Coupling ring

The present invention relates to a coupling ring for opposing and coupling flanges to each other and particularly relates to a technique for suitably coupling pipes having flanges in series. The present invention also relates to a positioning ring holding a pair of pipes while making central axes of the pipes coincident with each other. The present invention further relates to an inclined ring used to pressure-bond flanges opposing each other.

Various pipe coupling methods have been recently developed. As one of the methods, there is known a method of coupling a pair of pipes each having a disk flange to each other using a coupling ring as disclosed in Japanese Published Patent Application No. 2008-286325A. This coupling ring includes a series of unit members configured so that which adjacent members are rotatably coupled, and couples the flanges to each other by connecting the unit members on both ends using a fastener.

Technical Problem

At the time of coupling, one end of the coupling ring in an open state is inserted downward into the pipes from one side of the pipes with the flanges opposing and closely connected to each other, and the inserted end of the coupling ring is pulled up from the other side of the pipes and fastened to the other end of the coupling ring.

However, one end of the coupling ring inserted downward into the pipes is suspended due to gravity since the adjacent unit members of the coupling ring are rotatably connected. Particularly in a narrow working space, it is often disadvantageously difficult to insert one end of the coupling ring downward into the pipes or to pull up the end.

The present invention has been achieved to solve the above-stated problem. It is, therefore, a main object of the present invention to provide a coupling ring capable of easily coupling flanges even in a small working space.

Solution to the Problem

Accordingly, a coupling ring according to one aspect of the present invention includes: a series of unit members configured so that unit members adjacent to each other are rotatably coupled to each other; and a fastener coupling unit members on both ends to each other, wherein a concave groove is provided in each of the unit members to extend circumferentially. Further, the concave groove is externally fitted into an outer circumference of each of two opposing flanges, the unit members on the both ends are coupled to each other by the fastener to be turned into an annular state, the fastener is fastened to thereby press an inclined surface formed on a side surface of the concave groove and inclined surfaces formed on rear surfaces of the respective flanges, and the flanges are pressure-bonded to each other by components of force generated at a time of pressing. A stopper member to restrict a separation angle between a unit member on one end and an adjacent unit member to fall within a certain angle in an open state in which the unit members on the both ends are not coupled to each other by the fastener is provided on at least one of the unit members.

It is preferable that the stopper member protrudes from either of a unit member on one end or an adjacent unit member, and abuts the unit member on the other end when the separation angle is equal to the certain angle. If the stopper member is configured as stated above, it is possible to restrict a rotational angle without making the coupling ring complex.

It is preferable that the certain angle is equal to or smaller than 180 degrees since this can facilitate pulling up one end.

It is preferable that the series of unit members includes three unit members, and that the stopper member restricts a separation angle of each of the unit members on both ends with respect to an intermediate unit member located at intermediate the unit members on both ends.

A fluid supply device using such a coupling ring can be made compact and easily attach or detach pipes.

The conventional technique also has the following problem. A so-called flange joint is intended to connect pipes by connecting flanges provided on ends of the respective pipes. At the time of connection, it is necessary to make central axes of the opposing flanges (pipes) coincident with each other. To this end, a cylindrical positioning ring, for example, is used (see Japanese Published Patent Application No. 2008-286325A).

This positioning ring makes the central axes of these pipes coincident with each other by causing one end and the other end of the positioning ring to be externally fitted into one of the pipes (or flanges) and the other pipe (or flange) without backlash, respectively.

However, with this configuration, it is necessary to move the pipes relatively to the positioning ring in an axial direction when the positioning ring is detached or attached. It is often disadvantageously difficult to detach or attach the positioning ring if many pipes are connected horizontally and vertically such as seen in a gas panel and the pipes are difficult to move in the axial direction.

Particularly at the time of detachment, the problem is conspicuous since the pipes are in an assembled state and the other regions are often fixed and immovable.

The present invention has been achieved to solve the above-stated problem. It is, therefore, a main object of the present invention to provide a positioning ring capable of being easily and detachably attached.

Accordingly, a positioning ring according to another aspect of the present invention is a positioning ring in a form of a pipe having a predetermined length axially, having one end externally fitted into one pipe and other end externally fitted into another pipe, and holding the pipes while making central axes of the pipes substantially coincident with each other, wherein notches penetrating through a thickness direction of a wall forming the positioning ring are provided in one end and the other end, respectively.

It is preferable that a central angle of each of the notches viewed from an axial direction is set to be smaller than 180 degrees so as to ensure making central axes of the flanges coincident with each other.

It is preferable that the notch on one end and the notch on the other end are continuous. If the notches are continuous, the positioning ring can be easily attached or detached without separating or contacting the pipes. Alternatively, it is preferable that the notch on one end and the notch on the other end are discontinuous, and a residual portion having a predetermined width is formed between the notches.

It is preferable that a gasket in a form of a circular ring plate is integrally attached between one end and the other end so as to be orthogonal to an axis. If the positioning ring is configured as stated above, it is possible to attach or detach the positioning ring and the gasket simultaneously and easily without separating or contacting the pipes.

It is preferable that the positioning ring is elastically deformed since the positioning ring can be easily attached or detached and used repeatedly.

A fluid supply device using such a positioning ring can be made compact and easily attach or detach pipes.

