinsic region; i region).

Patent Literature

[Patent Document 1] Japanese Laid-Open Patent Publication No. 2006-3857

[Patent Document 2] Japanese Laid-Open Patent Publication No. 2009-16855

As display devices increase in resolution, it becomes necessary for the TFD provided in each pixel to become smaller. However, small TFDs make it difficult to obtain a sufficient photocurrent.

In the production method of a TFD disclosed in Patent Document 1, high concentration regions are formed by using usual photolithography steps, and misalignment must be taken into consideration; this results in a problem in that the high concentration regions will become longer than necessary, and that the low concentration region will decrease in length. A PIN (P-Intrinsic-N) diode has characteristics such that its photocurrent increases as the low concentration region increase in length. Moreover, recent liquid crystal display devices have pixels meant for higher resolution displaying, and the aforementioned problem becomes particularly outstanding in liquid crystal display devices having a high resolution.

Moreover, regarding the production of TFDs and TFTs, there is a problem in that insulation failures may occur due to insufficient coating of the insulating layers, thereby lowering the production yield.

The present invention has been made in view of the above problems, and a main objective thereof is to provide: a semiconductor device having a TFD and a TFT which provides a sufficient photocurrent even when downsized, and which is unlikely to experience insulation failures and has high reliability; a production method thereof; and a display device having such a semiconductor device.

A semiconductor device according to the present invention is a semiconductor device comprising an insulative substrate and a plurality of thin film diodes carried on the insulative substrate, wherein, each of the plurality of thin film diodes includes a semiconductor layer being formed on the insulative substrate and having first, second, and third semiconductor regions, a first insulating layer formed on the semiconductor layer, a second insulating layer formed on the first insulating layer, first and second contact holes penetrating through the first and second insulating layers, a first electrode being connected to the first semiconductor region within the first contact hole, and a second electrode being connected to the second semiconductor region within the second contact hole, the first semiconductor region containing an impurity of a first-conductivity type at a first concentration, the second semiconductor region containing an impurity of a second-conductivity type different from the first conductivity type at a second concentration, the third semiconductor region containing the first-conductivity type impurity at a third concentration lower than the first concentration or containing the second-conductivity type impurity at a third concentration lower than the second concentration; and the first semiconductor region conforms to an aperture pattern in the second insulating layer, or the second semiconductor region conforms to an aperture pattern in the second insulating layer.

In one embodiment, as viewed from a normal direction of the insulative substrate, an outer edge of the first semiconductor region is substantially defined by the aperture pattern in the second insulating layer, or an outer edge of the second semiconductor region is substantially defined by the aperture pattern in the second insulating layer.

In one embodiment, the first semiconductor region conforms to the aperture pattern in the second insulating layer, and the second semiconductor region conforms to the aperture pattern in the second insulating layer.

In one embodiment, as viewed from a normal direction of the insulative substrate, an outer edge of the first semiconductor region is substantially defined by the aperture pattern in the second insulating layer, and an outer edge of the second semiconductor region is substantially defined by the aperture pattern in the second insulating layer.

In one embodiment, the second insulating layer has a thickness greater than a thickness of the first insulating layer.

In one embodiment, the thickness of the second insulating layer is no less than 20 nm and no more than 200 nm.

In one embodiment, the thickness of the second insulating layer is no less than 30 nm and no more than 100 nm.

In one embodiment, the semiconductor device further comprises a plurality of thin film transistors carried on the insulative substrate.

A display device according to the present invention comprises any of the above semiconductor devices.

