Isolator

This application claims the benefit of priority to Japanese Patent Application No. 2011-102047, filed Apr. 28, 2011, of which full contents are incorporated herein by reference.

1. Field of the Invention

The present invention relates to an isolator.

2. Description of the Related Art

In an isolator used for work of handling a living-organism-derived material, such as cell culture, it is necessary to provide a dust-free/aseptic environment to the highest degree possible (hereinafter, referred to as aseptic environment) inside a working chamber or a pass box for bringing equipment necessary for the work and the like, in order to prevent intrusion of substances other than those necessary for the work. Hereinafter, a process of killing microorganisms, etc., to realize an aseptic environment is referred to as decontamination, and it is assumed that such a decontamination process includes processes of so-called sterilization, decolonization, and disinfection.

In a sterilizing liquid vaporizing device disclosed in Japanese Laid-Open Patent Publication No. 2003-339829, for example, heated compressed air and hydrogen peroxide solution are mixed and atomized by an atomizer, using hydrogen peroxide as decontamination material which is used for decontamination process, thereby producing hydrogen peroxide gas.

As such, decontaminating gas such as the hydrogen peroxide gas containing decontamination material is produced and supplied into a chamber to be decontaminated, such as a working chamber or a pass box, thereby being able to perform a decontamination process.

Each of an inlet and an outlet of the working chamber or the pass box in the isolator are provided with an air filter such as a HEPA (High Efficiency Particulate Air) filter and a ULPA (Ultra Low Penetration Air) filter, in order to remove impurities, such as dust, contained in gas to be taken in and discharged. However, depending on the combination of the decontaminating gas and the air filter to be used, as in a case where the hydrogen peroxide gas is used as the decontaminating gas and the HEPA filter is used as the air filter, for example, the air filter may have a property of having the decontaminating gas adsorbed thereon easily.

Thus, if the decontaminating gas is supplied from the inlet of the working chamber or the pass box, the decontaminating gas is adsorbed by the air filter, which leads to necessity for supplying more than a necessary amount of the decontaminating gas in expectation of an amount thereof to be absorbed, when decontaminating the working chamber or the pass box, resulting in inefficiency. On the other hand, if the decontaminating gas is supplied to the working chamber or the pass box without an air filter, it is not possible to sufficiently decontaminate the air filter (intake filter) of the inlet.

An isolator according to an aspect of the present invention, includes: a chamber to be decontaminated including an inlet provided with an intake filter and an outlet provided with a discharge filter; a first flow path through which outside air is taken into the chamber to be decontaminated via the intake filter; a second flow path through which gas in the chamber to be decontaminated is discharged via the discharge filter; a blower configured to take in the outside air to the chamber to be decontaminated through the first flow path, as well as produce an air current to discharge the gas in the chamber to be decontaminated through the second flow path; a decontaminating gas supply unit configured to supply decontaminating gas into the chamber to be decontaminated without flowing through the intake filter and the discharge filter; and a third flow path through which the gas in the chamber to be decontaminated is discharged via the intake filter when the decontaminating gas is supplied into the chamber to be decontaminated.

Other features of the present invention will become apparent from descriptions of this specification and of the accompanying drawings.

For more thorough understanding of the present invention and advantages thereof, the following description should be read in conjunction with the accompanying drawings, in which:

FIG. 1 is a block diagram illustrating a configuration of an isolator according to an embodiment of the present invention;

FIG. 2 is a block diagram illustrating states of valves, blowers, a compressor Cm, and a pump Pm in a leak test mode;

FIG. 3 is a block diagram illustrating states of valves, blowers, a compressor Cm, and a pump Pm in a decontaminating gas production mode;

FIG. 4 is a diagram illustrating control of a valve V 3 in a decontaminating gas production mode and a decontaminating gas exposure mode;

FIG. 5 is a block diagram illustrating states of valves, blowers, a compressor Cm, and a pump Pm in a decontaminating gas exposure mode;

FIG. 6 is a block diagram illustrating states of valves, blowers, a compressor Cm, and a pump Pm in a decontaminating gas discharge mode and an aseptic operation mode;

FIG. 7 is a block diagram illustrating another configuration example of an isolator; and

FIG. 8 is a block diagram illustrating state of valves, blowers, a compressor Cm, and a pump Pm in a decontaminating gas production mode in an isolator illustrated in FIG. 7 .

