Inventor
Markus Holz
Inventor
Aalen, DE
Overview
Patents· 12 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices38%
G02BOptical elements, systems or apparatus23%
B22DCasting of metals4%
B81BMicrostructural devices or systems, e.g. micromechanical devices4%
F27BFurnaces, kilns, ovens or retorts in general4%
F27DDetails or accessories of furnaces, kilns, ovens or retorts, in so far as they are of kinds occurring in more than one kind of furnace4%
G01DMeasuring not specially adapted for a specific variable4%
G21DNuclear power plant4%
G21FProtection against x-radiation, gamma radiation, corpuscular radiation or particle bombardment4%
H01LSemiconductor devices4%
PatentTitleYear
11,048,172Method for producing an illumination system for an EUV projection exposure system, and illumination system202110,843,259Casting method202010,838,307Apparatus and method for operating an apparatus202010,678,151Control device202010,514,608Method for producing an illumination system for an EUV projection exposure system, and illumination system201910,514,619Sensor arrangement for a lithography system, lithography system, and method for operating a lithography system201910,261,424Lithography apparatus and method for operating a lithography apparatus201910,101,507Mirror device201810,018,803Device and method for controlling positioning of multiple adjustable mirror elements in a multi-mirror arrangement201810,007,195Device for determining a tilt angle of at least one mirror of a lithography system, and method20189,851,555Optical component20179,721,690'Melting device for consolidating contaminated scrap'2017Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2017–2021Patents assigned to ZEISS CARL SMT GMBH (10)· patent assignee history
2017–2020Patents assigned to ALD VACUUM TECHN GMBH (2)· patent assignee history
2017–2021Based in Aalen, DE· patent location history
2017Based in Bruchköbel, DE· patent location history
2020Based in Bruchkobel, DE· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| ZEISS CARL SMT GMBH | 10 | 2017–2021 |
| ALD VACUUM TECHN GMBH | 2 | 2017–2020 |
Locations
| Location | Patents | Span |
|---|---|---|
| Aalen, DE | 10 | 2017–2021 |
| Bruchkobel, DE | 1 | 2020 |
| Bruchköbel, DE | 1 | 2017 |