A production method of a semiconductor device according to the present invention is a production method of a semiconductor device having an insulative substrate and a plurality of thin film diodes carried on the insulative substrate, the production method comprising: step a of providing an insulative substrate; step b of forming a semiconductor layer on the insulative substrate; step c of forming a first insulating layer on the semiconductor layer and forming a second insulating layer on the first insulating layer; step d of forming first and second contact holes penetrating through the first and second insulating layers; step e of forming first, second, and third semiconductor regions by implanting impurities of first and second-conductivity types to the semiconductor layer, the first semiconductor region containing an impurity of a first-conductivity type at a first concentration, the second semiconductor region containing an impurity of a second-conductivity type different from the first conductivity type at a second concentration, the third semiconductor region containing the first-conductivity type impurity at a third concentration lower than the first concentration or containing the second-conductivity type impurity at a third concentration lower than the second concentration; and step f of forming on the second insulating layer a first electrode connected to the first semiconductor region within the first contact hole and a second electrode connected to the second semiconductor region within the second contact hole, wherein step e includes a step of forming the first semiconductor region in a self-aligning manner with respect to an aperture pattern in the second insulating layer, or a step of forming the second semiconductor region in a self-aligning manner with respect to an aperture pattern in the second insulating layer.

In one embodiment, step e includes a step of forming the first semiconductor region in a self-aligning manner with respect to an aperture pattern in the second insulating layer and a step of forming the second semiconductor region in a self-aligning manner with respect to an aperture pattern in the second insulating layer.

In one embodiment, at least one of step c and step d includes a dry etching step using hydrogen bromide.

Another semiconductor device according to the present invention is a semiconductor device comprising an insulative substrate and a plurality of thin film transistors carried on the insulative substrate, wherein, each of the plurality of thin film transistors includes a semiconductor layer being formed on the insulative substrate and having first, second, and third semiconductor regions, a first insulating layer formed on the semiconductor layer, a second insulating layer formed on the first insulating layer, a first electrode formed on the first insulating layer, first and second contact holes penetrating through the first and second insulating layers, a second electrode connected to the first semiconductor region within the first contact hole, and a third electrode connected to the second semiconductor region within the second contact hole, the first and second semiconductor regions containing an impurity of a first-conductivity type at a first concentration, the third semiconductor region containing the first-conductivity type impurity at a second concentration lower than the first concentration or containing an impurity of a second-conductivity type different from the first conductivity type at a third concentration lower than the first concentration; and the first semiconductor region conforms to an aperture pattern in the second insulating layer and the first electrode, or the second semiconductor region conforms to an aperture pattern in the second insulating layer and the first electrode.

In one embodiment, as viewed from a normal direction of the insulative substrate, an outer edge of the first semiconductor region is substantially defined by the aperture pattern in the second insulating layer and the first electrode, or an outer edge of the second semiconductor region is substantially defined by the aperture pattern in the second insulating layer and the first electrode.

In one embodiment, the first semiconductor region conforms to an aperture pattern in the second insulating layer and the first electrode, and the second semiconductor region conforms to an aperture pattern in the second insulating layer and the first electrode.

In one embodiment, as viewed from a normal direction of the insulative substrate, an outer edge of the first semiconductor region is substantially defined by the aperture pattern in the second insulating layer and the first electrode, and an outer edge of the second semiconductor region is substantially defined by the aperture pattern in the second insulating layer and the first electrode.

In one embodiment, the second insulating layer has a thickness greater than a thickness of the first insulating layer.

In one embodiment, the thickness of the second insulating layer is no less than 20 nm and no more than 200 nm.

In one embodiment, the thickness of the second insulating layer is no less than 30 nm and no more than 100 nm.

In one embodiment, a thickness of a gate insulating layer at an end portion of the semiconductor layer is greater than a thickness of the gate insulating layer in anywhere other than the end portion of the semiconductor layer.

In one embodiment, the semiconductor device further comprises a plurality of thin film diodes carried on the insulative substrate.

Another display device according to the present invention comprises any of the above semiconductor devices.

