Inventor
YEN-HAO LIU
Inventor
TW
Overview
Patents· 4 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices60%
B08BCleaning in general20%
B24BMachines, devices, or processes for grinding or polishing20%
PatentTitleYear
12,420,313Onsite cleaning system and method202512,210,296Method of cleaning wafer table of photolithography system and method of manufacturing integrated circuit202511,953,839Highly efficient automatic particle cleaner method for EUV systems202411,520,246Highly efficient automatic particle cleaner method for EUV systems2022Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2022–2025Patents assigned to TAIWAN SEMICONDUCTOR MFG CO LTD (4)· patent assignee history
2022–2025Based in TW· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| TAIWAN SEMICONDUCTOR MFG CO LTD | 4 | 2022–2025 |
Locations
| Location | Patents | Span |
|---|---|---|
| TW | 4 | 2022–2025 |