Capacitor and manufacturing method therefor

This Application is a U.S. National Phase Application of PCT International Application PCT/JP2010/002182.

The present invention relates to a capacitor with a dielectric layer.

Capacitors have functions to store energy and act as an electric filter, and thus, they are components indispensable for electronic apparatuses. In line with a recent downsizing trend of electronic apparatuses, capacitors with higher capacitance are demanded on the market. A capacitor includes a dielectric layer between a pair of electrodes. The dielectric layer, upon being thin, provides the capacitor with high capacitance.

Patent Literature 1 discloses a conventional capacitor with high capacitance that includes an oxide nanosheet, such as a titanate nanosheet, that is a dielectric material providing a thin layer. However, a pair of electrodes may be short-circuited via the oxide nanosheet in this conventional capacitor.

Patent Literature

Patent Literature 1: Japanese Patent Laid-Open Publication No. 2008-277724

A capacitor includes an electrode and a dielectric layer over the electrode. The dielectric layer includes plural metal oxide particles which are spread, and have an aperture constituted by a space provided between the metal oxide particles. The capacitor further includes an insulating portion on a portion of the electrode facing an opening of the aperture of the dielectric layer. The insulating portion covers the opening of the aperture.

This capacitor prevents short-circuiting between the electrodes, thus being highly reliable.

FIG. 1 is a sectional view of a capacitor in accordance with Exemplary Embodiment 1 of the present invention.

FIG. 2 is a schematic enlarged view of a dielectric layer of the capacitor in accordance with Embodiment 1.

FIG. 3 is a sectional view of a capacitor of a comparative example.

FIG. 4A is a sectional view of the capacitor in accordance with Embodiment 1 for illustrating a process for manufacturing the capacitor.

FIG. 4B is a sectional view of the capacitor in accordance with Embodiment 1 for illustrating a process for manufacturing the capacitor.

FIG. 4C is a schematic sectional view of the dielectric layer of the capacitor in accordance with Embodiment 1.

FIG. 4D is a schematic sectional view of another dielectric layer in accordance with Embodiment 1.

FIG. 5 shows an evaluation result of the capacitor in accordance with Embodiment 1.

FIG. 6A is a perspective view of the capacitor in accordance with the Embodiment 1.

FIG. 6B is a perspective view of another capacitor in accordance with Embodiment 1.

FIG. 7A is a sectional view of still another capacitor in accordance with Embodiment 1.

FIG. 7B is a sectional view of a further capacitor in accordance with Embodiment 1.

FIG. 8 is a sectional view of a capacitor in accordance with Exemplary Embodiment 2 of the invention

FIG. 9A is a sectional view of the capacitor in accordance with Embodiment 2 for illustrating a process for manufacturing the capacitor.

FIG. 9B is a sectional view of the capacitor in accordance with Embodiment 2 for illustrating a process for manufacturing the capacitor.

FIG. 9C is a sectional view of another capacitor in accordance with Embodiment 2.

FIG. 9D is a sectional view of the capacitor shown in FIG. 9C for illustrating a process for manufacturing the capacitor.

Exemplary Embodiment 1

FIG. 1 is a schematic sectional view of capacitor 1 in accordance with Exemplary Embodiment 1 of the present invention. Capacitor 1 includes electrode 2 , dielectric layer 4 disposed on upper surface 2 A of electrode 2 , electrode 52 facing upper surface 4 A of dielectric layer 4 , and electrolyte 51 provided between dielectric layer 4 and electrode 52 . Lower surface 4 B of dielectric layer 4 is situated on upper surface 2 A of electrode 2 . Electrode 2 is a foil made of conductive material, and is preferably a foil made of valve metal, such as aluminum or titanium. Separator 53 may be disposed between electrodes 2 and 52 .

FIG. 2 is an enlarged schematic view of dielectric layer 4 . Dielectric layer 4 includes plural metal oxide particles 100 spread over upper surface 2 A of electrode 2 . Metal oxide particles 100 are made of oxide nanosheets, such as titanate nanosheets or niobate nanosheets. Each of metal oxide particles 100 has a thickness of a total thickness of several atoms. The thickness ranges approximately from 0.3 nm to 2 nm, preferably not less than 0.3 nm and not greater than 50 nm. Metal oxide particle 100 has a length and a width which range approximately from 10 nm to 1 mm. Metal oxide particles 100 are spread over and adhere to upper surface 2 A of electrode 2 with an adhesive support layer made of cation provided at upper surface 2 A of electrode 2 . Metal oxide particles 100 can hardly be spread over upper surface 2 A of electrode 2 without any space between metal oxide particles 100 . Aperture 5 constituted by space 101 provided between metal oxide particles 100 is formed in dielectric layer 4 . Aperture 5 passes through between upper surface 4 A and lower surface 4 B of dielectric layer 4 .