The conventional technique further has the following problem. A so-called flange joint is intended to connect pipes by pressure-bonding flanges provided on ends of the respective pipes. By way of example, as disclosed in Japanese Published Patent Application No. 2008-286325A, there is known an inclined-surface flange joint applying a radial pressure force on an inclined surface formed on each flange and pressure-bonding the flanges by axial component forces generated at the time of application of the pressure force. The inclined-surface flange joint is characterized by no need to secure an axial length even during attachment or detachment and by compactness.

However, the inclined-surface flange joint disadvantageously needs to use pipes each including a specific flange having an inclined surface and cannot use pipes including existing flanges without inclined surfaces.

The present invention has been achieved to solve the above-stated problem. It is, therefore, an object of the present invention to provide an inclined ring that is a tool capable of using the inclined-surface flange joint even if pipes include existing flanges without inclined surfaces.

Accordingly, an inclined ring according to yet another aspect of the present invention is an inclined ring used to pressure-bond two opposing flanges, wherein the inclined ring is provided separately from each of the flanges, is attached onto a respective rear side of an opposing surface of each of the flanges, and has an inclined surface that is wider outward as the inclined surface is closer to each of the flanges.

Furthermore, a coupling device according to still another aspect of the present invention is a coupling device including a coupling ring, the coupling ring including: a series of unit members configured so that unit members adjacent to each other are rotatably coupled to each other; and a fastener coupling unit members on both ends to each other, wherein the coupling device pressure-bonds two opposing flanges by a pressure force from an inclined sidewall of a concave groove provided to extend circumferentially, and the coupling device comprises an inclined ring, the inclined ring being provided separately from each of the flanges, being attached to respective rear sides of opposing surfaces of the flanges, being wider outward as the inclined ring is closer to each of the flanges, and having an inclined surface corresponding in form to the inclined sidewall.

If the inclined ring is formed out of each of a plurality of divided pieces in a form obtained by dividing a circular ring in a radial direction, the inclined ring can be attached from a radial direction. It is, therefore, effective to use the inclined ring if, for example, the inclined ring is difficult to attach from an axial direction.

A fluid supply device using such an inclined ring can be made compact.

Advantageous Effects of Invention

With this constitution, the stopper member restricts the separation angle between the unit member on one end and the adjacent unit member to fall within the certain angle. Therefore, in the open state in which the unit members on both ends are not coupled, the unit member on one end that is inserted into downward of the pipes can be easily pulled up even in a narrow working space without suspending the unit member on one end due to gravity. It is possible to improve working efficiency in coupling the flanges.

According to the present invention, each of the pipes can be passed through radially from the enlarged notch by adding only such a notch configured simply. Therefore, the positioning ring can be easily attached or detached without axially separating or contacting the paired pipes or only by slightly separating the pipes.

According to the present invention, the required inclined surface can be attached onto each flange. Therefore, even for existing flanges without inclined surfaces, such a flange joint can be used to convert radial pressure forces applied onto the respective attached inclined surfaces into axial components of force, and to pressure-bond the flanges. Since the flange joint is not required to have an axial length at the time of attachment or detachment, pipes can be configured to be compact.

FIG. 1 is a schematic diagram showing a state of coupling pipes using a coupling ring according to a first embodiment of the present invention in an axial direction;

FIG. 2 is a partial cross-sectional view showing an open state of the coupling ring according to the first embodiment;

FIG. 3 is a longitudinal sectional view showing a state of coupling the pipes using the coupling ring according to the first embodiment;

FIG. 4 is a configuration diagram of a fluid supply device using the coupling ring according to the first embodiment;

FIG. 5 is an overall perspective view of a positioning ring according to a second embodiment of the present invention;

FIG. 6 is a perspective view showing a state of holding pipes using the positioning ring according to the second embodiment;

FIG. 7 is an overall perspective view of a positioning ring according to a third embodiment of the present invention;

FIG. 8 is a longitudinal sectional view showing a state of holding pipes using a positioning ring according to a fourth embodiment of the present invention;

FIG. 9 is a partial cross-sectional view of the coupling ring according to the fourth embodiment;

FIG. 10 is an overall perspective view of a positioning ring according to a modification of the fourth embodiment;

FIG. 11 is a configuration diagram of a fluid supply device using the positioning ring according to the fourth embodiment;

FIG. 12 is an overall perspective view of an inclined ring according to a fifth embodiment of the present invention;

FIG. 13 is an overall perspective view of the inclined ring viewed from a different side according to the fifth embodiment;

FIG. 14 is a longitudinal sectional view showing a state of coupling pipes using the inclined ring according to the fifth embodiment;

FIG. 15 is a partial cross-sectional view of the coupling ring according to the fifth embodiment;

FIG. 16 is a configuration diagram of a fluid supply device using the coupling ring according to the fifth embodiment; and

FIG. 17 is an overall perspective view of an inclined ring according to another aspect of the present invention.

Embodiments of the present invention will be described hereinafter with reference to the accompanying drawings.

<First Embodiment>

A coupling ring 100 according to a first embodiment of the present invention is a constituent component of a flange joint 300 , and intended to connect in series a pair of pipes 1 a and 1 b including flanges 2 a and 2 b on ends, respectively. This flange joint 300 connects the pipes 1 a and 1 b to each other by coupling the flanges 2 a and 2 b provided on the ends of the respective pipes 1 a and 1 b . The flange joint 300 includes a gasket 7 , a positioning ring 8 , and the coupling ring 100 . The pipes 1 a and 1 b will first be described.