Another production method of a semiconductor device according to the present invention is a production method of a semiconductor device having an insulative substrate and a plurality of thin film transistors carried on the insulative substrate, the production method comprising: step a of providing an insulative substrate; step b of forming a semiconductor layer on the insulative substrate; step c of forming a first insulating layer on the semiconductor layer and forming a second insulating layer on the first insulating layer; step d of forming a first electrode on the first insulating layer; step e of forming first and second contact holes penetrating through the first and second insulating layers; step f of forming first and second semiconductor regions by implanting first and second-conductivity type impurities to the semiconductor layer, the first semiconductor region containing an impurity of a first-conductivity type at a first concentration, the second semiconductor region containing an impurity of a second-conductivity type different from the first conductivity type at a second concentration; and step g of forming on the second insulating layer an electrode connected to the first semiconductor region within the first contact hole, wherein step f includes a step of forming the first semiconductor region or the second semiconductor region in a self-aligning manner with respect to an aperture pattern in the second insulating layer and the first electrode.

In one embodiment, step f includes a step of forming the first semiconductor region in a self-aligning manner with respect to the aperture pattern in the second insulating layer and the first electrode, and a step of forming the second semiconductor region in a self-aligning manner with respect to the aperture pattern in the second insulating layer and the first electrode.

In one embodiment, at least one of step d and step e includes a dry etching step using hydrogen bromide.

According to the present invention, since the lengths of the high concentration regions can be minimized and the length of the low concentration region can be increased, a thin film diode can be provided which provides a sufficient photocurrent even in the case of disposing a PIN diode within the narrow pixel pitch of a higher resolution liquid crystal display device, and which experiences few insulation failures.

[ FIG. 1 ] ( a ) is a schematic cross-sectional view of a thin film diode 100 A and a thin film transistor 200 A included in a semiconductor device 1000 A according to an embodiment of the present invention; and ( b ) is a schematic plan view of the semiconductor device 1000 A according to an embodiment of the present invention.

[ FIG. 2 ] ( a ) is a schematic plan view of a semiconductor device 10008 according to an embodiment of the present invention; and ( b ) is a schematic plan view of a semiconductor device 1000 C according to an embodiment of the present invention.

[ FIG. 3 ] A schematic cross-sectional view of a thin film transistor 200 A included in the semiconductor device 1000 A according to an embodiment of the present invention.

[ FIG. 4 ] ( a ) is a schematic plan view showing the construction of a display device having the semiconductor device 1000 A according to an embodiment of the present invention; and ( b ) is a circuit diagram showing a portion of a display region 13 in ( a ).

[ FIG. 5 ] ( a ) to ( e ) are schematic cross-sectional views for describing a production method of a thin film diode 100 A and a thin film transistor 200 A according to an embodiment of the present invention.

[ FIG. 6 ] ( a ) to ( d ) are schematic cross-sectional views for describing a production method of a thin film diode 100 A and a thin film transistor 200 A according to an embodiment of the present invention.

[ FIG. 7 ] ( a ) and ( b ) are schematic cross-sectional views for describing a production method of a thin film diode 100 A and a thin film transistor 200 A according to an embodiment of the present invention.

Hereinafter, with reference to the drawings, a semiconductor device according to an embodiment of the present invention and a production method thereof will be described. In the following, a TFT substrate having a thin film diode for each pixel, which is for use in a liquid crystal display device, will be illustrated as the semiconductor device; however, the present invention is not limited thereto.

With reference to FIG. 1 to FIG. 4 , the structure of a semiconductor device 1000 A according to an embodiment of the present invention and a production method thereof will be described.

FIGS. 1( a ) and ( b ) show the structure of the semiconductor device 1000 A according to an embodiment of the present invention. FIG. 1( a ) is a schematic cross-sectional view showing the structure of a thin film diode 100 A and a thin film transistor 200 A included in the semiconductor device 1000 A; and FIG. 1( b ) is a schematic plan view of the semiconductor device 1000 A.