As shown in FIG. 1 , insulating portion 6 is formed on non-dielectric-layer portion 22 A of upper surface 2 A of electrode 2 facing aperture 5 . Non-dielectric-layer portion 22 A is exposed through aperture 5 . Electrode 2 is made of metal. Insulating portion 6 is made of oxide of this metal. For example, if electrode 2 is made of aluminum, insulating portion 6 is made of aluminum oxide. Insulating portion 6 can be formed by oxidizing upper surface 2 A of electrode 2 via aperture 5 by a method, such as anode oxidization or heat treatment.

Thickness T 1 (nm) of insulating portion 6 is determined according to withstand voltage WV (V) of the capacitor. If insulating portion 6 is formed by anode oxidization, thickness T 1 (nm) is determined by the following equation.

T 1=1.4 ×WV

In the particular case that electrolyte 51 is electrolytic solution, electrolyte 51 easily enters through aperture 5 . FIG. 3 is a schematic sectional view of capacitor 501 of a comparative example. In FIG. 3 , components identical to those of capacitor 1 according to Embodiment 1 shown in FIG. 1 are denoted by the same reference numerals. Capacitor 501 shown in FIG. 3 does not include insulating portion 6 , thus allowing electrode 2 to be exposed from aperture 5 . In capacitor 501 , electrolyte filling aperture 5 may contact electrode 2 , and causes short-circuiting between electrodes 2 and 52 .

It is extremely difficult to inspect whether or not aperture 5 exists in dielectric layer 4 with a simple method, such as visual inspection. The presence of aperture 5 in dielectric layer 4 can be practically recognized firstly by inspecting characteristics of capacitor 501 after manufacturing capacitor 501 with using oxide nanosheets. Therefore, it is difficult to reduce a defect rate in the manufacturing process.

In capacitor 1 according to Embodiment 1 shown in FIG. 1 , even in the particular case that electrolyte 51 is electrolytic solution, insulating portion 6 prevents electrolyte 51 from directly contacting electrode 2 even if electrolyte 51 enters through aperture 5 . A defect caused by short-circuiting of electrodes 2 and 52 can thus be avoided.

Dielectric layer 4 made of oxide nanosheets can be thin due to insulating portion 6 insulating between electrolyte 51 and electrode 2 . Even in capacitor 501 of the comparative example without insulating portion 6 , aperture 5 can be clogged by a lot of stacked layers made of metal oxide particles 100 to cause aperture 5 to have a complicated shape passing through from upper surface 4 A to lower surface 4 B of dielectric layer 4 , so as to suppress the short-circuiting. However, this method fails to make dielectric layer 4 thin, and accordingly, prevents capacitor 501 from having a large capacitance.

As described above, insulating portion 6 suppresses the short-circuiting between electrodes 2 and 52 even if capacitor 1 includes dielectric layer 4 made of oxide nanosheets in which the presence of aperture 5 can be hardly checked by a simple method. In addition, dielectric layer 4 having aperture 5 does not need to be disposed as a defective, hence improving production efficiency of capacitor 1 .

In the case that electrode 2 is made of aluminum, insulating portion 6 is made of oxidized aluminum. Relative dielectric constant of oxidized aluminum is not so large, of about 8. Relative dielectric constant of titanate nanosheet that can be used as a material of dielectric layer 4 is about 125. Relative dielectric constant of niobate nanosheet is about 300. These nanosheets can increase relative dielectric constant of dielectric layer 4 , and provides capacitor 1 with a large capacitance accordingly.

A method of manufacturing capacitor 1 will be described below. FIGS. 4A and 4B are sectional views of capacitor 1 for illustrating the method of manufacturing capacitor 1 .

