Inventor
Eita YOKOKURA
Inventor
JP
Overview
Patents· 1 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
B08Bprimary
B08BCleaning in general20%
C23CCoating metallic material20%
H01JElectric discharge tubes or discharge lamps20%
H05HPlasma technique20%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1020%
PatentTitleYear
11,488,813Cleaning method2022Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2022Patents assigned to TOKYO ELECTRON LTD (1)· patent assignee history
2022Based in JP· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| TOKYO ELECTRON LTD | 1 | 2022 |
Locations
| Location | Patents | Span |
|---|---|---|
| JP | 1 | 2022 |