Nitride semiconductor light emitting device

This application claims the priority of Korean Patent Application No. 2008-0043638 filed on May 9, 2008, in the Korean Intellectual Property Office, the disclosure of which is incorporated herein by reference.

1. Field of the Invention

The present invention relates to nitride semiconductor light emitting devices, and more particularly, to a nitride semiconductor light emitting device that improves light emitting efficiency.

2. Description of the Related Art

Recently, group III nitride semiconductors (simply referred to as “nitride semiconductors”) are widely used to manufacture light emitting devices that generate ultraviolet (UV) light, blue light, and green light in various apparatuses such as LCD backlights, camera flashes, and lighting equipment. In general, a nitride semiconductor has a composition represented by equation: Al x Ga y In 1-x-y N (0≦x≦1, 0≦y≦1, and 0≦x+y≦1). In order to manufacture nitride semiconductor light emitting devices (including LEDs and the like), an n-type nitride semiconductor layer, an active layer, and a p-type nitride semiconductor layer are sequentially grown on a growth substrate, such as a sapphire substrate, so as to form a light emitting structure. Here, the active layer may include quantum well layers and quantum barrier layers.

FIG. 1 is an energy band diagram of a nitride semiconductor light emitting device according to the related art. Referring to FIG. 1 , a nitride semiconductor light emitting device includes an active layer 12 that has InGaN quantum well layers 12 a and GaN quantum barrier layers 12 b between an n-type nitride semiconductor layer 11 and a p-type nitride semiconductor layer 13 . Here, light is emitted as electrons supplied from the n-type nitride semiconductor layer 11 and holes supplied from the p-type nitride semiconductor 13 are recombined in the active layer 12 . In order to improve the recombination of the electrons and the holes in the active layer, there needs to be considerable overlap between a wave function of the electrons and a wave function of the holes. However, a piezoelectric field occurs within the quantum well layers due to a lattice constant mismatch at the interface between the InGaN quantum well layers 12 a and the GaN quantum barrier layers 12 b . As a result, the overlap between the wave function of the electrons and the wave function of the holes is reduced because the wave function of the electrons and the wave function of the holes become distanced. Therefore, a chronic problem, that is, a decrease in recombination efficiency occurs in the active layer of the nitride semiconductor light emitting device.

In order to solve this, a technique that uses an AlInGaN quantum barrier layer having a similar lattice constant with the InGaN quantum well layers 12 a and a similar energy band gap with the quantum barrier layers has been developed. However, when the AlInGaN quantum barrier layer is grown, optimal penetration of Al atoms may be allowed at a temperature of 800° C. or more and a pressure of 199 Torr, and optimal penetration of In atoms may be allowed at a temperature of less than 800° C. and a pressure of approximately 300 Torr. That is, since processing conditions for the optimal penetration of the Al atoms and the In atoms are different from each other, it is difficult to grow an AlInGaN quantum barrier layer having excellent crystalline quality.

An aspect of the present invention provides a nitride semiconductor light emitting device that reduces lattice constant mismatch between a quantum well layer formed of InGaN and a quantum barrier layer and has a high energy band gap by alternating a plurality of AlGaN layers and a plurality of InGaN layers with each other, starting and ending with the InGaN layer, or by alternating GaN layer and InGaN layers with each other, starting and ending with the InGaN layer, so as to form a quantum barrier layer.

An aspect of the present invention also provides a nitride semiconductor light emitting device that can reduce lattice constant mismatch between an InGaN layer and AlGaN layer by alternating a plurality of InGaN layers and AlGaN layers with each other, starting and ending with the InGaN layer, and stacking a GaN layer between the InGaN layer and the AlGaN layer.

According to an aspect of the present invention, there is provided a nitride semiconductor light emitting device including: an n-type nitride semiconductor layer provided on a substrate; an active layer provided on the n-type nitride semiconductor layer, and including quantum barrier layers and quantum well layers; and a p-type nitride semiconductor layer provided on the active layer, wherein each of the quantum barrier layers includes a plurality of In x Ga (1-x) N layers (0<x<1) and at least one Al y Ga (1-y) N layer (0≦y<1), and the Al y Ga (1-y) N layer is stacked between the In x Ga (1-x) N layers.

The plurality of quantum well layers may be formed of In z Ga (1-z) N (0<x<z<1).

Each of the In x Ga (1-x) N layer and Al y Ga (1-y) N layer forming the quantum barrier layer may have a thickness of 0.5 to 10 nm.