As shown in FIG. 4A , dielectric layer 4 is disposed on upper surface 2 A of electrode 2 made of a thin conductive foil. Aperture 5 passing through between upper surface 4 A and lower surface 4 B of dielectric layer 4 has opening 5 B which opens to upper surface 2 A of electrode 2 . Upper surface 2 A of electrode 2 has, non-dielectric-layer portion 22 A that is a portion exposed from aperture 5 .

Next, as shown in FIG. 4B , insulating portion 6 is formed on non-dielectric-layer portion 22 A by oxidizing, via aperture 5 , non-dielectric-layer portion 22 A facing aperture 5 . The oxidizing of non-dielectric-layer portion 22 A via aperture 5 prevents a portion of upper surface 2 A of electrode 2 contacting dielectric layer 4 from being oxidized except non-dielectric-layer portion 22 A and a portion of upper surface 2 A around non-dielectric-layer portion 22 A. This oxidization thus prevents formation of an insulating film on the portion of upper surface 2 A except non-dielectric-layer portion 22 A and the portion of upper surface 2 A around non-dielectric-layer portion 22 A.

Then, as shown in FIG. 1 , electrode 52 facing upper surface 4 A of dielectric layer 4 is provided. Electrolyte 51 fills between upper surface 4 A of dielectric layer 4 and electrode 52 . Separator 53 may be disposed between electrodes 2 and 52 .

FIGS. 4C and 4D are schematic sectional views of dielectric layer 4 . As shown in FIG. 4C , dielectric layer 4 is made of dielectric film 44 , a single layer of an oxide nanosheet. Dielectric layer 4 may be made of dielectric film 44 made of plural laminated oxide nanosheets, as shown in FIG. 4D . Thickness T 2 of dielectric layer 4 made of dielectric film(s) 44 ranges from 0.3 nm to 50 nm. Thickness T 2 within this range may likely produce aperture 5 in dielectric layer 4 .

A diameter of aperture 5 shown in FIG. 4A is constant from upper surface 4 A to lower surface 4 B. In fact, as shown in FIG. 2 , the diameter of aperture 5 is not constant since aperture 5 is constituted by spaces 101 formed in dielectric layer 4 by metal oxide particles 100 that are multiple oxide nanosheets. Aperture 5 generally has a complicated shape.

Insulating portion 6 may extend to around non-dielectric-layer portion 22 A in addition to non-dielectric-layer portion 22 A facing aperture 5 . This reliably prevents electrolyte 51 from contacting electrode 2 .

Before forming dielectric layer 4 , upper surface 2 A of electrode 2 may be provided with an acid treatment or an alkali treatment. The acid or alkali treatment removes an oxidized film on upper surface 2 A, and roughens upper surface 2 A to enlarge its surface area, accordingly increasing capacitance of capacitor 1 .

Acids that can be used for the acid treatment may employ HCl, H 2 SO 4 , H 3 PO 4 , and (COOH) 2 . Alkalis that can be used for the alkali treatment may employ KOH and NaOH.

Similarly, the oxidized film on upper surface 2 A of electrode 2 can be removed by cathode reduction of upper surface 2 A of electrode 2 . This reduction roughens upper surface 2 A to enlarge its surface area, accordingly increasing a capacitance of capacitor 1 . In this cathode reduction, the surface of electrode 2 can be reduced by using electrode 2 as a cathode, and applying a current between a counter electrode that becomes an anode in the electrolytic solution.

Upper surface 2 A of electrode is roughened by the acid or alkali treatment or cathode reduction of upper surface 2 A of electrode 2 . If an oxidized nanosheet, for example, is disposed on roughened upper surface 2 A of electrode 2 as dielectric layer 4 , the oxidized nanosheet is difficult to be neatly and evenly disposed since upper surface 2 A is complicatedly roughened. Aperture 5 is thus likely generated in dielectric layer 4 . If dielectric layer 4 is formed on upper surface 2 A of electrode 2 roughened by a method, such as sputtering, except for solution method, it is more difficult to evenly form dielectric layer 4 without generating aperture 5 than forming dielectric layer 4 by a solution method.

In capacitor 1 according to Embodiment 1, insulating portion 6 covers opening 5 B of aperture 5 . This avoids contact of electrode 2 and electrolyte 51 . Therefore, insulating portion 6 effectively prevents short-circuiting between electrodes 2 and 52 in capacitor 1 manufactured using the manufacturing process of roughening upper surface 2 A of electrode 2 by the acid or alkali treatment, or cathode reduction. Insulating portion 6 preferably covers opening 5 B of aperture 5 completely.