At least the following details will become apparent from descriptions of this specification and of the accompanying drawings.

===Configuration of isolator ===

Description will hereinafter be given of a configuration of an isolator according to an embodiment of the present invention with reference to FIG. 1 . In an embodiment of the present invention, it is assumed that decontamination effect is achieved by performing the exposure of space to be decontaminated to hydrogen peroxide gas of a predetermined concentration for a predetermined time period, using hydrogen peroxide as an example of a decontamination material which is used in a decontamination process.

In the isolator illustrated in FIG. 1 , it is assumed that a working chamber 4 for working in an aseptic environment is the chamber to be decontaminated, and the isolator includes a control unit 1 a , an operating unit 2 a , and a decontaminating gas supply unit 3 a . Further, the working chamber 4 includes an inlet provided with an (intake) filter F 1 and an outlet provided with a (discharge) filter F 2 , and the inlet and outlet are provided with flow paths P 1 to P 3 that are made of pipes, tubes, or the like. Further, the working chamber 4 includes a pressure sensor 41 configured to measure an internal pressure IP 1 of the working chamber 4 . The filters F 1 and F 2 are air filters to remove impurities, such as dust, contained in gas to be taken in and discharged, and a HEPA filter is used, for example.

A (first) flow path P 1 is a flow path for taking in outside air to the working chamber 4 through the filter F 1 , and a catalyst C 1 , a blower (fan) B 1 , and a (first) valve V 1 are provided on the flow path P 1 . The blower B 1 is a centrifugal multi-blade fan, for example, and is configured to produce an air current to take in the outside air to the working chamber 4 through the flow path P 1 in response to a control signal Sb 1 . Such an air current causes the outside air to flow in through the catalyst C 1 , to be further supplied into the working chamber 4 through the filter F 1 . The valve V 1 is provided between the blower B 1 and the filter F 1 , and is configured to open/close the flow path P 1 in response to a control signal Sv 1 .

A (second) flow path P 2 is a flow path for discharging gas in the working chamber 4 through the filter F 2 , and a blower B 2 , a catalyst C 2 , and a (second) valve V 2 are provided on the flow path P 2 . The blower B 2 is a centrifugal multi-blade fan, for example, and is configured to produce an air current to discharge the gas in the working chamber 4 through the flow path P 2 in response to a control signal Sb 2 . Such an air current causes the gas in the working chamber 4 to flow out through the filter F 2 , and the hydrogen peroxide (decontamination material), upon being decomposed/rendered harmless by the catalyst C 2 , to be discharged to the exterior. In an embodiment of the present invention, the catalyst C 2 corresponds to a detoxifying unit configured to reduce the amount of the decontamination material to be rendered harmless (detoxified). The valve V 2 is provided between the catalyst C 2 and the filter F 2 , and is configured to open/close the flow path P 2 in response to a control signal Sv 2 .

A (third) flow path P 3 is a flow path for discharging the gas in the working chamber 4 through the filter F 1 in a decontaminating gas production mode and a decontaminating gas exposure mode which will be described later, and generally, the volume of the gas flowing therethrough is smaller than that flowing through each of the flow paths P 1 and P 2 . One end of the flow path P 3 is connected between the catalyst C 2 and the valve V 2 in the flow path P 2 while the other end thereof is connected to the filter F 1 , and a (third) valve V 3 is provided on the flow path P 3 . The valve V 3 is configured to open/close the flow path P 3 in response to a control signal Sv 3 .

The decontaminating gas supply unit 3 a includes a tank 31 , a bottle 32 , a water level sensor 33 , an atomizer 34 , and a filter F 32 , and further includes flow paths P 31 to P 33 , made of pipes, tubes, or the like, which are provided to connect the above components.

