Inventor
Kikuo Douta
Inventor
Hachioji, JP
Overview
Patents· 4 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices43%
C04BLime, magnesia14%
H01JElectric discharge tubes or discharge lamps14%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1014%
Y10STechnical subjects covered by former uspc cross-reference art collections [xracs] and digests14%
PatentTitleYear
4,614,706'Method of forming a microscopic pattern with far UV pattern exposure, alkaline solution development, and dry etching'19864,536,421'Method of forming a microscopic pattern'19853,957,609'Method of forming fine pattern of thin, transparent, conductive film'19763,942,982'Method for controlling the degree of side-etch in thin oxide films by photo-etching process'1976Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
1976–1986Patents assigned to HITACHI LTD (4)· patent assignee history
1976–1986Based in Hachioji, JP· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| HITACHI LTD | 4 | 1976–1986 |
Locations
| Location | Patents | Span |
|---|---|---|
| Hachioji, JP | 4 | 1976–1986 |