As shown in FIG. 3 and the like, the pipes 1 a and 1 b include pipe main bodies 11 a and 11 b , and disk flanges 2 a and 2 b provided on ends of the pipe main bodies 11 a and 11 b , respectively, and are coupled to each other by opposing tip end surfaces of the flanges 2 a and 2 b to each other. The flanges 2 a and 2 b have closed annular protrusions 5 a and 5 b provided on tip end surfaces (hereinafter, also “opposing surfaces”) of the flanges 2 a and 2 b , and have inclined surfaces 3 a and 3 b on rear surfaces thereof, respectively. The inclined surfaces 3 a and 3 b have larger diameters as being closer to tip ends thereof. Furthermore, stepped portions 4 a and 4 b are provided on outer peripheral surfaces of the tip end portions of flanges 2 a and 2 b , respectively.

If the pipes 1 a and 1 b are coupled to each other, the gasket 7 in the form of an equal-thickness annular plate is sandwiched between the opposing surfaces of the flanges 2 a and 2 b . At this time, the positioning ring 8 is externally fitted into the stepped portions 4 a and 4 b of the flanges 2 a and 2 b without backlash.

The gasket 7 has an inside diameter identical to those of the pipes 1 a and 1 b and an outside diameter identical to those of the stepped portions 4 a and 4 b , and ensures airtightness by causing the protrusions 5 a and 5 b to enter into the gasket 7 .

The positioning ring 8 is a cylindrical member having an inside diameter identical to the outside diameter of the stepped portions 4 a and 4 b and intended to precisely make central axes CL of the pipes 1 a and 1 b coincident with each other.

In this way, the coupling ring 100 is externally fitted into the opposing flanges 2 a and 2 b to fasten and couple the flanges 2 a and 2 b to each other. As shown in FIGS. 1 and 2 , the coupling ring 100 includes a plurality of (three in FIGS. 1 and 2 ) unit members 50 a to 50 c configured so that adjacent unit members are coupled to be rotatable about shafts 53 a and 53 b , and a fastener 52 coupling the unit members 50 a and 50 c to each other on both ends. The constituent elements will be described in detail.

As shown in FIG. 2 and the like, the unit members 50 a to 50 c are generally in the shape obtained by dividing an annular circle into three segments when viewed from an axial direction. On an inner circumferential surface of each of the unit members 50 a to 50 c , a concave groove 51 having such a width as to be able to be externally fitted into outer circumferences of the paired opposing flanges 2 a and 2 b is provided to extend circumferentially. An inclined surface 51 a corresponding to the inclined surface 3 a or 3 b on the rear surface of the flange 2 a or 2 b is formed on a side surface of this concave groove 51 .

As shown in FIG. 2 and the like, the fastener 52 includes, for example, a bolt member 52 a and a nut member 52 b . The bolt member 52 a is configured so that a proximal end of the bolt member 52 a is rotatably coupled to a tip end portion of the unit member 50 c on one end, and that a distal end thereof is fitted into a groove-like notch 54 provided on a tip end portion of the unit member 50 a on the other end. The fastener 52 can couple the unit members 50 a and 50 b on the both ends by mating the nut member 52 b with the bolt member 52 a that is fitted into the notch 54 and that protrudes, and can expand or reduce an inner circumferential diameter of the coupling ring 100 .

Stopper members 60 a and 60 b are generally triangular prism-like protrusions provided on an outer periphery near a portion where the unit members 50 a and 50 c on the both ends are coupled to each other. In a state in which a separation angle between the unit member 50 a or 50 c on one end and the adjacent unit member 50 b is narrower than a certain angle, the stopper members 60 a and 60 b do not abut on the unit member 50 b . In a state in which the separation angle is equal to the certain angle, the stopper members 60 a and 60 b abut on the unit member 50 b as shown in FIG. 2 . Therefore, the separation angle does not increase to be greater than the certain angle. The certain angle suffices, for example, to be within 180 degrees. In this example, the certain angle is set to 115 degrees as shown in FIG. 2 , and an angle between the unit members 50 a and 50 c on the both ends at this time degrees is 50 degrees.

A method of coupling the pipes 1 a and 1 b in series using the coupling ring 100 according to this embodiment will next be described.

First, one end portion of the positioning ring 8 is externally fitted into the stepped portion 4 a of one pipe 1 a . Next, the gasket 7 and the other stepped portion 4 b are sequentially fitted into the other end portion of the positioning ring 8 . It is thereby possible to precisely coincide the central axes of the pipes 1 a and 1 b and the gasket 7 with one another.

Next, the unit member 50 a on one end of the coupling ring 100 in an open state in which the both ends are not coupled is inserted into downward of the flanges 2 a and 2 b from one side of the flanges 2 a and 2 b , and one end of the coupling ring 100 is pulled up from the other side. At this time, the concave groove 51 is externally fitted into the outer circumferences of the opposing flanges 2 a and 2 b.

Thereafter, if the bolt member 52 a is fitted into the notch 54 of the unit member 50 a , the nut member 52 b is fastened, and the inner circumferential diameter of the coupling ring 100 is made smaller, the inclined surface 51 a formed on the side surface of the concave groove 51 presses the inclined surfaces 3 a and 3 b formed on the rear surfaces of the flanges 2 a and 2 b . Axial components of force generated at that time press the flanges 2 a and 2 b against each other, the protrusions 5 a and 5 b enter into both surfaces of the gasket 7 , and the pipes 1 a and 1 b are connected to each other with airtightness kept sufficiently.

