Inventor
Seongchul HONG
Inventor
KR
Overview
Patents· 6 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices24%
H01LSemiconductor devices19%
H05GX-ray technique19%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1019%
G02BOptical elements, systems or apparatus10%
H01SDevices using the process of light amplification by stimulated emission of radiation [laser] to amplify or generate light10%
PatentTitleYear
12,185,450Semiconductor manufacturing apparatus and operating method thereof202411,979,973Semiconductor manufacturing apparatus and operating method thereof202411,940,726Mask protective module, pellicle having the same, and lithography apparatus having the same202411,828,952Light source and extreme ultraviolet light source system using the same202311,778,719Laser beam delivery apparatus for extreme ultra violet light source202311,402,746Mask protective module, pellicle having the same, and lithography apparatus having the same2022Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2022–2024Patents assigned to UNIV HANYANG IND UNIV COOP FOUND (2)· patent assignee history
2022–2024Based in KR· patent location history
2023–2024Patents assigned to SAMSUNG ELECTRONICS CO LTD (4)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| SAMSUNG ELECTRONICS CO LTD | 4 | 2023–2024 |
| UNIV HANYANG IND UNIV COOP FOUND | 2 | 2022–2024 |
Locations
| Location | Patents | Span |
|---|---|---|
| KR | 6 | 2022–2024 |