Insulating portion 6 is made of an oxidized film formed by oxidizing electrode 2 made of metal. However, insulating portion 6 is not limited to the oxidized film. As long as contact of electrode 2 and electrolyte 51 can be prevented, any composition is applicable.

FIG. 5 shows evaluation results of capacitor 1 according to Embodiment 1. Sample 1 is capacitor 1 including dielectric layer 4 with various thicknesses according to Embodiment 1. Sample 2 is capacitor 501 of the comparative example shown in FIG. 3 including dielectric layer 4 with various thicknesses. Sample 2 does not have insulating portion 6 . A yield rate based on capacitance is confirmed by applying current to Samples 1 and 2 . The number of dielectric films 44 ( FIGS. 4C and 4D ) in dielectric layer 4 ranged from 1 to 10.

As shown in FIG. 5 , the yield rate of Sample 1 does not decrease and has high reliability, although Sample 1 including extremely thin dielectric layer 4 . In sample 2 , the yield rate decreases if the number of dielectric films 44 in dielectric layer 4 decreases and dielectric layer 4 becomes thin. To achieve the same yield rate, dielectric layer 4 of sample 2 requires more laminated dielectric films 44 than that for dielectric layer 4 of Sample 1 . Accordingly, capacitor 1 according to Embodiment 1 is highly reliable and has a large capacitance even if the number of laminated dielectric films 44 is small and dielectric layer 4 is thin.

FIG. 6A is a perspective view of capacitor 1001 according to Embodiment 1. Capacitor 1001 is a solid electrolytic capacitor, and includes multiple laminated capacitor elements 20 . Anode foil 21 is configured with a substrate that is electrode 2 , and dielectric layer 4 laminated on the substrate. Capacitor element 20 includes anode foil 21 , a solid electrolytic layer made of conductive polymer or organic semiconductor formed on dielectric layer 4 of anode foil 21 , and a cathode layer made of conductive paste, such as silver paste or carbon paste, formed on the solid electrolytic layer. The solid electrolytic layer and the cathode layer constitute cathode electrode 22 . Anode foil 21 of each of multiple laminated capacitor elements 20 is connected to anode terminal 23 (an external terminal). Cathode electrode 22 of each of multiple capacitor elements 20 is connected to cathode terminal 24 (an external terminal). Laminated capacitor elements 20 , anode terminal 23 , and cathode terminal 24 are covered with package 25 made of insulating resin while a part of anode terminal 23 and a part of cathode terminal 24 are exposed outside.

FIG. 6B is a perspective view of another capacitor 2001 according to Embodiment 1. Capacitor 2001 is a roll-type electrolytic capacitor including capacitor element 30 . Electrode 2 in which dielectric layers 4 are laminated is used as anode foil 31 . Anode foil 31 is connected to anode terminal 33 , and cathode foil 32 is connected to cathode terminal 34 . Anode foil 31 and cathode foil 32 are laminated via separator 35 and rolled to constitute capacitor element 30 . Capacitor element 30 is impregnated with cathode material, such as electrolytic solution, conductive polymer, organic semiconductor, or their composite material, and is accommodated in case 36 having a tubular shape with a bottom. An opening of case 36 is sealed with sealing 37 while a part of anode terminal 33 and a part of cathode terminal 34 are exposed outside. Electrode 2 in which dielectric layers 4 are laminated can also be used as cathode foil 32 . Alternatively, electrode 2 may also be used for both anode foil 31 and cathode foil 32 .

A capacitor according to Embodiment 1 is not limited to the above configurations. Dielectric layer 4 can be formed on electrode 2 even if electrode 2 is configured with a film substrate and an electrode formed on this substrate. Insulating portion 6 may be formed on electrode 2 after forming the capacitor element.