A flow path P 31 connects between the tank 31 and the bottle 32 , and a pump Pm and a filter F 31 are provided on the flow path P 31 . For example, a peristaltic pump is used as the pump Pm so as to deliver fluid in a state dust-free and aseptic as possible, and hydrogen peroxide solution (decontamination material solution) stored in the tank 31 is taken in, in response to a control signal Spm. Then, the hydrogen peroxide solution taken in as such is delivered toward the atomizer 34 side through the filter F 31 for removing impurities, such as dust.

The bottle 32 is opened to the outside air through the (air) filter F 32 , and acts as a buffer for collecting the hydrogen peroxide solution that has not been injected as hydrogen peroxide gas (decontaminating gas) from the nozzle of the atomizer 34 . The bottle 32 is provided with a water level sensor 33 configured to measure water level WL 1 of the collected hydrogen peroxide solution.

One end of the flow path P 32 is connected between the filter F 31 and the bottle 32 in the flow path P 31 while the other end thereof is connected to a lower port of the atomizer 34 , and a valve V 31 is provided on the flow path P 32 . The valve V 31 is configured to open/close the flow path P 32 in response to a control signal Sv 31 .

A flow path P 33 is a flow path for supplying compressed air (compressed gas) to the atomizer 34 , and a compressor Cm, a filter F 33 , and a valve V 32 are provided on the flow path P 33 . The compressor Cm is configured to take in the outside air and compress it in response to a control signal Scm, and such compressed air is supplied to an upper port of the atomizer 34 through the (air) filter F 33 for removing impurities, such as dust and moisture content. The valve V 32 is provided between the filter F 33 and the upper port of the atomizer 34 and is configured to open/close the flow path P 33 in response to a control signal Sv 32 .

A mode selection signal SLm is inputted to the control unit 1 a from the operating unit 2 a , and the control unit 1 a is configured to switch the operation mode, which will be described later, in response to the mode selection signal SLm. Further, control unit 1 a is configured to output, in addition to switching the operation mode, the control signals Sv 1 to Sv 3 , Sv 31 , Sv 32 , Sb 1 , Sb 2 , Scm, and Spm for controlling the valves, blowers, the compressor Cm, and the pump Pm based on the internal pressure IP 1 and the water level WL 1 .

===Operation of isolator===

A description will hereinafter be given of an operation of the isolator according to an embodiment of the present invention with reference to FIGS. 2 to 6 , as appropriate.

The operation mode of the isolator according to an embodiment of the present invention is switched in response to the mode selection signal SLm, and such mode can be broadly classified into: a decontaminating operation mode (SLm=1 to 4) for decontaminating the working chamber 4 (chamber to be decontaminated); and an aseptic operation mode (SLm=5) for working in the working chamber 4 where the aseptic environment has been provided by decontamination being performed. The decontaminating operation mode includes a leak test mode (SLm=1) the decontaminating gas production mode (SLm=2), the decontaminating gas exposure mode (SLm=3), and a decontaminating gas discharge mode (SLm=4).

In the decontaminating operation mode, firstly, airtightness of the working chamber 4 is tested in the leak test mode. In the leak test mode, as illustrated in FIG. 2 , the control unit 1 a drives the compressor Cm as well as opens the valve V 32 in a state where the blowers B 1 and B 2 and the pump Pm are stopped with the valves V 1 to V 3 and V 31 closed. Then, by such control, the atomizer 34 of the decontaminating gas supply unit 3 a supplies, from a nozzle thereof, only the compressed air supplied to the upper port thereof into the working chamber 4 , thereby pressurizing the working chamber 4 .

In such pressurized state of the working chamber 4 , the control unit 1 a determines the airtightness of the working chamber 4 based on the internal pressure IP 1 of the working chamber 4 measured by the pressure sensor 41 . For example, the control unit 1 a determines that the airtightness of the working chamber 4 is in a good condition, when an amount of decrease in the internal pressure IP 1 after elapse of a predetermined time equals a pressure that is equal to or lower than a predetermined pressure.

When it is determined that the airtightness of the working chamber 4 is in a good condition in the leak test mode, next, the hydrogen peroxide gas is supplied into the working chamber 4 in the decontaminating gas production mode. The decontaminating gas production mode is commenced when the control unit 1 a drives the pump Pm and opens the valve V 31 in the state of the leak test mode and further controls opening/closing of the valve V 3 , as illustrated in FIG. 3 .