With such a configuration, the separation angle between each of the unit members 50 a and 50 c on the both ends and the adjacent unit member 50 b is restricted to fall within the certain angle by simply additionally providing the stopper members 60 a and 60 b on the unit members 50 a and 50 b on the both ends, respectively. This can prevent both of the unit members 50 a and 50 b on the both ends from being suspended by the gravity. Therefore, even if whichever side of the coupling ring 100 is inserted into downward of the flanges 2 a and 2 b in a small working space, the flanges 2 a and 2 b can be easily coupled to each other.

Additionally, a fluid supply device can be configured using the flange joint 300 according to this embodiment. For example, the fluid supply device is configured to include gas supply lines L 1 that are three longitudinal fluid lines provided in parallel, and one horizontal fluid line that is provided among these gas supply lines L 1 and that is a cleaning gas supply line L 2 , in the example shown in FIG. 4 , supplying cleaning gas to the respective gas supply lines L 1 .

Each of the longitudinal fluid lines L 1 includes a fluid device such as a mass flow controller X 11 or the like and is configured to function as a gas supply line. The horizontal fluid line 12 is configured to function as the cleaning gas supply line. While it is described herein that the flange joint 300 is used for each of all pipe connections, the present invention is not limited to this example. It suffices to use the flange joint 300 for at least one pipe connection.

In FIG. 4 , reference symbol L 1 denotes the gas supply line, L 2 denotes the cleaning gas supply line, X 11 denotes the mass flow controller, X 12 and X 13 denote valves or pressure sensors, 300 denotes the flange joint, and X 4 and X 4 ′ denote piping.

The present invention is not limited to this embodiment. For example, in this embodiment, the stopper members are provided in two portions. Alternatively, the stopper member can be provided, for example, in at least one portion out of the unit member on each end and the adjacent unit member.

Furthermore, it is described in this embodiment that the stopper members always restrict the separation angle between the unit member on one end and the adjacent unit member is within the certain angle. Alternatively, the stopper members can be configured, for example, to restrict the separation angle at the time of a step of constructing an annular shape and to be moved or prevented from abutting on the unit members so that the stopper members do not restrict the separation angle in the other steps.

Moreover, the stopper members can be configured, for example, to temporarily hold the separation angle when the separation angle is equal to one predetermined angle or one of a plurality of predetermined angles. “To temporarily hold the certain angle” means that the stopper members can hold the separation angle to be the predetermined angle in a state of applying no force in a separation direction, and that the separation angle can exceed the predetermined angle when a force is applied in the separation direction.

That is, it suffices that at least one end of the coupling ring in the open state is not suspended by the gravity to the extent that the coupling ring can be easily pulled up even in the small working space in the step of constructing the annular shape of the coupling ring.

Further, the coupling ring is described in this embodiment to include the three unit members. However, it suffices that the coupling ring includes a plurality of unit members.

In this embodiment, the stopper member is provided between the unit member on one end and the adjacent unit member. However, the present invention is not limited to this embodiment. For example, in a coupling ring configured, for example, to connect four or more unit members in series, a stopper member can be provided between at least one unit member and the adjacent unit member.

One embodiment of the present invention will be described with reference to the drawings.

<Second Embodiment>

A positioning ring Y 200 according to a second embodiment of the present invention holds a pair of pipes Y 1 a and Y 1 b while making central axes of the pipes Y 1 a and Y 1 b coincident with each other. The positioning ring Y 200 includes an elastically deformed holder Y 201 in which notches Y 200 a and Y 200 b are formed as shown in FIG. 5 .

The holder Y 201 has a partially cylindrical C-shape if being viewed from an axial direction, and has an inside diameter identical to an outside diameter of the end of each of the pipes Y 1 a and Y 1 b to be described later. The holder Y 201 is set to have an axial length so that the holder Y 201 can hold the pipes Y 1 a and Y 1 b while making the central axes of the pipes Y 1 a and Y 1 b coincident with each other.

The notches Y 202 a and Y 202 b are grooves penetrating in a thickness direction of the holder Y 201 , and extend linearly in the axial direction so that the notch Y 202 a on one end is continues to the notch Y 202 b on the other end. A width of each of these notches Y 202 a and Y 202 b , that is, a central angle thereof if viewed from the axial direction is set to 90 degrees in this embodiment.

Operation for attaching or detaching the positioning ring Y 200 according to this embodiment will be described.

At the time of attachment, the positioning ring Y 200 is elastically deformed and fitted into the pipes Y 1 a and Y 1 b arranged in series by pressing the notches Y 202 a and Y 202 b against the pipes Y 1 a and Y 1 b in a radial direction. As a result, the central axes of the pipes 1 a and 1 b coincide with each other and are held. As other attachment methods, there is, for example, an attachment method including fitting the positioning ring Y 200 into the pipes Y 1 a and Y 1 b from the radial direction while enlarging widths of the notches Y 202 a and Y 202 b.

At the time of detachment, the positioning ring Y 200 is pulled in the radial direction, elastically deformed, and detached. As other detachment methods, there is, for example, a detachment method including pulling the positioning ring Y 200 in the radial direction and detaching the positioning ring Y 200 from the pipes Y 1 a and Y 1 b while enlarging the widths of the notches Y 202 a and Y 202 b.

If the positioning ring Y 200 is configured as stated above, the positioning ring Y 200 can be easily attached or detached to or from the pipes Y 1 a and Y 1 b without making the positioning ring Y 200 complex and without separating or contracting the pipes Y 1 a and Y 1 b but only by providing the notches Y 202 a and Y 202 b quite simple in shape in the positioning ring Y 200 . Alternatively, the positioning ring Y 200 can be attached or detached to or from the pipes

Y 1 a and Y 1 b by axially separating or contacting the pipes Y 1 a and Y 1 b similarly to the conventional technique.