The plurality of In x Ga (1-x) N layers may have an energy band gap larger than the quantum well layer and smaller than the at least Al y Ga (1-y) N layer.

The quantum barrier layer may include a super lattice structure having the Al y Ga (1-y) N layer stacked between the In x Ga (1-x) N layers, and having at least two stacks of In x Ga (1-x) N layers and Al y Ga (1-y) N layers alternating with each other, starting and ending with the In x Ga (1-x) N layer.

Each of the In x Ga (1-x) N layers and the Al y Ga (1-y) N layers forming the quantum barrier layer may have a thickness of 0.3 to 3 nm.

The quantum barrier layer may further include a GaN layer provided between the In x Ga (1-x) N layer and Al y Ga (1-y) N layer.

The plurality of In x Ga (1-x) N layers may have an energy band gap larger than the quantum well layer and smaller than the GaN layer, and the GaN layer may have a smaller energy band gap than the Al y Ga (1-y) N layer.

Each of the In x Ga (1-x) N layer, the Al y Ga (1-y) N layer, and the GaN layer forming the quantum barrier layer may have a thickness of 0.5 to 10 nm.

The quantum barrier layer may have a thickness of 2 to 15 nm.

The quantum well layer may have a thickness of 1 to 15 nm.

The above and other aspects, features and other advantages of the present invention will be more clearly understood from the following detailed description taken in conjunction with the accompanying drawings, in which:

FIG. 1 is a graph illustrating an energy band diagram of a nitride semiconductor light emitting device according to the related art;

FIG. 2 is a view illustrating a nitride semiconductor light emitting device according to an exemplary embodiment of the invention;

FIG. 3 is a view illustrating a nitride semiconductor light emitting device according to another exemplary embodiment of the invention;

FIG. 4 is a view illustrating a nitride semiconductor light emitting device according to still another exemplary embodiment of the invention;

FIG. 5 is an energy band diagram of the nitride semiconductor light emitting device according to the embodiment of the invention, as shown in FIG. 2 ;

FIG. 6 is an energy band diagram of the nitride semiconductor light emitting device according to the embodiment of the invention, as shown in FIG. 3 ; and

FIG. 7 is an energy band diagram of the nitride semiconductor light emitting device according to the embodiment of the invention, as shown in FIG. 4 .

Exemplary embodiments of the present invention will now be described in detail with reference to the accompanying drawings.

FIG. 2 is a view illustrating a nitride semiconductor light emitting device according to an exemplary embodiment of the invention. Referring to FIG. 2 , a nitride semiconductor light emitting device includes a buffer layer 120 formed on a substrate 110 , an n-type nitride semiconductor layer 130 formed on the buffer layer 120 , an active layer 140 formed on the n-type nitride semiconductor layer 130 , a p-type nitride semiconductor layer 150 formed on the active layer 140 , an n-electrode 160 formed on the n-type nitride semiconductor layer 130 having a mesa structure, and a p-electrode 170 formed on the p-type nitride semiconductor layer 150 .

In general, a sapphire substrate is used as the substrate 110 , the buffer layer 120 may be formed of undoped GaN, AlN or SiN in order to reduce a lattice constant mismatch between the sapphire substrate and the n-type nitride semiconductor layer 130 .

The n-type nitride semiconductor layer 130 may be formed of GaN doped with an n-type impurity, and the p-type nitride semiconductor layer 150 may be formed of GaN doped with a p-type impurity. The active layer 140 having a multiple quantum well structure is located between the n-type nitride semiconductor layer 130 and the p-type nitride semiconductor layer 150 . Specifically, referring to an enlarged view illustrating a part of the active layer 140 , the active layer 140 includes a plurality of quantum well layers 141 , and a plurality of quantum barrier layers 142 formed between the plurality of quantum well layers 141 .

The plurality of quantum well layers 141 may be formed of In z Ga (1-z) N (0<z<1), and may have a thickness of approximately 1 to 15M. Further, each of the plurality of the quantum barrier layer 142 includes a plurality of In x Ga (1-x) N layers (0<x<1) 142 a and one Al y Ga (1-y) N layer (0≦y<1) 142 b . Here, the Al y Ga (1-y) N layer 142 b is formed between the In x Ga (1-x) N layers 142 a . The active layer 140 has a multilayer structure of In x Ga (1-x) N layer/Al y Ga (1-y) N layer/In x Ga (1-x) N layer.