FIG. 7A is a sectional view of still another capacitor 5001 according to Embodiment 1. In FIG. 7A , components identical to those shown in FIG. 1A are denoted by the same reference numerals. In capacitor 5001 , dielectric layer 144 is formed on lower surface 52 B of electrode 52 facing electrode 2 via electrolyte 51 and separator 53 , in addition to on upper surface 2 A of electrode 2 . Dielectric layer 144 is formed of plural metal oxide particles 100 ( FIG. 2 ) spread over lower surface 52 B of electrode 52 , similarly to dielectric layer 4 . Aperture 55 having an opening is constituted by space 101 between plural metal oxide particles 100 . Aperture 55 faces lower surface 52 B of electrode 52 , and is formed in dielectric layer 144 . Insulating portion 606 is provided on lower surface 52 B of electrode 52 so as to cover the opening of aperture 55 similarly to insulating portion 6 . Insulating portion 606 has the same effect as insulating portion 6 . Insulating portion 606 preferably covers the opening of aperture 55 completely.

FIG. 7B is a sectional view of further capacitor 6001 according to Embodiment 1. In FIG. 7B , components identical to those shown in FIG. 1A are denoted by the same reference numerals. In capacitor 6001 , dielectric layer 144 is formed on lower surface 2 B of electrode 2 in addition to on upper surface 2 A of electrode 2 . Dielectric layer 144 is configured with plural metal oxide particles 100 ( FIG. 2 ) spread over lower surface 2 B of electrode 2 , similarly to dielectric layer 4 . Aperture 55 having an opening is constituted by space 101 between plural metal oxide particles 100 . Aperture 55 faces lower surface 2 B of electrode 2 , and is formed in dielectric layer 144 . Insulating portion 606 covering the opening of aperture 55 is provided on lower surface 2 B of electrode 2 by the same method as that of insulating portion 6 . Insulating portion 606 has the same effect as insulating portion 6 . Insulating portion 606 preferably covers the opening of aperture 55 completely.

Exemplary Embodiment 2

FIG. 8 is a schematic sectional view of capacitor 3001 according to Exemplary Embodiment 2. In FIG. 8 , components identical to those of capacitor 1 according to Embodiment 1 shown in FIG. 1 are denoted by the same reference numerals. Capacitor 3001 shown in FIG. 8 further includes insulating film 66 formed on upper surface 2 A of electrode 2 . Lower surface 66 B of insulating film 66 is situated on upper surface 2 A of electrode 2 . Dielectric layer 4 is formed on upper surface 66 A of insulating film 66 . Dielectric layer 4 is formed on upper surface 66 A of insulating film 66 . Dielectric layer 4 is configured with plural metal oxide particles 100 spread over upper surface 66 A of insulating film 66 . Aperture 5 having an opening is constituted by space 101 between plural metal oxide particles 100 . Aperture 5 faces upper surface 66 A of insulating film 66 , and is formed in dielectric layer 4 .

In general, the thickness of an insulating film of a capacitor is determined based on a withstand voltage of the capacitor. The thickness of insulating film 66 of capacitor 3001 according to Embodiment 2 is thinner than the insulating film of a capacitor having the same withstand voltage. In capacitor 3001 , the thickness of the insulating film determined based on the withstand voltage is a total of the thicknesses of insulating film 66 and dielectric layer 4 .

In capacitor 3001 , insulating film 66 is formed entirely on upper surface 2 A of electrode 2 , and covers opening 5 B of aperture 5 in dielectric layer 4 , hence reliably preventing the contact of electrode 2 and electrolyte 51 at aperture 5 . This reduces a defective rate of capacitor 3001 . Insulating film 66 preferably covers opening 5 B of aperture 5 completely.

Insulating film 66 includes electrode coating portion 266 disposed between upper surface 2 A of electrode 2 and lower surface 4 B of dielectric layer 4 , and insulating portion 6 that covers opening 5 B of aperture 5 . This structure can raise a withstand voltage of capacitor 3001 . Insulating portion 6 preferably covers opening 5 B completely.

Similarly to capacitor 1 according to Embodiment 1, same effect as capacitor 1 according to Embodiment 1 can be achieved by performing an acid treatment, an alkali treatment, or a cathode reduction to upper surface 2 A of electrode 2 .

A method of manufacturing capacitor 3001 will be described below. FIGS. 9A and 9B are sectional views of capacitor 3001 for illustrating the method of manufacturing capacitor 3001 .

As shown in FIG. 9A , insulating film 66 is formed by oxidizing upper surface 2 A of electrode 2 . Electrode 2 is made of a conductive foil, preferably a valve metal foil, such as aluminum or titanium.