By such control, the compressed air is supplied to the upper port of the atomizer 34 , as in the leak test mode. Negative pressure is produced by injecting the compressed air from the nozzle of the atomizer 34 , and such negative pressure causes the hydrogen peroxide solution, delivered by the pump Pm from the tank 31 toward the atomizer 34 , to be supplied to the lower port of the atomizer 34 . Then, the compressed air and the hydrogen peroxide solution are mixed in the atomizer 34 , to be injected as atomized hydrogen peroxide solution, thereafter immediately vaporized, and supplied as the hydrogen peroxide gas.

As such, in the isolator according to an embodiment of the present invention, the hydrogen peroxide gas is directly supplied into the working chamber 4 without flowing through the filters F 1 and F 2 , in the decontaminating gas production mode. Thus, the hydrogen peroxide gas is supplied into the working chamber 4 without loss by absorption into the filters F 1 and F 2 , thereby being able to perform a process of decontaminating the inside of the working chamber 4 in an efficient manner.

The decontaminating gas supply unit 3 a can produce hydrogen peroxide gas utilizing the negative pressure produced by injection of compressed air, without heating or using ultrasonic waves. If some kind of failure should stop the supply of the compressed air to the atomizer 34 , the hydrogen peroxide solution delivered by the pump Pm is collected in the bottle 32 utilizing the difference in flow-path resistance caused by the difference in flow-path diameter, avoiding supply into the working chamber 4 in a liquid state. Then, the control unit 1 a stops the pump Pm to stop delivering the hydrogen peroxide solution when the water level WL 1 of the hydrogen peroxide solution measured by the water level sensor 33 reaches a water level that is equal to or greater than a predetermined level.

In the decontaminating gas production mode, the control unit 1 a further controls opening/closing of the valve V 3 based on the internal pressure IP 1 of the working chamber 4 . For example, as illustrated in FIG. 4 , if the internal pressure IP 1 exceeds a predetermined positive pressure IPtg, the valve V 3 is opened; while if the internal pressure IP 1 equals or falls below the predetermined positive pressure IPtg, the valve V 3 is closed. Then, when the valve V 3 is opened, the hydrogen peroxide gas in the working chamber 4 is discharged through the filter F 1 . The permissible flow rate through the valve V 3 is lower than that through each of the valves V 1 and V 2 , which leads the valve V 3 to have greater responsiveness, thereby being able to accurately control the internal pressure IP 1 with the control unit 1 a.

As such, in the isolator according to an embodiment of the present invention, in the decontaminating gas production mode, the hydrogen peroxide gas in the working chamber 4 is discharged through the filter F 1 while the internal pressure IP 1 of the working chamber 4 is adjusted to the predetermined positive pressure IPtg. Thus, the filter F 1 , which is an intake filter, can be sufficiently decontaminated.

After the hydrogen peroxide gas is supplied into the working chamber 4 in the decontaminating gas production mode, the interior of the working chamber 4 is exposed to hydrogen peroxide gas in the decontaminating gas exposure mode. In the decontaminating gas exposure mode, after proceeding from the state of the decontaminating gas production mode, the control unit 1 a stops the pump Pm as well as closes the valve V 31 , as illustrated in FIG. 5 . Then, by such control, the decontaminating gas supply unit 3 a supplies, from the nozzle, only the compressed air into the working chamber 4 as in the leak test mode, and further, the control unit 1 a controls opening/closing of the valve V 3 based on the internal pressure IP 1 of the working chamber 4 as in the decontaminating gas production mode.

As such, in the isolator according to an embodiment of the present invention, in the decontaminating gas exposure mode, the interior of the working chamber 4 is exposed to the hydrogen peroxide gas, which is supplied in the decontaminating gas production mode. Further, in the decontaminating gas exposure mode as well, the hydrogen peroxide gas in the working chamber 4 is discharged through the filter F 1 while the internal pressure IP 1 of the working chamber 4 is adjusted to the predetermined positive pressure IPtg. Thus, by proceeding from the decontaminating gas production mode to the decontaminating gas exposure mode, the interior of the working chamber 4 and the filter F 1 can be sufficiently decontaminated while suppressing the consumption of the hydrogen peroxide solution stored in the tank 31 .