The In x Ga (1-x) N layers 142 a and the Al y Ga (1-y) N layer 142 b that form the quantum barrier layer 142 may be separately grown by individual processes. Specifically, the In x Ga (1-x) N layer 142 a may be grown by such a method that In atoms penetrate into a GaN layer at a temperature of 800° C. or less and a pressure of approximately 300 Torr. Further, the Al y Ga (1-y) N layer 142 b may be grown by such a method that Al atoms penetrate into a GaN layer at a temperature of 800° C. or more and a pressure of 100 Torr. The In x Ga (1-x) N layer 142 a and the Al y Ga (1-y) N layer 142 b are separately grown by using the individual processes, thereby forming the quantum barrier layer 142 , shown in FIG. 2 . Each of the In x Ga (1-x) N layers 142 a and the Al y Ga (1-y) N layer 142 b that form the quantum barrier layer 142 may have a thickness of approximately 0.5 to 10M.

Further, the In x Ga (1-x) N layer 142 a of the quantum barrier layer 142 is formed of the same material as In z Ga (1-z) N (0<z<1) that forms the quantum well layer 141 , so that the lattice constant mismatch at the interface between the quantum well layer 141 and the quantum barrier layer 142 can be significantly reduced. In order to modulate a energy band gap of the In x Ga (1-x) N layers 142 a of the quantum barrier layer 142 , that is, in order to obtain an energy band gap that is larger than that of the quantum well layer 141 , an In composition x In of the In x Ga (1-x) N layer 142 a may be less than an In composition (z) of the In z Ga (1-z) N (0<z<1). That is, the relationship of the In composition x between the In x Ga (1-x) N layer 142 a and the In z Ga (1-z) N (0<z<1) may be 0<x<z<1.

The quantum barrier layer 142 , shown in FIG. 2 , reduces the lattice constant mismatch between the quantum barrier layer 142 and the quantum well layer 141 by the In x Ga (1-x) N layer 142 a , thereby reducing generation of a piezoelectric field. Therefore, the overlap between wave functions of electrons and holes is increased to thereby increase light-emitting efficiency. Further, the energy band gap is increased by the Al y Ga (1-y) N layer 142 b that forms the quantum barrier layer 142 to thereby effectively confine electrons within the quantum well layer 141 .

FIG. 3 is a view illustrating a nitride semiconductor light emitting device according to another exemplary embodiment of the invention. Referring to FIG. 3 , the nitride semiconductor light emitting device includes a buffer layer 220 formed on a substrate 210 , an n-type nitride semiconductor layer 230 formed on the buffer layer 220 , an active layer 240 formed on the n-type nitride semiconductor layer 230 , a p-type nitride semiconductor layer 250 formed on the active layer 240 , an n-electrode 260 formed on the n-type nitride semiconductor layer 230 having a mesa structure, and a p-electrode 270 formed on the p-type nitride semiconductor layer 250 .

The active layer 240 having a multiple quantum well structure is located between the n-type nitride semiconductor layer 230 and the p-type nitride semiconductor layer 250 . Specifically, referring to an enlarged view illustrating a part of the active layer 240 , the active layer 240 includes a plurality of quantum well layers 241 , and a plurality of quantum barrier layer 242 formed between the plurality of quantum well layers 241 .

The plurality of quantum well layers 241 may be formed of In z Ga (1-z) N (0<z<1), and have a thickness of approximately 1 to 15 nm. Further, each of the plurality of quantum barrier layers 242 includes a plurality of In x Ga (1-x) N layers (0<x<1) 242 a and a plurality of Al y Ga (1-y) N layers (0≦y<1) 242 b . In this case, the Al y Ga (1-y) N layers 242 b are formed between the In x Ga (1-x) N layers 242 a . The quantum barrier layer 242 has a structure in which the In x Ga (1-x) N layers 242 a and the Al y Ga (1-y) N layers 242 b alternate with each other. Here, as shown in the enlarged view of the active layer 240 in FIG. 3 , the In x Ga (1-x) N and Al y Ga (1-y) N layers 242 a and 242 b may be arranged in alternate layers, starting and ending with the In x Ga (1-x) N layers 242 a in one quantum barrier layer 242 . One quantum barrier layer 242 having this structure has a thickness of approximately 2 to 15 nm.