<Third Embodiment>

A positioning ring Y 200 according to a third embodiment of the present invention includes the elastically deformed holder Y 201 having the notch Y 202 a on one end and the notch Y 202 b on the other end formed discontinuously, and a residual portion Y 203 as shown in FIG. 7 .

The residual portion Y 203 is a circular arc-shaped member having a predetermined width and formed between the notch Y 202 a on one end and the notch Y 202 b on the other end. The width of the residual portion Y 203 is sufficiently smaller than a width of the holder Y 201 and smaller than an axial separation distance between the pipes Y 1 a and Y 1 b.

Groove-like cuts Y 201 a intended to extend the residual portion Y 203 in a circumferential direction are provided to make it easier to enlarge the holder Y 201 .

If the positioning ring Y 200 is configured as stated above, the other configurations of the positioning ring Y 200 are similar to those of the positioning ring Y 200 according to the second embodiment except that the pipes Y 1 a and Y 1 b need to slightly separate or contact axially. The third embodiment also exhibits an advantage in that the positioning ring Y 200 can be easily attached or detached.

<Fourth Embodiment>

A positioning ring Y 200 according to a fourth embodiment of the present invention is a constituent component of a flange joint Y 300 and holds a pair of pipes Y 1 a and Y 1 b that include flanges Y 2 a and Y 2 b on ends, respectively while making central axes of the pipes Y 1 a and Y 1 b coincident with each other. This flange joint Y 300 connects the pipes Y 1 a and Y 1 b to each other by coupling the flanges Y 2 a and Y 2 b provided on the ends of the respective pipes Y 1 a and Y 1 b . The flange joint Y 300 includes a gasket 7 , the positioning ring Y 200 , and a coupling ring Y 100 . The pipes Y 1 a and Y 1 b will first be described.

As shown in FIG. 9 and the like, the pipes Y 1 a and Y 1 b include pipe main bodies Y 11 a and Y 11 b , and disk flanges Y 2 a and Y 2 b provided on ends of pipe main bodies Y 11 a and Y 11 b , respectively, and are coupled to each other by opposing tip end surfaces of the flanges Y 2 a and Y 2 b to each other. The flanges Y 2 a and Y 2 b have closed annular protrusions Y 5 a and Y 5 b provided on tip end surfaces (hereinafter, also “opposing surfaces”) of the flanges Y 2 a and Y 2 b , and have inclined surfaces Y 3 a and Y 3 b on rear surfaces thereof. The inclined surfaces Y 3 a and Y 3 b have larger diameters as being closer to tip ends thereof. Furthermore, stepped portions Y 4 a and Y 4 b are provided on outer circumferential surfaces of the tip end portions of flanges Y 2 a and Y 2 b , respectively.

If the pipes Y 1 a and Y 1 b are to be coupled to each other, the gasket Y 7 in the form of an equal-thickness annular plate is sandwiched between the opposing surfaces of the flanges Y 2 a and Y 2 b . At this time, the positioning ring Y 200 is externally fitted into the stepped portions Y 4 a and Y 4 b of the flanges Y 2 a and Y 2 b without backlash. Further, the coupling ring Y 100 is externally fitted into the opposing flanges Y 2 a and Y 2 b to fasten and couple the flanges Y 2 a and Y 2 b to each other. The constituent elements will be described in detail.

The gasket Y 7 has an inside diameter identical to those of the pipes Y 1 a and Y 1 b and an outside diameter identical to those of the stepped portions Y 4 a and Y 4 b , and ensures airtightness by causing the protrusions Y 5 a and Y 5 b to enter into the gasket Y 7 .

The positioning ring Y 200 is similar in shape to the positioning ring Y 8 according to the second embodiment, and has an inside diameter identical to the outside diameters of the stepped portions Y 4 a and Y 4 b.

The coupling ring Y 100 includes a plurality of (three in this embodiment) unit members Y 50 a to Y 50 c configured so that adjacent unit members are coupled to be rotatable, and a fastener Y 52 coupling the unit members Y 50 a and Y 50 c on both ends.

As shown in FIG. 9 , the unit members Y 50 a to Y 50 c are generally in the shape obtained by dividing an annular circle into three segments when viewed from an axial direction. On an inner circumferential surface of each of the unit members Y 50 a to Y 50 c , a concave groove Y 51 having such a width as to be able to be externally fitted into outer circumferences of the paired opposing flanges Y 2 a and Y 2 b is provided to extend circumferentially. An inclined surface Y 51 a corresponding to the inclined surface Y 3 a or Y 3 b on the rear surface of the flange Y 2 a or Y 2 b is formed on a side surface of this concave groove Y 51 .

As shown in FIG. 9 , the fastener Y 52 includes, for example, a bolt member Y 52 a having a proximal end attached to the unit member Y 50 c and a nut member Y 52 b . The fastener Y 52 can couple the unit members Y 50 a and Y 50 c on the both ends to each other by fitting a distal end of the bolt member Y 52 a into a bolt inlet Y 54 and mating the nut member Y 52 b with the bolt member Y 52 a , and can expand or reduce an inner circumferential diameter of the coupling ring Y 100 .

A method of coupling the pipes Y 1 a and Y 1 b in series and separating the pipes Y 1 a and Y 1 b using the positioning ring Y 200 according to this embodiment will next be described.