The semiconductor device 1000 A is a TFT substrate for use in a liquid crystal display device, having a thin film diode 100 A and a thin film transistor 200 A shown in FIG. 1( a ) in each pixel 50 . As shown in FIG. 1( b ), the semiconductor device 1000 A includes an insulative substrate not shown (e.g., a glass substrate) 101 and thin film diodes 100 A and thin film transistors 200 A carried on the insulative substrate 101 . On the insulative substrate 101 , Cs lines (storage capacitor lines) 72 A 1 , gate bus lines 72 A 2 , read signal lines (RWS) 74 A 1 , and reset signal lines (RST) 74 A 2 extending along the row direction and source bus lines 73 A extending along the column direction are formed in a lattice. The pixels 50 are arranged in a matrix array, such that a thin film diode 100 A, a follower thin film transistor M 1 A, and a storage capacitor C 1 A are disposed for each pixel 50 . Moreover, a thin film transistor 200 A, a pixel capacitor C 2 A, and a pixel electrode are disposed for each pixel 50 , the thin film transistor 200 A being connected to a gate bus line 72 A 2 and a source bus line 73 A. Semiconductor devices 1000 B and 1000 C described below have similar constructions.

As shown in FIG. 1( a ), each thin film diode 100 A includes: an overcoat layer 111 formed on the insulative substrate 101 ; a semiconductor layer 130 formed on the overcoat layer 111 ; and a first insulating layer 122 , a second insulating layer 123 , a third insulating layer 124 , and a fourth insulating layer 125 formed on the semiconductor layer 130 . The semiconductor layer 130 has a first semiconductor region 134 A, a second semiconductor region 135 A, and a third semiconductor region 133 A. The second insulating layer 123 is thicker than the first insulating layer 122 , and preferably has a thickness of no less than 20 nm and no more than 200 nm, and more preferably no less than 30 nm and no more than 100 nm.

Furthermore, the thin film diode 100 A includes: a first contact hole 141 and a second contact hole 142 penetrating through the first insulating layer 122 , the second insulating layer 123 , the third insulating layer 124 , and the fourth insulating layer 125 ; a first electrode 171 connected to the first semiconductor region 134 A within the first contact hole 141 ; and a second electrode 172 connected to the second semiconductor region 135 A within the second contact hole 142 . The first electrode 171 and the second electrode 172 are formed on the insulating layer 125 .

The first semiconductor region 134 A contains an impurity of a first-conductivity type (e.g., a p type impurity) at a first concentration; the second semiconductor region 135 A contains an impurity of a second-conductivity type (e.g., an n type impurity), which is different from the first conductivity type, at a second concentration; and the third semiconductor region 133 A contains the first-conductivity type impurity at a third concentration lower than the first concentration, or contains the second-conductivity type impurity at a third concentration lower than the second concentration. That is, the first semiconductor region 134 A is a p + region; the second semiconductor region 135 A is an n + region; and the third semiconductor region 133 A is a p − region or an n − region (i region).

In the thin film diode 100 A, the first semiconductor region 134 A and the second semiconductor region 135 A conform to an aperture pattern (holes) in the second insulating layer 123 . In other words, the two high concentration regions respectively conform to the corresponding aperture pattern in the second insulating layer 123 . Herein, that a high concentration region “conforms to an aperture pattern in the second insulating layer” means that, through the production process of the thin film diode 100 A, the high concentration region has been formed in a self-aligning manner with respect to the aperture pattern in the insulating layer. Therefore, the two-dimensional expanse of the high concentration region as viewed from the substrate normal direction is substantially defined by the aperture pattern in the insulating layer. Moreover, the aperture pattern in the insulating layer with respect to which the high concentration region is formed in a self-aligning manner is not limited to that in the second insulating layer 123 , and between the two high concentration regions, at least one high concentration region may be formed so as to conform to the aperture pattern in the insulating layer. Furthermore, thin film diodes 100 B and 100 C of constructions as shown in FIG. 2( a ) and FIG. 2( b ) may also be used.