The In x Ga (1-x) N layers 242 a and the Al y Ga (1-y) N layers 242 b that form the quantum barrier layer 242 may be separately grown by individual processes. In this case, the In x Ga (1-x) N layer 242 a and the Al y Ga (1-y) N layer 242 b may be grown by using the same method of growing the In x Ga (1-x) N layer 142 a and Al y Ga (1-y) N layer 142 b as shown in FIG. 2 . In this case, each of the In x Ga (1-x) N layers 242 a and the Al y Ga (1-y) N layers 242 b that form the quantum barrier layer 242 may have a thickness of approximately 0.3 to 3 nm, that is, each layer may have a super lattice structure.

Further, in order to modulate the energy band gap, the In composition x of the In x Ga (1-x) N layer 242 a of the quantum barrier layer 242 is reduced less than the In composition z of In z Ga (1-z) N (0<z<1).

The quantum barrier layer 242 , shown in FIG. 3 , reduces the lattice constant mismatch between the quantum well layer 241 and the quantum barrier layer 242 by the In x Ga (1-x) N layer 242 a , thereby reducing generation of a piezoelectric field. This causes an increase in overlap between wave functions of electrons and holes, thereby increasing the light emitting efficiency. Further, the energy band gap is increased by the Al y Ga (1-y) N layer 242 b that forms the quantum barrier layer 242 , so that the electrons can be effectively confined within the quantum well layer 241 . Since the In x Ga (1-x) N layer 242 a and the Al y Ga (1-y) N layer 242 b that are separately grown by using the individual processes super lattice structures, and can substantially serve as an Al y In x GaN (1-x-y) layer.

By controlling an Al composition y of each of the Al y Ga (1-y) N layers 141 b and 242 b of the quantum barrier layers 142 and 242 of the nitride semiconductor light emitting device, shown in FIGS. 2 and 3 , a quantum barrier layer can be formed in which a GaN layer is stacked between the plurality of In x Ga (1-x) N layers 142 a and the plurality of In x Ga (1-x) N layers 242 a . Specifically, when the Al composition y is 0, the Al y Ga (1-y) N layers 141 b and 242 b can be formed as GaN layers. Here, the In x Ga (1-x) N layers 142 a and 242 a and the GaN layers may have super lattice structures. Therefore, the quantum barrier layers 142 and 242 reduce the lattice constant mismatches between the quantum barrier layers 142 and 242 and the quantum well layers 141 and 241 , respectively, thereby reducing generation of the piezoelectric field.

FIG. 4 is a view illustrating a nitride semiconductor light emitting device according to still another exemplary embodiment. Referring to FIG. 4 , a nitride semiconductor light emitting device 300 includes a buffer layer 320 formed on a substrate 310 , an n-type nitride semiconductor layer 330 formed on the buffer layer 320 , an active layer 340 formed on the n-type nitride semiconductor layer 330 , a p-type nitride semiconductor layer 350 formed on the active layer 340 , an n-electrode 360 formed on the n-type nitride semiconductor layer 330 having a mesa structure, and a p-electrode 370 formed on the p-type nitride semiconductor layer 350 .

The active layer 340 having a multi-well structure is located between the n-type nitride semiconductor layer 330 and the p-type nitride semiconductor layer 350 . Specifically, referring to an enlarged view illustrating a part of the active layer 340 , the active layer 340 includes a plurality of quantum well layers 341 , and a plurality of quantum well layers 342 formed between the plurality of quantum well layer 341 . Here, the quantum well layers 341 and the quantum well layers 342 alternate with each other. In this case, the quantum well layer 341 may be formed of In z Ga (1-z) N (0<z<1), and have a thickness of approximately 1 to 15 nm.

Each of the quantum barrier layers 342 includes a plurality of In x Ga (1-x) N layers (0<x<1) 342 a , a plurality of GaN layers 342 b , and at least one Al y Ga (1-y) N layer (0≦y<1) 342 c . Here, the Al y Ga (1-y) N layer 342 c is formed between the plurality of In x Ga (1-x) N layers 342 a , and the GaN layer 342 b is formed between the In x Ga (1-x) N layer 342 a and the Al y Ga (1-y) N layer 342 c . The quantum barrier layer 342 has a multilayer structure of the In x Ga (1-x) N layer/GaN layer/Al y Ga (1-y) N layer/GaN layer/In x Ga (1-x) N layer that includes at least five layers. One quantum barrier layer 342 has a thickness of approximately 2 to 15 nm.