First, at the time of coupling, one end portion of the positioning ring Y 200 is externally fitted into the stepped portion Y 4 a of one pipe Y 1 a . Next, the gasket Y 7 and the other stepped portion Y 4 b are sequentially fitted into the other end portion of the positioning ring Y 200 .

Next, the concave groove Y 51 of the coupling ring 100 in an open state in which the both ends are not coupled is externally fitted into outer circumferences of the opposing flanges Y 2 a and Y 2 b . If the faster Y 52 is fastened to make the inner circumferential diameter of the coupling ring Y 100 smaller, the inclined surface Y 51 a formed on the side surface of the concave groove Y 51 presses the inclined surfaces Y 3 a and Y 3 b formed on the rear surfaces of the respective flanges Y 2 a and Y 2 b as shown in FIG. 8 . Axial components of force generated at that time press the flanges Y 2 a and Y 2 b against each other, the protrusions Y 5 a and Y 5 b enter into both surfaces of the gasket Y 7 , and the pipes Y 1 a and Y 1 b are connected to each other with airtightness kept sufficiently.

At the time of separation, the fastener Y 52 is first loosened to detach the coupling ring Y 100 . The positioning ring Y 200 is detached in the radial direction without separating the pipes Y 1 a and Y 1 b from each other similarly to the second embodiment.

Needless to say, the positioning ring Y 200 according to the second or third embodiment can be used as the constituent component of the flange joint Y 300 according to the fourth embodiment.

Additionally, a fluid supply device can be configured using the flange joint Y 300 according to the fourth embodiment. For example, the fluid supply device is configured to include gas supply lines YL 1 that are three longitudinal fluid lines provided in parallel, and one horizontal fluid line that is provided among these gas supply lines YL 1 and that is a cleaning gas supply line YL 2 , in this embodiment, supplying cleaning gas to the respective gas supply lines YL 1 .

Each of the longitudinal fluid lines YL 1 includes a fluid device such as a mass flow controller YX 11 or the like and is configured to function as a gas supply line. The horizontal fluid line YL 2 is configured to function as the cleaning gas supply line. While it is described herein that the flange joint Y 300 is used for each of all pipe connections, the present invention is not limited to this example. It suffices to use the flange joint Y 300 for at least one pipe connection.

In FIG. 11 , reference symbol YL 1 denotes the gas supply line, YL 2 denotes the cleaning gas supply line, YX 11 denotes the mass flow controller, YX 12 and YX 13 denote valves or pressure sensors, Y 300 denotes the flange joint, and YX 4 and YX 4 ′ denote piping.

The present invention is not limited to the fourth embodiment. For example, while notches are shown to extend axially in this embodiment, the notches can be configured to extend aslant. While it is shown that a central angle of each of the notches is smaller than 180 degrees and a holder has a partially cylindrical C-shape, the holder can be configured to have a helical shape such as a spring.

Alternatively, the holder can be formed out of a material that is not substantially elastically deformed. In this alternative, the holder needs to be plastically deformed if the positioning ring is detached radially.

The residual portion can be formed into a shape, out of a material or the like that enables breaking more easily than the other portions. In this alternative, the residual portion can be broken if the positioning ring is to be detached radially without separating the pipes.

In another alternative, the residual portion can be configured to enlarge at the time of attachment or detachment by rotatably coupling one of roots of the residual portion to the holder and making the other root thereof detachable.

By so configuring, the positioning ring can be detached radially without separating the pipes. Moreover, it suffices that a width of the residual portion is equal to or smaller than that of the holder.

As shown in FIG. 10 , the gasket can be configured to be integrally attached between one end and the other end of the positioning ring and to be attached to the residual portion or the like formed similarly to the third embodiment. In sum, it suffices that parts of the holder divided according to a position of the gasket have widths that enable the holder to hold the paired pipes while coinciding the central axes of the pipes with each other.

In the fourth embodiment, if the positioning ring is to be attached from the radial direction, it often happens that the attachment operation is difficult to carry out after the gasket falls off from between the pipes during the attachment operation. However, the positioning ring is configured to integrally attach the gasket to the positioning ring, there is no need to hold the gasket so as not to fall off from the positioning ring. Therefore, similarly to the second embodiment, the positioning ring can be easily attached or detached from either the radial direction or the axial direction without separating or contacting the pipes. Moreover, the positioning ring and the gasket can be attached or detached only by a step of attaching or detaching the positioning ring.

Furthermore, an outer circumferential surface of the gasket is preferably not bonded at a certain distance from at least circumferentially one end of an inner circumferential surface of the holder since the gasket can be easily elastically deformed so as to enlarge the notches.

A fifth embodiment of the present invention will be described with reference to the drawings.

<Fifth Embodiment>

An inclined ring Z 200 is a constituent component of a flange joint Z 300 and intended to make it possible to use the inclined-surface flange joint for each of existing flanges Z 2 a and Z 2 b without inclined surfaces. This flange joint Z 300 connects pipes Z 1 a and Z 1 b by coupling the flanges Z 2 a and Z 2 b provided on ends of the respective pipes Z 1 a and Z 1 b . The flange joint 300 includes a gasket Z 7 , the inclined ring Z 200 , and a coupling ring Z 100 . The pipes Z 1 a and Z 1 b will first be described.