The thin film diodes 100 B included in the semiconductor device 1000 B shown in FIG. 2( a ) have their second semiconductor region 135 B conforming to an aperture pattern in the second insulating layer 123 not shown. First semiconductor regions 134 B are formed by a known method such as photolithography.

Depending on the aperture pattern in the second insulating layer 123 , as in the thin film diodes 100 C included in the semiconductor device 1000 C shown in FIG. 2( b ), first semiconductor regions 134 C and second semiconductor regions 135 C can be made as small as possible.

Since the length L of the third semiconductor region 133 A, 133 B, or 133 C is greater than those of the first semiconductor region 134 A, 134 B, or 134 C and the second semiconductor region 135 A, 135 B, or 135 C, a depletion layer which is formed between the first semiconductor region 134 A, 134 B, or 134 C and the second semiconductor region 135 A, 135 B, or 135 C has a broad expanse in the third semiconductor region 133 A, 134 B, or 134 C, thus providing an advantage in that the photocurrent is increased and the efficiency of light/current conversion is improved. Moreover, since the length L of the third semiconductor region 133 A, 133 B, or 133 C is defined by the aperture pattern in the second insulating layer 123 , the length L does not vary, thereby providing an advantage in that characteristics variations in the thin film diode 100 A, 100 B, or 100 C are reduced.

As shown in FIG. 1( a ), each thin film transistor 200 A includes: a semiconductor layer 230 formed on the insulative substrate 101 ; the first insulating layer 122 , second insulating layer 123 , third insulating layer 124 , and fourth insulating layer 125 formed on the semiconductor layer 230 ; and a first electrode (gate electrode) 251 formed on the first insulating layer 122 . The second insulating layer 123 is thicker than the first insulating layer 122 , and preferably has a thickness of no less than 20 nm and no more than 200 nm, and more preferably no less than 30 nm and no more than 100 nm. The semiconductor layer 230 includes a first semiconductor region 234 , a second semiconductor region 234 , and a third semiconductor region 233 . As shown in FIG. 3 , at end portions of the semiconductor layer 230 of the thin film transistor 200 A, the thickness of a gate insulating layer 120 having the first insulating layer 122 and the second insulating layer 123 is greater than that of the gate insulating layer 120 in anywhere other than the end portions of the semiconductor layer 230 . Thus, by allowing the gate insulating layer at the end portions of the semiconductor layer to be thicker than the gate insulating layer in anywhere other than the end portions of the semiconductor layer, there is provided an advantage of preventing a decrease in production yield associated with insulation failures at the end portions of the semiconductor layer, which are likely to suffer insulation failures due to insufficient coating. Although the gate insulating layer 120 has a multilayer structure in the present embodiment, the gate insulating layer 120 may have a single-layer structure.

Furthermore, the thin film transistor 200 A includes: a first contact hole 241 and a second contact hole 242 penetrating through the first insulating layer 122 , second insulating layer 123 , third insulating layer 124 , and fourth insulating layer 125 ; a second electrode 271 connected to the first semiconductor region 234 within the first contact hole 241 ; and a third electrode 272 connected to the second semiconductor region 234 within the second contact hole 242 . The second electrode 271 and the third electrode 272 are formed on the fourth insulating layer 125 .

The first semiconductor region 234 and the second semiconductor region 234 contain a first-conductivity type impurity (e.g., an n type impurity) at a first concentration; and the third semiconductor region 233 contains a second-conductivity type impurity different from the first-conductivity type impurity at a second concentration, or contains the first-conductivity type impurity at a third concentration lower than the first concentration. That is, the first semiconductor region 234 and the second semiconductor region 234 are n+ regions (or p+ regions), whereas the third semiconductor region 233 is a p− region or an n− region (channel region).