After the interior of the working chamber 4 is sufficiently exposed to the hydrogen peroxide gas in the decontaminating gas exposure mode, the hydrogen peroxide gas in the working chamber 4 is discharged in the decontaminating gas discharge mode. In the decontaminating gas discharge mode, after proceeding from the state of the decontaminating gas exposure mode, the control unit 1 a drives the blowers B 1 and B 2 as well as opens the valves V 1 and V 2 and closes the valve V 3 ; and stops the compressor Cm as well as closes the valve V 32 , as illustrated in FIG. 6 .

By such control, the decontaminating gas supply unit 3 a stops supplying the compressed air and the hydrogen peroxide gas into the working chamber 4 . Further, the control unit la controls the number of revolutions of the blowers B 1 and B 2 based on the internal pressure IP 1 of the working chamber 4 , and adjusts the internal pressure IP 1 of the working chamber 4 to the predetermined positive pressure IPtg, as in the decontaminating gas production mode and the decontaminating gas exposure mode. Thus, the outside air is taken into the working chamber 4 through the flow path P 1 , and the hydrogen peroxide gas in the working chamber 4 is discharged through the flow path P 2 . Then, through continuous operation of such for predetermined time period, the hydrogen peroxide gas in the working chamber 4 is replaced by outside fresh air.

In the isolator according to an embodiment of the present invention, the filter F 2 , being a discharge filter, is decontaminated in the decontaminating gas discharge mode. Further, after the hydrogen peroxide gas in the working chamber 4 is sufficiently discharged in the decontaminating gas discharge mode, the mode proceeds to the aseptic operation mode, and control therein is similar to that in the decontaminating gas discharge mode.

===Another configuration example of isolator===

In an embodiment described above, it was assumed that only the working chamber 4 is the chamber to be decontaminated, however, it is not limited thereto. For example, as illustrated in FIG. 7 , a pass box 5 for bringing equipment necessary for the work into the working chamber 4 through a door 52 may be the chamber to be decontaminated, in addition to the working chamber 4 . It should be noted that the components for decontaminating the working chamber 4 are similar to those in the isolator according to an embodiment described above, and thus are omitted in FIG. 7 except for the atomizer 34 and the like. Description of the components for decontaminating the working chamber 4 , which are common to those in an embodiment described above, will hereinafter be omitted.

The isolator illustrated in FIG. 7 includes a control unit 1 b , an operating unit 2 b , and a decontaminating gas supply unit 3 b . The pass box 5 includes an inlet provided with an (intake) filter F 3 and an outlet provided with a (discharge) filter F 4 , and the inlet and outlet are provided with flow paths P 4 to P 6 . Further, the pass box 5 includes therein a pressure sensor 51 configured to measure the internal pressure IP 2 of the pass box 5 .

A (first) flow path P 4 is a flow path for taking in the outside air to the pass box 5 through the filter F 3 , and a catalyst C 3 , a (first) valve V 4 , and a blower B 3 are provided on the flow path P 4 . Whereas, a (second) flow path P 5 is a flow path for discharging gas in the pass box 5 through the filter F 4 , and a catalyst C 4 and a (second) valve V 5 are provided on a flow path P 5 . The blower B 3 is an axial-flow fan, for example, and is configured to produce air currents to take in the outside air to the pass box 5 through the flow path P 4 as well as discharge the gas in the pass box 5 through the flow path P 5 , in response to a control signal Sb 3 . Since the capacity of the pass box 5 is smaller than that of the working chamber 4 , such intake and discharge are performed by the a single blower B 3 .

By the air currents, the outside air flows in through the catalyst C 3 , and is further supplied into the pass box 5 through the filter F 3 , while the gas in the pass box 5 flows out through the filter F 4 , and furthermore the hydrogen peroxide is decomposed/rendered harmless by the catalyst C 4 , to be discharged to the exterior. The valve V 4 is provided between the catalyst C 3 and the blower B 3 , and is configured to open/close the flow path P 4 in response to a control signal Sv 4 ; while the valve V 5 is provided between the catalyst C 4 and the filter F 4 , and is configured to open/close the flow path P 5 in response to a control signal Sv 5 .