As shown in FIG. 14 and the like, the pipes Z 1 a and Z 1 b include pipe main bodies Z 11 a and Z 11 b , and disk flanges Z 2 a and Z 2 b provided on ends of the pipe main bodies Z 11 a and Z 11 b , respectively, and are coupled to each other by opposing tip end surfaces of the flanges Z 2 a and Z 2 b to each other. The flanges Z 2 a and Z 2 b have closed annular protrusions Z 5 a and Z 5 b provided on tip end surfaces (hereinafter, also “opposing surfaces”) of the flanges Z 2 a and Z 2 b , and have rear surfaces Z 3 a and Z 3 b , respectively perpendicular to the pipe main bodies Z 11 a and Z 11 b . Furthermore, stepped portions Z 4 a and Z 4 b are provided on outer circumferential surfaces of the tip end portions of the flanges Z 2 a and Z 2 b , respectively.

If the pipes Z 1 a and Z 1 b are coupled to each other, the gasket Z 7 in the form of an equal-thickness annular plate is sandwiched between the opposing surfaces of the flanges Z 2 a and Z 2 b . At this time, the positioning ring Z 8 is externally fitted into the stepped portions Z 4 a and Z 4 b of the flanges Z 2 a and Z 2 b without backlash. Furthermore, the coupling ring Z 100 is externally fitted into the opposing flanges Z 2 a and Z 2 b to fasten and couple the opposing flanges Z 2 a and Z 2 b to each other. The respective constituent elements will be described in detail.

The gasket Z 7 has an inside diameter identical to those of the pipes Z 1 a and Z 1 b and an outside diameter identical to those of the stepped portions Z 4 a and Z 4 b , and ensures airtightness by causing the protrusions Z 5 a and Z 5 b to enter into the gasket Z 7 .

The positioning ring Z 8 is a cylindrical member having an inside diameter identical to the outside diameters of the stepped portions Z 4 a and Z 4 b and intended to precisely make central axes CL of the pipes Z 1 a and Z 1 b coincident with each other.

As shown in FIG. 15 , the coupling ring Z 100 includes a plurality of (three in this embodiment) unit members Z 50 a to Z 50 c configured so that adjacent unit members are coupled to be rotatable, and a fastener Z 52 coupling the unit members Z 50 a and Z 50 c on both ends.

As shown in FIG. 15 and the like, the unit members Z 50 a to Z 50 c are generally in the shape obtained by dividing an annular circle into three segments when viewed from an axial direction. On an inner circumferential surface of each of the unit members Z 50 a to Z 50 c , a concave groove Z 51 having such a width as to be able to be externally fitted into outer circumferences of the paired opposing flanges Z 2 a and Z 2 b is provided to extend circumferentially. An inclined sidewall Z 51 a is formed on a side surface of this concave groove Z 51 .

As shown in FIG. 15 , the fastener Z 52 includes, for example, a bolt member Z 52 a having a proximal end attached to the unit member Z 50 c and a nut member Z 52 b . The fastener Z 52 can couple the unit members Z 50 a and Z 50 c on the both ends by fitting a distal end portion of the bolt member Z 52 a into a notch Z 54 of the unit member Z 50 a and mating the nut member Z 52 b with the unit member Z 50 a , and can expand or reduce an inner circumferential diameter of the coupling ring Z 100 .

The inclined ring Z 200 is intended to make it possible to use the inclined-surface flange joint for each of the existing flanges Z 2 a and Z 2 b without inclined surfaces. The inclined ring Z 200 includes a base surface Z 202 , an inner circumferential surface Z 203 , and an inclined surface Z 201 as shown in FIGS. 12 , 13 , and the like.

The base surface Z 202 is in the form of a circular ring plate, and has inside and outside diameters identical to inside and outside diameters of each of the rear surfaces Z 3 a and Z 3 b of the flanges Z 2 a and Z 2 b , respectively.

The inner circumferential surface Z 203 is in the form of a cylinder upright from the inside diameter of the base surface Z 202 .

The inclined surface Z 201 is made wider outward from a tip end of the inner circumferential surface Z 203 toward each of the flanges Z 2 a and Z 2 b when the inclined ring Z 200 is attached to each of rear surfaces Z 3 a and Z 2 b of the flanges Z 2 a and Z 2 b , and is in the form corresponding to that of the inclined sidewall Z 51 a of the coupling ring Z 100 . In this embodiment, the inclined surface Z 201 has an inclination angle corresponding to that of the inclined sidewall Z 51 a.

A method of coupling the pipes Z 1 a and Z 1 b in series and separating the pipes Z 1 a and Z 1 b using the inclined ring Z 200 according to this embodiment will next be described.

First, two inclined rings Z 200 are fitted into the pipes Z 1 a and Z 1 b so that the base surfaces Z 202 are closely attached onto the rear surfaces Z 3 a and Z 3 b of the flanges Z 2 a and Z 2 b , respectively. Next, one end portion of the positioning ring Z 8 is externally fitted into the stepped portion Z 4 a of one pipe Z 1 a , and the gasket Z 7 and the other stepped portion Z 4 b are sequentially fitted into the other end portion of the positioning ring Z 8 . It is thereby possible to precisely coincide central axes of the pipes Z 1 a and Z 1 b and the gasket Z 7 .

The concave groove Z 51 of the coupling ring Z 100 in an open state in which the both ends are not coupled is externally fitted into each of outer circumferences of the opposing flanges Z 2 a and Z 2 b . If the fastener Z 52 is fastened to make the inner circumferential diameter of the coupling ring Z 100 smaller, the inclined sidewall Z 51 a formed on the side surface of the concave groove Z 51 radially presses each of the inclined surfaces Z 201 of the inclined rings Z 200 as shown in FIG. 15 . Axial components of force generated at that time press the flanges Z 2 a and Z 2 b against each other, the protrusions Z 5 a and Z 5 b enter into both surfaces of the gasket Z 7 , and the pipes Z 1 a and Z 1 b are connected to each other with airtightness kept sufficiently.