In the thin film transistor 200 A, the first semiconductor region 234 and the second semiconductor region 234 conform to an aperture pattern (holes) that is defined by the second insulating layer 123 and the first electrode (gate electrode) 251 . In other words, two high concentration regions respectively conform to the corresponding aperture pattern in the second insulating layer 123 and the first electrode 251 . Herein, that a high concentration region “conforms to an aperture pattern in the second insulating layer and the first electrode” means that, through the production process of the thin film transistor 200 A, the high concentration region has been formed in a self-aligning manner with respect to the aperture pattern in the insulating layer and the electrode. Therefore, the two-dimensional expanse of the high concentration region as viewed from the substrate normal direction is substantially defined by the aperture pattern in the insulating layer and the electrode. Moreover, between the two high concentration regions, at least one high concentration region may be formed so as to conform to the aperture pattern in the insulating layer and the electrode.

Next, FIG. 4( a ) is a schematic plan view showing the construction of a display device having the semiconductor device 1000 A. The display device shown in FIG. 4( a ) has an image capturing function (image sensor), and is composed of the insulative substrate 101 and a semiconductor substrate 18 . On the insulative substrate 101 are a display region 13 in which the gate bus lines 72 A 2 and the source bus lines 73 A are formed, a source driver 14 for driving the source bus lines 73 A, a gate driver 15 for driving the gate bus lines 72 A 2 , a sensor read driver 17 for capturing and outputting an image, and a sensor scan driver 16 for driving the image sensor. A logic IC 19 for performing display control and image capturing control is provided on the semiconductor substrate 18 . The logic IC 19 may be mounted on the insulative substrate 101 , or externally connected to the insulative substrate 101 via an FPC, for example. Note that, in FIG. 4( a ), TV denotes a timing control signal and a power voltage; SD denotes a sensor data signal; and ID denotes an image data signal.

FIG. 4( b ) is a circuit diagram showing a portion of the display region 13 . The display region 13 in FIG. 4( b ) includes a thin film transistor 200 A formed near each of intersections between the source bus lines 73 A and gate bus lines 72 A 2 formed in columns and rows, a liquid crystal capacitor CLC and a pixel capacitor C 2 A connected between one end of the thin film transistor 200 A and a Cs line 72 A 1 , as well as the thin film diodes 100 A, the follower thin film transistors M 1 A, and the storage capacitors C 1 A.

The operation principles of the image sensors will be briefly described.

First, a reset signal at a high level is supplied to a reset signal line (RST) 74 A 2 . As a result, a forward bias is applied to a thin film diode 100 A. At this time, since the potential of the gate electrode of the follower thin film transistor M 1 A is lower than a threshold voltage of the follower thin film transistor M 1 A, the follower thin film transistor M 1 A is in a non-conducting state.

Next, the potential of the reset signal line 74 A 2 is set to a low level. As a result, an integration period of photocurrent begins. In this integration period, a photocurrent which is in proportion to the amount of light entering the thin film diode 100 A flows out, so that the storage capacitor C 1 A becomes discharged. In this integration period, too, the potential of the gate electrode of the follower thin film transistor M 1 A is lower than the threshold voltage of the follower thin film transistor M 1 A, so that the follower thin film transistor M 1 A remains in a non-conducting state.

Next, a read signal at a high level is supplied to the read signal line (RWS) 74 A 1 . As a result, the integration period is ended, and a read period begins. As the read signal is supplied, charge is injected and stored in the storage capacitor C 1 A, and the potential of the gate electrode of the follower thin film transistor M 1 A becomes higher than the threshold voltage of the follower thin film transistor M 1 A. As a result, the follower thin film transistor M 1 A enters a conducting state, whereby an output voltage (VPIX) is read from the follower thin film transistor M 1 A via the source bus line 73 A. VPIX is in proportion to an integral of the photocurrent in the thin film diode 100 A during the integration period.

Next, the potential of the read signal line (RWS) 74 A 1 is lowered to a low level, thus ending the read period.

Next, with reference to FIG. 5 to FIG. 7 , a production method of the semiconductor device 1000 A will be described.

