Inventor

Saburo Kamiya

Inventor
Yokohama, JP

Overview

24→
Patents
1989–2021
Patent span
Physics
Primary field (CPC G)

Patents· 24 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices54%
G01BMeasuring length, thickness or similar linear dimensions18%
B23KSoldering or unsoldering5%
B60KArrangement or mounting of propulsion units or of transmissions in vehicles3%
B60NSeats specially adapted for vehicles3%
B60TVehicle brake control systems or parts thereof3%
B60YIndexing scheme relating to aspects cross-cutting vehicle technology3%
F16DCouplings for transmitting rotation3%
F16HGearing3%
F24FAir-conditioning3%
PatentTitleYear
11,009,129Vehicle parking apparatus202110,960,800Seat frame20217,876,452'Interferometric position-measuring devices and methods'20117,471,372'Exposure apparatus and production method of device using the same'20087,283,200'System and method for measuring displacement of a stage'20076,897,963'Stage device and exposure apparatus'20056,784,972'Exposure apparatus, device manufacturing method and environmental control method of exposure apparatus'20046,741,358'Exposure apparatus and device production method in which position of reference plate provided on substrate stage is measured'20046,714,278'Exposure apparatus'20046,710,854'Projection exposure apparatus'20046,377,336'Projection exposure apparatus'20026,002,987'Methods to control the environment and exposure apparatus'19995,790,253'Method and apparatus for correcting linearity errors of a moving mirror and stage'19985,719,704'Projection exposure apparatus'19985,563,683'Substrate holder'19965,550,633'Optical measuring apparatus having a partitioning wall for dividing gas flow in an environmental chamber'19965,392,120'Dual interferometer measuring system including a wavelength correction resulting from a variation in the refractive index'19955,272,501'Projection exposure apparatus'19935,151,749'Method of and apparatus for measuring coordinate position and positioning an object'19925,018,848'Laser beam transmitting apparatus'19914,989,031'Projection exposure apparatus'19914,902,900'Device for detecting the levelling of the surface of an object'19904,853,745'Exposure apparatus'19894,820,899'Laser beam working system'1989

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

1989–2011Patents assigned to NIKON CORP (21)· patent assignee history
1989–2004Based in Yokohama, JP· patent location history
1999–2011Based in Tokyo, JP· patent location history
2004Patents assigned to NIPPON KOGAKU KK (1)· patent assignee history
2004–2008Based in Ageo, JP· patent location history
2021Patents assigned to HONDA MOTOR CO LTD (1)· patent assignee history
2021Patents assigned to TOYOTA BOSHOKU KK (1)· patent assignee history
2021Based in Wako, JP· patent location history
2021Based in Aichi, JP· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
NIKON CORP211989–2011
HONDA MOTOR CO LTD12021
NIPPON KOGAKU KK12004
TOYOTA BOSHOKU KK12021
Locations
LocationPatentsSpan
Yokohama, JP131989–2004
Ageo, JP32004–2008
Tokyo, JP21999–2011
Wako, JP12021
Aichi, JP12021