The In x Ga (1-x) N layer 342 a , the GaN layer 342 b , and the Al y Ga (1-y) N layer 342 c that form the quantum barrier layer 342 are separately grown by individual processes, so that each of the layers can ensure crystalline quality. In this case, the In x Ga (1-x) N layer 342 a and the Al y Ga (1-y) N layer 342 c may be grown by the same method of forming the In x Ga (1-x) N layer 142 a and the Al y Ga (1-y) N layer 142 b , shown in FIG. 2 . The GaN layer 342 b may be grown by metal organic chemical vapor deposition (MOCVD). Here, each of the In x Ga (1-x) N layer 342 a , the GaN layer 342 b , and the Al y Ga (1-y) N layer 342 c may have a thickness of approximately 0.5 to 10 nm.

Further, the In x Ga (1-x) N layer 342 a and the quantum well layer 341 of the quantum barrier layer 342 are formed of the same material to thereby significantly reduce the lattice constant mismatch at the interface between the quantum well layer 341 and the quantum barrier layer 342 . In this case, the In composition x of the In x Ga (1-x) N layer 342 a is reduced less than the In composition z of the In z Ga (1-z) N (0<z<1) to thereby modulate the energy band gap.

The quantum barrier layer 342 , shown in FIG. 4 , reduces the lattice constant mismatch between the quantum well layer 341 and the quantum barrier layer 342 by the In x Ga (1-x) N layer 342 a , thereby reducing generation of a piezoelectric field. Therefore, an increase in overlap between wave functions of electrons and holes causes an increase in light-emitting efficiency. Further, the energy band gap is increased by the Al y Ga (1-y) N layer 342 c that forms the quantum barrier layer 342 , so that the electrons can be effectively confined within the quantum well layers. Further, the lattice constant mismatch between the In x Ga (1-x) N layer 342 a and the Al y Ga (1-y) N layer 342 c is reduced by the GaN layer 342 b that forms the quantum barrier layer 342 to thereby increase the light emitting efficiency.

Referring to FIGS. 2 to 4 , the plurality of quantum well barrier layers have multilayer structures according to the embodiments of the invention. However, quantum barrier layers that are only adjacent to the p-type nitride semiconductor layer may only have the above-described multilayer structures.

Further, in FIGS. 2 to 4 , the nitride semiconductor light emitting device has a horizontal structure in which each of the n-electrodes 160 , 260 , and 360 and each of the p-electrodes 170 , 270 , and 370 are disposed on the same surface. However, the invention can be applied to a nitride semiconductor light emitting device having a vertical structure.

FIG. 5 is an energy band diagram illustrating the nitride semiconductor light emitting device according to the embodiment of the invention, shown in FIG. 2 . That is, in FIG. 5 , an energy band diagram of the nitride semiconductor light emitting device, shown in FIG. 2 , is shown.

Referring to FIG. 5 , the active layer 140 located between the n-type and p-type nitride semiconductor layers 130 and 150 includes the plurality of quantum well layers 141 and the plurality of quantum barrier layers 142 . Further, the plurality of quantum well layers 141 are formed of In z Ga (1-z) N (0<z<1). Each of the plurality of quantum barrier layers 142 includes In x Ga (1-x) N layers 142 a and the Al y Ga (1-y) N layer 142 b . Here, the In x Ga (1-x) N layers 142 a have a larger energy band gap than the quantum well layer 141 in order to reduce the lattice constant mismatch between the quantum well layer 141 and the In x Ga (1-x) N layers 142 a , and serve as the quantum barrier layer. The In x Ga (1-x) N layers 142 a can have a larger energy band gap by reducing the In composition x of the In x Ga (1-x) N layers 142 a less than the In composition z of the quantum well layer 141 . Since the Al y Ga (1-y) N layer 142 b has a larger energy band gap than the In x Ga (1-x) N layers 142 a , the electrons can be effectively confined within the quantum well layer 141 . As a result, a nitride semiconductor light emitting device having the improved light emitting efficiency can be provided.

FIG. 6 is an energy band diagram illustrating the nitride semiconductor light emitting device according to the embodiment of the invention, shown in FIG. 3 . In FIG. 6 , an energy band diagram of the nitride semiconductor light emitting device, shown in FIG. 3 , is shown.

Referring to FIG. 6 , the active layer 240 includes the plurality of quantum well layers 241 and the plurality of quantum barrier layer 242 . Further, the plurality of quantum well layers 241 are formed of In z Ga (1-z) N (0<z<1). Each the plurality of quantum barrier layer 242 includes In x Ga (1-x) N layers 242 a and Al y Ga (1-y) N layers 242 b.