With such a configuration, the coupling ring Z 100 can be used even for the flanges Z 2 a and Z 2 b without inclined surfaces only by attaching the inclined rings Z 200 quite simple in form to rear sides of the opposing surfaces of the respective flanges Z 2 a and Z 2 b . Furthermore, since the inclined rings Z 200 have the inner circumferential surfaces Z 203 closely attached onto outer circumferential surfaces of the respective pipe main bodies Z 11 a and Z 11 b , it is possible to further ensure pressure-bonding the flanges Z 2 a and Z 2 b to each other.

Additionally, a fluid supply device can be configured using the flange joint Z 300 according to this embodiment. For example, the fluid supply device is configured to include gas supply lines ZL 1 that are three longitudinal fluid lines provided in parallel, and one horizontal fluid line that is provided among these gas supply lines ZL 1 and that is a cleaning gas supply line ZL 2 , in this embodiment, supplying cleaning gas to the respective gas supply lines ZL 1 .

Each of the longitudinal fluid lines ZL 1 includes a fluid device such as a mass flow controller ZX 11 or the like and is configured to function as a gas supply line. The horizontal fluid line ZL 2 is configured to function as the cleaning gas supply line. While it is described herein that the flange joint Z 300 is used for each of all pipe connections, the present invention is not limited to this example. It suffices to use the flange joint Z 300 for at least one pipe connection.

In FIG. 16 , reference symbol ZL 1 denotes the gas supply line, ZL 2 denotes the cleaning gas supply line, ZX 11 denotes the mass flow controller, ZX 12 and ZX 13 denote valves or pressure sensors, Z 300 denotes the flange joint, and ZX 4 and ZX 4 ′ denote piping.

The present invention is not limited to this embodiment. For example, as shown in FIG. 17 , the inclined rings can be attached from the radial direction if the inclined rings are formed out of a plurality of divided pieces in the form obtained by radially dividing a circular ring. Due to this, the inclined rings can be easily attached to the pipes to which it is difficult to attach the inclined rings from the axial direction for such a reason that the pipes are connected vertically and horizontally or that each of the pipes includes members on both ends.

Alternatively, a retracted surface in the form of a convex can be formed on the base surface so that the base surface is not closely attached to a protrusion such as the fastener formed on the rear surface of each flange. By so configuring, the same type of inclined rings can be used for a plurality of flanges or the like different in the shape of a partial part of the rear surface.

Various changes and modifications can be made of the present invention without departure of the spirit of the present invention.

1 a , 1 b . . . Pipe

2 a , 2 b . . . Flange

3 a , 3 b . . . Inclined surface formed on rear surface of flange

4 a , 4 b . . . Stepped portion

5 a , 5 b . . . Protrusion

7 . . . Gasket

8 . . . Positioning ring

11 a , 11 b . . . Pipe main body

50 a , 50 b , 50 c . . . Unit member

51 . . . Concave groove

51 a . . . Inclined surface formed on side surface of concave groove

52 . . . Fastener

52 a . . . Bolt member

52 b . . . Nut member

53 a , 53 b . . . Shaft

54 . . . Notch

60 a , 60 b . . . Stopper member

100 . . . Coupling ring

300 . . . Flange joint

Y 1 a , Y 1 b . . . Pipe

Y 2 a , Y 2 b . . . Flange

Y 3 a , Y 3 b . . . Inclined surface formed on rear surface of flange

Y 4 a , Y 4 b . . . Stepped portion

Y 5 a , Y 5 b . . . Protrusion

Y 7 . . . Gasket

Y 11 a , Y 11 b . . . Pipe main body

Y 50 a , Y 50 b , Y 50 c . . . Unit member

Y 51 . . . Concave groove

Y 51 a . . . Inclined surface formed on rear surface of concave groove

Y 52 . . . Fastener

Y 52 a . . . Bolt member

Y 52 b . . . Nut member

Y 53 a , Y 53 b . . . Shaft

Y 54 . . . Bolt inlet

Y 100 . . . Coupling ring

Y 200 . . . Positioning ring

Y 201 . . . Holder

Y 201 a . . . Cut

Y 202 a , Y 202 b . . . Notch

Y 203 . . . Residual portion

Y 300 . . . Flange joint

Z 1 a , Z 1 b . . . Pipe

Z 2 a , Z 2 b . . . Flange

Z 3 a , Z 3 b . . . Rear surface

Z 4 a , Z 4 b . . . Stepped portion

Z 5 a , Z 5 b . . . Protrusion

Z 7 . . . Gasket

Z 8 . . . Positioning ring

Z 11 a , Z 11 b . . . Pipe main body

Z 50 a , Z 50 b , Z 50 c . . . Unit member

Z 51 . . . Concave groove

Z 51 a . . . Inclined sidewall

Z 52 . . . Fastener

Z 52 a . . . Bolt member

Z 52 b . . . Nut member

Z 53 a , Z 53 b . . . Shaft

Z 54 . . . Notch

Z 100 . . . Coupling ring

Z 200 . . . Inclined ring

Z 201 . . . Inclined surface

Z 202 . . . Base surface

Z 203 Inner circumferential surface