Next, as shown in FIG. 9B , dielectric layer 4 is formed on upper surface 66 A of insulating film 66 . Similarly to Embodiment 1, dielectric layer 4 is made of oxide nanosheets configured with plural metal oxide particles 100 ( FIG. 2 ), and has plural apertures 5 passing from upper surface 4 A to lower surface 4 B.

Then, as shown in FIG. 8 , electrode 52 facing upper surface 4 A of dielectric layer 4 is provided, and electrolyte 51 fills between upper surface 4 A of dielectric layer 4 and electrode 52 . Separator 53 may be disposed between electrodes 2 and 52 .

FIG. 9C is a sectional view of another capacitor 4001 according to Embodiment 2. In FIG. 9C , components identical to those of capacitor 3001 shown in FIG. 8 are denoted by the same reference numerals. Insulating film 66 includes electrode coating portion 266 disposed between upper surface 2 A of electrode 2 and lower surface 4 B of dielectric layer 4 , and insulating portion 6 covering opening 5 B of aperture 5 . Insulating portion 6 is thicker than electrode coating portion 266 . This further increases a withstand voltage of capacitor 4001 . Insulating portion 6 preferably covers opening 5 B completely.

Next, a method of manufacturing capacitor 4001 will be described below. FIG. 9D is a sectional view of capacitor 4001 for illustrating the method of manufacturing capacitor 4001 . In FIG. 9D , components identical to those of capacitor 3001 shown in FIGS. 9A and 9B are denoted by the same reference numerals. As shown in FIG. 9D , non-dielectric-layer portion 166 A of insulating film 66 is exposed from aperture 5 . Portion 122 of electrode 2 contacts non-dielectric-layer portion 166 A. Portion 122 of electrode 2 is oxidized via aperture 5 . This forms insulating portion 6 on non-dielectric-layer portion 166 A. Insulating portion 6 can be thicker than electrode coating portion 266 between dielectric layer 4 and electrode 2 . This increases a withstand voltage of capacitor 3001 Formation of insulating portion due to oxidization of a portion of upper surface 2 A of electrode 2 other than portion 122 and its surrounding portion can be prevented by oxidizing portion 122 of electrode 2 via aperture 5 .

Then, as shown in FIG. 9C , electrode 52 facing upper surface 4 A of dielectric layer 4 is provided, and electrolyte 51 fills between upper surface 4 A of dielectric layer 4 and electrode 52 . Separator 53 may be disposed between electrodes 2 and 52 .

If the withstand voltages of capacitors 3001 and 4001 according to Embodiment 2 is 5V, 2V that is a part of the withstand voltage, for example, can be secured by the thickness of insulating film 66 . Remaining of the withstand voltage, which is 3V, can be secured by dielectric layer 4 . Accordingly, capacitors 3001 and 4001 secure the thickness of insulating film required for a desired withstand voltage by thicknesses of two layers, i.e., insulating film 66 and dielectric layer 4 .

In the case that electrode 2 is made of an aluminum foil, an oxidized aluminum film which is insulating film 66 is formed by oxidizing upper surface 2 A of electrode 2 . Since the relative dielectric constant of oxidized aluminum is about 8, capacitors 3001 and 4001 with large capacitance can be achieved by making thickness of oxidized nanosheet, such as titanate nanosheet (relative dielectric constant: about 125) and niobate nanosheet (relative dielectric constant: about 300) used as dielectric layer 4 , thicker than the thickness of the oxidized aluminum film.

Capacitors 1001 and 2001 can be configured using capacitors 3001 and 4001 in the second exemplary embodiment as capacitor elements 20 and 30 shown in FIGS. 6A and 6B .

According to Embodiments 1 and 2, terms, such as “upper surface” and “lower surface”, indicating directions indicate relative directions dependent only on the relative positional relationship of components, such as electrodes 2 and 22 and dielectric layer 4 , of capacitor 1 , and do not indicate absolute directions, such as a vertical direction.

A capacitor according to the present invention prevents short-circuiting between electrodes, and is thus highly reliable and can reduce a defect rate. Accordingly, the capacitor is effectively applicable to devices that require high reliability such as a range of electronic devices and communications equipment.

2 Electrode (First Electrode)

4 Dielectric Layer

5 Aperture

6 Insulating Portion

51 Electrolyte

52 Electrode (Second Electrode)

66 Insulating Film