In this case, the In x Ga (1-x) N layers 242 a reduce the lattice constant mismatch between the quantum well layer 241 and the quantum barrier layer 242 , and have a larger energy band gap than the quantum well layer so as to serve as a quantum barrier layer. Further, the Al y Ga (1-y) N layer 242 b has a larger energy band gap than the In x Ga (1-x) N layers 242 a to thereby effectively confine the electrons within the quantum well layer 241 .

The In x Ga (1-x) N layers 242 a and the Al y Ga (1-y) N layers 242 b alternate with each other to form a super lattice structure, thereby serving as an Al y In x GaN (1-x-y) layer. As described above, the quantum barrier layer 242 can reduce the lattice constant mismatch between the quantum well layer 241 and the quantum barrier layer 242 , and have a high energy band gap.

FIG. 7 is an energy band diagram of the nitride semiconductor light emitting device according to the embodiment of the invention, as shown in FIG. 4 . That is, in FIG. 7 , the energy band diagram of the nitride semiconductor light emitting device, shown in FIG. 4 , is shown.

Referring to FIG. 7 , the active layer 340 is located between the n-type and p-type nitride semiconductor layers 330 and 350 , and the active layer 340 includes the plurality of quantum well layers 341 and the plurality of quantum barrier layers 342 . Here, each of the plurality of quantum barrier layers 342 includes the In x Ga (1-x) N layers 342 a , the GaN layers 342 b , and the at least one Al y Ga (1-y) N layer 342 c . Here, the In x Ga (1-x) N layers 342 a have a larger energy band gap than the quantum well layer in order to reduce the lattice constant mismatch between the quantum well layer 341 and the quantum barrier layer 342 , and serve as the quantum barrier layer.

Further, the GaN layers 342 b reduce lattice the constant mismatch between the In x Ga (1-x) N layer 342 a and the Al y Ga (1-y) N layer 342 c , and have an energy band gap larger than the In x Ga (1-x) N layers 342 a and lower than the Al y Ga (1-y) N layer 342 c.

Further, the Al y Ga (1-y) N layer 342 c has a larger energy band gap than the GaN layers 342 b to effectively confine electrons within the quantum well layer 341 . As a result, the nitride semiconductor light emitting device having improved light emitting efficiency can be provided.

In the energy band diagrams, shown in FIGS. 5 to 7 , the same kind of layer, that is, the In x Ga (1-x) N layers 142 a , 242 a , and 342 a and the Al y Ga (1-y) N layers 142 b , 242 b , and 342 c , or the GaN layers 342 b have the same energy band gap. However, the individual layers may have different energy band gaps from each other. For example, the In composition x of the each of the plurality of In x Ga (1-x) N layers 242 a , shown in FIG. 3 , may be adjusted so that the In x Ga (1-x) N layers 242 a can have different energy band gaps. Alternatively, the Al composition y of each of the plurality of Al y Ga (1-y) N layers 242 b , shown in FIG. 3 , may be adjusted so that the Al y Ga (1-y) N layers 242 b can have different energy band gaps.

As set forth above, according to exemplary embodiments of the invention, lattice constant mismatch between a quantum well layer formed of InGaN and a quantum barrier layer can be reduced by stacking AlGaN layers between a plurality of InGaN layers to form a quantum barrier layer or stacking GaN layers between the plurality of InGaN layers. The lattice constant mismatch at the interface between the quantum well layer and the quantum barrier layer can be reduced to thereby increase light emitting efficiency of a nitride semiconductor light emitting device.

Further, the InGaN layers and the AlGaN layers that form the quantum barrier layer are separately grown by individual processes to form a super lattice structure, such that the quantum barrier layer can serve as an AlInGaN quantum barrier layer.

Further, since the quantum barrier layer has a high energy band gap by the AlGaN layers, the quantum barrier can effectively confine electrons within the quantum well layer, thereby increasing the light emitting efficiency.

The plurality of InGaN and AlGaN layers alternate with each other, and the GaN layer is stacked between the InGaN layer and the AlGaN layer, thereby reducing the lattice constant mismatch between the InGaN layer and the AlGaN layer.

While the present invention has been shown and described in connection with the exemplary embodiments, it will be apparent to those skilled in the art that modifications and variations can be made without departing from the spirit and scope of the invention as defined by the appended claims.