Inventor
Martin R. Elliott
Inventor
Round Rock, TX, US
Overview
Patents· 52 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1044%
Y10STechnical subjects covered by former uspc cross-reference art collections [xracs] and digests17%
B65GTransport or storage devices, e.g. conveyors for loading or tipping, shop conveyor systems or pneumatic tube conveyors14%
A01KAnimal husbandry4%
Y10TTechnical subjects covered by former us classification4%
A63BApparatus for physical training, gymnastics, swimming, climbing, or fencing2%
B25JManipulators2%
F24CDomestic stoves or ranges2%
F27BFurnaces, kilns, ovens or retorts in general2%
G01BMeasuring length, thickness or similar linear dimensions2%
PatentTitleYear
10,854,478Load lock fast pump vent202010,815,057Universal gripper for tote and sub-tote transport202010,541,157Load lock fast pump vent20209,623,555'Dual arm robot'20178,689,812'Methods and loadport for purging a substrate carrier'20148,601,975'Methods and loadport apparatus for purging a substrate carrier'20138,074,597'Methods and apparatus for purging a substrate carrier'20117,984,543'Methods for moving a substrate carrier'20117,914,248'Methods and apparatus for repositioning support for a substrate carrier'20117,912,576'Calibration of high speed loader to substrate transport system'20117,857,570'Method and apparatus for supplying substrates to a processing tool'20107,798,309'Stabilizing substrate carriers during overhead transport'20107,792,608'Substrate carrier handler that unloads substrate carriers directly from a moving conveyor'20107,720,558'Methods and apparatus for mapping carrier contents'20107,711,445'Systems and methods for transferring small lot size substrate carriers between processing tools'20107,684,895'Wafer loading station that automatically retracts from a moving conveyor in response to an unscheduled event'20107,673,735'System for transporting substrate carriers'20107,611,318'Overhead transfer flange and support for suspending a substrate carrier'20097,611,319'Methods and apparatus for identifying small lot size substrate carriers'20097,597,183'Kinematic pin with shear member and substrate carrier for use therewith'20097,594,789'Overhead transfer flange and support for suspending a substrate carrier'20097,578,647'Load port configurations for small lot size substrate carriers'20097,552,816'Break-away positioning conveyor mount for accommodating conveyor belt bends'20097,540,371'Break-away positioning conveyor mount for accommodating conveyor belt bends'20097,537,108'Methods and apparatus for transporting substrate carriers'20097,527,141'System for transporting substrate carriers'20097,506,747'Break-away positioning conveyor mount for accommodating conveyor belt bends'20097,506,752'Methods and apparatus for transporting substrate carriers'20097,506,746'System for transporting substrate carriers'20097,503,448'Break-away positioning conveyor mount for accommodating conveyor belt bends'20097,455,172'Break-away positioning conveyor mount for accommodating conveyor belt bends'20087,433,756'Calibration of high speed loader to substrate transport system'20087,409,263'Methods and apparatus for repositioning support for a substrate carrier'20087,367,446'Methods and apparatus for transporting substrate carriers'20087,359,767'Substrate carrier handler that unloads substrate carriers directly from a moving conveyor'20087,346,431'Substrate carrier handler that unloads substrate carriers directly from a moving conveyer'20087,299,831'Substrate carrier having door latching and substrate clamping mechanisms'20077,293,642'Methods and apparatus for transporting substrate carriers'20077,258,520'Methods and apparatus for using substrate carrier movement to actuate substrate carrier door opening/closing'20077,243,003'Substrate carrier handler that unloads substrate carriers directly from a moving conveyor'20077,234,584'System for transporting substrate carriers'20077,230,702'Monitoring of smart pin transition timing'20077,221,993'Systems and methods for transferring small lot size substrate carriers between processing tools'20077,168,553'Dynamically balanced substrate carrier handler'20077,156,221'Break-away positioning conveyor mount for accommodating conveyor belt bends'20077,077,264'Methods and apparatus for transporting substrate carriers'20066,955,197'Substrate carrier having door latching and substrate clamping mechanisms'20056,745,908'Shelf module adapted to store substrate carriers'20046,582,175'Robot for handling semiconductor wafers'20036,573,522'Locator pin integrated with sensor for detecting semiconductor substrate carrier'20036,379,095'Robot for handling semiconductor wafers'20024,604,934'Carriage train precision linear positioning system'1986Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
1986–2020Based in Austin, TX, US· patent location history
2002–2014Patents assigned to APPLIED MATERIALS INC (45)· patent assignee history
2002–2011Based in Round Rock, TX, US· patent location history
2008–2011Based in Pepperall, MA, US· patent location history
2010–2014Based in Pepperell, MA, US· patent location history
2011–2014Patents assigned to ENGLHARDT ERIC (3)· patent assignee history
2011–2014Patents assigned to HUDGENS JEFFREY C (3)· patent assignee history
2013–2017Patents assigned to ELLIOTT MARTIN R (3)· patent assignee history
2017–2020Patents assigned to BROOKS AUTOMATION INC (3)· patent assignee history
2020Based in Bedford, NH, US· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| APPLIED MATERIALS INC | 45 | 2002–2014 |
| BROOKS AUTOMATION INC | 3 | 2017–2020 |
| ELLIOTT MARTIN Rself | 3 | 2013–2017 |
| ENGLHARDT ERIC | 3 | 2011–2014 |
| HUDGENS JEFFREY C | 3 | 2011–2014 |
Locations
| Location | Patents | Span |
|---|---|---|
| Round Rock, Texas, US | 40 | 2002–2011 |
| Pepperell, Massachusetts, US | 5 | 2010–2014 |
| Austin, Texas, US | 4 | 1986–2020 |
| Pepperall, Massachusetts, US | 2 | 2008–2011 |
| Bedford, NH, US | 1 | 2020 |