First, as shown in FIG. 5( a ), a basecoat layer 111 containing e.g. SiN x (silicon nitride), SiO x (silicon oxide), or the like is formed on a glass substrate 101 by a CVD (Chemical

Vapor Deposition) technique. Next, by a CVD technique, sputtering technique, or the like, an amorphous silicon (a-Si) layer 129 is formed on the basecoat layer 111 .

Next, as shown in FIG. 5( b ), the amorphous silicon layer 129 is subjected to a thermal annealing to dehydrate the amorphous silicon layer 129 , and thereafter it is subjected to excimer laser irradiation, thus crystallizing the amorphous silicon layer 129 to form a polysilicon (p-Si) layer 131 .

Next, as shown in FIG. 5( c ), island shapes of polysilicon (p-Si) layers 132 and 232 are formed by photolithography or the like.

Next, as shown in FIG. 5( d ), a first insulating layer 122 containing SiO x or the like is formed on the polysilicon layers 132 and 232 by a CVD technique or the like.

Next, as shown in FIG. 5( e ), by using a photoresist not shown as a mask, a low concentration of p type impurity (e.g., boron (B) ions) is implanted to the polysilicon layers 132 and 232 , thereby forming p− regions 133 A and 233 .

Next, as shown in FIG. 6( a ), a second insulating layer 123 , whose layer thickness is greater than the first insulating layer 122 , is formed on the first insulating layer 122 . The thickness of the second insulating layer 123 is preferably no less than 20 nm and no more than 200 nm, and more preferably no less than 30 nm and no more than 100 nm. The second insulating layer 123 contains SiN x and SiO x , for example, and has a multilayer structure. Note that the first insulating layer 122 and second insulating layer (gate insulating layer) 123 formed in the thin film transistor 200 A are made integral with the first insulating layer 122 and second insulating layer 123 formed in the thin film diode 100 A. By forming the second insulating layer 123 so as to be thick, there is provided an advantage of preventing a decrease in the production yield due to insulation failures in the thin film transistor and the thin film diode.

Next, as shown in FIG. 6( b ), the second insulating layer 123 excluding the end portions of the semiconductor layer 230 and the second insulating layer 123 over the regions to become the high concentration regions (the p+ region and n+ region) of the thin film diode 100 A are etched away. When using dry etching to remove the second insulating layer 123 over the regions to become the high concentration regions (the p+ region and n+ region), it is preferable to use hydrogen bromide (HBr) as an etching gas, for example.

Next, as shown in FIG. 6( c ), an electrode 251 (gate electrode) is formed on the first insulating layer 122 . For example, in the case where dry etching is employed in forming the electrode 251 , it is preferable to use hydrogen bromide (HBr) as the etching gas.

Next, as shown in FIG. 6( d ), the region to become the p+region 134 A is masked with a photoresist not shown, and by using the electrode 251 and the second insulating layer 123 as a mask, an n type impurity (e.g., phosphorus ions) are implanted to portions of the p− region (or n− region) 133 A and 233 , thereby forming the n+ regions 135 A and 234 . Next, the n+ regions 135 A and 234 are masked by using a photoresist or the like not shown, and by using the second insulating layer 123 as a mask, a high concentration of p type impurity (e.g., boron ions) is implanted to a portion of the p− region (or n− region) 133 A, thereby forming the p+ region 134 A. Next, the substrate is heated to activate the impurity that has been implanted to the p− region 133 A.

Next, as shown in FIG. 7( a ), a third insulating layer 124 containing SiN x is formed on the second insulating layer 123 by a CVD technique or the like, and a fourth insulating layer 125 containing SiO x is formed on the third insulating layer 124 by a CVD technique or the like.

Next, as shown in FIG. 7( b ), the semiconductor layers are hydrogenated through diffusion of hydrogen that is contained in the SiN x of the third insulating layer 124 . Next, contact holes 141 , 142 , 241 , and 242 for exposing the surface of the semiconductor layers 130 and 230 are formed by photolithography or the like. The etching of the contact holes employs conditions for obtaining a sufficient selection ratio between the second insulating layer 123 and the third insulating layer 124 containing SiN x . In the case where dry etching is used to form the contact holes, it is preferable to use hydrogen bromide (HBr) as the etching gas.

