Inventor
COEN HUBERTUS MATHEUS BALTIS
Inventor
NL
Overview
Patents· 8 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices35%
H01LSemiconductor devices22%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1022%
C03BManufacture, shaping, or supplementary processes9%
G02BOptical elements, systems or apparatus9%
B25BTools or bench devices not otherwise provided for, for fastening, connecting, disengaging, or holding4%
PatentTitleYear
12,405,539Substrate support and substrate table202512,321,104Substrate holder for use in a lithographic apparatus202512,306,433Hollow-core photonic crystal fiber based optical component for broadband radiation generation202511,774,671Hollow-core photonic crystal fiber based optical component for broadband radiation generation202311,664,264Lithographic apparatus, method for unloading a substrate and method for loading a substrate202311,579,533Substrate holder, a lithographic apparatus and method of manufacturing devices202311,448,976Substrate holder for use in a lithographic apparatus202211,385,547Extraction body for lithographic apparatus2022Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2022–2025Patents assigned to ASML NETHERLANDS BV (8)· patent assignee history
2022–2025Patents assigned to ASML HOLDING NV (2)· patent assignee history
2022–2025Based in NL· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| ASML NETHERLANDS BV | 8 | 2022–2025 |
| ASML HOLDING NV | 2 | 2022–2025 |
Locations
| Location | Patents | Span |
|---|---|---|
| NL | 8 | 2022–2025 |