Inventor
Bruno W. Schueler
Inventor
San Jose, CA, US
Overview
Patents· 22 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G01Nprimary
G01NInvestigating or analysing materials by determining their chemical or physical properties26%
H01JElectric discharge tubes or discharge lamps21%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1012%
H01LSemiconductor devices11%
G06FElectric digital data processing8%
H03FAmplifiers8%
G01QScanning-probe techniques or apparatus5%
G21KHandling of particles or ionising radiation not otherwise provided for3%
B23QDetails, components, or accessories for machine tools, e.g. arrangements for copying or controlling1%
G01BMeasuring length, thickness or similar linear dimensions1%
PatentTitleYear
10,910,208Systems and approaches for semiconductor metrology and surface analysis using secondary ion mass spectrometry202110,859,519Methods and systems for measuring periodic structures using multi-angle x-ray reflectance scatterometry (XRS)202010,636,644Systems and approaches for semiconductor metrology and surface analysis using secondary ion mass spectrometry202010,481,112Methods and systems for measuring periodic structures using multi-angle X-ray reflectance scatterometry (XRS)201910,403,489Systems and approaches for semiconductor metrology and surface analysis using secondary ion mass spectrometry201910,119,925Methods and systems for measuring periodic structures using multi-angle X-ray reflectance scatterometry (XRS)201810,056,242Systems and approaches for semiconductor metrology and surface analysis using secondary ion mass spectrometry20189,588,066'Methods and systems for measuring periodic structures using multi-angle X-ray reflectance scatterometry (XRS)'20179,297,771'Methods and systems for fabricating platelets of a monochromator for X-ray photoelectron spectroscopy'20169,240,254'System and method for characterizing a film by X-ray photoelectron and low-energy X-ray fluorescence spectroscopy'20169,201,030'Method and system for non-destructive distribution profiling of an element in a film'20158,916,823'Method and system for non-destructive distribution profiling of an element in a film'20148,610,059'Method and system for non-destructive distribution profiling of an element in a film'20138,269,167'Method and system for non-destructive distribution profiling of an element in a film'20128,011,830'Method and system for calibrating an X-ray photoelectron spectroscopy measurement'20117,884,321'Method and system for non-destructive distribution profiling of an element in a film'20117,420,163'Determining layer thickness using photoelectron spectroscopy'20087,411,188'Method and system for non-destructive distribution profiling of an element in a film'20087,399,963'Photoelectron spectroscopy apparatus and method of use'20087,231,324'Techniques for analyzing data generated by instruments'20075,637,879'Focused ion beam column with electrically variable blanking aperture'19975,128,543'Particle analyzer apparatus and method'1992Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
1992Based in Redwood City, CA, US· patent location history
1997–2021Based in San Jose, CA, US· patent location history
2007–2016Patents assigned to REVERA INC (11)· patent assignee history
2012–2015Patents assigned to BALLANCE DAVID STEPHEN (3)· patent assignee history
2012–2015Patents assigned to DECECCO PAOLA (3)· patent assignee history
2012–2015Patents assigned to KWAN MICHAEL (3)· patent assignee history
2018–2021Patents assigned to NOVA MEASURING INSTR INC (7)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| REVERA INC | 11 | 2007–2016 |
| NOVA MEASURING INSTR INC | 7 | 2018–2021 |
| BALLANCE DAVID STEPHEN | 3 | 2012–2015 |
| DECECCO PAOLA | 3 | 2012–2015 |
| KWAN MICHAEL | 3 | 2012–2015 |
Locations
| Location | Patents | Span |
|---|---|---|
| San Jose, California, US | 21 | 1997–2021 |
| Redwood City, California, US | 1 | 1992 |