A (third) flow path P 6 is a flow path for discharging the gas in the pass box 5 through the filter F 3 in the decontaminating gas production mode and the decontaminating gas exposure mode. One end of the flow path P 6 is connected between the catalyst C 4 and the valve V 5 in the flow path P 5 while the other end thereof is connected to the filter F 3 , and a (third) valve V 6 is provided on the flow path P 6 . The valve V 6 is configured to open/close the flow path P 6 in response to a control signal Sv 6 .

The decontaminating gas supply unit 3 b includes the tank 31 , the bottles 32 and 35 , the water level sensors 33 and 36 , the atomizers 34 and 37 , and the filters F 32 and F 34 , and further includes the flow paths P 31 to P 33 and flow paths P 34 to P 36 provided so as to connect the aforementioned components.

The flow path P 31 connects between the tank 31 and the bottles 32 and 35 ; and the pump Pm, the filter F 31 , and a valve V 35 are provided on the flow path P 31 . Further, the pump Pm is configured to take in the hydrogen peroxide solution stored in the tank 31 and deliver it toward the atomizers 34 and 37 through the filter F 31 , in response to the control signal Spm. Further, the valve V 35 allows the hydrogen peroxide solution filtered by the filter F 31 to pass therethrough toward the atomizer 34 or the atomizer 37 in response to a control signal Sv 35 .

The bottle 32 is opened to the outside air through the (air) filter F 32 , and the bottle 32 is provided with the water level sensor 33 configured to measure the water level WL 1 of the hydrogen peroxide solution. Whereas, the bottle 35 is opened to the outside air through the (air) filter F 34 , and the bottle 35 is provided with the water level sensor 36 configured to measure a water level WL 2 of the hydrogen peroxide solution.

One end of the flow path P 32 is connected to the flow path P 31 between the valve V 35 and the bottle 32 while the other end thereof is connected to the lower port of the atomizer 34 , and the valve V 31 is provided on the flow path P 32 . Whereas, one end of a flow path P 34 is connected to the flow path P 31 between the valve V 35 and the bottle 35 while the other end thereof is connected to a lower port of the atomizer 37 , and a valve V 33 is provided on the flow path P 34 . The valve V 31 is configured to open/close the flow path P 32 in response to the control signal Sv 31 , and the valve V 33 is configured to open/close the flow path P 34 in response to a control signal Sv 33 .

The flow path P 33 is a flow path for supplying compressed air to the atomizer 34 or 37 , and is bifurcated into the flow path P 35 connected to the atomizer 34 and a flow path P 36 connected to the atomizer 37 . The compressor Cm and the filter F 33 are provided on the flow path P 33 , the valves V 32 and V 34 are provided on the flow paths P 35 and P 36 , respectively. Further, the compressor Cm is configured to take in the outside air to be compressed in response to the control signal Scm, and such compressed air is supplied to the upper port of the atomizer 34 or the atomizer 37 through the (air) filter F 33 . The valve V 32 is provided between the filter F 33 and the upper port of the atomizer 34 and is configured to open/close the flow path P 35 in response to the control signal Sv 32 , while the valve V 34 is provided between the filter F 33 and the upper port of the atomizer 37 and is configured to open/close the flow path P 36 in response to a control signal Sv 34 .

From the operating unit 2 b , a decontamination-target-chamber-selection signal SLr and the mode selection signal SLm are inputted to the control unit 1 b . The control unit 1 b is configured to select the working chamber 4 or the pass box 5 as the chamber to be decontaminated in response to the decontamination-target-chamber-selection signal SLr, and switch an operation mode in response to the mode selection signal SLm. Further, the control unit 1 b is configured to output, in addition to selecting the chamber to be decontaminated and switching the operation mode, the control signals Sv 1 to Sv 6 , Sv 31 to Sv 35 , Sb 1 to Sb 3 , Scm, and Spm based on the internal pressures IP 1 and IP 2 and the water levels WL 1 and WL 2 . The decontaminating gas supply unit 3 b is configured to supply the compressed air and the hydrogen peroxide gas into the chamber to be decontaminated selected in response to the decontamination-target-chamber-selection signal SLr.