Next, as shown in FIG. 1( a ), by photolithography or the like, electrodes 271 and 272 for connecting to the n+ regions 234 within the respective contact holes 241 and 242 , an electrode 171 for connecting to p+ region 134 A within the contact hole 141 , and an electrode 172 for connecting to the n+ region 135 A within the contact hole 142 are formed. The electrodes 171 , 172 , 271 , and 272 are formed upon the second insulating layer 123 .

As described above, in the production method of the present embodiment, the p+ region 134 A and the n+ region 135 A included in the thin film diode 100 A are formed in a self-aligning manner with respect to the aperture pattern in the second insulating layer 123 . In other words, the p+ region 134 A and the n+ region 135 A are formed as a result of impurities (e.g., phosphorus ions or boron ions) being implanted into the aperture pattern of the second insulating layer 123 , such that a desired semiconductor region (high concentration region) is formed in each impurity-implanted region. Although the impurities diffuse during the heat treatment (activation annealing) after the impurity implantation, it can be said that the final extent of the high concentration region is substantially defined by the aperture pattern in the second insulating layer 123 .

Thus, since the high concentration regions are formed in a self-aligning manner with respect to the aperture pattern in the second insulating layer 123 , the length of the p− region 133 A in the finally-obtained thin film diode 100 A will not vary, thus providing an advantage of reducing characteristics variations between one thin film diode and another. Since stray-light is restrained from entering the thin film diode and thus the optical S/N (Signal/Noise) ratio is increased, it is particularly effective when designing the p− region 133 A so as to have a large length. Furthermore, since it is possible to make the p+ region 134 A and the n+ region 135 A smaller and make the length of the p− region 133 A correspondingly larger, a greater photocurrent can be obtained; therefore, the higher resolution the display device has, the more advantage there is. Furthermore, since the length of the p− region 133 A is defined by the aperture pattern in the second insulating layer 123 , length variations do no occur, so that characteristics variations of the thin film diode can be reduced.

Since the high concentration regions (n+ regions or p+ regions) of the thin film transistor 200 A are formed in a self-aligning manner with respect to the aperture pattern in the second insulating layer 123 and the first electrode 251 , there is provided an advantage of being able to curtail the production Process and the production cost, as compared to forming high concentration regions in a conventional photolithography step.

Furthermore, by forming the second insulating layer 123 so as to be thick, insulation failures due to insufficient coating of the insulating layers are alleviated, thereby providing an advantage in that the thin film diode 100 A and the thin film transistor 200 A are improved in terms of reliability and production yield.

Although TFT-type liquid crystal display devices having a thin film diode for each pixel are illustrated as examples of the display device, the present invention is applicable to other display devices, such as organic EL display devices. Moreover, without being limited to display devices having a thin film diode for each pixel, it is applicable to display devices having an image sensor region separately from the display region, as is disclosed in Patent Document 2. It is certainly applicable to an image sensor itself, and to any electronic device, other than display devices, in which image sensors are integrated.

The present invention is applicable to a semiconductor device, a production method thereof, and a display device having a semiconductor device.

72 A 1 Cs line

72 A 2 gate bus line

73 A source bus line

74 A 1 read signal line (RWS)

74 A 2 reset signal line (RST)

M 1 A follower TFT

C 1 A storage capacitor

C 2 A pixel capacitor

101 insulative substrate

122 first insulating layer

123 second insulating layer

124 third insulating layer

130 , 230 semiconductor layer

133 A, 133 B, 133 C, 233 p− region

134 A, 134 B, 134 C p+ region

135 A, 135 B, 135 C, 234 n+ region

171 , 172 , 251 , 271 , 272 electrode