In the isolator illustrated in FIG. 7 , the operation mode is switched in response to the mode selection signal SLm, and the control is performed as in the isolator according to an embodiment described above. For example, in the decontaminating gas production mode with respect to the pass box 5 , as illustrated in FIG. 8 , the decontaminating gas supply unit 3 b has the compressed air supplied to the upper port of the atomizer 37 and the hydrogen peroxide solution supplied to the lower port thereof by the negative pressure, to directly supply the hydrogen peroxide gas into the pass box 5 . Further, the control unit 1 b is configured to control opening/closing of the valve V 6 based on the internal pressure IP 2 of the pass box 5 , so as to discharge the hydrogen peroxide gas in the pass box 5 thorough the filter F 3 while the internal pressure IP 2 of the pass box 5 is adjusted to the predetermined positive pressure IPtg.

As described above, in the decontaminating gas production mode illustrated in FIG. 1 ( FIG. 7 ), the hydrogen peroxide gas, which is the decontaminating gas, is directly supplied into the working chamber 4 (pass box 5 ), which is the chamber to be decontaminated, without flowing through the filters F 1 (F 3 ), F 2 (F 4 ), which is the intake filter and the discharge filter, respectively, and the decontaminating gas in the chamber to be decontaminated is discharged through the intake filter, thereby being able to supply a sufficient amount of decontaminating gas into the chamber to be decontaminated, and further being able to sufficiently contaminate the intake filter. Thus, the process of decontaminating the chamber to be decontaminated and the intake filter can be improved in efficiency.

Further, in the decontaminating gas production mode, while the decontaminating gas is being supplied from the decontaminating gas supply unit 3 a ( 3 b ) into the chamber to be decontaminated, the third flow path P 3 (P 6 ), which is opened/closed by the third valve V 3 (V 6 ), is opened in the state where the blowers B 1 and B 2 (blower B 3 ) are (is) stopped as well as the first flow path P 1 (P 4 ) for performing intake and the second flow path P 2 (P 5 ) for performing discharge using the blowers (blower) are closed, so that the decontaminating gas in the chamber to be decontaminated is discharged through the intake filter and the third flow path, thereby being able to sufficiently decontaminate the intake filter.

Further, the catalyst C 2 (C 4 ) for decomposing the decontamination material is provided on the side more distant (away) from the discharge filter as compared with the second valve V 2 (V 5 ) configured to open/close the second flow path, and one end of the third flow path is connected between the catalyst and the second valve, and the other end thereof is connected to the intake filter, thereby, after decomposing and rendering harmless the decontamination material contained in the decontaminating gas, is allowed to discharge to the exterior, which is discharged not only in the decontaminating gas discharge mode and the aseptic operation mode but also the decontaminating gas production mode and the decontaminating gas exposure mode.

Further, in the decontaminating gas production mode, opening/closing of the third valve is controlled based on the internal pressure IP 1 (IP 2 ) of the chamber to be decontaminated that is measured by the pressure sensor 41 ( 51 ), thereby being able to discharge the decontaminating gas in the chamber to be decontaminated through the intake filter, while the internal pressure of the chamber to be decontaminated is adjusted to the predetermined positive pressure IPtg.

Further, in the decontaminating gas production mode, the compressed air and the decontamination material are mixed to produce the decontaminating gas, to be supplied into the chamber to be decontaminated, and thereafter, in the decontaminating gas exposure mode, while only the compressed air is being supplied into the chamber to be decontaminated, opening/closing of the third valve is controlled as in the decontaminating gas production mode, thereby being able to sufficiently decontaminate the interior of the chamber to be decontaminated and the intake filter while suppressing the consumption of the decontamination material.

Further, only the compressed air is supplied into the chamber to be decontaminated in the state where all the first to third flow paths are closed, thereby being able to test the airtightness of the chamber to be decontaminated based on the internal pressure of the chamber to be decontaminated.

The above embodiments of the present invention are simply for facilitating the understanding of the present invention and are not in any way to be construed as limiting the present invention. The present invention may variously be changed or altered without departing from its spirit and encompass equivalents thereof.